JPH04156974A - Spinner device - Google Patents

Abstract

PURPOSE:To prevent the sticking of a coating material to the rear surface of a body to be coated by blowing out air approximately uniformly at a high speed over the entire periphery of the rear surface of the object to be coated at the time of rotation of the body to be coated. CONSTITUTION:A guard ring 7 and a cylinder 8 having an air supplying port 10 are provided to enclose a spinner head 2 in a coater house 4 on the circumference of this spinner head 2. The front surface of the guard ring 7 and the rear surface of the body 1 to be coated are so positioned as to have a prescribed spacing as an air blowing out port 9. The air is supplied from the air supplying port 10 and the air is blown out of the air blowing out port 9. The speed of the air blown out of the air blowing out port 9 is set higher than the speed of the air flowing toward a discharge port 6 in the coater house 4, by which the air is blown out uniformly at the high speed over the entire periphery of the rear surface of the body 1 to be coated.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an improvement in a spinner device for applying a liquid substance onto the surface of an object to be coated.

[Conventional technology]

A known method for applying a liquid substance to a sample is to drop or spray an ultraviolet-curable liquid substance onto the surface of the sample, such as a glass substrate or a disk substrate, as it rotates once, thereby uniformly applying the liquid substance to the entire surface of the sample. ing. As an apparatus for carrying out this method, there is a spinner apparatus as shown in FIG. In the figure, the spinner device includes a spinner head 2 on which the object to be coated 1 is placed, a conical wheel 3 attached near the outside of the spinner head, a coater house 4 housing these, and a motor (not shown). The rotating shaft 5 transmits the rotation of the spinner head 2 to the spinner head 2. The rotating shaft 5 extends through the center of the bottom surface of the coater house 4 and is connected to a vacuum device (not shown). An exhaust port 6 is provided around the bottom of the coater house 4.
This exhaust port 6 is also connected to a vacuum device (not shown).

When applying a liquid substance to the surface of the object 1 to be coated using the spinner device described above, first, the vacuum device is activated to suction and fix the object 1 to the upper surface of the spinner head 2 . Then, rotate the spinner head 2 and open the exhaust port 6.
While evacuating the inside of the coater house 4, a liquid substance is dropped or sprayed onto the upper surface of the object 1 to be coated, and then the object 1 to be coated is rotated at high speed. As a result, the liquid substance is applied to the object 1
is applied evenly over the entire surface.

[Invention or problem to be solved]

However, in such a conventional spinner device, due to the high speed rotation of the object to be coated (1), the liquid material may be splashed and scattered, or the excess liquid may be scattered around the periphery of the object (1) to be coated. A phenomenon occurs in which the liquid scatters from the surface and becomes mist. A certain amount of this mist is discharged from the exhaust port 6, or a part of it adheres to the back surface of the object to be coated 1. This liquid substance adhering to the back surface of the object to be coated 1 causes stains and must be removed later. However, depending on the type of liquid substance, it is very difficult to remove it, and it may cause scratches on the object to be coated. It also leads to production efficiency and decreases. Also, parts with liquid substances cannot be used.

The utilization rate of the object to be coated 1 also decreases.

(Means for Solving the Problems) In order to eliminate the above-mentioned drawbacks, the present invention provides a spinner that forms a uniform coating film on the surface of an object by dropping or spraying a liquid substance onto the surface of the object. In the apparatus, when the object to be coated is rotated, the air supplied from the air supply port passes through a passage on the back surface of the object to be coated, and is blown out substantially uniformly and at high speed from the air outlet over the entire circumference of the back surface of the object to be coated. The present invention provides a spinner device characterized by the following.

[Effect]

According to such a spinner device, when the object to be coated is rotated, air is blown out almost uniformly and at high speed from the air outlet over the entire circumference of the back surface of the object to be coated, so that the mist of the liquid substance, etc. It is possible to prevent it from penetrating and adhering to the back surface of the object to be coated.

〔Example〕

FIG. 1 is a diagram for explaining one embodiment of the present invention. In the figure, around the spinner head 2 in the coater house 4, a guard ring 7 and a cylinder 8 supporting it are arranged coaxially with the rotation axis 5 of the spinner head 2 and arranged around the guard ring so as to surround the spinner head 2. The upper surface of the ring 7 and the back surface of the object to be coated 1 are arranged so as to form a predetermined interval 2, which is an air outlet 9, at a substantially uniform interval, for example, about 1 m. Further, one or several air supply ports 10 are provided on the side surface of the cylinder 8.
Air is supplied from the air outlet 9 and the air is blown out from the air outlet 9. In this case, air should be blown out almost uniformly and at high speed from the air outlet 9 over the entire circumference of the back surface of the object 1 to be coated.

