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JPH05298612A - Magnetic head and its manufacture - Google Patents

Magnetic head and its manufacture

Info

Publication number
JPH05298612A
JPH05298612A JP9131792A JP9131792A JPH05298612A JP H05298612 A JPH05298612 A JP H05298612A JP 9131792 A JP9131792 A JP 9131792A JP 9131792 A JP9131792 A JP 9131792A JP H05298612 A JPH05298612 A JP H05298612A
Authority
JP
Japan
Prior art keywords
magnetic
track width
laminated film
thickness
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP9131792A
Other languages
Japanese (ja)
Inventor
Toshiyuki Okumura
俊之 奥村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP9131792A priority Critical patent/JPH05298612A/en
Publication of JPH05298612A publication Critical patent/JPH05298612A/en
Withdrawn legal-status Critical Current

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  • Magnetic Heads (AREA)

Abstract

PURPOSE:To easily provide a magnetic head which has a narrow track with high precision without increasing the machining precision at the time of the abutting of head core half bodies. CONSTITUTION:On nonmagnetic substrates 11a and 11b of one side, soft magnetic materials such as 'Sendust(R)' are laminated to thickness larger than specific track width to form laminate films 12a and 12b respectively. The thickness of the laminate films is set in consideration of the abutting machining precision, i.e., the quantity of abutting deviation. Those laminate films 12a and 12b are sandwiched by nonmagnetic substrates 13a and 13b of the other side respectively to form the head core half bodies 1a and 1b, which are made to abut on each other, thereby forming a magnetic gap 14. Then the magnetic part where deviation is generated is irradiated with FIB and machined areas 15 and 16 are formed so that the thickness of the laminate films 12a and 12b at the magnetic gap part which performs recording and reproduction by abutting on a magnetic tape reaches the specific track width.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は磁気記録再生装置に適用
する磁気ヘッドおよびその製造方法に関し、特に狭トラ
ック幅で高密度記録再生を行う積層膜構造の磁気ヘッド
およびその製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head applied to a magnetic recording / reproducing apparatus and a method for manufacturing the same, and more particularly to a magnetic head having a laminated film structure for performing high density recording / reproducing with a narrow track width and a method for manufacturing the same.

【0002】[0002]

【従来の技術】図3は、従来のこの種の磁気ヘッドを示
す図であり、磁気ギャップ付近の磁気テープ摺動面を示
している。
2. Description of the Related Art FIG. 3 is a diagram showing a conventional magnetic head of this type, showing a magnetic tape sliding surface in the vicinity of a magnetic gap.

【0003】まず、一方の非磁性基板31a,31b上
に、スパッタリング等の工程によってセンダスト等の軟
磁性材料を所定のトラック幅の厚みW1に積層して積層
膜32a,32bをそれぞれ形成する。この積層膜32
a,32bを他方の非磁性基板33a,33bによって
挟持してヘッドコア半体3a,3bをそれぞれ形成す
る。このヘッドコア半体3a,3bを突き合わせて磁気
ギャップ34を形成している。
First, a laminated film 32a, 32b is formed on one of the non-magnetic substrates 31a, 31b by laminating a soft magnetic material such as sendust to a predetermined track width thickness W1 by a process such as sputtering. This laminated film 32
The head core halves 3a and 3b are formed by sandwiching a and 32b between the other non-magnetic substrates 33a and 33b. The head core halves 3a and 3b are butted to form a magnetic gap 34.

【0004】[0004]

【発明が解決しようとする課題】上述した従来の磁気ヘ
ッドおよびその製造方法では、積層膜32a,32bを
所定のトラック幅の厚みに積層している。従って、高密
度記録化のためにトラック幅を狭くした場合、磁気抵抗
が高くなり記録再生効率が低下するという問題点があ
る。
In the above-described conventional magnetic head and manufacturing method thereof, the laminated films 32a and 32b are laminated to have a predetermined track width. Therefore, when the track width is narrowed for high density recording, the magnetic resistance increases and the recording / reproducing efficiency decreases.

