DE102010028524A1 - Microfluidic component, in particular peristaltic micropump, and method for its production - Google Patents

Abstract

The invention relates to a microfluidic component (1), in particular a peristaltic micropump, at least comprising a layer structure consisting of a fluidic substrate (2), a control substrate (4) and an elastic membrane (3) arranged in between, characterized in that the fluidic substrate ( 2) has on its side adjacent to the elastic membrane (3) a fluid chamber (5), the control substrate (4), at least on its side adjacent to the elastic membrane (3), has at least two separate actuation components, each at least partially are arranged opposite the fluid chamber (5) and can act on the elastic membrane (3) and the actuation components can be actuated independently of one another, optionally by one or more actuators. The invention further relates to a method for producing a microfluidic component (1) and its use in a lab-on-chip system.

Description

The present invention relates to a microfluidic component, in particular a peristaltic micropump, and a method for its production.

State of the art

Macroscopic peristaltic pumps in radial and linear design are known from medical technology and chemical analysis. In these pumps, a flexible hose is compressed from the outside so that it comes to a directed displacement of the liquid contained therein.

Implementations of microtechnical pumps, among others with peristaltic pumping principle, are for example in the publication of N.-T. Nguyen and W. Dötzel "Micropumps - an overview of the state of development", Mikrotechnik, Jahrg. 109, (2001), 3, Carl Hanser Verlag, Munich , described. Compared to other designs, peristaltic micropumps offer the advantage of a greatly simplified production, since no check valves have to be realized. Another advantage is the insensitivity to particles. On the other hand, Nguyen et al. described that the peristaltic micropumps require at least three pumping chambers, which are connected via channels. Each pumping chamber is bounded on one side by a pumping membrane. By deflecting the membrane from the rest position, the chamber volume can be changed. By a shaft-like actuation of the pumping chambers, a fluid can be conveyed in a desired direction. For example, micropumps can be used to transport liquids in microfluidic systems.

Microfluidic systems are used, for example, in the form of miniaturized analysis systems, so-called μTAS (Miniaturized Total Analysis System) or lab-on-chip systems or as microreactors. They find particular applications in molecular diagnostics, biotechnology, analytical, pharmaceutical and clinical chemistry, environmental analysis and food chemistry.

Disclosure of the invention

The subject matter of the present invention is a microfluidic component, in particular a peristaltic micropump, comprising at least one layer structure comprising a fluidic substrate, a drive substrate and an elastic membrane arranged therebetween, wherein the fluidic substrate has a fluid chamber on its side adjacent to the elastic membrane, the drive substrate , At least on its side adjacent to the elastic membrane side, at least two independent Aktuierungskomponenten each having at least partially disposed opposite the fluid chamber and can act on the elastic membrane and the Aktuierungskomponenten, optionally by one or more actuators, are independently actuated.

In other words, according to the invention, in the fluidic substrate, the at least three pumping chambers of the known peristaltic micropumps are replaced by a single main chamber. This advantageously results in a minimal fluidic resistance as well as an increased pumping rate. At the same time, the dead volume otherwise given by the connection channels between the pumping chambers can be eliminated.

According to the invention, the fluidic substrate is essentially plate-shaped, for example designed in the form of a layer. The fluid chamber is formed as a recess in the fluidic substrate, which is closed by the elastic membrane on the side adjacent to this membrane. The fluidic substrate is connected to the elastic membrane. The fluid chamber according to the invention is also referred to as a pumping chamber or reservoir.

Opposite the fluidic substrate and separated therefrom, at least in the region of the pumping chamber, by an elastic membrane is the drive substrate, which is likewise connected to the elastic membrane. This results in a sandwich-like structure of the microfluidic component. The drive substrate may also be substantially plate-shaped.

The at least two actuation components may comprise in the drive substrate, for example, actuation chambers, which may be formed as recesses, which are closed by the elastic membrane on the side adjacent to this membrane. The actuation chambers can be separated for example by webs. The webs are expediently designed as narrow as possible in relation to the Aktuierungskammern. According to the invention, the drive substrate can also be referred to as cover or cap of the microfluidic component. The Aktuierungskomponenten can according to the invention act directly or indirectly on the elastic membrane.

