CN219495532U - Diaphragm type pressure sensing system with feedback - Google Patents

Abstract

The utility model relates to a diaphragm type pressure sensing system with feedback, which comprises a main body, a diaphragm and a feedback assembly. The main body is provided with an air cavity. The diaphragm is arranged at the opening of the air cavity, and when pressure difference is generated at two sides of the diaphragm, the diaphragm deforms and moves towards the side with smaller pressure; the feedback assembly is arranged on the main body and is used for providing a feedback field acting on the diaphragm, and the diaphragm deforms to generate displacement under the action of the feedback field. When the diaphragm type pressure sensing system with feedback detects the environmental pressure to be detected, the air pressure difference at two sides of the diaphragm enables the diaphragm to deform to displace, and the environmental pressure to be detected can be determined through the displacement value of the diaphragm. When the pressure range measured by the diaphragm needs to be enlarged, a feedback field can be formed through the feedback component, so that the diaphragm can deform and displace towards the direction opposite to the original deformation displacement direction, the air pressure difference at two sides of the diaphragm can be increased, and the effect of enlarging the pressure range measured by the diaphragm is achieved.

Description

Diaphragm type pressure sensing system with feedback

Technical Field

The utility model relates to the technical field of pressure sensing, in particular to a diaphragm type pressure sensing system with feedback.

Background

In detecting the air pressure or the sound pressure, a diaphragm type pressure sensor may be used to detect the air pressure or the sound pressure.

Most of the existing diaphragm type pressure sensors are based on diaphragms such as metal films or polymer films, when pressure differences exist on two sides of the diaphragms, the diaphragms can deviate under the action of the pressure differences, and the pressure differences can be obtained by detecting deformation displacement values of the diaphragms, so that pressure detection is achieved.

However, due to the influence of the thickness of the membrane material after membrane formation and the suspended diameter of the membrane, it is difficult to obtain a pressure sensor with high sensitivity and wide dynamic range.

Disclosure of Invention

Based on this, it is necessary to provide a diaphragm type pressure sensing system with feedback against the problem that the detection range width of the pressure sensor is small.

A diaphragm pressure sensing system with feedback, comprising:

the main body is provided with an air cavity;

the diaphragm is arranged at the opening of the air cavity, and when pressure difference is generated at two sides of the diaphragm, the diaphragm deforms and moves towards the side with smaller pressure; and

The feedback assembly is arranged on the main body and comprises a polar plate, the polar plate is used for being electrically connected with a voltage source, the polar plate is arranged at the opening of the air cavity, and the polar plate and the diaphragm are arranged at intervals.

In one embodiment, the number of the polar plates is one, the polar plates are electrically connected with a first electrode of a voltage source, the diaphragm is electrically connected with a second electrode of the voltage source, and the polar plates are different from the diaphragm in potential;

or the number of the polar plates is one, the polar plates are electrically connected with a first electrode of a voltage source, the diaphragm is grounded, and the polar plates and the diaphragm have different potentials;

or the number of the polar plates is two, the two polar plates are respectively arranged at two sides of the diaphragm at intervals, one polar plate is connected with a first electrode of a voltage source, the other polar plate is connected with a second electrode of the voltage source, and the potentials of the two polar plates are different.

In one embodiment, the maximum deformation displacement of the diaphragm under the action of the feedback field generated by the polar plate is D1, and the distance between the polar plate and the diaphragm is D2, where D1 is less than 1/2D2.

In one embodiment, the device further comprises a avoidance ring, wherein the avoidance ring is arranged between the diaphragm and the polar plate, and the avoidance ring is provided with a avoidance space for deformation displacement of the diaphragm.

In one embodiment, the polar plate includes an insulating ring body and a grid structure arranged in the middle of the insulating ring body, the grid structure is penetrated and provided with a plurality of air flow holes, the insulating ring body is connected with the main body, the grid structure is correspondingly arranged with the diaphragm, and the grid structure is used for being electrically connected with a voltage source.

In one embodiment, the membrane comprises a support ring and a membrane body, wherein the support ring is provided with a through hole; the membrane body is arranged on the connecting surface of the supporting ring, and the membrane body covers the through hole.

In one embodiment, the device further comprises a baffle and a pressing piece, wherein the baffle is arranged at the opening of the main body, the baffle is provided with a mounting groove, the bottom of the mounting groove is provided with a through groove, and the through groove is communicated with the air cavity; the mounting groove is used for accommodating the diaphragm and the feedback assembly; the compressing piece is detachably arranged at the notch of the mounting groove.

In one embodiment, the device further comprises a compression ring, wherein the compression ring is arranged between the compression piece and the diaphragm;

or, the compression ring is arranged between the compression piece and the feedback assembly.

In one embodiment, the system further comprises a pressure supplementing assembly, wherein the pressure supplementing assembly is provided with an air passage; the pressure supplementing assembly is connected with the main body, and the air channel is communicated with the air cavity.

In one embodiment, the device further comprises a displacement detection device, wherein the displacement detection device is arranged at the opening of the main body and is used for detecting the displacement of the diaphragm.

When the diaphragm type pressure sensing system with feedback detects the environmental pressure to be detected, the air pressure difference at two sides of the diaphragm enables the diaphragm to deform so as to generate displacement, and the environmental pressure to be detected can be determined through the displacement value of the diaphragm. When the pressure range measured by the diaphragm needs to be enlarged, a feedback field can be formed through the feedback component, so that the diaphragm can deform and displace towards the direction opposite to the original deformation displacement direction, the air pressure difference at two sides of the diaphragm can be increased, and the effect of enlarging the pressure range measured by the diaphragm is achieved.

Drawings

FIG. 1 is an exploded view of a diaphragm pressure sensing system with feedback according to an embodiment of the present utility model.

FIGS. 2A-2D are schematic diagrams illustrating feedback field adjustment for a diaphragm pressure sensing system with feedback according to an embodiment of the present utility model.

Fig. 3A-3D are schematic diagrams of feedback field adjustment of a diaphragm pressure sensing system with feedback according to an embodiment of the present utility model.

FIG. 4 is an exploded view of a diaphragm pressure sensing system with feedback according to another embodiment of the present utility model.

FIG. 5 is an exploded view of a diaphragm pressure sensing system with feedback according to yet another embodiment of the present utility model.

FIG. 6 is an exploded view of a diaphragm pressure sensing system with feedback according to yet another embodiment of the present utility model.

Fig. 7 is a schematic structural diagram of a plate of a diaphragm type pressure sensing system with feedback according to an embodiment of the present utility model.

Fig. 8 is a schematic structural diagram of a plate of a diaphragm type pressure sensing system with feedback according to another embodiment of the present utility model.

Fig. 9 is a schematic structural diagram of a pressure sensor according to an embodiment of the present utility model.

Fig. 10 is a schematic structural diagram of a pressure sensor according to another embodiment of the present utility model.

Reference numerals illustrate:

100. a main body; 101. an air cavity; 102. an opening; 103. an air port;

200. a membrane; 210. a support ring; 211. a through hole; 212. a second connecting portion; 220. a membrane body;

300. a feedback assembly; 310. a polar plate; 311. an insulating ring body; 312. a grid structure; 313. an air flow hole; 314. a clearance hole; 315. a first connection portion;

400. a shadow mask; 401. a mounting groove; 402. a through groove; 403. a first limit groove; 404. the second limit groove; 405. a third limit groove;

500. a pressing member;

600. a avoidance ring; 610. a space for avoiding the position; 620. a limit part;

700. A sealing gasket; 710. a first gasket; 720. a second gasket; 730. a third gasket;

800. a compression ring;

900. a pressure supplementing assembly; 910. an air pipe;

1000. the membrane graphene optical fiber FP cavity detection-demodulation system comprises a membrane type graphene optical fiber FP cavity detection-demodulation system; 1010. an optical system; 1011. a light source member; 1012. a circulator; 1013. an optical fiber; 1014. a demodulation device; 1015. an attenuator; 1016. a flange; 1020. a gas system; 1021. a gas supply member; 1022. a steady flow member; 1023. a pressure reducing valve; 1024. a flow meter; 1025. a three-way valve; 1030. a sound source member; 1040. and a controller.

Detailed Description

In order that the above objects, features and advantages of the utility model will be readily understood, a more particular description of the utility model will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model. The present utility model may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the utility model, whereby the utility model is not limited to the specific embodiments disclosed below.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.

Referring to fig. 1-6, an embodiment of the present utility model provides a diaphragm type pressure sensing system with feedback, which includes a main body 100, a diaphragm 200, and a feedback assembly 300.

Wherein the main body 100 is provided with an air chamber 101. The air chamber 101 may be filled with a gas. The membrane 200 is arranged at the opening 102 of the air cavity 101.