【0005】また、2つのヘッドコア半体3a,3bを
突き合わせるとき、磁気ギャップに沿ってずれΔWが生
じる。このため、有効トラック幅W2が所定のトラック
幅W1よりも狭くなり、磁気抵抗が高くなって記録再生
効率が低下するという問題点がある。この突き合わせず
れの影響は狭トラックになるほど顕著となり、例えば、
ずれ量が1μmであっても、所定のトラック幅が10μ
mの場合では有効トラック幅が10%減少することにな
る。このため、狭トラック化に伴ってずれ量を低減させ
ることが重要となる。
When the two head core halves 3a and 3b are butted against each other, a deviation ΔW is generated along the magnetic gap. Therefore, there is a problem that the effective track width W2 becomes narrower than the predetermined track width W1, the magnetic resistance increases, and the recording / reproducing efficiency decreases. The influence of this misalignment becomes more remarkable as the track becomes narrower.
Even if the deviation amount is 1 μm, the predetermined track width is 10 μm.
In the case of m, the effective track width is reduced by 10%. Therefore, it is important to reduce the shift amount as the track becomes narrower.

【0006】ところで、高密度記録化に対応するために
はトラック幅を10μm以下にすることが必要となる。
このため、突き合わせ加工時における精度を高める必要
があり、従って、高精度の加工装置および測定装置が必
要となるばかりでなく、加工に長時間を要してコスト高
になる。また、突き合わせずれの生じた部分では、軟磁
性材料の積層膜と非磁性基板といった硬度の異なる材料
が存在し、磁気テープによる磨耗度の差により段差が生
じて磁気テープに傷を付けたり、ヘッド側に損傷が生じ
たりするという問題点がある。本発明の目的は、記録再
生効率を低下させることなく、またヘッドコア半体の突
き合わせ時の加工精度を高めることなく、狭トラックの
磁気ヘッドを高精度かつ容易に実現できる磁気ヘッドお
よびその製造方法を提供することにある。
By the way, in order to cope with high density recording, it is necessary to set the track width to 10 μm or less.
For this reason, it is necessary to increase the accuracy in the butt machining, and therefore, not only a highly accurate machining device and measuring device are required, but also a long time is required for the machining and the cost becomes high. In the portion where the butt displacement occurs, materials having different hardness such as a laminated film of a soft magnetic material and a non-magnetic substrate are present, and a step is generated due to a difference in the degree of wear of the magnetic tape, and the magnetic tape is scratched, or the head is damaged. There is a problem that the side is damaged. An object of the present invention is to provide a magnetic head capable of realizing a narrow track magnetic head with high accuracy and easily without lowering the recording / reproducing efficiency and without increasing the processing accuracy when the head core halves are butted, and a method for manufacturing the same. To provide.

【0007】[0007]

【課題を解決するための手段】本発明の磁気ヘッドは、
軟磁性体積層膜を非磁性基板によって上下から挟持した
2つのヘッドコア半体を互いに突き合わせて磁気ギャッ
プを形成して成る磁気ヘッドであって、前記非磁性基板
によって挟持されている軟磁性体積層膜の厚さが所定の
トラック幅よりも厚く形成され、磁気媒体に当接して記
録再生を行う前記磁気ギャップ部分の軟磁性体積層膜の
厚みが所定のトラック幅となるように機械加工されてい
る。本発明の磁気ヘッドの製造方法は、一方の非磁性基
板上に軟磁性材料を所定のトラック幅以上の厚みに積層
して前記軟磁性体積層膜を形成する工程と、この軟磁性
体積層膜を他方の非磁性基板によって挟持して前記ヘッ
ドコア半体を形成する工程と、このヘッドコア半体を突
き合わせて前記磁気ギャップを形成する工程と、磁気媒
体に当接する前記磁気ギャップ部分の軟磁性体積層膜の
厚みが所定のトラック幅となるように収束イオンビーム
照射によって加工する工程とを有している。また、前記
収束イオンビーム照射によって加工する工程の代りに溝
を切削する工程に置換えてもよい。
The magnetic head of the present invention comprises:
What is claimed is: 1. A magnetic head comprising two head core halves sandwiching a soft magnetic laminated film sandwiched by a non-magnetic substrate from above and below to form a magnetic gap, the soft magnetic laminated film sandwiched by the non-magnetic substrate. Is formed thicker than a predetermined track width, and is machined so that the thickness of the soft magnetic material laminated film in the magnetic gap portion which comes into contact with a magnetic medium for recording and reproduction has a predetermined track width. . A method of manufacturing a magnetic head according to the present invention comprises a step of forming a soft magnetic material laminated film by laminating a soft magnetic material on one non-magnetic substrate to a thickness of a predetermined track width or more, and the soft magnetic material laminated film. Sandwiching the other non-magnetic substrate to form the head core half body, abutting the head core half bodies to form the magnetic gap, and a soft magnetic material lamination of the magnetic gap portion abutting the magnetic medium. And a step of processing by convergent ion beam irradiation so that the film thickness becomes a predetermined track width. Further, instead of the step of processing by the focused ion beam irradiation, a step of cutting a groove may be replaced.