The elastic membrane according to the invention can be realized in particular as a continuous film-shaped film. In comparison with the use of several divided membranes, according to the invention the simplified elastic membrane results in a simplified production, improved mechanical strength and a lower risk of leaks. In the case of a microfluidic component designed and used as a peristaltic micropump, the elastic membrane is also referred to as a pumping membrane.

Important advantages of the microfluidic component according to the invention, in particular a microfluidic pump, are a higher possible pumping rate relative to the size and a minimized dead volume. The minimized dead volume can in particular also ensure the pumpability of gases and keep the required amounts of possibly expensive samples and reagents low.

The actuation of the actuation components used in the microfluidic component can be based, for example, on electromagnetic, piezoelectric, hydraulic or pneumatic principles of action. The corresponding actuation components and / or actuators used for this purpose usually have the advantage that they can be easily implemented and offer a strong drive. Other possible actuations according to the invention can also be based, for example, on electrostatic, electromagnetic, thermo-pneumatic or thermomechanical principles of action.

In one embodiment of the invention, the actuation components can comprise actuation chambers which can be subjected to a pneumatic or hydraulic pressure, for example via supply ducts. Alternatively, thermopneumatically a pressure can be generated in the Aktuierungskammern, for example by heating a gas contained therein or evaporation of a liquid. If the pressure in the respective actuation chamber exceeds the pressure in the fluidic plane, the elastic membrane is deflected into the volume of the fluid chamber and the respective fluid, for example a liquid reagent, displaced. For example, by a Lauflichtartiges Aktuierungsmuster a directed fluid flow can be achieved. The component according to the invention can, in particular for controlling the actuation, furthermore a control device.

In an alternative embodiment of the invention, instead of the actuation chambers, the drive substrate may comprise integrated electromagnetic, electrostatic, piezoelectric and / or shape memory effect actuation components which may be independently actuated. Such actuators can act directly on the membrane and can optionally be produced simultaneously with the microfluidic component and advantageously allow a simplified miniaturization. In a further alternative embodiment, instead of the actuation chambers, the actuation substrate has an opening through which external electromagnetic, electrostatic, piezoelectric or shape memory effect actuators, if appropriate, can act on the membrane by means of a plunger.

In the context of an embodiment of the microfluidic component, the fluidic substrate and / or the driving substrate may be configured as a structured polymer substrate, in particular of polycarbonate, polystyrene, polydimethylsiloxane or a cyclo-olefin copolymer, or as a glass or silicon substrate. In the manufacture of the substrates with the corresponding chambers, or recesses to be provided, made of polymers can be advantageously resorted to suitable and established methods such as hot stamping or injection molding. The preparation of polymers is usually also inexpensive. The recesses can also be subsequently formed for example by photolithography and etching or by milling in the substrates.

The fluidic substrate and the drive substrate may independently have a layer thickness of 300 μm to 10 mm and / or a footprint of 5 mm × 5 mm to 200 mm × 200 mm, for example, of 15 mm × 30 mm. For example, the fluidic substrate and drive substrate may have the same footprint and terminate flush with each other.

According to the invention, the fluid chamber may for example have a length L1 of ≥ 15 mm to ≦ 30 mm, for example 20 mm and / or a width W of ≥ 5 mm to ≦ 15 mm, for example 10 mm. According to the invention, the height of the fluid chamber T2 may be in particular ≥ 100 μm to ≦ 1000 μm, for example 250 μm or 500 μm.

The actuation chambers may for example have a length L2 of ≥ 3 mm to ≦ 10 mm, for example 4 mm, 6 mm or 9 mm and / or a width W2 of 5 mm to ≦ 15 mm, for example 10 mm. According to the invention, the height of the actuation chamber T1 can be in particular ≥ 100 μm to ≦ 1000 μm, for example 250 μm or 500 μm.

The dimensioning of the fluidic substrate, the drive substrate, the fluid chambers and the actuation chambers, or the design and dimensioning of the actuation components and / or actuators can be adapted according to the invention to specific applications and is not limited to the values given above.

