JP5470408B2 - Transmission electron microscope apparatus having electron spectrometer, sample holder, sample stage, and spectral image acquisition method - Google Patents

Description

  The present invention relates to a transmission electron microscope apparatus having an electron spectrometer capable of simultaneously acquiring spectral images from a plurality of samples and measuring a high-precision chemical shift from an electron energy loss spectrum extracted from the spectral images. , A sample holder, a sample stage, and a spectral image acquisition method.

  The processing dimensions of silicon semiconductors, magnetic devices, and the like are miniaturized and highly integrated, and device characteristics and reliability are more important than ever. In recent years, (Scanning) Transmission Electron Microscopy ((Scanning) Transmission Electron Microscopy) has been developed in order to analyze the failure of semiconductor devices in the nanometer range and to identify and resolve the causes of defects in the development and mass production of new processes. : (S) TEM) and spectrum analysis using electron energy loss spectroscopy (EELS) and two-dimensional element distribution analysis are essential analysis means.

  The electron energy loss spectrum includes zero loss spectrum that does not lose energy when passing through the sample, plasmon loss spectrum obtained by losing energy by exciting electrons in the valence band, and energy by exciting core electrons. It can be roughly divided into inner-shell electron excitation loss spectra obtained by loss of. In the inner shell electron excitation loss (core loss) spectrum, a fine structure is observed near the absorption edge.

  This structure is called an absorption edge fine structure (ELNES) and has information reflecting the electronic state and chemical bonding state of the sample. Moreover, since the energy loss value (absorption edge position) is unique to the element, qualitative analysis is possible. Further, since information related to the coordination around the element of interest can be obtained from the shift of the absorption edge position called chemical shift, a simple state analysis is also possible.

  Conventionally, when acquiring electron energy loss spectra at different locations on a sample, it is possible to carry out spectroscopy using a scanning transmission electron microscope that scans the sample with a scanning coil with a small focused electron beam and the amount of energy the electron beam has. By combining with an electron spectrometer, the electron beam transmitted through the sample was dispersed, and an electron energy loss spectrum was continuously acquired.

  However, in this method, the electron energy loss spectrum's aberration and origin position change due to the drift of the acceleration voltage of the electron beam and the change of magnetic field / electric field due to the disturbance change around the device. It is difficult to compare the shape of the absorption edge fine structure of the spectrum and the slight chemical shift.

  Therefore, for example, Patent Document 1 discloses that measurement in a short time is performed a plurality of times using a two-dimensional position detection element constituted by a plurality of pixels, and the detection value of each pixel in each measurement performed a plurality of times is electronic Detects each pixel with the highest spectral intensity of the line, detects each pixel with the highest spectral intensity of the electron beam, and two-dimensionally matches the pixel position with the highest spectral intensity of the electron beam for each measurement. A method is described that shifts the sensing elements, identifies the pixels that coincide in position at this time as pixels for the same energy value, and integrates the detected values in each measurement to enable a long time measurement. ing.

  Further, for example, in Patent Documents 2 and 3, a peak of a spectrum is detected by an electron beam detector, the amount of deviation of the peak position from a reference position on the electron beam detector is detected, and an electron beam on the electron beam detector is detected. Using an electron beam position control device that controls the position, the amount of deviation is corrected, and further, the amount of deviation of the peak position of the spectrum and the spectrum measurement by the electron beam detector are controlled, and the electron energy loss spectrum is calculated. It is described to measure.

  Although the above-mentioned technique corrects energy transfer (drift) due to changes in the disturbance of the device during measurement and measures the electron energy loss spectrum, the spectrum used for detecting the deviation amount and the spectrum to be analyzed Cannot always be acquired simultaneously, and it is difficult to completely correct the shift amount of the peak position.

  In addition, since the electron energy loss spectrum of multiple locations is not acquired at the same time, when comparing the chemical shift of the electron energy loss spectrum acquired at each location in detail, the shift due to the chemical shift reflecting the difference in the chemical bond state, Alternatively, it is difficult to determine whether the shift is caused by disturbance as in the conventional techniques.