【0008】[0008]

【実施例】次に本発明について図面を参照して説明す
る。
The present invention will be described below with reference to the drawings.

【0009】図1は本発明の第1の実施例を示す図であ
り、(a)は斜視図、(b)は磁気ギャップ付近の磁気
テープ摺動面を示す図である。
1A and 1B are views showing a first embodiment of the present invention. FIG. 1A is a perspective view and FIG. 1B is a view showing a magnetic tape sliding surface near a magnetic gap.

【0010】まず、一方の非磁性基板11a,11b上
に、スパッタリング等の工程によりセンダスト等の軟磁
性材料を所定のトラック幅以上の厚みに積層して積層膜
12a,12bをそれぞれ形成する。なお、積層膜の厚
みは、突き合わせ加工精度、つまり突き合わせずれ量を
考慮して設定する。
First, a laminated film 12a, 12b is formed on one of the non-magnetic substrates 11a, 11b by laminating a soft magnetic material such as sendust to a thickness not less than a predetermined track width by a process such as sputtering. The thickness of the laminated film is set in consideration of the butting processing accuracy, that is, the butt shift amount.

【0011】次に、この積層膜12a,12bを他方の
非磁性基板13a,13bによってそれぞれ挟持してヘ
ッドコア半体1a,1bを形成し、更に、このヘッドコ
ア半体1a,1bを突き合わせて磁気ギャップ14を形
成する。次に、磁気ギャップ14に沿ってずれの生じて
いる磁気ギャップ部分に対して、FIB(Focuse
d Ion Beam)を照射して表面を削り取って加
工域15,16を形成する。この場合、加工域15,1
6の深さは磁気ヘッドの記録再生特性に影響しない程度
とし、また、磁気テープが当接して記録再生を行う磁気
ギャップ部分の積層膜12a,12bの厚さが、所定の
トラック幅となるように加工する。
Next, the laminated films 12a and 12b are sandwiched between the other non-magnetic substrates 13a and 13b to form head core halves 1a and 1b, and the head core halves 1a and 1b are abutted against each other to form a magnetic gap. 14 is formed. Next, the FIB (Focuse) is applied to the magnetic gap portion that is displaced along the magnetic gap 14.
d Ion Beam) and the surface is scraped off to form the processing areas 15 and 16. In this case, the processing area 15,1
The depth of 6 is set so as not to affect the recording / reproducing characteristics of the magnetic head, and the thicknesses of the laminated films 12a and 12b in the magnetic gap portion where the magnetic tape contacts to perform recording / reproducing have a predetermined track width. To process.

【0012】このようにすることにより、磁気ギャップ
部分に生じた突き合わせずれを除去できると共に、狭ト
ラックの磁気ヘッドを形成できる。
By doing so, it is possible to remove the butt displacement generated in the magnetic gap portion and to form a narrow track magnetic head.

【0013】図2は、本発明の第2の実施例を示す図で
あり、(a)は斜視図、(b)は磁気ギャップ付近の磁
気テープ摺動面を示す図である。
2A and 2B are views showing a second embodiment of the present invention. FIG. 2A is a perspective view, and FIG. 2B is a view showing a magnetic tape sliding surface near a magnetic gap.