In one embodiment of the microfluidic component, the elastic membrane may be formed as a polymer film, in particular with a thickness of ≥ 0.01 μm to 200 μm, for example with a thickness of 100 μm. Depending on the choice of material and, if appropriate, the intended use, the desired and / or required loading capacity and elasticity, however, the elastic membrane may also be made thicker or thinner.

In an embodiment of the microfluidic component according to the invention, the elastic membrane may be formed from a thermoplastic, in particular weldable, polymer, in particular from a thermoplastic elastomer. By using a weldable polymer as an elastic membrane, this can advantageously, in addition to the pumping and displacement function for a fluid, at the same time serve as connection and sealing of the layer structure according to the invention, for example three-layer construction. The use of a weldable polymer further allows easy connection of the substrates to the elastic membrane, for example by laser welding, ultrasonic welding or thermo-compression welding.

In principle, it is also possible according to the invention that the elastic membrane is formed from a non-thermoplastic elastomer. Examples of suitable elastomers are silicone elastomers, polyurethanes, rubbers such as polyacrylic rubber, styrene rubber, butadiene rubber or mixtures thereof. The connection to the fluidic substrate and the drive substrate in this case can be done, for example, by an adhesive technique, for example, a lamination.

In the context of a further embodiment of the invention, the fluid chamber may have rounded side walls. Advantageously, it has been found that the elastic membrane deflected downwards into the fluid chamber, for example the pumping membrane, can thereby better fit against the fluid chamber and the fluidic resistance in the actuated state is increased. As a result, a reflux of a fluid can advantageously be prevented and the pumping rate can be increased. In addition, the dead volume is reduced by the rounding.

In the context of a further embodiment of the invention, the fluid chamber may have phase conductors (phaseguides) arranged on its bottom.

Phase conductors are capillary pressure barriers, for example, edges or other structures that act perpendicular to the direction of movement of a gas, such as air, liquid meniscus. The meniscus then aligns itself with the phase conductor and eventually overcomes the barrier given, for example, by edges. In this way, a controlled, bubble-free filling and emptying with liquids can be achieved. This is particularly advantageous when using the microfluidic component according to the invention as a reservoir for the pre-storage of liquid reagents, for example in a lab-on-chip system. Here, the phase conductors can allow even more accurate dimensioning and pre-storage of a defined amount of liquid, as well as the substantially residue-free controlled emptying of the reservoir.

When using the invention as a reservoir in a lab-on-chip system, the chamber in the fluidic substrate, for example, completely filled with a liquid reagent. Optionally located at the inlet and outlet of the main chamber valves with which the filled main chamber can be closed. The emptying of the reservoir can take place, for example, by first opening the valve at the outlet of the main chamber and then actuating the actuation chambers sequentially.

In a further embodiment of the method according to the invention, the fluidic substrate and / or the drive substrate may have further microfluidic structures and / or microfluidic components, for example chambers, mixers, valves. Hereby, the pumping or reservoir function of the microfluidic component can be further supported and / or the microfluidic component can simultaneously take on additional functions associated with the additional components. Advantageously, these additional structures and / or components can be made at least partially simultaneously with the pumping chamber or the actuation chambers.

The invention further relates to a method for producing a microfluidic component, in particular a microfluidic peristaltic pump.

The fluidic substrate and the drive substrate can in particular be produced by microtechnological methods and provided for the further production of the microfluidic component. For example, as a plate-shaped or sheet-shaped fluidic substrate and / or as a driving substrate, a glass substrate, a silicon substrate, a printed circuit substrate or a polymer substrate, in particular a Pyrex substrate, a Teflon substrate, a polystyrene substrate, a polycarbonate substrate, a substrate of a cyclo-olefin copolymer, a polyester substrate or a PDMS substrate, or a substrate structured by injection molding or deep etching or embossing, in particular hot stamping, for example a structured glass substrate, silicon substrate or polymer substrate, in particular a Pyrex substrate, a Teflon substrate, a polystyrene substrate, a polycarbonate substrate, a substrate made of a cyclo Olefin copolymer, a polyester substrate or a PDMS substrate.