  Therefore, for example, in Patent Document 4, a transmission electron microscope image in which the focal positions of both the x-axis and the y-axis are the same surface is obtained in a normal transmission electron microscope, whereas electron transmission spectroscopy is performed in the transmission electron microscope described above. The image detector obtains a two-dimensional image with the x-axis focal position as the spectral plane and the one y-axis focal position as the image plane by differentiating the focal positions of the x-axis and y-axis. It is described.

  As a result, the electron energy loss spectrum in the y-axis direction of the sample can be separated and observed. That is, as shown in FIG. 2B, the image obtained by the image detector can be observed as a spectral image having the amount of energy loss, that is, the energy dispersion axis, and the y axis indicating the position information of the sample, as shown in FIG. . The spectrum image is observed in a band shape corresponding to each laminated film of the transmission electron microscope image shown in FIG. 2A, when the intensity profile of the spectrum image is extracted at each location corresponding to each laminated film, as shown in FIG. 2C, the electron energy loss spectra at different positions of the sample are simultaneously obtained. It can be observed, and the absorption edge fine structure and slight chemical shift of the electron energy loss spectrum at different positions can be compared in detail.

The spectral image in which the x-axis described in Patent Document 4 has an energy loss amount and the y-axis has the position information of the sample changes the lens action of an electron spectrometer or the like, and the focal positions of the x-axis and the y-axis differ, It is a two-dimensional image obtained by an image detector, that is, it is possible to simultaneously observe electron energy loss spectra at a plurality of points at different positions on the sample. In this technique, although there are disclosures about techniques for acquiring spectral images, that is, electron energy loss spectra from different points in a sample, and discussing chemical shifts due to differences in chemical bonding states, The spectrum image was acquired simultaneously, and the measurement of the electron energy loss spectrum and the chemical shift was not disclosed, and the spectrum image could not be acquired simultaneously from a plurality of samples.

JP 2000-113854 A JP 2002-157773 A JP 2003-151478 A JP-A-10-302700

  An object of the present invention is to obtain a transmission electron microscope apparatus and a sample holder capable of simultaneously acquiring spectral images from a plurality of samples and measuring a highly accurate chemical shift from an electron energy loss spectrum extracted from the spectral images. It is intended to provide a sample stage and a method for acquiring a spectral image.

  That is, a transmission electron microscope apparatus according to one embodiment of the present invention includes an electron gun that emits an electron beam, a converging lens that converges the emitted electron beam, a focused electron beam that is emitted, and a sample is disposed. A plurality of sample tables, a sample movement control device that moves the sample tables, an imaging lens that forms an image of an electron beam transmitted through the plurality of samples, and an energy amount of the imaged electron beam An electron spectrometer that splits an electron beam and outputs a spectrum image with different convergence positions in the energy dispersion axis and a direction orthogonal to the energy dispersion axis to simultaneously obtain a spectrum image from a plurality of samples, and the acquired spectrum And an image display device for displaying an image.

  A sample holder according to an aspect of the present invention is a transmission electron microscope apparatus sample holder including an electron spectrometer, and includes a plurality of sample stands on which the sample is placed, and the sample is an energy dispersion axis of the electron spectrometer. It is characterized by being arranged in a direction orthogonal to

  The sample stage according to one aspect of the present invention is the sample stage on which the sample for the transmission electron microscope apparatus is installed, and the sample for the transmission electron microscope apparatus is installed on the opposite side of the sample stage from the sample stage fixing part. It has the projection part of this.

  A method for acquiring a spectral image according to one aspect of the present invention is a method for acquiring a spectral image formed by two axes in which position information is orthogonal to an energy dispersion axis acquired by a transmission electron microscope apparatus having an electron spectrometer. It is characterized by acquiring spectral images from a plurality of samples at the same time.

