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GB1239573A - - Google Patents

Info

Publication number
GB1239573A
GB1239573A GB646268A GB1239573DA GB1239573A GB 1239573 A GB1239573 A GB 1239573A GB 646268 A GB646268 A GB 646268A GB 1239573D A GB1239573D A GB 1239573DA GB 1239573 A GB1239573 A GB 1239573A
Authority
GB
United Kingdom
Prior art keywords
acid
pump
temperature
devices
tray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB646268A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1239573A publication Critical patent/GB1239573A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1919—Control of temperature characterised by the use of electric means characterised by the type of controller
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/08—Apparatus, e.g. for photomechanical printing surfaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Weting (AREA)
  • Dicing (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

1,239,573. Etching. JOSEPH LUCAS (INDUSTRIES) Ltd. 29 Jan., 1969 [9 Feb., 1968], No. 6462/68. Heading B6J. A wafer to form a number of semi-conductor devices, the individual devices being protected by wax masks, is etched to separate the devices by being placed on a tray 11 through which an etching acid such as nitric, hydrofluoric or acetic acid is passed, along a path having means for controlling the temperature of the acid. The acid is forced by a pump 13 through a heat exchanger 14, and a control valve 15, to the tray 11 and thence through a temperature detector 16 to a reservoir 12, and back to the pump. Water acting as a coolant is forced by a pump 18 through the heat exchanger 14 and a control valve 19 to a reservoir 17 and thence back to the pump. The valve 19 is controlled by a solenoid 21 controlled by the detector 16. The acid temperature is thus kept constant, for example at 10-14‹ C. when the wax has a melting point of 90‹ C.
GB646268A 1968-02-09 1968-02-09 Expired GB1239573A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB646268 1968-02-09

Publications (1)

Publication Number Publication Date
GB1239573A true GB1239573A (en) 1971-07-21

Family

ID=9814926

Family Applications (1)

Application Number Title Priority Date Filing Date
GB646268A Expired GB1239573A (en) 1968-02-09 1968-02-09

Country Status (4)

Country Link
US (1) US3632462A (en)
DE (1) DE1905732A1 (en)
GB (1) GB1239573A (en)
NL (1) NL6901837A (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4950872A (en) * 1972-09-18 1974-05-17
US3964957A (en) * 1973-12-19 1976-06-22 Monsanto Company Apparatus for processing semiconductor wafers
US4142893A (en) * 1977-09-14 1979-03-06 Raytheon Company Spray etch dicing method
US4778532A (en) * 1985-06-24 1988-10-18 Cfm Technologies Limited Partnership Process and apparatus for treating wafers with process fluids
US4633893A (en) * 1984-05-21 1987-01-06 Cfm Technologies Limited Partnership Apparatus for treating semiconductor wafers
US4984597B1 (en) * 1984-05-21 1999-10-26 Cfmt Inc Apparatus for rinsing and drying surfaces
US4856544A (en) * 1984-05-21 1989-08-15 Cfm Technologies, Inc. Vessel and system for treating wafers with fluids
US4911761A (en) * 1984-05-21 1990-03-27 Cfm Technologies Research Associates Process and apparatus for drying surfaces
US4738272A (en) * 1984-05-21 1988-04-19 Mcconnell Christopher F Vessel and system for treating wafers with fluids
US4740249A (en) * 1984-05-21 1988-04-26 Christopher F. McConnell Method of treating wafers with fluid
US5090432A (en) * 1990-10-16 1992-02-25 Verteq, Inc. Single wafer megasonic semiconductor wafer processing system
DE69233293T2 (en) * 1991-10-04 2004-11-18 CFMT, Inc., Wilmington Super cleaning of complex microparticles
US6039059A (en) 1996-09-30 2000-03-21 Verteq, Inc. Wafer cleaning system
US6328809B1 (en) 1998-10-09 2001-12-11 Scp Global Technologies, Inc. Vapor drying system and method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3095463A (en) * 1958-03-12 1963-06-25 Crucible Steel Co America Temperature control apparatus

Also Published As

Publication number Publication date
DE1905732A1 (en) 1969-11-20
NL6901837A (en) 1969-08-12
US3632462A (en) 1972-01-04

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee