JP2000317809A - Polishing equipment - Google Patents

Abstract

(57) [Problem] To provide a polishing apparatus having a small load acting on a driving roller, having high durability, and capable of suppressing occurrence of fatigue fracture. SOLUTION: The polishing apparatus 20 according to the present invention comprises:
A ring polisher 22 for polishing a workpiece;
A disk-shaped correction tool 26 for correcting the surface shape of the ring polisher 22 and a friction drive roller 60 for applying a rotational force to the outer peripheral surface of the correction tool 26 to rotate the correction tool 26
A drive rod 66 for holding the correction tool 26 is formed on the inner peripheral surface, and a drive ring 59 is provided in contact with the friction drive roller 60 on the outer peripheral surface. The drive ring 59 is rotatable and held in a fixed position. Guide roller 58 is provided, and the friction drive roller 60 rotates its own drive ring 5.
9, the drive ring 59 is rotated, and the correction tool 26 is rotated via the drive ring 59.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing apparatus used for polishing a workpiece, for example, a glass member.

[0002]

2. Description of the Related Art As shown in FIG. 7, a polishing machine 1 in a polishing apparatus comprises a turntable 2 rotating about a z-axis (vertical axis), and a polisher 3 formed on the upper surface of the turntable 2 at a pitch. The polishing process is performed when the workpiece slides on the surface 3a of the rotating polisher 3.

[0003] A disk-shaped correction tool 4 is generally provided on the polishing machine 1.
Is to repair the local damage of the surface shape of the polisher 3 due to friction with the workpiece by plastic flow of the pitch surface layer and continuously repair it in process (during polishing), and at the same time, by the contact pressure with the polisher 3 The curvature of the surface 3a is adjusted.
In this curvature adjustment, the center distance C between the polishing machine 1 and the correction tool 4 is adjusted, and the centroid A of the contact surface between the polisher 3 and the correction tool 4 is shifted from the center of gravity G of the correction tool 4. The rolling moment (curvature deflection moment) My 'is generated in the radial direction, and the pressure pxy' exerted on the polisher 3 by the correction tool 4 is distributed as shown in the figure, and a larger pressure is applied to the outer peripheral side of the polisher 3. The curvature deflection moment My 'is expressed by the pressure pxy'
Can be obtained by multiplying the resultant force P obtained by integrating the above for the entire contact surface by the decentering distance s.

My '= P · s P = ∬pxy'dxdy As a polishing apparatus including such a polishing board 1 and a repair tool 4, the following is conventionally known.

In the apparatus shown in FIG. 8, a plurality of guide rollers 6 provided on a slide plate 5 are in rolling contact with the outer peripheral surface of the correction tool 4, and hold the correction tool 4 rotatably. The slide plate 5 is movable in the radial direction of the polishing board 1, and the correction tool 4 is positioned with respect to the polishing board 1 by adjusting the position of the slide plate 5. Although the correction tool 4 rotates (self-rotates) with the polisher 3 due to frictional force, a rotation error is likely to occur due to a shape error of the surface 3 a of the polisher 3.

In the apparatus shown in FIG. 9, one of the guide rollers 6 of the apparatus shown in FIG. 8 is provided with a rotating force by an electric motor 7 and functions as a driving roller. Since the driving roller 8 applies a rotational force for rotating the correction tool 4 to the outer peripheral surface of the correction tool 4 and positively rotates the correction tool 4, even if there is a shape error in the surface 3 a of the polisher 3. Rotation error is less likely to occur.

In the apparatus shown in FIG. 10, the upper surface of the correction tool 4 of the apparatus shown in FIG. 9 is subjected to boring, and the metal insert 10 attached to the jack device 9 is embedded therein so that the correction tool 4 can be raised and lowered. It has become. That is, in the jack device 9, when the handle 11 is operated, the screw spindle 12 rotates, and the Y-shaped member 13 moves up and down. Accordingly, the I-shaped member 1 in which the metal insert 10 is fixed and fixed to the Y-shaped member 13 by the fixing pin 14
Since the tool 5 also moves up and down, the correction tool 4 integrated with the I-shaped member 15 also moves up and down. This allows the correction tool 4 to be pulled upward during maintenance work or the like.

In the apparatus shown in FIG. 11, the correction tool 4 can be moved up and down similarly to the apparatus shown in FIG.
6 can be used to increase the pressure on the polisher 3 of the correction tool 4 by driving the rod 17 downward.

[0009]

FIGS. 8 to 1 show an embodiment of the present invention.
In each device shown in FIG. 1, the guide tool 6 or the drive roller 8 directly contacts the outer peripheral surface of the correction tool 4, so that the correction tool 4 is held at a fixed position on the polishing board 1. Therefore, as shown in FIG. 12, a shear force F always acts on the spindle of the guide roller 6 due to a frictional force generated between the polisher 3 and the correction tool 4. When the guide roller 6 is cantilevered as shown in the drawing, a bending moment M = F · L1 that increases according to the arm length L1 from the point of application of the shearing force F acts on the spindle.