【0014】まず、第1の実施例と同様にしてヘッドコ
ア半体2a,2bを形成し、このヘッドコア半体2a,
2bを突き合わせて磁気ギャップ24を形成する。次
に、ずれが生じている磁気ギャップ部分に対して、ダイ
サー等を使用して磁気ギャップに沿って斜め方向から溝
25,26を切削する。この場合、溝25,26の深さ
は磁気ヘッドの記録再生特性に影響しない程度とし、ま
た、磁気テープが当接して記録再生を行う磁気ギャップ
部分の積層膜22a,22bの厚さが、所定のトラック
幅となるように加工する。切削された溝25,26には
ガラス等を充填する。
First, the head core halves 2a and 2b are formed in the same manner as in the first embodiment, and the head core halves 2a and 2b are formed.
The magnetic gaps 24 are formed by abutting 2b. Next, with respect to the magnetic gap portion in which the deviation has occurred, the grooves 25 and 26 are cut obliquely along the magnetic gap using a dicer or the like. In this case, the depths of the grooves 25 and 26 are set so as not to affect the recording / reproducing characteristics of the magnetic head, and the thicknesses of the laminated films 22a and 22b in the magnetic gap portions where the magnetic tape contacts to perform recording / reproduction are predetermined. Process so that the track width becomes. The cut grooves 25 and 26 are filled with glass or the like.

【0015】このようにすることにより、磁気ギャップ
部分に生じた突き合わせずれを除去できると共に、狭ト
ラックの磁気ヘッドを形成できる。
By doing so, it is possible to eliminate the butt displacement generated in the magnetic gap portion and to form a narrow track magnetic head.

【0016】なお、本実施例では、FIBあるいはダイ
サー等を使用して、磁気テープが当接する磁気ギャップ
部分の積層膜の厚みを所定のトラック幅となるように加
工しているが、ヘッドの電磁変換特性を損なわない範囲
において、他の加工方法であってもよい。また、加工の
形状も三角形や半円形等であっても同様な効果が得られ
る。
In this embodiment, an FIB or a dicer is used to process the thickness of the laminated film in the magnetic gap portion with which the magnetic tape comes into contact so as to have a predetermined track width. Other processing methods may be used as long as the conversion characteristics are not impaired. Further, the same effect can be obtained even if the processed shape is a triangle or a semicircle.

【0017】[0017]

【発明の効果】以上説明したように本発明によれば、非
磁性基板によって挟持される軟磁性体積層膜の厚みが所
定のトラック幅よりも厚いヘッドコア半体を形成し、こ
のヘッドコア半体を互いに突き合わせて磁気ギャップを
形成した後、磁気テープに当接する磁気ギャップ部分の
軟磁性体積層膜の厚みを所定のトラック幅となるように
FIBあるいはダイサー等を使用して機械加工すること
により、磁気ギャップ部分に生じる突き合わせずれを除
去できると共に、狭トラックの磁気ヘッドを高精度かつ
容易に実現できる。従って、磁気抵抗を低く抑えること
ができて記録再生効率を向上でき、また、突き合わせず
れによる磁気テープおよび磁気ヘッドの損傷を防止でき
る。
As described above, according to the present invention, a head core half body is formed in which the thickness of the soft magnetic material laminated film sandwiched by the non-magnetic substrates is larger than a predetermined track width, and this head core half body is formed. After the magnetic gaps are formed by abutting each other, the thickness of the soft magnetic material laminated film in the magnetic gap portion abutting on the magnetic tape is machined using a FIB or a dicer so as to have a predetermined track width. It is possible to eliminate the butt displacement occurring in the gap portion, and it is possible to easily realize a narrow track magnetic head with high accuracy. Therefore, the magnetic resistance can be suppressed to be low, the recording / reproducing efficiency can be improved, and the magnetic tape and the magnetic head can be prevented from being damaged due to misalignment.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施例を示す図であり、(a)
は斜視図、(b)は磁気ギャップ付近の磁気テープ摺動
面を示す図である。
FIG. 1 is a diagram showing a first embodiment of the present invention, (a)
Is a perspective view, and (b) is a diagram showing a magnetic tape sliding surface near the magnetic gap.

【図2】本発明の第2の実施例を示す図であり、(a)
は斜視図、(b)は磁気ギャップ付近の磁気テープ摺動
面を示す図である。
FIG. 2 is a diagram showing a second embodiment of the present invention, (a)
Is a perspective view, and (b) is a diagram showing a magnetic tape sliding surface near the magnetic gap.