In some embodiments, the gas within the gas cavity 101 provides a standard pressure P0 to the side of the diaphragm 200 facing the gas cavity 101. The environment to be detected provides a pressure to be detected P1 for the side of the diaphragm 200 away from the air cavity 101, and the diaphragm 200 deforms and displaces towards the side with smaller pressure, namely, the diaphragm 200 deforms and displaces relative to the initial position S0 through the pressure difference between the pressure to be detected P1 and the standard pressure P0. In other embodiments, the gaseous environment to be measured may be connected within the air chamber 101 and provide the pressure to be measured P1 to the side of the diaphragm 200 facing the air chamber 101, while the external normal atmospheric environment provides the standard pressure P0 to the side of the diaphragm 200 facing away from the air chamber 101. By the pressure difference between the pressure to be measured P1 and the standard pressure P0, the diaphragm 200 is deformed and displaced toward the side where the pressure is smaller, that is, the diaphragm 200 is deformed and displaced relative to the initial position S0.

The deformation displacement value generated by the diaphragm 200 can determine the pressure P1 to be measured in the environment to be measured. The feedback assembly 300 is disposed on the main body 100. The feedback component 300 can provide a feedback field. The diaphragm 200 may deform to displace under the influence of the feedback field. The feedback field may be an electric field or a magnetic field. That is, the diaphragm 200 may be deformed and displaced by the feedback electric field or the feedback magnetic field.

When the air pressure detection range of the diaphragm 200 needs to be widened, a feedback field can be provided through the feedback assembly 300, so that the diaphragm 200 moves towards the opposite direction of the original moving direction, the total displacement amount of the diaphragm 200 is changed, and the pressure detection range of the diaphragm 200 is expanded.

It will be appreciated that when the pressure difference across the diaphragm 200 is 0, the diaphragm 200 is in the home position S0, as shown in fig. 2A. As shown in fig. 2B, when the two sides of the diaphragm 200 are subjected to the maximum pressure difference Pa, the diaphragm 200 may be deformed in the first direction and displaced to the farthest position S1. As shown in fig. 2C, when the feedback assembly 300 applies a feedback field, the feedback field may deform the diaphragm 200 in a second direction opposite the first direction and place the diaphragm 200 in the feedback adjustment position S2. The feedback adjustment position S2 is located on the side of the farthest position S1 near the original position S0. At this time, the pressure difference across the diaphragm 200 is still Pa, and the diaphragm 200 can also move toward the first direction at the feedback adjustment position. As shown in fig. 2D, when the feedback assembly 300 applies a feedback field and both sides of the diaphragm 200 are subjected to Pb, which is a pressure difference greater than Pa, the diaphragm 200 may still continue to move to the corresponding position in the first direction. The pressure P1 (or P1') of the actual environment to be detected can be determined by the deformation displacement value of the diaphragm 200 and the diaphragm displacement value affected by the feedback field. The arrangement of the feedback assembly 300 can widen the range of air pressure detected by the fed-back diaphragm pressure sensing system, so that the fed-back diaphragm pressure sensing system can be applied to more scenes.

It should be noted that, the above description is that the test environment deforms the diaphragm 200, and further the feedback field is added to deform the diaphragm 200 in the opposite direction, so as to widen the measurement range. In other test environments, the feedback field may be added to deform the diaphragm 200 to a certain extent, and then the diaphragm pressure sensing system with feedback is used for detection, so as to widen the measurement range.

For example, as shown in fig. 3A to 3D, when the pressure difference across the diaphragm 200 is 0, the diaphragm 200 is located at the original position S0. Before the air pressure detection is performed, the diaphragm 200 may be moved to a certain position in the second direction by applying a feedback field through the feedback assembly 300, as shown in fig. 3B. In the subsequent detection process, referring to fig. 3C, if the two sides of the diaphragm 200 are subjected to the pressure difference Pa, the diaphragm 200 may return to the first position S0. Referring to fig. 3D, if both sides of the diaphragm 200 receive Pb of a pressure difference greater than Pa, the diaphragm 200 moves to a certain position in the first direction. The pressure P1 (or P1') of the actual environment to be detected can be determined by the deformation displacement value of the diaphragm 200 and the diaphragm displacement value affected by the feedback field. The feedback assembly 300 may be configured to widen the range of air pressure detected by a diaphragm type pressure sensing system with feedback.

Referring to fig. 1-6, in some embodiments, the membrane 200 includes a support ring 210 and a membrane body 220. The support ring 210 is provided with a through hole 211. The membrane 220 is disposed on the connection surface of the support ring 210. The film 220 covers the through hole 211. The membrane 220 may be suspended from the support ring 210. The membrane 220 and the support ring 210 may be connected by van der waals forces. When the two sides of the portion of the membrane 220 covering the through hole 211 are subjected to a pressure difference, the portion of the membrane 220 deforms to a corresponding extent according to the pressure difference. The displacement generated in the middle part (the position with larger displacement degree during deformation) of the part of the membrane 220 can be detected by the displacement detection device, so that the pressure difference at two sides of the membrane 220 is determined, and the detection of the environmental air pressure to be detected is realized. The support ring 210 may be provided to facilitate the mounting of the diaphragm 200 to the body 100.

In some embodiments, the film 220 may be a graphene film 220. In some of these embodiments, the graphene may have a diameter-to-thickness ratio in the range of 1.0X10 ⁶ -9.9×10 ⁶ Namely reach 10 ⁶ On the order of magnitude. The film body 220 has a high sensitivity of up to 200 μm/Pa.

In some embodiments, the material of the support ring 210 is copper, silicon, glass, iron, ceramic, or plastic. By adopting the support ring 210 made of the above materials, the membrane 220 can be well connected with the support ring 210, and the membrane 220 can be ensured to be suspended at the through hole 211 of the support ring 210.

In some embodiments, the interface may be provided with a plasma treatment layer. Through setting up the plasma treatment layer, can make the surface of connection face more easily be connected with the membrane body 220, and then ensure when the atmospheric pressure difference of membrane body 220 both sides is great, the membrane body 220 is difficult for separating with the connection face to guarantee the reliability of the diaphragm type pressure sensing system of taking the feedback.

In some embodiments, the material of the main body 100 may be metal or nonmetal, and may be adjusted according to practical situations. The feedback assembly 300 may be disposed at the opening 102 of the body 100 so as to be proximate to the diaphragm 200 to provide a corresponding feedback field. The feedback field may be selected from a feedback electric field or a feedback magnetic field. By adding a feedback electric field or a feedback magnetic field, the diaphragm 200 can be moved in a direction opposite to the original displacement direction, so that the air pressure detection range of the diaphragm type pressure sensing system with feedback is enlarged.

The feedback assembly 300 is used to provide a feedback electric field.

Referring to fig. 1-8, in some embodiments, feedback assembly 300 may include a plate 310. The plate 310 may be electrically connected to a voltage source (not shown). The plate 310 is disposed at the opening 102 of the air cavity 101. The plate 310 is spaced apart from the membrane 200. The electrode plate 310 is electrically connected with a voltage source, when the voltage source provides positive pressure or negative pressure, the electric potential between the electrode plate 310 and the diaphragm 200 changes, and an electric field force is generated between the electrode plate 310 and the diaphragm 200, and the electric field force can drive the diaphragm 200 to displace. The displacement of the movement of the diaphragm 200 can be controlled by the voltage provided by the voltage source, so that the air pressure detection range of the diaphragm 200 is properly widened.

Referring to fig. 1, 4 and 5, in some embodiments, the number of plates 310 may be one. The plate 310 is electrically connected to a first electrode (not shown) of a voltage source, the diaphragm 200 is electrically connected to a second electrode (not shown) of the voltage source, and the plate 310 is at a different potential than the diaphragm 200. In some embodiments, the voltages provided by the first electrode and the second electrode are the same positive and negative but different in voltage values, in other embodiments, the voltages provided by the first electrode and the second electrode are different positive and negative but the voltage values are the same, and in some other embodiments, the voltages provided by the first electrode and the second electrode are both different positive and negative. Can be adjusted according to actual conditions. Through the arrangement of the first electrode and the second electrode, the diaphragm 200 is positioned in the feedback electric field, so that the diaphragm 200 generates displacement under the action of the corresponding electric field force, and the pressure detection range of the diaphragm type pressure sensing system with feedback is widened.

It will be appreciated that the membrane 200 is electrically connected to the second electrode of the voltage source, and the membrane 220 may be electrically connected to the second electrode of the voltage source by electrically connecting the second electrode of the voltage source to the support ring 210 made of a conductive material (e.g., by electrically connecting the second electrode of the voltage source to the support ring through a conductive wire).

With continued reference to fig. 1, 4 and 5, in other embodiments, the number of plates 310 is one. The plate 310 is electrically connected to a first electrode of a voltage source. The diaphragm 200 is grounded. That is, when the first electrode of the voltage source is electrically connected to the plate 310, the plate 310 may be positive or negative, the membrane 200 has a potential of 0, and the plate 310 has a different potential from the membrane 200. Therefore, under the adsorption action of the electric field force generated by the polar plate 310, the diaphragm 200 is displaced towards the corresponding direction, so as to widen the pressure detection range of the diaphragm type pressure sensing system with feedback.