  According to another aspect of the present invention, there is provided a method of acquiring a spectral image formed by two axes whose position information is orthogonal to an energy dispersion axis acquired by a transmission electron microscope apparatus having an electron spectrometer. A plurality of samples are arranged on the energy dispersion axis, and spectral images are simultaneously acquired from the plurality of samples.

  According to the present invention, a transmission electron microscope apparatus and a sample holder capable of simultaneously acquiring spectral images from a plurality of samples and measuring a chemical shift with high accuracy from an electron energy loss spectrum extracted from the spectral images. , A sample stage and a method for acquiring a spectral image can be provided.

1 is a schematic configuration diagram schematically showing a configuration of a transmission electron microscope apparatus according to an embodiment of the present invention. Transmission electron microscope image, spectrum image and electron energy loss spectrum obtained by conventional technology. The flowchart which showed the procedure which acquires an electron energy loss spectrum and a chemical shift from the standard sample and measurement object sample which are not the same samples. The figure which showed an example in an image display apparatus in a transmission electron microscope apparatus. The top view of the side entry type | mold sample holder for transmission electron microscope apparatuses of this invention. (A), (b) is explanatory drawing which shows an example of the sample stand for installing a sample in this invention. Explanatory drawing which shows an example which installed the sample stand in the sample holder. In this invention, explanatory drawing which shows an example which installed the sample in two sample stands. In this invention, explanatory drawing which shows an example which installed the sample in four sample stands.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. Note that in all the drawings for describing the embodiments, the same portions are denoted by the same reference numerals, and the description thereof is partially omitted.

  FIG. 1 is a schematic configuration diagram schematically showing a configuration of a transmission electron microscope apparatus according to an embodiment of the present invention. The transmission electron microscope apparatus 1 includes an electron spectrometer 8.

The transmission electron microscope apparatus 1 of the present embodiment includes an electron gun that has an electron source 2 and emits an electron beam 3, a converging lens 4, an objective lens 6, an imaging lens system 7 (imaging lens), A fluorescent plate 9, an electron spectrometer 8, an image display device 14, a data storage device 15, and a central control device 16 are provided. Between the converging lens 4 and the objective lens 6, a plurality of samples 18 and 19 are arranged on the sample tables 20 and 21. The sample tables 20 and 21 are connected to a sample movement control device 22 that moves the sample tables 20 and 21.

  The electron spectrometer 8 includes a magnetic field sector 10, multipole lenses 11 and 12, and an image detector 13.

  The configuration of the transmission electron microscope apparatus 1 and the configuration of the electron spectrometer 8 are not limited to this. The transmission electron microscope apparatus 1 includes at least an electron gun, a converging lens 4, a plurality of sample stands 20, 21, a sample movement control device 22, an imaging lens system 7, an electron spectrometer 8, and an image. The display device 14 may be provided.

  Further, the position where the electron spectrometer 8 is arranged is not particularly limited. In the present embodiment, the electron spectrometer 8 is disposed between the fluorescent plate 9 and the image display device 14, but the electron spectrometer 8 may be disposed between the imaging lens system 7.

  In the transmission electron microscope apparatus 1, the electron beam 3 emitted from the electron source 2 passes through the converging lens 4 and irradiates the samples 18 and 19. When the electron beam 3 transmitted through the samples 18 and 19 passes through the objective lens 6 and a plurality of imaging lens systems 7 and the fluorescent screen 9 is opened, the electron beam 3 is directly applied to the electron spectrometer 8. enter in.

  The electron beam 3 that has entered the electron spectrometer 8 is a multipole lens 11, 12 used for focusing, enlargement / reduction, aberration reduction, etc. of an electron energy loss spectrum or a transmission electron microscope image in the electron spectrometer 8, After passing through the magnetic field sector 10 that can be dispersed by the energy amount of the electron beam 3, the image is taken as a transmission electron microscope image, a two-dimensional element distribution image, a spectrum image, etc. by the image detector 13, and then the image display device 14. And stored in the data storage device 15. The magnetic field sector 10 and the multipole lenses 11 and 12 are controlled by the central controller 16. Further, the central control device 16 can control switching of acquisition modes such as a transmission electron microscope image, a two-dimensional element distribution image, and a spectrum image. Furthermore, it is possible to control the change of the focal position of the x-axis and the y-axis, that is, the switching between the transmission electron microscope image and the spectral image acquisition mode.