On the other hand, as shown in FIG. 13, the spindle of the driving roller 8 has a shearing force F and a bending moment M =
FL·L2 is under an alternating load condition that periodically fluctuates due to the rotation of the drive roller 8. Further, a torsional moment T acts on the spindle of the driving roller 8 to apply a rotational force to the correction tool 4, and when the rotating correction tool 4 slightly moves up and down, a load in the thrust direction also acts accordingly. .

As described above, the driving roller 8 serves as the correction tool 4
In the configuration in which the rotational force is applied directly to the outer peripheral surface of the roller, the spindle is exposed to severe load conditions and there is a high risk of causing fatigue failure. For example, when the roller spindle is broken or greatly deformed, the correction tool 4 It is released from the rotating state at a fixed position on the polishing machine 1 and collides with other parts of the apparatus, a workpiece, etc., and falls from the polishing machine 1. In such an accident, the surface structure of the polisher 3 is likely to be damaged by the entanglement of the workpiece, and the damage is enormous if the correction tool 4 itself, which is a precision tool, is destroyed by dropping.

When the correction tool 4 is lifted during maintenance work or the like, the correction tool 4 can be lifted by hand with a small-sized polishing apparatus. However, the weight of the correction tool 4 exceeds 30 kg to 100 kg with a medium to large-sized apparatus. Therefore, a metal insert 10 is embedded in the upper surface of the correction tool 4 as shown in FIGS. 10 and 11, and a chain, a wire, a bar, or the like is fastened to an anchor material such as an eyebolt or a universal joint. The method of lifting with etc. is adopted. Boring is performed at the center of the upper surface of the correction tool 4 to embed the metal insert 10, so that the center of the correction tool 4 is thinner than other portions. Therefore, the pressure distribution applied to the polisher 3 by the correction tool 4 is slightly different from the case where the boring is not performed, and the pressure distribution intended in the design cannot be obtained. Furthermore, since the metal insert 10 is sensitive to temperature disturbances, the curvature of the entire correction surface of the correction tool 4 in which it is embedded is generally unstable.

Conventionally, a polishing apparatus is provided with a modification tool 4 which has been subjected to processing such as surface grinding or lapping by a separate machine tool in advance and the flatness and surface roughness are satisfied to required specifications. It was built on top. In such an apparatus, when the shape of the correction tool 4 is significantly damaged, or when the chamfer on the correction surface side of the correction tool 4 is lost due to wear and the like, the correction tool 4 is removed from the polishing machine 1. It must be transported to a specialized factory, installed on the machine tool and reprocessed. Since most of the correction tools 4 are made of a highly brittle material such as granite or glass, there is a problem that considerable trouble and attention are required when the correction tool 4 is transferred to another place such as a factory.

Further, in the conventional polishing apparatus, the pressure exerted on the polisher 3 by the correction tool 4 cannot be adjusted, or can be adjusted by using a plurality of air cylinders or a double-acting air cylinder. See FIG. 11). The operation of the correction tool 4 is as described above,
Repairing the local damage of the surface shape of the surface 3
In the former, the pressure exerted on the polisher 3 by the correction tool 4 is applied to the former, and for the latter, the outer diameter of the correction tool 4 and the width (ring width) of the polisher 3 are added to the pressure. The dimensional ratio governs performance. For this reason,
It seems that the greater the pressure exerted by the repair tool 4, the better. However, the increase in the pressure causes a reduction in tool life due to an increase in the plastic deformation rate of the polisher 3, and the frictional force between the polisher 3 and the repair tool 4 is reduced. Requires excessive redundancy design for equipment stiffness and powertrain to keep up. Correction tool 4
It is desirable that the weight be as light as possible if the effect is obtained. The pressure adjustment mechanism using the air cylinder is advantageous in that an appropriate pressure can be obtained by the lightweight correction tool 4.

However, in such a pressure adjusting mechanism using an air cylinder, it is necessary to perform boring on the upper surface of the correction tool 4 in order to embed a universal joint or the like provided for connection with the rod, and the pressure intended for the design is required. There is a possibility that the above-mentioned adverse effects, such as the inability to obtain a distribution, may occur.

The present invention has been made in view of the above circumstances, and a first object of the present invention is to provide a small load acting on a driving roller, high durability, and to suppress the occurrence of fatigue failure. An object of the present invention is to provide a polishing apparatus.

A second object of the present invention is to provide a polishing apparatus capable of lifting a correction tool from above a polishing board without performing boring.

It is a third object of the present invention to provide a polishing apparatus which can easily process and inspect a repair tool near a polishing board.

A fourth object of the present invention is to provide a polishing apparatus capable of adjusting a pressure exerted on a polishing tool without boring a correction tool.