Referring to fig. 6, in some embodiments, the number of plates 310 may be two. The two polar plates 310 are respectively arranged at two sides of the diaphragm 200 at intervals. One of the plates 310 is connected to a first electrode of a voltage source and the other plate 310 is connected to a second electrode of the voltage source. The potentials of the two plates 310 are different. When the first electrode and the second electrode are electrically connected with the corresponding electrode plates 310, the diaphragm 200 is in the corresponding feedback electric field, and the diaphragm 200 is displaced along the corresponding direction under the action of the feedback electric field, so that the pressure detection range of the diaphragm type pressure sensing system with feedback is widened. In the technical solution of setting the two pole plates 310, the positive and negative voltages provided by the first electrode of the voltage source and the second electrode of the voltage source can be changed without changing, that is, only the voltage values provided by the first electrode of the voltage source and the second electrode of the voltage source need to be changed.

In the embodiment of the two electrode plates 310, the voltage provided by the first electrode of the voltage source and the second electrode of the voltage source may be positive, negative, or positive and negative. I.e. a voltage difference between the two.

It will be appreciated that in the embodiment of the two plates 310, the diaphragm 200 may also be connected to the third electrode of the voltage source, and there is a potential difference between the diaphragm 200 and both plates 310, so as to enable the diaphragm 200 to move under the action of the corresponding feedback electric field. The diaphragm 200 is electrically connected to the third electrode of the voltage source, which means that the third electrode may be electrically connected to the supporting ring 210 made of a conductive material (for example, electrically connected by a wire), so as to electrically connect the diaphragm 220 to the second electrode of the voltage source. The third electrode may be a ground electrode so that the potential of the diaphragm 200 is 0.

Referring to fig. 1 and 4-8, in some embodiments, the plate 310 may include an insulating ring 311 and a mesh structure 312 disposed in the middle thereof. The grid structure 312 may be electrically connected to a voltage source. The mesh structure 312 is provided with a plurality of air flow holes 313 therethrough, the insulating ring body 311 is connected to the main body 100, and the mesh structure 312 is provided corresponding to the diaphragm 200. By providing the air flow hole 313, the air pressure in the air cavity 101 or the air pressure of the environment to be measured can pass through the air flow hole 313 and act on the diaphragm 200, and the air pressure difference at two sides of the diaphragm 200 is ensured to be the actual air pressure difference. The grid structure 312 may enable the electric field to be distributed to the diaphragm 200 to a greater extent, so that the feedback field is distributed more uniformly, and the acting force applied to the diaphragm 200 is more uniform.

It will be appreciated that in some embodiments, the insulating ring 311 may be integrally formed with the mesh structure 312, such as the plate 310 may alternatively be integrally formed with a PCB board. The insulating ring 311 may be provided with conductive channels so that the grid structure 312 is provided with corresponding electrical connection structures for electrical connection with a voltage source. In some embodiments, the degree of sparseness (airflow aperture 313 ratio) of the mesh structure 312 may be designed based on the electrical properties of the material of the diaphragm 200.

In some embodiments, the maximum displacement of the diaphragm 200 under the feedback field generated by the plate 310 has a value D1, and the distance between the plate 310 and the diaphragm 200 is D2, where D1 < 1/2D2. By the arrangement, the membrane 200 can be feedback-regulated under the action of a feedback field, and meanwhile, the situation that the membrane 200 is damaged due to the contact of the membrane 200 and a substrate is avoided to a large extent.

Referring to fig. 1, 4 and 6, in some embodiments, the diaphragm pressure sensing system with feedback further includes a clearance ring 600. The spacer ring 600 is disposed between the diaphragm 200 and the plate 310. The avoidance ring 600 has a avoidance space 610 for displacement of the diaphragm 200. By the arrangement of the avoidance ring 600, the distance between the polar plate 310 and the diaphragm 200 can be larger, so that when the diaphragm 200 is deformed due to the maximum atmospheric pressure difference, the diaphragm will not prop against the polar plate 310 when moving to the farthest position. The arrangement of the avoidance ring 600 can ensure that the diaphragm 200 has enough avoidance space 610, and meanwhile, the middle part of the polar plate 310 can be provided with a relatively uniform grid structure 312, so that a feedback electric field generated after the polar plate is electrified acts on the diaphragm 200 relatively uniformly.