  When acquiring a spectrum image, in order to limit the place where the spectrum is to be acquired, a long field limiting slit 17 is inserted in the x-axis direction, that is, the same direction as the energy dispersion axis, and in the y-axis direction, that is, the sample measurement position direction. Sometimes.

  The samples 18 and 19 are respectively arranged on the sample tables 20 and 21, and the samples 18 and 19 can be moved independently by the sample movement control device 22. The samples 18 and 19 are arranged at positions orthogonal to the energy dispersion axis of the electron spectrometer 8 and are moved as needed so that the electron energy loss spectra of the samples 18 and 19 can be acquired simultaneously. The positions of the samples 18 and 19 can be confirmed while being confirmed by the fluorescent screen 9 or the image display device 14. The number of samples is not limited to two.

  FIG. 3 is a flowchart showing a procedure for obtaining an electron energy loss spectrum and a chemical shift from a plurality of samples using the transmission electron microscope apparatus 1 shown in FIG. In this flowchart, the number of samples is set to two, but the present invention is not limited to this, and a plurality of samples may be used.

  First, the magnification of the transmission electron microscope apparatus 1 is set to a low magnification, and the measurement sample M is moved by the sample movement control device 22 to an electron beam irradiation region, that is, a position where it can be observed by the fluorescent screen 9 or the image detector 13 (S101-102). ). Next, similarly to the movement of the measurement sample M, the measurement sample N is moved to the electron beam irradiation region (S103). Here, as for the movement of the measurement sample M and the measurement sample N, either may be moved first. In this case, it is desirable to keep the measurement sample M and the measurement sample N as close as possible.

  Next, the magnification of the transmission electron microscope apparatus 1 is set to the acquisition magnification of the spectrum image (S104). When the measurement sample M and the measurement sample N are not arranged in the same field at this magnification, the sample movement control device 22 moves the sample to be arranged in the same field. Arranging in the same visual field in this case means that spectral images of the measurement sample M and the measurement sample N can be acquired simultaneously. The measurement sample M and the measurement sample N may be in contact with each other, and there is no particular problem even if there is an interval between the samples.

  Next, the sample movement control device 22 moves the measurement sample M and the measurement sample N so that the positions of the measurement sample M and the measurement sample N are orthogonal to the energy dispersion axis of the electron spectrometer 8 (S105). In this case, if a mark in the direction orthogonal to the energy dispersion axis is provided on the image display device 14 or the like on which the two-dimensional image obtained from the fluorescent screen 9 or the image detector 13 is displayed, both the samples are efficiently moved. Is possible.

  As described above, after the measurement sample M and the measurement sample N are arranged, the spectrum images of the measurement sample M and the measurement sample N are obtained simultaneously by the electron spectrometer 8 (S106), and the measurement sample M and the measurement are measured from this spectrum image. After extracting the electron energy loss spectrum of the sample N (S107), the chemical shift between the measurement sample M and the measurement sample N is measured (S108).

  Next, an operation performed by the operator and an operation instruction screen of the transmission electron microscope apparatus 1 will be described. FIG. 4 is a diagram showing an example of display contents in the image display device 14. The selection button group 26 includes a spectrum measurement start button 28, a spectrum acquisition end button, a spectrum acquisition time change button, a spectrum extraction button 23, a chemical shift measurement button 27, and the like. For example, when the spectrum measurement start button 28 in the selection button group 26 is selected, the spectrum image 24 simultaneously acquired from a plurality of samples by the image detector 13 is displayed in the image display device 14.

  When the spectrum extraction button 23 in the selection button group 26 is selected, the spectrum selection region tool 25 is displayed in the spectrum image 24 and, at the same time, the electron energy loss spectrum display unit 29 extracted by the spectrum selection region tool 25 is displayed. . The spectrum selection area tool 25 can be freely moved in the position direction, and the width of the extraction area can be varied, so that a spectrum at an arbitrary position can be set.