The invention also relates to the use of a microfluidic component in a lab-on-chip system. In particular, the microfluidic component can be used as a peristaltic micropump. Furthermore, a microfluidic component according to the invention can be used in a lab-on-chip system as a reservoir for pre-storage, in particular of liquid reagents. The volume of the fluid chamber then forms the fluid reservoir. Advantageously, the microfluidic component according to the invention can therefore be used for the pre-storage and metering and / or for the transport of fluids, for example liquid reagents.

drawings

Further advantages and advantageous embodiments of the subject invention are illustrated by the drawings and explained in the following description. It should be noted that the figures have only descriptive character and are not intended to limit the invention in any way.

It shows:

1 3 is a schematic oblique top view of a microfluidic component according to the invention, in particular a peristaltic pump,

2 a schematic plan view of the in 1 shown embodiment of the microfluidic component,

3 a schematic cross section along the line AA 'through 1 .

4 a simplified schematic plan view of a microfluidic component according to the invention,

5 a schematic cross section along the line BB 'by 4 .

6 a schematic plan view of an embodiment of a microfluidic reservoir according to the invention,

7 a schematic cross section along the line CC 'through 6 Embodiment of a microfluidic reservoir according to the invention,

8th a simplified schematic plan view of inventive microfluidic component with three Aktuierungskomponenten, and

9 a schematic cross section along the line DD 'through the in 7 shown embodiment.

1 shows a microfluidic component according to the invention 1 which is a fluidic substrate 2 , a driving substrate 4 and an elastic membrane sandwiched between these substrates 3 having. In this case, the fluidic substrate is adjacent 2 to the elastic membrane 3 and is connected to this area. The elastic membrane 3 is also referred to as pumping membrane according to the invention. The fluidic substrate 2 points to the on the elastic membrane 3 adjacent side a recess 5 on, which is also called pumping chamber. In contrast to previous implementations of microfluidic peristaltic pumps, the at least two pumping chambers form a single main pumping chamber 5 merged. Advantageously, this results in a minimal fluidic resistance and an increased pumping rate. In addition, according to the invention, the dead volume by the construction according to the invention with only one pumping chamber 5 , in particular by the associated elimination of communication channels between the pumping chambers are minimized. The driving substrate 4 also borders on the elastic membrane 3 and is connected to this. The driving substrate 4 indicates at its to the elastic membrane 3 adjacent side three recesses 6a . 6b . 6c which are also called actuation chambers. The actuation chambers arranged one behind the other in the flow direction 6a . 6b . 6c are by footbridges 7a . 7b separated from each other and can be independently actuated. In the embodiment shown, the actuation chambers are with feed channels 8a . 8b . 8c connected and can via inlet openings 9a . 9b . 9c in the driving substrate 4 For example, with a hydraulic or pneumatic pressure by an external pressure device (not shown) are acted upon and actuated. Exceeds the pressure in the respective Aktuierungskammer 6a . 6b . 6c the pressure in the fluidic plane 2 That's how the pumping membrane gets 3 into the volume of the pumping chamber 5 deflected into and displaces the respective fluid. For example, by a Lauflichtartiges Aktuierungsmuster a directed fluid flow can be achieved. A fluid can pass through an inlet 10a via a supply channel 11a into the pumping chamber 5 be fed and through an outlet 10b via a supply line 11b led out of the pumping chamber, in particular by the previously described actuation of Aktuierungskammern 6a . 6b . 6c be pumped out. Further particularly suitable Aktuierungsmuster for a microfluidic peristaltic pump according to the invention with a fluid chamber 5 and three actuation chambers 6a . 6b . 6c , are reproduced below in Examples 1 to 6.

2 shows that in 1 shown, inventive microfluidic component 1 in a schematic plan view of the drive substrate 4 with its inlet openings 9a . 9b . 9c through which the three actuation chambers 6a . 6b . 6c via the supply channels 8a . 8b . 8c can be applied with a pressure.