[0020]

In order to solve the above-mentioned problems, an object of the present invention is to provide a polishing disk for polishing a workpiece, a disk-shaped correction tool for correcting the surface shape of the polishing disk, and a disk-shaped correction tool. In a polishing apparatus having a driving roller for applying a rotational force to an outer peripheral surface of the correction tool to rotate the correction tool, a holding portion for holding the correction tool is formed on an inner peripheral surface and is in contact with the driving roller on an outer peripheral surface. A ring member is provided, and ring member holding means for holding the ring member rotatably and in a fixed position is provided, and the drive roller transmits its own rotation to the outer peripheral surface of the ring member to rotate the ring member. Rotating the correction tool via the ring member.

According to the first aspect of the present invention, the driving roller rotates the correction tool via the ring member, but the ring member is held at a fixed position by the ring member holding means, so that the rotating correction tool is rotated around the rotation tool. Is distributed to the ring member holding means through the ring member. Also,
Since the contact pressure of the ring member with respect to the drive roller is also kept constant, only a small preload necessary for transmitting the rotational force acts on the drive roller in a steady state.

In other words, the driving roller is released from the severe situation in which the direction of load periodically fluctuates due to the combined action of torsion and bending moment, thereby improving the durability of the device and causing fatigue failure. This makes it difficult to achieve a favorable effect from the viewpoint of safety.

According to a second aspect of the present invention, in the polishing apparatus according to the first aspect, the ring member holding means is a guide roller, which is in contact with the outer peripheral surface of the ring member so as to be able to roll, and the vertical direction of the ring member. It is characterized by engaging with an outer peripheral surface of the ring member so as to restrict movement.

According to the second aspect of the present invention, the guide roller contacts the outer peripheral surface of the ring member to restrict the movement of the ring member in the lateral direction (radial direction). It is absorbed by the roller and its transmission to the drive roller is prevented. In addition, the guide roller engages with the ring member to regulate its vertical movement, so the thrust load from the correction tool is also absorbed by the guide roller, preventing transmission to the drive roller, and reducing the load acting on the drive roller. Can be

According to a third aspect of the present invention, in the polishing apparatus according to the first aspect, an elevating means for elevating and lowering the ring member is provided, and the holding portion locks the correction tool when the ring member is raised and lowered. The correction tool is moved up and down.

According to the third aspect of the present invention, the lifting and lowering of the correction tool is performed by the holding portion that locks the correction tool, so that the correction tool can be removed from the polishing machine without performing boring or embedding of a metal insert. Can be lifted from above. Thus, the pressure distribution exerted on the polishing board by the repair tool and the curvature of the repair surface of the repair tool can be designed as intended, and the surface shape of the polishing board can be stably maintained.

According to a fourth aspect of the present invention, there is provided a polishing machine for polishing a workpiece, a disk-shaped correction tool for correcting a surface shape of the polishing disk, and a rotary force applied to an outer peripheral surface of the correction tool to perform the correction. In a polishing apparatus having a driving roller for rotating a tool, an auxiliary device for temporarily holding the correction tool is provided, and the correction tool and the driving roller are moved between the polishing plate and the auxiliary device. A moving means is provided.

According to the fourth aspect of the present invention, the moving tool can easily move the correcting tool to the auxiliary device which temporarily holds the correcting tool for a predetermined purpose.
In the case where the correction tool is processed in the auxiliary device, the driving roller is transferred to the auxiliary device together with the correction tool. Therefore, it is necessary to rotate the correction tool without providing a separate driving device and perform the processing and the like. Can be.

According to a fifth aspect of the present invention, there is provided a polishing machine for polishing a workpiece, a disk-shaped correction tool for correcting a surface shape of the polishing disk, and a rotary force applied to an outer peripheral surface of the correction tool to perform the correction. In a polishing apparatus having a driving roller for rotating a tool, a reversing means for reversing the correction tool up and down is provided.

According to the fifth aspect of the present invention, a repair tool that is generally brittle and large in size and weight can be turned upside down by the reversing means. Inspection, measurement, and the like can be easily performed near the polishing board.

According to a sixth aspect of the present invention, there is provided a polishing machine for polishing a workpiece, a disk-shaped correction tool for correcting a surface shape of the polishing disk, and a rotary force applied to an outer peripheral surface of the correction tool to perform the correction. In a polishing apparatus having a driving roller for rotating a tool, a liquid tank having an upper surface of the correction tool as a bottom surface is provided, and a pressure applied to the polishing plate of the correction tool by the amount of liquid put in the liquid tank is adjusted. It is characterized by being performed.

According to the sixth aspect of the present invention, the correction tool, whose upper surface is pressurized by the weight of the liquid put in the liquid tank, presses the polishing board with a strength corresponding to the amount of the liquid, so that the correction is performed. It is possible to adjust the pressure it exerts on the polishing machine without boring the tool. Further, since the pressure is applied by the liquid, the pressure acting on the upper surface of the correction tool becomes uniform, and the polishing disk can be pressed evenly.

According to a seventh aspect of the present invention, in the polishing apparatus of the sixth aspect, liquid level holding means for holding a level of the liquid in the liquid tank at a constant level is provided. I do.

According to the seventh aspect of the present invention, since the liquid level which determines the pressing force is kept constant by the liquid level holding means, the pressure exerted by the correction tool on the polishing board can be stabilized. .

[0035]

Embodiments of the present invention will be described with reference to the drawings.

Embodiment 1 FIG. 1 shows the overall configuration of a polishing apparatus according to the present invention. This polishing apparatus 20
Is a rotating device 21, a ring polisher 22 as a polishing machine, a dam 23, and a truing device 24.
And an auxiliary device 25.

The ring polisher 22 is rotated about an axis O ₁ by a rotating device 21 to polish a glass member as a workpiece. The dam 23 holds the polishing liquid supplied to the ring polisher 22 during polishing. The truing device 24 is used for truing of the ring polisher 22 and has a correction tool holder 27 for holding a correction tool 26.
Is provided. The correction tool holding unit 27 will be described later in detail.

The housing 28 of the truing device 24 has a gate shape when viewed from the front. A fixing plate 30 is provided on a ceiling portion 29 of the housing 28, and a jack device 31 is fixed to the fixing plate 30. Guide rods 33a, 3 extending in the vertical direction are provided on the inner surfaces of the side walls 32a, 32b of the housing 28, respectively.
3b are provided four by four. Side walls 32a, 32b
Guide space 33 by jack device 31
An elevating unit 34 that can move up and down along a and 33b is provided so as to face a part of the ring polisher 22 from above.

At the bottom of the housing 28, a screw leg 35 for level adjustment is provided. The housing 28 is formed by the screw legs 35.
And the height with respect to the ring polisher 22 are appropriately adjusted.

The elevating section 34 includes a pair of guide track members 36a and 36b extending substantially horizontally and linearly, and a guide track member 36.
a and a connecting plate 37 for connecting the two to each other. A guide rod 33a is inserted through the guide track member 36a,
A guide rod 33b is inserted through the guide track member 36b, and a screw portion 39 of the jack device 31 is connected to a central portion of the connection plate 37 via a flange 38. In the jack device 31, when there is an input by a rotation operation of the handle 40, the rotation is decelerated by a worm mechanism (not shown), so that a large thrust is given to the screw portion 39. Go up and down. The elevating part 34 is moved up and down with the elevating of the screw part 39, and is self-locked to a predetermined position in the vertical direction.

The auxiliary device 25 temporarily supports the correction tool holding portion 27 and provides the rework of the correction surface of the correction tool 26. In FIG. 1, for convenience, not only the case where the correction tool holding unit 27 is at the normal position on the truing device 24 side, but also how the correction tool holding unit 27 is carried by the auxiliary device 25 is shown. It may be on either side of the truing device 24 or the auxiliary device 25. Although the auxiliary device 25 is shown as being separated from the truing device 24 in the figure, both may be connected.

The auxiliary device 25 has a reversing unit 41 for carrying the correction tool holding unit 27 and reversing the same, and a reversing unit 41.
And a gantry 42 for supporting. A caster 43 is provided at the bottom of the gantry 42, and the auxiliary device 25 is provided when unnecessary.
Can be easily moved from the side of the truing device 24 to another place. At the bottom of the gantry 42, a screw leg 44 for level adjustment is further provided. The screw legs 44 are used to lift the casters 43 from the floor when the auxiliary device 25 is used so that the gantry 42 cannot be moved, and to adjust the height of the gantry 42 to match the truing device 24.

The reversing part 41 is formed in a box shape by the side plates 45a and 45b and the connecting plates 46 and 47 for connecting the side plates 45a and 45b, and is pivotally supported by the gantry 42. The reversing part 41 includes a handle 48, a worm speed reducer 49 that reduces the speed of rotation input from the handle 48 and outputs the reduced speed, and a worm speed reducer 4.
And a small diameter gear which rotates about the axis O ₂ based on the output of the 9, by a rotation mechanism comprising a small-diameter gear meshed with and large diameter gear directly connected to the side plates 45a, inverted in rotation about the axis O _3. The small-diameter gear and the large-diameter gear are not illustrated because they are covered with the safety cover 50.

The connecting plate 46 has a disk-shaped tool 51 described later.
A circular opening 52 having a diameter larger than the diameter of is formed at the center. A plurality of guide rollers 53 for guiding the disc-shaped tool 51 are attached to the inside of the connection plate 46 in the box shape along the circumferential direction of the circular opening 52.

When the auxiliary device 25 is connected to the truing device 24, the pair of guide tracks 54a, 54b are connected to the guide track members 36a, 36b of the elevating unit 34 inside the box-shaped sides of the side plates 45a, 45b. Guide track member 5 to be formed
5a and 55b are provided. Correction tool holder 27
Is held by the guide tracks 54a and 54b, and can move between the truing device 24 and the auxiliary device 25.