It will be appreciated that in some embodiments, the support ring 210 may be in abutment with the avoidance ring 600. The through hole 211 of the support ring 210 may be in communication with the space 610 of the avoidance ring 600 for the avoidance of the membrane 220. Such an arrangement may reduce the thickness of the avoidance ring 600, reduce the cost of the avoidance ring 600, and enable miniaturization of the diaphragm-type pressure sensing system with feedback.

The side of the support ring 210 away from the connection surface is abutted against the bit-rate ring 600. The side of the spacer ring 600 remote from the support ring 210 abuts the pole plate 310. Whether the connection surface faces the air cavity 101 or departs from the air cavity 101, the polar plate 310 is arranged on one side of the diaphragm 200 close to the air cavity 101 or far from the air cavity 101, and the supporting ring 210 and the avoiding ring 600 can provide a space for avoiding the position of the diaphragm 220, so that the situation that the diaphragm 220 is damaged due to the abutting of the diaphragm 220 and the polar plate 310 is effectively avoided.

For example, in one embodiment, the polar plate 310, the avoidance ring 600, the support ring 210, and the membrane 200 are sequentially disposed along the direction from the bottom of the air cavity 101 to the opening 102. For another example, in another embodiment, the electrode plate 310, the avoidance ring 600, the support ring 210, the membrane 200, the avoidance ring 600, and the electrode plate 310 are sequentially disposed along the direction from the cavity bottom of the air cavity 101 to the opening 102. For example, in another embodiment, the diaphragm 200, the support ring 210, the avoidance ring 600, and the polar plate 310 are sequentially disposed along the direction from the bottom of the air cavity 101 to the opening 102.

In some embodiments, the feedback diaphragm pressure sensing system may further include a baffle 400 and a hold-down 500. Wherein the shadow mask 400 may be disposed at the opening 102 of the main body 100. The shadow mask 400 is provided with a mounting groove 401. A through groove 402 is provided at the bottom of the mounting groove 401. The through slot 402 communicates with the air cavity 101. The mounting slot 401 may receive the diaphragm 200 and the feedback assembly 300. The pressing member 500 is detachably disposed at the opening 102 of the mounting groove 401. The provision of the baffle 400 may facilitate the mounting of the diaphragm 200 and feedback assembly 300 to the body 100 at the opening 102. The structural complexity of the main body 100 is reduced, and the manufacturing difficulty of the main body 100 is reduced. The provision of the hold-down 500 may facilitate the removal and installation of the diaphragm 200 and the feedback assembly 300.

In some embodiments, the baffle 400 may be removably coupled to the body 100, such as by a threaded, snap-fit, or bolted connection. Such an arrangement may facilitate maintenance or replacement of the main body 100 and the shadow mask 400, reducing maintenance and replacement costs. In addition, the mask 400 with the mounting grooves 401 of different sizes can be connected with the main body 100, so that the film 220 of different sizes and models and the feedback assembly 300 can be connected with the main body 100, and the replacement cost can be reduced.

In some embodiments, the projected size of the mask 400 may be greater than the projected size of the body 100 as projected onto the plane of the opening 102 of the body 100. Such an arrangement may facilitate the attachment and detachment of the baffle 400 when the two are removed.

In some embodiments, the baffle 400 may be provided with a first limit slot 403. Correspondingly, the polar plate 310 can be provided with a first connecting part 315, the first connecting part 315 can be connected with the outer wall of the insulating ring body 311, and the two connecting modes can be integrally formed or integrally installed after being separately arranged. The first connection portion 315 may be electrically connected to an external wire so as to electrically connect the plate 310 to a voltage source. When the pole plate 310 is located in the mounting groove 401, at least a portion of the first connecting portion 315 is received in the first limiting groove 403, and the first connecting portion 315 may also be configured to limit the pole plate 310 by the baffle 400.

It will be appreciated that a conductive hole (not shown) may be disposed in the first limiting groove 403, and the conductive hole may be used for a wire to pass through, so as to electrically connect the electrode plate 310 with a corresponding voltage source.

In some embodiments, the baffle 400 may be provided with a second limiting slot 404. Correspondingly, the support ring 210 may be provided with a second connection 212. The second connection portion 212 may be disposed at an outer edge of the support ring 210. The second connection 212 may be electrically connected with an external wire in order to electrically connect the support ring 210 with a voltage source. When the support ring 210 is located in the mounting groove 401, at least a portion of the second connecting portion 212 is received in the second limiting groove 404, and the second connecting portion 212 can also be disposed to limit the support ring 210 by the baffle 400.

