JPH05166600A - Cooling device for vacuum chamber of particle accelerator - Google Patents

Abstract

(57) [Abstract] [Purpose] Efficiently cools the heat generated on the inner wall of the particle accelerator vacuum chamber due to the irradiation of SOR light. The SOR light 36 is emitted from the electron beam 30 at the deflection portion of the storage ring 22 toward the outer peripheral side in the horizontal direction. Chamber wall portion 38a irradiated with SOR light 36
A flow path 50 is formed on the outer side of and the cooling fluid 42 flows. Channel 5
The chamber wall portion 3 in which 0 is irradiated with the SOR light 36
Fins 51 to 53 are formed in the radial direction from 8a to radiate heat 54 to the cooling fluid 42 from the fins 51 to 53.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for cooling the heating of the wall surface of a vacuum chamber by irradiation of SOR light in a particle accelerator such as a synchrotron,
The cooling efficiency is improved.

[0002]

2. Description of the Related Art In recent years, a synchrotron is expected to be applied as a synchrotron radiation (SOR) device to various fields such as creation of ultra-ultra LSI circuits, diagnosis in the medical field, molecular analysis, and structural analysis.

An outline of the synchrotron radiation device is shown in a plan view in FIG. An electron beam generated by a charged particle generator (electron gun, etc.) 10 is accelerated by a linear accelerator (linac) 12 to near the speed of light, and the deflection electromagnet 1 of the beam transport unit 14 is accelerated.
It is deflected by 6 and enters the storage ring 22 via the inflector 18. The electron beam incident on the storage ring 22 is given energy in the high-frequency accelerating cavity 21 while focusing electromagnets 23 (for vertical direction) and 25 (for horizontal direction).
Is converged by the storage ring 2 and deflected by the deflection electromagnet 24.
2 Continue to go around. The synchrotron radiation light generated when being deflected by the deflecting electromagnet 24 is sent to, for example, an exposure device 28 through a beam channel 26 and is used as a light source or the like for creating an ultra-super LSI circuit.

As shown in FIG. 3, from the electron beam 30 circulating in the storage ring 22, SO is tangential to the electron beam 30.
The R light 36 is emitted, and the chamber wall 3 of the storage ring 22 is emitted.
The inner peripheral surface of 8 is irradiated and the portion is heated to a high temperature.
Therefore, a flow path 40 such as a cooling pipe is formed on the outer peripheral side of the chamber wall 38 at the position where the SOR light 36 is irradiated, and a cooling fluid 42 is made to flow therethrough for cooling.

The structure of the conventional flow channel 40 is shown in FIG. 4 as a view taken in the direction of arrows in FIGS. This is a single channel 4 having a circular cross section along the portion 38a of the chamber wall 38 where the SOR light 36 emitted horizontally outward from the electron beam 30 is irradiated.
0 is formed to allow the cooling fluid 42 to flow.

[0006]

The single channel 40 having a circular cross section in FIG. 4 has a drawback that the cooling efficiency is poor because the heat transfer area is small. Therefore, as shown in FIG. 5A, it is conceivable to provide two channels 44 and 46 having a circular cross section so that the cooling fluid 42 flows in the same direction so as to increase the heat transfer area. However, if this is done, B in FIG.
As shown in FIG. 5B in which the portion is enlarged, the distance d from the irradiation position 38a of SOR light 36 (the position where the SOR light 36 becomes the hottest) to the flow path 44 is a distance d ′ in the case of the flow path 40 arrangement in FIG. However, the heat transfer efficiency is poor and the cooling efficiency is poor.

Therefore, as shown in FIG. 6, the flow path 48 having a quadrangular cross section is further formed to shorten the distance d from the irradiation position 38a of the SOR light 36 to the flow path 48 to the same extent as the flow path 40 in FIG. At the same time, it is conceivable to increase the heat transfer area. However, in this case, the flow passage cross-sectional area becomes too wide, the speed of the cooling fluid 42 becomes slow, and the cooling efficiency also deteriorates.

When the cooling fluid 42 is flown from one direction as shown in FIGS. 4 to 6, the temperature of the cooling fluid 42 is low on the inlet side but high on the outlet side, so that the temperature difference in the vacuum chamber 22 depends on the position. However, there is a problem in that the thermal expansion becomes non-uniform and the vacuum chamber is twisted.

The present invention solves the above problems in the prior art, and provides a cooling device for a vacuum chamber of a particle accelerator, which can improve cooling efficiency and uniformly cool the vacuum chamber. It is a thing.

[0010]

According to a first aspect of the present invention, in a deflecting portion of a vacuum chamber of a particle accelerator, it is formed on an outer peripheral side of a chamber wall irradiated with SOR light along an axial direction of the vacuum chamber. The cooling fluid has a flow path and a plurality of fins formed in a radial direction from a chamber wall near the position where the SOR light is irradiated in the flow path.

Further, the invention of claim 2 is such that the flow path is composed of a plurality of flow paths partitioned by the plurality of fins.

Further, the invention of claim 3 is characterized in that any one of the plurality of flow paths or a plurality of flow paths flow a cooling fluid in a direction opposite to the other flow paths. It is a thing.

[0013]

According to the first aspect of the invention, the heat generated by the SOR light is transferred to the plurality of fins extending in the radial direction from the chamber wall near the SOR light irradiation position and cooled by the cooling fluid. The area is expanded and the cooling efficiency is improved. Moreover, since the fins are included in the flow passage, the cross-sectional area of the flow passage does not become too wide, and the velocity of the cooling fluid can be secured.

Further, according to the second aspect of the present invention, since the flow passage is divided by the fins to form a plurality of flow passages, the flow velocity, the flowing direction, etc. can be set for each flow passage, and the optimum cooling can be performed. Can be set to state.