【図3】従来の磁気ヘッドの一例を示す図である。FIG. 3 is a diagram showing an example of a conventional magnetic head.

【符号の説明】[Explanation of symbols]

1a,1b,2a,2b ヘッドコア半体 11a,11b,13a,13b 非磁性基板 12a,12b,22a,22b 積層膜 14,24 磁気ギャップ 15,16 加工域 25,26 溝 1a, 1b, 2a, 2b head core half body 11a, 11b, 13a, 13b non-magnetic substrate 12a, 12b, 22a, 22b laminated film 14, 24 magnetic gap 15, 16 working area 25, 26 groove

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 軟磁性体積層膜を非磁性基板によって上
下から挟持した2つのヘッドコア半体を互いに突き合わ
せて磁気ギャップを形成して成る磁気ヘッドであって、
前記非磁性基板によって挟持されている軟磁性体積層膜
の厚さが所定のトラック幅よりも厚く形成され、磁気媒
体に当接して記録再生を行う前記磁気ギャップ部分の軟
磁性体積層膜の厚みが所定のトラック幅となるように機
械加工されていることを特徴とする磁気ヘッド。
1. A magnetic head in which two head core halves sandwiching a soft magnetic laminated film between non-magnetic substrates from above and below are butted against each other to form a magnetic gap,
The thickness of the soft magnetic material laminated film sandwiched by the non-magnetic substrate is formed to be thicker than a predetermined track width, and the thickness of the soft magnetic material laminated film in the magnetic gap portion for contact with a magnetic medium for recording and reproduction. Is machined to have a predetermined track width.
【請求項2】 一方の非磁性基板上に軟磁性材料を所定
のトラック幅以上の厚みに積層して前記軟磁性体積層膜
を形成する工程と、この軟磁性体積層膜を他方の非磁性
基板によって挟持して前記ヘッドコア半体を形成する工
程と、このヘッドコア半体を突き合わせて前記磁気ギャ
ップを形成する工程と、磁気媒体に当接する前記磁気ギ
ャップ部分の軟磁性体積層膜の厚みが所定のトラック幅
となるように収束イオンビーム照射によって加工する工
程とを有することを特徴とする磁気ヘッドの製造方法。
2. A step of forming a soft magnetic material laminated film by laminating a soft magnetic material on one non-magnetic substrate to a thickness equal to or larger than a predetermined track width, and the soft magnetic material laminated film on the other non-magnetic substrate. A step of forming the head core half by sandwiching it by a substrate, a step of forming the magnetic gap by butting the head core halves, and a thickness of the soft magnetic laminated film of the magnetic gap portion abutting the magnetic medium are predetermined. And a step of processing by converging ion beam irradiation so that the track width becomes.
【請求項3】 請求項2記載の磁気ヘッドの製造方法に
おいて、前記収束イオンビーム照射によって加工する工
程の代りに溝を切削する工程に置換えることを特徴とす
る磁気ヘッドの製造方法。
3. The method of manufacturing a magnetic head according to claim 2, wherein a step of cutting a groove is substituted for the step of processing by the focused ion beam irradiation.
JP9131792A 1992-04-13 1992-04-13 Magnetic head and its manufacture Withdrawn JPH05298612A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9131792A JPH05298612A (en) 1992-04-13 1992-04-13 Magnetic head and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9131792A JPH05298612A (en) 1992-04-13 1992-04-13 Magnetic head and its manufacture

Publications (1)

Publication Number Publication Date
JPH05298612A true JPH05298612A (en) 1993-11-12

Family

ID=14023090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9131792A Withdrawn JPH05298612A (en) 1992-04-13 1992-04-13 Magnetic head and its manufacture

Country Status (1)

Country Link
JP (1) JPH05298612A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997040493A1 (en) * 1996-04-19 1997-10-30 Micrion Corporation Thin-film magnetic recording heads and systems and methods for manufacturing the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997040493A1 (en) * 1996-04-19 1997-10-30 Micrion Corporation Thin-film magnetic recording heads and systems and methods for manufacturing the same
US5916424A (en) * 1996-04-19 1999-06-29 Micrion Corporation Thin film magnetic recording heads and systems and methods for manufacturing the same

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