It will be appreciated that in some embodiments, conductive holes may be disposed in the second connection portion 212, and the conductive holes may be used to pass through a conductive wire, so that the support ring 210 is electrically connected to a corresponding voltage source, so as to electrically connect the membrane 220 to the voltage source.

It is understood that the first limiting groove 403 and the second limiting groove 404 may be disposed at intervals. The arrangement mode can realize independent arrangement of the polar plate 310 and the supporting ring 210, so that insufficient space positions of the polar plate 310 and the diaphragm 200 when the polar plate 310 and the diaphragm 200 are connected with external leads can be avoided, and short circuit caused by abutting of the polar plate 310 and the diaphragm 200 can also be avoided.

In some embodiments, the baffle 400 may also be provided with a third limiting slot 405. Correspondingly, the avoidance ring 600 is provided with a limit portion 620. The limiting portion 620 may be disposed at an outer edge of the ring body structure of the avoidance ring 600. When the support ring 210 is located in the mounting groove 401, at least part of the limiting portion 620 is accommodated in the third limiting groove 405, so as to limit the position-avoiding ring 600 by the baffle 400.

It is understood that the number of the first limiting grooves 403 may be adjusted according to the number of the pole plates 310. The third limiting groove 405 may be adjusted according to the number of the avoidance rings 600. The first limiting groove 403, the second limiting groove 404 and the third limiting groove 405 are arranged at intervals.

In some embodiments, the hold-down 500 may be removably coupled to the mask 400 to facilitate removal of the diaphragm 200 and the feedback assembly 300.

In the embodiment of fig. 1, 4-6, the compression member 500 may be a compression clip. Wherein one end of the compression clip is movably disposed on the shadow mask 400. The other end of the clamp is adapted to abut against the notch of the mounting groove 401 to facilitate the abutment of the diaphragm 200 and the feedback assembly 300 into the mounting groove 401.

It will be appreciated that the number of compression clips may be plural, with plural compression clips being circumferentially spaced along the slot opening of the mounting slot 401. The arrangement can disperse the stress of the diaphragm 200, so that the diaphragm is balanced in stress and not easy to crack.

In other embodiments, the hold-down member 500 may alternatively hold down a cantilever cap (not shown). The pressing screw cap is provided with a through communication hole 211, and the communication hole 211 can be communicated with the ambient air pressure to be measured. The pressing screw cap may be screw-coupled to the notch of the mounting groove 401. The compression screw cap may be pressed against the diaphragm 200 or the feedback assembly 300 such that the diaphragm 200 and the feedback assembly 300 are fixed in the mounting groove 401.

In some embodiments, the diaphragm pressure sensing system with feedback may also include a pressure ring 800. The compression ring 800 may be disposed between the compression member 500 and the diaphragm 200. When the diaphragm 200 is disposed at the notch of the mounting groove 401, the pressing member 500 directly abuts against the diaphragm 200, which easily causes the diaphragm 200 to be damaged due to excessive local stress. Thus, the arrangement of the press ring 800 may be such that the pressing member 500 acts on a part of the press ring 800 first and then acts on the diaphragm 200 through the press ring 800. The arrangement mode can disperse the acting force locally applied to the diaphragm 200, and effectively reduce the damage of the diaphragm 200 caused by overlarge local stress.

In some embodiments, the material of the pressure ring 800 may be selected from a dense metal or alloy, such as iron.

It will be appreciated that in other embodiments, the feedback assembly 300 is disposed at the notch of the mounting slot 401, that is, the plate 310 is disposed at the notch of the mounting slot 401. The pressure ring 800 is disposed between the pressing member 500 and the feedback assembly 300. The arrangement of the compression ring 800 can reduce deformation of the pole plate 310 due to local overstress.

Through the setting of baffle 400, compress tightly piece 500 and clamping ring 800, can make diaphragm 200 and feedback subassembly 300 comparatively stably set up in mounting groove 401, and the part of diaphragm 200 and feedback subassembly 300 all is difficult for the atress too big and leads to its deformation even damaged.

With reference to fig. 1, 4-6, in some embodiments, the diaphragm pressure sensing system with feedback may further include a gasket seal 700. Gasket seal 700 may improve the tightness of a diaphragm-type pressure sensing system with feedback.

