HK1118906A1 - 微机械传感器、传感器阵列和方法 - Google Patents
微机械传感器、传感器阵列和方法 Download PDFInfo
- Publication number
- HK1118906A1 HK1118906A1 HK08110342.6A HK08110342A HK1118906A1 HK 1118906 A1 HK1118906 A1 HK 1118906A1 HK 08110342 A HK08110342 A HK 08110342A HK 1118906 A1 HK1118906 A1 HK 1118906A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- sensor
- micromechanical
- guide portion
- acoustic waves
- wave guide
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/04—Networks or arrays of similar microstructural devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2462—Probes with waveguides, e.g. SAW devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/30—Arrangements for calibrating or comparing, e.g. with standard objects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0292—Sensors not provided for in B81B2201/0207 - B81B2201/0285
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/10—Number of transducers
- G01N2291/106—Number of transducers one or more transducer arrays
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20050739 | 2005-07-08 | ||
FI20050739A FI118829B (fi) | 2005-07-08 | 2005-07-08 | Mikromekaaninen sensori, sensoriryhmä ja menetelmä sekä pitkittäisten akustisten aaltojen uusi käyttö |
PCT/FI2006/000240 WO2007006843A1 (en) | 2005-07-08 | 2006-07-04 | Micromechanical sensor, sensor array and method |
Publications (2)
Publication Number | Publication Date |
---|---|
HK1118906A1 true HK1118906A1 (zh) | 2009-02-20 |
HK1118906B HK1118906B (en) | 2009-11-06 |
Family
ID=
Also Published As
Publication number | Publication date |
---|---|
GB0801930D0 (en) | 2008-03-12 |
FI20050739L (fi) | 2007-01-09 |
CN101218503A (zh) | 2008-07-09 |
FI20050739A0 (fi) | 2005-07-08 |
US8136403B2 (en) | 2012-03-20 |
GB2442415B (en) | 2009-05-27 |
FI118829B (fi) | 2008-03-31 |
CN101218503B (zh) | 2012-01-04 |
GB2442415A (en) | 2008-04-02 |
WO2007006843A1 (en) | 2007-01-18 |
US20090277271A1 (en) | 2009-11-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB2442415A (en) | Micromechanical sensor, sensor array and method | |
US7458265B2 (en) | Piezoelectric cantilever sensors | |
Lee et al. | Immunoassay of prostate-specific antigen (PSA) using resonant frequency shift of piezoelectric nanomechanical microcantilever | |
Sang et al. | Surface stress-based biosensors | |
WO2003102218A3 (en) | Hybrid microcantilever sensors | |
WO2008019693A3 (en) | Bio surface acoustic wave (saw) resonator amplification for detection of a target analyte | |
US8440468B2 (en) | Method for amplifying variation of frequency of signal in piezoelectrical biosensor | |
WO2009041313A1 (ja) | 超音波探傷方法とその装置 | |
NZ590930A (en) | Improving the calibration accuracy of a fluidic system by comparing test readings with a calibration curve and then adjusting the signal output | |
WO2007002579A3 (en) | Assay cartridges and methods for point of care instruments | |
WO2004106891A3 (en) | Ultrasensitive biochemical sensor | |
WO2006138161A3 (en) | Large scale parallel immuno-based allergy test and device for evanescent field excitation of fluorescence | |
WO2007035576A3 (en) | Surface plasmon resonance biosensor system for detection of antigens and method for determining the presence of antigens | |
WO2006113440A3 (en) | Multi-transduction mechanism based microfluidic analyte sensors | |
WO2008015645A3 (en) | A method of determining the concentration of an analyte using analyte sensor molecules coupled to a porous membrane | |
WO2004040261A3 (en) | Acoustic array analytical system | |
WO2003100413A3 (en) | Surface acoustic wave sensors and methods for detecting target analytes | |
JP2011519422A5 (fi) | ||
WO2006072043A3 (en) | Label-independent detection of unpurified analytes | |
WO2007094805A3 (en) | Method for electrocatalytic protein detection | |
WO2004097371A3 (en) | System and method for the detection of analytes | |
KR20200044795A (ko) | 지연 라인 코딩을 갖는 다중 표면 탄성파 센서 | |
Wang et al. | A micro-machined thin film electro-acoustic biosensor for detection of pesticide residuals | |
KR101113793B1 (ko) | 마이크로 캔틸레버 기반 트롬빈 검출 시스템 및 방법 | |
WO2002099381A3 (en) | A single-cell biosensor for the measurement of gpcr ligands in a test sample |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PC | Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee) |
Effective date: 20240704 |