3 shows a schematic cross section along the line AA 'through the in 2 shown inventive microfluidic component 1 , The height of the actuation chambers 6 According to the invention, T1 may in particular be ≥ 100 μm to ≦ 1000 μm, for example 250 μm or 500 μm. Regardless, the fluid chamber 5 According to the invention have a height T2 of ≥ 100 microns to ≤ 1000 microns, for example 250 microns or 500 microns. 2 also shows that in this embodiment the actuation chamber 6b and the pumping chamber 5 flush with each other in their lateral boundaries. The pumping chamber 5 has rounded side walls in this embodiment, whereby advantageously, deflected into the volume of the fluid chamber, elastic membrane, such as pumping membrane, can create better to the fluid chamber walls. In this way, the fluidic resistance can be increased in the actuated state and advantageously prevents backflow of a fluid and the pumping rate can be increased. In addition, the dead volume is reduced by the rounding of the side walls.

4 shows a simplified schematic plan view of a microfluidic component 1 , in particular a peristaltic pump. The fluidic substrate 2 , the elastic membrane 3 as well as the driving substrate 4 are not shown in this illustration for the sake of clarity. 3 shows again that according to the invention only one pumping chamber 5 is provided. As a result, it is advantageously possible to achieve a minimal fluidic resistance and a pumping rate which is increased in relation to the size. The pumping chamber 5 can through the supply channels 11a and 11b be filled and emptied. For example, a fluid may pass through the channel 11a into the pumping chamber 5 be fed, flow through it and through the channel 11b the pumping chamber 5 leave again. Generation of a directional fluid stream may be achieved by the controlled sequential actuation of the actuation chambers 6a . 6b . 6c respectively. The actuation chambers 6a . 6b . 6c can via the supply channels 8a . 8b . 8c be acted upon and actuated, for example, with a pneumatic or hydraulic pressure. The actuation chambers 6a . 6b . 6c overhang the pumping chamber in this embodiment 5 laterally, perpendicular to the flow direction, and do not close as in 1 reproduced, with the pumping chamber 5 flush off.

5 shows a schematic cross section along the line BB 'by 3 , In this figure, the fluidic substrate 2 , the elastic membrane 3 and the driving substrate 4 shown as a three-layer structure. The figure illustrates that essential to the invention in the fluidic substrate, only one pumping chamber 5 is arranged, which is given in comparison to the prior art advantageously a minimized dead volume. Through the supply channels 8a . 8b . 8c may be the controlled sequential actuation of the actuation chambers 6a . 6b . 6c For example, pneumatic or hydraulic pressure.

6 shows a schematic plan view of an embodiment of a microfluidic component according to the invention 1 as a reservoir, as can be used, for example, for the pre-storage of liquid reagents in a microfluidic lab-on-chip system. The fluid chamber 5 is used as storage volume, ie as a reservoir. The fluid chamber 5 For example, it may have a length L1 of ≥ 15 mm to ≦ 30 mm, for example 20 mm, and / or a width W of ≥ 5 mm to ≦ 15 mm, for example 10 mm. According to the invention, the height of the fluid chamber T2 can be in particular ≥ 100 μm to ≦ 1000 μm. The microfluidic component according to the invention 1 also has three Aktuierungskammern in this embodiment 6a . 6b and 6c on, independently of each other via supply channels 8a . 8b and 8c , For example, pneumatically or hydraulically, can be acted upon with a pressure. A pneumatic or hydraulic actuation can take place via external or internal pilot valves. The actuation chambers may, for example, have a length L2 of ≥ 3 mm to ≦ 10 mm, for example 4 mm or 6 mm, and / or a width W of ≥ 5 mm to ≦ 15 mm, for example 10 mm. The microfluidic component according to the invention 1 can continue to valves 14 . 15 and 16 exhibit. Through the inlet 10a can liquid through the reservoir 5 to a venting channel 17 pumped and the reservoir 5 thereby be filled. Here is the valve 15 closed and the valves 14 and 16 opened and the actuation chambers 6a . 6b and 6c not actuated. The valves 14 and 16 can then be closed and the liquid in the reservoir is now "on chip" upstream. To release the liquid, the valve 15 to be opened while valve 14 and 16 stay closed. Below can first the Aktuierungskammer 6a For example, be subjected to a pneumatic or hydraulic pressure, then the Aktuierungskammer 6b , and finally the actuation chamber 6c , This allows the reservoir 5 be emptied targeted and controlled. According to the invention, in principle and not limited to this embodiment, two or more than three actuation chambers may also be limited 6 in the microfluidic component 1 be provided. Advantageously, in such an embodiment according to the invention, an amount of liquid precisely defined in volume can be measured and stored upstream. The intended amount of liquid can then be controlled, possibly also in several defined steps, from the reservoir 5 be discharged without an external pump is needed. According to the invention, moreover, with two or more Aktuierungskammern 6 prevents that, especially in the corners of the reservoir 5 , Liquid residues remain. As a result, a more accurate metering of fluids, for example in a lab-on-chip system, possible.