The velocity of the air blown out from the air outlet 9 must be higher than the velocity of the air flowing inside the coater house 4 in the direction of the exhaust outlet 6. Therefore, the guard ring 7 has a structure and arrangement in which the volume of the part where air is once stored, that is, the buffer part, is large, and the air outlet 9 is narrowed as shown in the figure.

As a result, the air supplied to the guard ring 7 from the air supply port IO has a stable and almost uniform blowing pressure over the entire circumference of the air outlet 9, so that the air is blown out almost uniformly over the entire circumference of the air outlet 9. become. Also,
It is desirable that the diameter of the outer periphery of the upper surface of the guard ring 7 parallel to the object 1 to be coated is slightly larger than the diameter of the object 1 to be coated.

In such a spinner device, air supplied from the air supply port 10 passes through a passage on the back surface of the object l, and is blown out almost uniformly and at high speed from the air outlet 9 over the entire circumference of the back surface of the object l. By doing so, it is possible to prevent the mist from entering from the periphery of the object 1 to be coated, and to prevent the mist from adhering to the back surface of the object 1 to be coated.

FIG. 2 is a diagram for explaining another embodiment of the present invention. This embodiment is an embodiment in which a liquid substance is degenerated onto an object to be coated l having a smaller diameter than the embodiment shown in FIG. As shown in this figure, by simply replacing the guard ring 7 with a guard ring 7 having a tapered portion on the upper surface at a different angle, the same apparatus can be easily applied to objects 1 of various diameters.

FIG. 3 is a diagram for explaining another embodiment of the present invention. While the guard link 7 in the embodiments of FIGS. 1 and 2 is fixed, in this embodiment the guard ring 7
In this embodiment, the spinner head 2 is fixed to the side wall of the spinner head 2 so as to rotate together with the object to be coated.This embodiment can also be carried out in the same manner as in FIGS. 1 and 2, and the same effect can be obtained. .

〔Effect of the invention〕

As described above, the present invention relates to a spinner device that forms a uniform coating film on the surface of an object to be coated by dropping or spraying a liquid substance onto the surface of the object to be coated.

When the object to be coated is rotated, the air supplied from the air supply port passes through a passage on the back surface of the object to be coated, and is blown out almost uniformly and at high speed from the air outlet over the entire back surface of the object to be coated. This is a spinner device. Since the present invention has such characteristics, it is possible to prevent the mist of the liquid substance from penetrating and adhering to the back surface of the object to be coated. Therefore, since there is no need to remove deposits compared to conventional spinner devices, productivity is significantly improved.

Furthermore, since the entire surface of the object to be coated can be used, the utilization rate of the object to be coated is improved.

[Brief explanation of drawings]

FIG. 1 is a diagram for explaining one embodiment of the present invention, FIGS. 2 and 3 are diagrams for explaining another embodiment of the present invention, and FIG. 4 is a diagram for explaining a conventional example. This is a diagram. l...Object to be coated 2...Spinner head 3
...Conical wheel 4...Coater house 5.
... Rotating shaft 6 ... Exhaust lower ... Guard ring 8 ... Cylinder 9 ... Air outlet
lO...Air supply port patent applicant Origin Electric Co., Ltd.

Claims (4)

[Claims] (1) In a spinner device that drops or sprays a liquid substance onto the surface of the object to be coated to form a uniform coating film on the surface of the object to be coated, when the object to be coated is rotated, air is supplied from the air supply port. A spinner device characterized in that air is blown out substantially uniformly and at high speed over the entire circumference of the back surface of the object to be coated from an air outlet through a passage on the back surface of the object to be coated. (2) In a spinner device that forms a uniform coating film on the surface of an object by dropping or spraying a liquid substance onto the surface of the object, a guard ring and a guard ring are installed around the spinner head in the coater house. A supporting cylinder is disposed coaxially with the rotational axis of the spinner head, and such that the upper surface of the guard ring and the back surface of the object to be coated form a predetermined distance as an air outlet; A spinner device characterized in that an air supply port is provided on the side. (3) The guard ring is characterized in that its buffer portion has a large volume, and the air outlet formed between the guard ring and the back surface of the object to be coated is sufficiently narrow. Item 2. The spinner device according to item 2. (4) The spinner device according to claim 2, wherein the outer periphery of the upper surface of the guard ring parallel to the object to be coated is slightly larger than the diameter of the object to be coated.