As shown in FIG. 2, the correction tool holding portion 27 has a base 56, a total of six guide rollers 57 provided on both sides of the base 56 so as to form a left and right pair, and the same shape as the guide rollers 57. A guide roller 58 as a ring member holding means, a drive ring 59 as a ring member, and a friction drive roller 60 as a drive roller
And

The guide roller 57 is vertically symmetrical and has two conical surfaces 61. The conical surface 61 comes into contact with an inclined surface 62 (see FIG. 1) formed on the guide tracks 54a and 54b. I have. That is, when the inclined surface 62 abuts the conical surface 61 from above and below, the guide roller 57 is held on the guide trajectory 54a or 54b.
Is held. In addition, the guide roller 57 is used to guide the guide track 5.
By rolling with respect to 4a and 54b, the correction tool holding part 27 can move along the guide tracks 54a and 54b.

A circular opening 63 is formed at the center of the base 56, and a total of four guide rollers 58 are provided at every 90 ° along the circumferential direction of the opening 63. Similarly to the guide roller 57, the guide roller 58 has upper and lower conical surfaces 64.

The drive ring 59 is provided in the opening 63 of the base 56, and has inclined surfaces 65 above and below the outer peripheral surface of the drive ring 59.
Are formed. The guide roller 58 has its inclined surface 6
5 against the drive ring 5
9 is engaged with the outer peripheral surface so as to restrict the vertical movement of the drive ring 9, and holds the drive ring 59 at a fixed position on the base 56. However, since the guide roller 58 can roll with respect to the drive ring 59, the drive ring 59 can rotate at its fixed position.

On the inner peripheral surface of the drive ring 59, a plurality of drive rods 66 (here, 18) are provided at equal intervals along the circumferential direction as holding portions. The drive rod 66 extends in the up-down direction, and has a lower end formed with a protrusion 67 protruding toward the center of the drive ring 59. Correction tool 26
Is held by the protrusion 67.

The friction drive roller 60 is rotated by the electric motor 68, and transmits its own rotation to the outer peripheral surface of the drive ring 59 to rotate the drive ring 59.
Rotate 6. The electric motor 68 is fixed to an electric motor fixing plate 69 whose position can be adjusted with respect to the base 56, and the rotational force of the electric motor 68 is transmitted to the friction drive roller 60 via a drive pulley 70, a timing belt 71, and a driven pulley 72. . In this embodiment, the tension of the timing belt 71 is adjusted by adjusting the position of the motor fixing plate 69 with respect to the base 56. In addition,
2, reference numeral 73 denotes a reinforcing rib of the base 56, reference numeral 74 denotes a safety cover, and reference numeral 110 denotes a bracket for fixing the feed screw 111 provided on each of the truing device 24 and the auxiliary device 25.

FIGS. 3 and 4 show the detailed structure of the drive ring 59 and the friction drive roller 60. FIG. Drive ring 59
The driving rod 66 is fixed to a ring main body 75 by a screw 76. The lower portion of the drive rod 66 projects below the base 56 through the opening 63. At the lower end of the drive rod 66,
A rubber member 78 is attached with a screw 79 via an adjustment washer 77, thereby forming a projection 67. On the other hand, the correction tool 26 includes a disk-shaped tool main body 81 having a correction surface 80 and a flange 82 formed with a larger diameter than the tool main body 81. Is adjusted by an adjustment washer 77 to be 1 to 2 mm.

The friction drive roller 60 has a rotating part 85 mounted on a fixed shaft 83 fixed on the base 56 via a ball bearing 84, and the rotating part 85 is attached to the rotating part 85.
6, the driven pulley 72 is fastened. Specifically, the fixed shaft 83 is attached to a mounting flange 88 by a screw 87, and the mounting flange 88 is fixed on the base 56 by a screw 89. The ball bearings 84 are provided above and below the outer periphery of the fixed shaft 83, and space collars 90 and 91 are interposed between the two ball bearings 84. The rotating part 85 is provided on the outer periphery of the ball bearing 84 and the space collar 91, and a plurality of grooves 92 having a V-shaped cross section are formed on the outer peripheral surface so as to cover the entire periphery. An O-ring 93 is attached to each groove 92, and the O-ring 93 is
In contact with a portion of the outer peripheral surface of the ring body 9 that is not the inclined surface 65, that is, a cylindrical portion of the outer peripheral surface of the ring main body 75, torque is transmitted by friction. The rotating shaft 86 is provided with a screw 95 so that the shaft 94 is coaxial with the fixed shaft 83.
It is fixed by. The shaft 94 of the rotating shaft 86 is fitted coaxially with the driven pulley 72, and the driven pulley 72 and the rotating shaft 86 are fastened by a parallel key 96 and a fixing screw 97.

In the correction tool holding portion 27, the rubber member 78 of the projection 67 is attached to the tool body so that the correction tool 26 rotates with the rotation of the drive ring 59 by the friction drive roller 60 during the polishing process. 81 and gives a rotational force to the outer peripheral surface 81 (FIG. 4). Also,
At the time of polishing, the distance h between the protrusion 67 and the flange 82 is 3 mm or more. On the other hand, the jack device 31
When the raising / lowering portion 34 rises and the correction tool holding portion 27 rises accordingly, the protrusion 67
2 and the correction tool 26 is lifted (FIG. 3).