7 shows a schematic cross section along the line CC 'through 6 through the actuation chamber 6b and their supply channel 8b , The height of the actuation chambers 6 According to the invention, T1 may in particular be ≥ 100 μm to ≦ 1000 μm, for example 250 μm or 500 μm. Regardless, the fluid chamber can also be used 5 According to the invention, a height T2 of ≥ 100 μm to ≦ 1000 μm, for example 250 μm or 500 μm.

8th shows a simplified schematic plan view of a microfluidic component 1 , in particular a peristaltic pump in which the Aktuierungskammern by alternative Aktuierungskomponenten 18a . 18b . 18c are replaced. The actuation components 18a . 18b . 18c For example, they can include actuators that can act on the elastic membrane directly or via plungers. The actuators may be piezoelectric, electromagnetic, electrostatic or shape memory actuators in this embodiment, for example. The fluidic substrate 2 , the elastic membrane 3 as well as the driving substrate 4 are not shown in this illustration for the sake of clarity. According to the invention is advantageously only a pumping chamber 5 provided, whereby not only the production of the fluidic substrate is simplified, but it can be achieved a minimum fluidic resistance and in relation to the size increased pumping rate. The pumping chamber 5 can through the channels 11a and 11b , or through the inlet 10a , filled and through the outlet 10b be emptied. For example, a fluid may pass through the channel 11a into the pumping chamber 5 be fed, flow through it and through the channel 11b the pumping chamber 5 leave again. Directed fluid flow can be achieved by the controlled sequential actuation of the actuation components 18a . 18b . 18c respectively.

9 shows a schematic cross section along the line DD 'through 8th , In this figure, the fluidic substrate 2 , the elastic membrane 3 and the driving substrate 4 shown as a three-layer structure. By arranged in the fluidic substrate main pumping chamber 5 will be compared to the stand The technique advantageously a minimized dead volume and a more accurate and more precisely controllable function of the microfluidic component 1 reached. The Aktuierungskomponenten are designed as a ram, which in turn directly to the elastic membrane 3 Act. For example, by external actuators, the controlled sequential actuation of the plunger 18a . 18b . 18c respectively. The external actuators can be, for example, piezoelectric, electromagnetic, electrostatic or shape memory actuators.

Examples

The following Examples 1 to 6 give in tabular form particularly suitable Aktuierungsmuster a peristaltic pump according to the invention, as described for example in 1 shown again. The Aktuierungsmuster are independent of the type of Aktuierung and can for example be applied to an embodiment of the invention, as shown in the 8th and 9 is reproduced.
(X = actuation chamber actuated, O = not actuated) Example 1 step Actuation chamber 1 Actuation chamber 2 Actuation chamber 3 1 O O O 2 X O O 3 X X O 4 X X X 5 O X X 6 O O X Example 2 step Actuation chamber 1 Actuation chamber 2 Actuation chamber 3 1 O O O 2 X O O 3 X X O 4 O X X 5 O X X 6 O O X Example 3 step Actuation chamber 1 Actuation chamber 2 Actuation chamber 3 1 X O O 2 X X O 3 X X X 4 O X X 5 O O X Example 4 step Actuation chamber 1 Actuation chamber 2 Actuation chamber 3 1 X O O 2 X X O 3 O X X 4 O O X 5 O O O Example 5 step Actuation chamber 1 Actuation chamber 2 Actuation chamber 3 1 X O O 2 X X O 3 O X X 4 O O X Example 6 step Actuation chamber 1 Actuation chamber 2 Actuation chamber 3 1 X O O 2 O X O 3 O O X

In summary, the invention provides a microfluidic component, in particular a peristaltic micropump, with an optimized design. Due to the design according to the invention, a minimum dead volume and, furthermore, a higher pumping rate relative to the size can be achieved. In particular, by virtue of the inventively minimized dead volume, by the provision of only one fluid chamber, in particular pumping chamber, the pumpability of gases can be ensured and the required amounts of sample material and reagents can be kept low.