  The electron energy loss spectrum display unit 29 can display an electron energy loss spectrum extracted from an arbitrary position. For example, an electron energy loss spectrum extracted from each sample can be displayed simultaneously.

  When the chemical shift measurement button 27 in the selection button group 26 is selected, the chemical shift obtained from the electron energy loss spectrum displayed on the electron energy loss spectrum display unit 29 is displayed on the chemical shift display unit 30.

  Here, a calculation method of the absorption edge position necessary for obtaining a chemical shift from a plurality of electron energy loss spectra will be described. The chemical shift can be obtained by obtaining the energy difference at the absorption edge position of each electron energy loss spectrum.

  Examples of the calculation method of the absorption edge position of the electron energy loss spectrum obtained from the position set by the spectrum selection region tool 25 include a maximum value method, a differential method, and an intermediate value method.

  The maximum value method is a method of calculating the energy value of the maximum intensity in an arbitrary energy range as the absorption edge position. Further, the differential method is a method of calculating the energy value of the maximum intensity of the differentiated spectrum as the absorption edge position after first-differentiating the spectrum.

  The calculation method of the absorption edge position by the intermediate value method is as follows. 1) The difference between the maximum intensity of the spectrum and the background region is calculated. 2) Subtract half the intensity from the entire spectrum. 3) Obtain the absolute value of the intensity at each energy of the spectrum. 4) The energy value of the minimum intensity within the arbitrarily set energy range is calculated as the absorption edge position.

  This procedure is an example showing a method of calculating the absorption edge position, and the calculation method is not limited to this.

  The buttons for the functions described above can be moved and arranged as appropriate in the image display device 14. In addition, each function button may be a toolbar. Further, the spectral image 24 displayed in the image display device 14, the electron energy loss spectrum display unit 29, the chemical shift display unit 30 and the like can be freely arranged.

  FIG. 5 is a top view of a sample holder for a transmission electron microscope apparatus in which a plurality of sample stands can be installed. In this embodiment, a side entry type sample holder for a transmission electron microscope apparatus will be described. The sample holder is inserted from the lateral direction into the high vacuum container of the transmission electron microscope apparatus after a plurality of sample stands on which the sample is set are installed outside the transmission electron microscope apparatus.

  The sample holder main body 31 can be provided with sample stands 20 and 21 on which different samples 18 are respectively installed. The sample stand is fixed to the sample holder main body 31 by a sample stand holder 32 and a sample holder holding screw 33. The The fixing of the sample stage is not limited to this. Each sample can be arranged in a direction perpendicular to the energy dispersion axis.

  The sample holder main body 31 includes a piezoelectric element 34, and the sample movement control device 22 can freely move the sample table 20 on which the sample is installed in three axial directions. Therefore, it is possible to arrange a plurality of samples with high accuracy in a direction orthogonal to the energy dispersion axis.

  FIG. 6 is a diagram showing an example of a sample stage for installing a sample according to the embodiment of the present invention. The sample stage is provided with a projection 51 for installing the sample on the side opposite to the sample fixing unit 52, and a desired sample is set by a focused ion beam apparatus or the like. In FIG. 6 (a), there is only one protrusion 51 for placing the sample, but in FIG. 6 (b), there are three protrusions 51, and the shape of the sample stage 20 is changed as needed. Thus, a plurality of measurement samples can be installed.

  FIG. 7 is a view showing an example in which the sample stage shown in FIG. 6 is installed in the sample holder. The sample stage 20 has one protrusion and the sample stage 21 has three protrusions. In addition, another sample is installed on each protrusion. The combination of the samples that simultaneously acquire the spectrum image is arbitrary, and the sample table 20 can be freely moved by the piezoelectric element 34 in the sample holder main body 31 to acquire the spectrum image.