The correction tool holding portion 27 on the ring polisher board 22 is transferred to the auxiliary device 25 and the correction tool 26
In the case of processing the correction surface 80, the lift section 34 is raised to a predetermined height, and then the guide track members 36a, 36
B is aligned with the guide track members 55a and 55b of the reversing section 41 to form a pair of guide tracks 54a and 54b, and the correction tool holding section 27 is moved toward the auxiliary device 25 along the guide tracks 54a and 54b. Let it.

Specifically, first, the auxiliary device 25 is positioned with respect to the truing device 24 by the casters 43, and the level thereof is adjusted by the screw legs 44. Next, the lifting unit 34 is raised to a predetermined height by the jack device 31, and the angle of the reversing unit 41 is adjusted by the rotating mechanism to adjust the receiving posture of the correction tool holding unit 27. At this time, the connecting plate 4 in which the circular opening 52 is formed
6 is turned downward, and the connecting plate 47 is turned upward,
Align the up and down directions.

After the guide trajectories 54a and 54b are formed in this manner, the correction tool holding portion 27 is moved to the auxiliary device 25 side along the guide trajectories 54a and 54b. At this time, the bracket 110 of the base 56 is moved to the truing device 24 side. Feed screw 1
11, the correction tool holding portion 27 is slid to an arbitrary position of the auxiliary device 25, and the bracket 1 is removed.
10 is connected to the nut of the feed screw 111 on the auxiliary device 25 side.

Further, in the auxiliary device 25, the correction tool holding portion 27 is turned upside down by the reversing portion 41. In order to prevent the correction tool 26 from dropping during the reversal, the driving rod 66 is provided as shown in FIG. A support piece 99 to which a rubber plate 98 is attached is screwed in advance. Support piece 99
It is not necessary to provide for all the drive rods 66, but by providing them to a plurality of drive rods 66, the correction tool 26 at the time of reversing is supported from below and is prevented from dropping.

The rework of the correction surface 80 of the correction tool 26
With the correction tool holding part 27 inverted by the reversing part 41, a disk-shaped tool 51 for lapping and polishing is provided.
Is placed on the correction surface 80 through the circular opening 52, and the correction tool 26 is rotated by the electric motor 68. When the correction tool 26 is rotated, the disk-shaped tool 51 is held at a fixed position by the guide roller 53, so that it rotates on the correction surface 80 and is processed. Correction tool 26
The relative positional relationship between the disk-shaped tool 51 and the disk-shaped tool 51 can be freely defined by the above-described feed screw 111. Therefore, the misalignment between the centroid of the contact surface of the two and the center of gravity of the disk-shaped tool 51 is adjusted. The movement of the disk-shaped tool 51 can be changed. The polishing liquid used at the time of this processing is an easily removable and simple structure of the annular container 100.
(See FIG. 1) so as not to spill from the correction tool 26.

In the polishing apparatus 20 according to this embodiment, the friction drive roller 60 rotates the correction tool 26 via the drive ring 59, but the guide roller 58 contacts the outer peripheral surface of the drive ring 59 and the side of the drive ring 59. Correction tool 2 for restricting movement in the direction (radial direction)
The radial load and moment load from 6 are absorbed by the guide roller 58. For this reason, the friction drive roller 60
Needs only to apply a rotational force to the drive ring 59 and does not need to play a role of holding the drive ring 59.
Only the preload necessary for transmitting the rotational force acts constantly on the friction drive roller 60 in the radial direction. Further, since the shearing force based on the preload is split up and down by the two ball bearings 84 and transmitted to the fixed shaft 83, the bending moment acting on the fixed shaft 83 and the mounting flange 88 is suppressed to a small extent.

The guide roller 58 is engaged with the inclined surface 65 of the drive ring 59 by the conical surface 64 to regulate the vertical movement of the drive ring 59 and to prevent the friction drive roller 6 from moving.
Since zero is configured so as not to contact the inclined surface 65, all the thrust load from the correction tool 26 is absorbed by the guide roller 58, and transmission to the friction drive roller 60 is prevented.

Since the load acting on the friction drive roller 60 is minimized, the durability of the polishing apparatus 20 is improved, and the occurrence of fatigue failure is effectively suppressed.

The raising and lowering of the correction tool 26 is performed by locking the protrusion 67 of the drive rod 66 to the flange portion 82, so that it is not necessary to perform boring or embedding of a metal insert into the correction tool 26. Therefore, the correction tool 26
The pressure distribution exerted on the ring polisher 22 and the curvature of the correction surface 80 of the correction tool 26 can be designed as intended, so that the surface shape of the ring polisher 22 can be stably maintained.