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited non-patent literature

• N.-T. Nguyen and W. Dötzel "Micropumps - an overview of the state of development", Mikrotechnik, Jahrg. 109, (2001), 3, Carl Hanser Verlag, Munich [0003]

Claims (11)

Microfluidic component ( 1 ), in particular a peristaltic micropump, at least comprising a layer structure consisting of a fluidic substrate ( 2 ), a driving substrate ( 4 ) and an elastic membrane ( 3 ), characterized in that • the fluidic substrate ( 2 ) on its to the elastic membrane ( 3 ) adjacent side a fluid chamber ( 5 ), the drive substrate ( 4 ), at least on its to the elastic membrane ( 3 ) adjacent side, at least two separate Aktuierungskomponenten, each at least partially the fluid chamber ( 5 ) are arranged opposite and on the elastic membrane ( 3 ) and • the Aktuierungskomponenten, optionally by one or more actuators, are independently actuated. Microfluidic component ( 1 ) according to claim 1, characterized in that the Aktuierungskomponenten actuation chambers ( 6 ), which can be actuated in particular hydraulically, pneumatically and / or thermopneumatically. Microfluidic component ( 1 ) according to one of claims 1 or 2, characterized in that the drive substrate ( 4 ) comprises electromagnetic, electrostatic and / or piezoelectric actuation components which can be actuated independently of each other and directly or by means of a plunger ( 18 ) on the elastic membrane ( 3 ) can act. Microfluidic component ( 1 ) according to one of claims 1 to 3, characterized in that the fluidic substrate ( 2 ) and / or the driving substrate ( 4 ) are formed of polycarbonate, polystyrene, a cyclo-olefin copolymer, polydimethyldisiloxane, glass or silicon. Microfluidic component ( 1 ) according to one of claims 1 to 4, characterized in that the elastic membrane ( 3 ) is formed of a weldable, thermoplastic elastomer. Microfluidic component ( 1 ) according to one of claims 1 to 5, characterized in that the fluid chamber ( 2 ) has rounded side walls. Microfluidic component ( 1 ) according to one of claims 1 to 6, characterized in that the fluid chamber ( 2 ) has phase conductors arranged on its bottom. Microfluidic component ( 1 ) according to one of the preceding claims 1 to 7, characterized in that the fluidic substrate ( 2 ) and / or the driving substrate ( 4 ) has further microfluidic structures and / or microfluidic components. Method for producing a microfluidic component ( 1 ), in particular a peristaltic micropump, according to one of claims 1 to 8, comprising the following steps: • providing a fluidic substrate ( 2 ) with a recess as a fluid chamber ( 5 ), • providing one on the fluidic substrate ( 2 ) arranged elastic membrane ( 3 ), • providing one on the elastic membrane ( 3 ) and optionally on the fluidic substrate ( 2 ) drive substrate ( 4 ) comprising at least two actuation components which can be controlled independently of one another, • connecting the fluidic substrate ( 2 ) and the driving substrate ( 4 ) with the elastic membrane ( 3 ) to a composite layer, wherein the Aktuierungskomponenten at least partially on the elastic membrane ( 3 ) can act. A method according to claim 9, characterized in that the fluidic substrate ( 2 ), the driving substrate ( 4 ) and the elastic membrane ( 3 ) are joined together by welding, in particular laser beam, ultrasonic or thermal welding. Use of a microfluidic component ( 1 ) according to one of claims 1 to 8 in a lab-on-chip system and / or for the pre-storage and / or metering of reagents and / or for the transport of a fluid.

Images