  FIG. 8 shows an example in which the samples are placed on two sample stands in the present invention and the samples are brought close to each other so that spectral images of both samples can be acquired simultaneously. Samples 18 and 19 installed by a focused ion beam device are installed on the sample tables 20 and 21, respectively. The samples 18 and 19 are thinned by a focused ion beam device so that a spectrum image can be acquired.

  Sample 18 is a sample in which nickel silicide 42 is deposited on a silicon (Si) substrate 41, and sample 19 is a sample in which nickel disilicide 43 is deposited on a silicon substrate 41, and has a cross-sectional structure. . Further, the dotted line portion in FIG. 8 indicates the spectrum image acquisition region 40 and indicates that the spectrum images of the sample 18 and the sample 19 can be acquired simultaneously.

  The samples 18 and 19 are not limited to the sample sliced by the focused ion beam apparatus, and for example, nanoparticles or carbon nanotubes may be fixed to the sample tables 20 and 21.

  FIG. 9 shows an example in which samples are installed on four sample stands in the present invention. Sample stands 46 and 47 are added to the sample stands 20 and 21, and samples 48 and 49 are installed on the sample stands 46 and 47. Also in the present embodiment, it is possible to simultaneously acquire spectral images of all samples.

Next, a specific example in which the above-described spectral images of a plurality of samples are acquired simultaneously will be shown. In this specific example, the transmission electron microscope apparatus 1 is used, and the sample holder body 31 of the present invention is used to simultaneously acquire spectrum images from two samples, and the electron energy loss spectrum obtained from the spectrum images is obtained. The chemical shift was measured. The measurement sample is a sample (measurement sample M) obtained by thinning a cross section of a sample obtained by depositing 20 nm of nickel silicide (NiSi) on a silicon substrate, and a sample (deposited by 20 nm of nickel disilicide (NiSi ₂ ) on a silicon substrate ( The sample N) was cut into thin sections, and each sample was placed on a sample stage.

  The acceleration voltage of the transmission electron microscope apparatus 1 at the time of spectrum image acquisition was 200 kV, the take-in angle of the electron beam 3 was 6 mrad, and the energy dispersion was 0.05 eV / pixel. The image detector 13 used for acquiring the spectrum image is a 1024 pixel × 1024 pixel two-dimensional detector.

  First, the observation magnification of the transmission electron microscope apparatus 1 was set to 200 times, and the measurement sample M was moved into the irradiation region of the electron beam 3. Thereafter, the measurement sample N was moved using the sample movement control device 22 so as to be as close to the measurement sample M as possible. The positions of both were confirmed by using the image on the fluorescent plate 9 and moved so that the samples of both were arranged at the center of the fluorescent plate 9 as much as possible.

  Next, the observation magnification on the display in the transmission electron microscope apparatus 1 is changed to 10000 times, and the measurement sample N is moved so that the measurement sample M and the measurement sample N are orthogonal to the energy dispersion axis of the electron spectrometer 8. After that, the measurement sample N was further moved closer so that the spectrum images of the measurement sample M and the measurement sample N can be acquired simultaneously. At this time, the positions of both were confirmed using a transmission electron microscope image obtained by the image detector 13.

  Next, the spectrum extraction button 23 in the spectrum selection button 21 was selected, and the spectrum images of the measurement sample M and the measurement sample N were acquired simultaneously. Spectral images were acquired in the L-shell absorption edge region of silicon and the L-shell absorption edge region of nickel.

  In the spectrum image obtained from the silicon L-shell absorption edge region, the spectrum selection region tool 25 is used to set the silicon substrate portion, nickel silicide portion, and nickel disilicide portion, and then the spectrum extraction button 23 is selected. The electron energy loss spectrum was extracted. After extracting the electron energy loss spectrum, the chemical shift measurement button 27 was selected, and the chemical shift of the silicon L shell absorption edge position of the silicon substrate portion, the nickel silicide portion, and the nickel disilicide portion was measured. The intermediate value method was used for measuring the absorption edge position. As a result, no chemical shift was observed between the two.