The correction tool holding unit 27 includes a guide track 54
a, 54b and the guide roller 57 for the auxiliary device 25.
Can be easily transferred to the auxiliary device 25.
Since the reversing unit 41 can easily revert and rework the reversing tool, the reworking of the retouching tool can be performed remarkably efficiently as compared with the related art in which the retouching tool is transferred to a factory or the like. At this time, since the correction tool 26 and the friction drive roller 60 are integrally transferred as the correction tool holding unit 27, the correction tool 26 can be rotated without providing a separate driving device on the auxiliary device 25 side.
In addition, the fact that the moving and reversing of the correction tool 26 is easy as described above is not limited to the rework of the correction surface 80, but also the inspection,
It is very advantageous also in measurement and the like.

[Embodiment 2] The polishing apparatus according to this embodiment is constituted by providing a thin cylinder 101 on the upper surface of the correction tool 26 of the polishing apparatus 20 according to Embodiment 1 (see the frame in FIG. 1). , The overall configuration and the like are the same, and a description thereof is omitted.

As shown in FIG. 6, a thin cylinder 101 is adhered to the upper surface of the correction tool 26 with a silicone rubber 102 so as to be watertight, thereby forming a liquid tank 103 having the upper surface as a bottom surface. . In this liquid tank 103,
A liquid level holding device 104 is provided as liquid level holding means.

The liquid level holding device 104 is connected to a liquid introduction pipe 105 for introducing a liquid fed under pressure from a pump (not shown), and a discharge pipe 106 for discharging the liquid from the liquid introduction pipe 105 into the liquid tank 103. And a float switch 108 for controlling the operation of the built-in solenoid valve in response to the liquid level of the liquid 107 in the liquid tank 103.

In the polishing apparatus according to this embodiment,
Since the correction tool 26 whose upper surface is pressurized by the weight of the liquid 107 put in the liquid tank 103 presses the ring polisher 22 with a strength corresponding to the amount of the liquid 107, the correction tool 26 is boring. The pressure exerted on the ring polisher 22 can be adjusted without applying pressure.

Even if the shape of the upper surface of the repair tool 26 is irregular, the pressure p acting on the upper surface by the liquid 107 becomes uniform according to the principle of Pascal. The pressure applied to the ring polisher 22 can be uniformly pressed without affecting the pressure applied to the ring polisher 22.

Further, when the level of the liquid 107 decreases due to the decrease in the amount of the liquid 107, the liquid level holding device 104 releases the solenoid valve and the liquid is discharged from the discharge pipe 106 until the float switch 108 detects the liquid level. Discharge. Thereby, the liquid 10
The liquid level height 7 is maintained at a predetermined constant value, and the pressure applied to the liquid 107 on the upper surface of the correction tool 26 and the pressure applied to the ring polisher 22 of the correction tool 26 can be stabilized.

As shown, a suction pipe 109 for sucking the liquid 107 may be added to the liquid level holding device 104 so that the liquid level of the liquid 107 can be controlled while circulating the temperature-controlled liquid. Can be kept constant.

[0072]

As described above, according to the first aspect of the present invention, the driving roller rotates the correction tool via the ring member, and the ring member is held at a fixed position by the ring member holding means. Thus, the force exerted on the periphery by the rotating correction tool is distributed to the ring member holding means through the ring member. Further, since the contact pressure of the ring member with respect to the drive roller is also kept constant, only a small preload required for transmitting the rotational force acts on the drive roller in a steady state.

That is, the driving roller is released from the severe situation in which the direction of the load periodically fluctuates due to the combined action of the torsion and the bending moment, thereby improving the durability of the device and causing fatigue failure. This makes it difficult to achieve a favorable effect from the viewpoint of safety.

According to the second aspect of the present invention, since the guide roller contacts the outer peripheral surface of the ring member and regulates the lateral (radial) movement of the ring member, the radial load and the moment load from the correction tool can be reduced by the guide. It is absorbed by the roller and its transmission to the drive roller is prevented. In addition, the guide roller engages with the ring member to regulate its vertical movement, so the thrust load from the correction tool is also absorbed by the guide roller, preventing transmission to the drive roller, and reducing the load acting on the drive roller. Can be

According to the third aspect of the present invention, the lifting and lowering of the correction tool is performed by the holding portion which locks the correction tool. Can be lifted from above. As a result, the pressure distribution exerted on the polishing board by the repair tool and the curvature of the repair surface of the repair tool can be designed as intended, and the surface shape of the polishing board can be stably maintained.

According to the fourth aspect of the present invention, the moving tool can easily move the correcting tool to the auxiliary device that temporarily holds the correcting tool for a predetermined purpose.
In the case where the correction tool is processed in the auxiliary device, the driving roller is transferred to the auxiliary device together with the correction tool. Therefore, it is necessary to rotate the correction tool without providing a separate driving device and perform the processing and the like. Can be.

According to the fifth aspect of the present invention, a repair tool that is generally brittle and large in size and weight can be turned upside down by the reversing means. Inspection, measurement, and the like can be easily performed near the polishing board.