According to the third aspect of the invention, since the cooling fluids flow in the plurality of flow paths in mutually opposite directions, the vacuum chamber can be cooled uniformly.

[0016]

【Example】

(Embodiment 1) An embodiment of the present invention is shown in FIG.
This is the storage ring 22 (vacuum chamber) shown in FIG.
It is what was shown by the sectional view of the -A position.

The electron beam 30 circulating in the storage ring 22 emits SOR light 36 in the tangential direction of the deflecting portions 31 to 34 and irradiates the chamber 38 of the storage ring 22. SOR on the outer peripheral side of the chamber wall
A flow path 50 is formed along the portion 38a irradiated with the light 36 in the same arrangement as the flow path 40 of FIG.
Is being washed away.

As shown in FIG. 1B, which is an enlarged view of the C portion of FIG. 1A, in the channel 50, fins 51 extending in the radial direction from the chamber wall surface portion 38a irradiated with the SOR light 36. ˜53 are extended along the axial direction of the vacuum chamber 22 over the entire flow path 50. Then, the cooling fluid 42 is passed through between the fins 51 to 53.

According to the above construction, as shown in FIG. 1B, the chamber wall surface portion 3 is irradiated with the SOR light 36.
The heat generated in 8a is generated by the fin 51 as shown by the dotted line 54.
To 53 and is radiated to the cooling fluid 42. Therefore, a large heat transfer area is secured, and the cooling efficiency is improved. Further, since the fins 51 to 53 are included in the flow passage 50, the flow passage cross-sectional area is reduced accordingly and the flow velocity is secured.

(Embodiment 2) An embodiment of the invention of claim 2 is shown in FIG. 7 (a). A plan view thereof is shown in FIG. In this structure, three channels 61 to 63 having a triangular cross section are formed by partitioning the channels with fins 58 and 59 extending in a radial direction from a position 38a irradiated with the SOR light 36. S
The heat generated in the chamber wall surface portion 38a by the irradiation of the OR light 36 is transmitted to the fins 58 and 59 as indicated by a dotted line 64 in FIG. 7B which is an enlarged view of the portion D in FIG. Heat is radiated to 66 to 68. Channels 61-63
Are independent of each other, the directions and flow rates of the cooling fluids 66 to 68 can be set independently. Channel 6
Although the cooling fluids can be made to flow in the same direction in all of 1 to 63, if the cooling fluids 66, 68 and the cooling fluid 67 are made to flow in opposite directions as shown in FIGS. 22 can be cooled uniformly.

(Embodiment 3) Although the number of fins is two in the embodiment of FIG. 7, the heat transfer area can be expanded by increasing the number. FIG. 9 shows an example in which three fins 81 to 83 are provided, whereby four flow paths 71 to 74 are formed, and the cooling fluids 75 to 78 are respectively cooled fluids 75 and 77 and the cooling fluid 7.
6.78 flows so that the directions are opposite to each other.

[0022]

[Modification] Although the fin is formed integrally with the chamber wall surface in the above embodiment, it may be attached to the chamber wall surface by welding or bolting.

[0023]

As described above, according to the first aspect of the invention, the heat generated by the SOR light is transmitted to the plurality of fins extending in the radial direction from the chamber wall near the SOR light irradiation position, and the cooling fluid is then transmitted. Since it is cooled by, the heat transfer area is expanded and the cooling efficiency is enhanced. Moreover, since the fins are included in the flow passage, the cross-sectional area of the flow passage does not become too wide, and the velocity of the cooling fluid can be secured.

According to the second aspect of the present invention, since the flow paths are divided by the fins to form a plurality of flow paths, the flow velocity, the flow direction, etc. can be set for each flow path, and the optimum cooling can be performed. Can be set to state.

Further, according to the third aspect of the present invention, the cooling fluids are caused to flow in opposite directions in the plurality of flow paths, so that the vacuum chamber can be cooled uniformly.

[Brief description of drawings]

FIG. 1 is a sectional view showing an embodiment of the present invention.

FIG. 2 is a plan view showing an outline of an SOR device.

3 is a plan view showing an example of a cooling channel arranged in the storage ring of FIG.

FIG. 4 is a cross-sectional view showing a conventional device.

FIG. 5 is a cross-sectional view showing another conventional device.

FIG. 6 is a sectional view showing still another conventional device.

FIG. 7 is a sectional view showing another embodiment of the present invention.

FIG. 8 is a plan view of the flow path of FIG.

FIG. 9 is a sectional view showing still another embodiment of the present invention.

[Explanation of symbols]

 22 Storage ring (vacuum chamber) 31-34 Deflection part 36 SOR light 38 Chamber wall 50, 61-63, 71-74 Flow path 42, 66-68, 75-78 Cooling fluid 51-53, 58, 59, 81- 83 fins

Claims (3)

[Claims] 1. A flow path of a cooling fluid formed along the axial direction of the vacuum chamber on the outer peripheral side of a chamber wall irradiated with SOR light in a deflection part of a vacuum chamber of a particle accelerator, and in the flow path. 2. A cooling device for a vacuum chamber of a particle accelerator, comprising: a plurality of fins extending radially from the chamber wall in the vicinity of the position where the SOR light is irradiated. 2. The cooling device for a vacuum chamber of a particle accelerator according to claim 1, wherein the flow passage is constituted by a plurality of flow passages partitioned by the plurality of fins. 3. The vacuum chamber according to claim 2, wherein any one of the plurality of flow passages or a plurality of flow passages allow a cooling fluid to flow in the opposite direction to the other flow passages. Cooling system.