  Next, in the spectrum image obtained from the nickel L-shell absorption edge region, after setting the nickel silicide portion and the nickel disilicide portion by the spectrum selection region tool 25, the spectrum extraction button 23 is selected, and the electrons from the respective locations are selected. The energy loss spectrum was extracted. After extracting the electron energy loss spectrum, the chemical shift measurement button 27 was selected to measure the chemical shift of both. Similarly, the absorption edge position was obtained using the intermediate value method. As a result, it was found that nickel disilicide was on the high loss energy side of about 2 eV. Conventionally, it was difficult to deposit both nickel silicide and nickel disilicide in one sample. Therefore, although it was difficult to measure the chemical shift of the nickel L shell absorption edge position of both samples with high precision, this technology has made it possible to measure the chemical shift of both. As described above, according to the present invention, since it is possible to simultaneously acquire an electron energy loss spectrum from a plurality of samples, the measurement range of chemical shifts for samples that have been difficult to measure so far is expanded. And the knowledge about the correlation between the composition ratio can be obtained.

  As mentioned above, the invention made by the present inventor has been specifically described based on the embodiments. However, the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the scope of the invention. Needless to say.

DESCRIPTION OF SYMBOLS 1 Transmission electron microscope apparatus 2 Electron source 3 Electron beam 4 Converging lens 6 Objective lens 7 Imaging lens system 8 Electron spectrometer 9 Fluorescent plate 10 Magnetic sector 11, 12 Multipole lens 13 Image detector 14 Image display device 15 Data storage device 16 Central control device 17 Field limiting slits 18, 19 Sample 22 Sample movement control device 23 Spectrum extraction button 24 Spectrum image 25 Spectrum selection region tool 26 Selection button group 27 Chemical shift measurement button 28 Spectrum measurement start button 29 Electronic energy loss spectrum display section 30 Chemical shift display unit 31 Sample holder body 32 Sample holder 33 Sample holder holding screw 34 Piezoelectric element 40 Spectrum image acquisition region 41 Silicon substrate 42 Nickel silicide 43 Nickel disilicide 46, 47 Sample stage 48, 49 Sample 5 Projections 52 sample stage fixing portion

Claims (4)

An electron gun that emits an electron beam;
A converging lens that converges the emitted electron beam ;
A plurality of sample table arranging a plurality of specimen which the electron beam is irradiated,
A sample movement control device for moving the sample stage;
An imaging lens for imaging an electron beam transmitted through the plurality of samples;
The electron beam is dispersed according to the energy amount of the imaged electron beam, and the convergence position of the electron beam is determined by an energy dispersion axis and an arrangement direction orthogonal to the energy dispersion axis and in which the plurality of samples are arranged. A different electron spectrometer,
The plurality of sample stands can arrange the plurality of samples in a region where the electron beam can be irradiated simultaneously, and electrons transmitted from the plurality of samples are perpendicular to the energy dispersion axis. The plurality of samples can be arranged to focus at different positions;
The transmission electron microscope further comprises an image processing device for displaying a spectrum image in which an energy dispersion axis of the electron beam and the arrangement direction of the sample are orthogonal to each other . An electron gun that emits an electron beam;
A converging lens that converges the emitted electron beam;
A plurality of sample stands for arranging a plurality of samples irradiated with the electron beam;
A sample movement control device for moving the sample stage;
An imaging lens for imaging an electron beam transmitted through the plurality of samples;
An electron spectrometer for dispersing electrons transmitted through the sample;
With
A plurality of samples placed on at least two sample stands among the plurality of sample stands are arranged to be irradiated with an electron beam at the same time, and each electron transmitted through the plurality of samples is subjected to the electron spectroscopy. A transmission electron microscope , wherein the plurality of samples are arranged so as to be dispersed at different positions in a position direction orthogonal to the energy dispersion direction of the vessel . The transmission electron microscope apparatus according to claim 1, wherein the electron spectrometer is disposed between the imaging lenses. 3. The transmission electron microscope according to claim 1, wherein the sample stage includes a plurality of mounting portions on which the sample is mounted.