According to the sixth aspect of the present invention, the correction tool, whose upper surface is pressurized by the weight of the liquid put in the liquid tank, presses the polishing plate with a strength corresponding to the amount of the liquid. It is possible to adjust the pressure it exerts on the polishing machine without boring the tool. Further, since the pressure is applied by the liquid, the pressure acting on the upper surface of the correction tool becomes uniform, and the polishing disk can be pressed evenly.

According to the seventh aspect of the present invention, since the liquid level which determines the pressing force is kept constant by the liquid level holding means, the pressure exerted by the correction tool on the polishing board can be stabilized. .

[Brief description of the drawings]

FIG. 1 is an explanatory view showing a polishing apparatus according to the present invention.

2A and 2B show a correction tool holding portion of the polishing apparatus of FIG. 1, wherein FIG. 2A is a plan view, FIG. 2B is a rear view, and FIG. 2C is a side view.

FIG. 3 is an enlarged view showing a drive ring and a friction drive roller of the correction tool holding unit in FIG. 2 and showing a state where the drive ring locks the correction tool.

FIG. 4 is an enlarged view showing a drive ring and a friction drive roller of the correction tool holding unit in FIG. 2 and showing a state where the correction tool is on a ring polisher.

FIG. 5 is an explanatory diagram showing a state in which the correction tool holding unit is turned upside down in the auxiliary device.

FIG. 6 is an explanatory diagram showing a state in which a liquid tank is provided on the upper surface of the correction tool.

FIG. 7 is an explanatory diagram showing an operation of a correction tool on a polishing board.

FIG. 8 is an explanatory diagram showing a conventional polishing apparatus that holds a correction tool with a guide roller.

FIG. 9 is an explanatory view showing a conventional polishing apparatus that holds a correction tool with a driving roller and a guide roller.

FIG. 10 is an explanatory view showing a conventional polishing apparatus in which a correction tool is held by a driving roller and a guide roller, and the correction tool can be moved up and down by a jack device.

FIG. 11 is an explanatory view showing a conventional polishing apparatus in which a correction tool is held by a driving roller and a guide roller, and the correction tool can be moved up and down by an air cylinder device.

FIG. 12 is an explanatory diagram showing a load acting on a guide roller in the polishing apparatus of FIGS. 8 to 11;

FIG. 13 is an explanatory diagram showing a load acting on a driving roller in the polishing apparatus of FIGS. 9 to 11;

[Explanation of symbols]

 Reference Signs List 20 polishing apparatus 22 ring polisher board (polishing board) 26 correction tool 59 drive ring (ring member) 60 friction drive roller (drive roller) 66 drive rod (holding part) 58 guide roller (ring member holding means)

Claims (7)

[Claims] A polishing machine for polishing a workpiece, a disk-shaped correction tool for correcting the surface shape of the polishing disk, and a drive for applying a rotational force to the outer peripheral surface of the correction tool to rotate the correction tool In a polishing apparatus having a roller, a holding portion for holding the correction tool is formed on an inner peripheral surface, and a ring member is provided in contact with the driving roller on an outer peripheral surface, and the ring member is rotatably held at a fixed position. The driving roller transmits its own rotation to the outer peripheral surface of the ring member to rotate the ring member, and rotates the correction tool via the ring member. Polishing equipment. 2. The ring member holding means is a guide roller, which is in rolling contact with the outer peripheral surface of the ring member and engages with the outer peripheral surface of the ring member so as to regulate the vertical movement of the ring member. The polishing apparatus according to claim 1, wherein the polishing is performed. 3. The apparatus according to claim 1, further comprising lifting means for lifting and lowering the ring member, wherein the holding portion locks the correction tool when the ring member is raised and lowered to raise and lower the correction tool. The polishing apparatus according to claim 1. 4. A polishing disk for polishing a workpiece, a disk-shaped correction tool for correcting the surface shape of the polishing disk, and a drive for applying a rotational force to an outer peripheral surface of the correction tool to rotate the correction tool. In a polishing apparatus having a roller, an auxiliary device for temporarily supporting the correction tool is provided, and moving means for moving the correction tool and the driving roller between the polishing board and the auxiliary device is provided. A polishing apparatus. 5. A polishing disk for polishing a workpiece, a disk-shaped correction tool for correcting the surface shape of the polishing disk, and a drive for applying a rotational force to an outer peripheral surface of the correction tool to rotate the correction tool. A polishing apparatus comprising a roller and a reversing means for reversing the correction tool up and down. 6. A polishing disk for polishing a workpiece, a disk-shaped correction tool for correcting the surface shape of the polishing disk, and a drive for applying a rotational force to an outer peripheral surface of the correction tool to rotate the correction tool. A polishing apparatus having a roller, wherein a liquid tank having an upper surface of the correction tool as a bottom surface is provided, and a pressure applied to the polishing plate of the correction tool is adjusted by an amount of liquid put in the liquid tank. Polishing equipment. 7. A polishing apparatus according to claim 6, further comprising a liquid level holding means for holding the liquid level inside the liquid tank at a constant level.