In some of these embodiments, gasket seal 700 may include a first gasket seal 710. The first gasket 710 may be disposed between the diaphragm 200 and the main body 100 in order to improve the sealing effect between the diaphragm 200 and the main body 100. It will be appreciated that in some embodiments, the diaphragm type pressure sensing system with feedback includes a baffle 400, a first sealing pad 710 is disposed at the bottom of the mounting groove 401, and the first sealing pad 710 may abut against the support ring 210 to improve the sealing effect between the diaphragm 200 and the baffle 400, and further improve the sealing effect between the diaphragm 200 and the main body 100. In another embodiment, the diaphragm 200 may be directly connected to the body 100. The first sealing pad 710 is disposed between the main body 100 and the support ring 210, and is used for improving the sealing effect between the membrane 220 and the main body 100.

In some embodiments, gasket seal 700 may include a second gasket 720. The second sealing gasket 720 may be disposed between the membrane 220 and the pressing member 500. It can be appreciated that in one embodiment, the pressing ring 800 is disposed between the pressing member 500 and the membrane 220, and thus the second sealing pad 720 is disposed between the pressing ring 800 and the supporting ring 210 to improve the sealing effect between the pressing ring 800 and the membrane 220. In another embodiment, the diaphragm type pressure sensing system with feedback does not include the pressure ring 800, and the second sealing pad 720 may be disposed between the pressing member 500 and the supporting ring 210 to improve the sealing effect between the pressing member 500 and the diaphragm body 220.

In some embodiments, the feedback-equipped diaphragm pressure sensing system includes a baffle 400. Gasket seal 700 may include a third gasket seal 730. The third gasket 730 may be disposed between the main body 100 and the shadow mask 400 to improve the sealing effect between the main body 100 and the shadow mask 400.

It will be appreciated that the specific widths of the first gasket 710, the second gasket 720, and the third gasket 730 may be adjusted according to practical situations.

Referring to fig. 1, 4, and 6, in some embodiments, the diaphragm pressure sensing system with feedback may further include a pressure compensating assembly 900. The pressure compensating assembly 900 has an airway. The pressure compensating assembly 900 is connected to the main body 100. And the air passage communicates with the air chamber 101. Since a sealing state between the diaphragm 200 and the body 100 is poor during the actual assembly, there may occur a case where there is an air leakage between the diaphragm 200 and the body 100. By providing the pressure compensating assembly 900, the air within the air cavity 101 can be replenished. That is, if there is an air leakage of Q (unit: cfm) between the diaphragm 200 and the main body 100. When the pressure sensing probe detects negative pressure, the pressure compensating assembly 900 can input the Q gas amount into the gas cavity 101 to ensure that the gas pressure difference at two sides of the diaphragm 200 is the actual gas pressure difference, so as to ensure accurate detection data, or when the pressure sensing probe detects positive pressure, the pressure compensating assembly 900 can output the Q gas amount into the gas cavity 101 to ensure that the gas pressure difference at two sides of the diaphragm 200 is the actual gas pressure difference, so as to ensure accurate detection data.

In some embodiments, the pressure make-up assembly 900 may include a pressure generating device, a flow controller, and a gas line 910. Wherein the pressure generating device may generate positive or negative pressure and the flow controller may control the flow in the air tube 910. The air tube 910 may be connected to the main body 100 and the air passage communicates with the air chamber 101. The air pipe 910 may be connected to a side wall or a bottom wall of the main body 100 according to actual circumstances. The air quantity fed in or discharged out can be accurately controlled through the flow controller, so that pressure compensation is realized, the air pressure difference at two sides of the diaphragm 200 is ensured to be the actual air pressure difference, and the detection data is ensured to be accurate.

In some embodiments, the pressure generating device may include a positive pressure generating device and a negative pressure generating device. The positive pressure generating device can be a gas cylinder or an air compressor. The negative pressure generating device may be an air pump or a vacuum pump.

In some embodiments, the pressure compensating assembly 900 may change the original air pressure within the air cavity 101 to perform measurements of different environments to be measured. It will be appreciated that in the above embodiments, the sealing state between the membrane 200 and the main body 100 may be better, or may have a certain air leakage. If the sealing state between the diaphragm 200 and the main body 100 is good, the air pressure in the air chamber 101 only needs to be changed before detection. If a certain air leakage exists between the diaphragm 200 and the main body 100, the pressure compensating assembly 900 can also maintain a working state during the detection process, so as to ensure that the air pressure difference at two sides of the diaphragm 200 is the actual air pressure difference, and ensure that the detection data is accurate.

It should be noted that the pressure compensating assembly 900 also corresponds to the feedback assembly 300. Namely, by changing the original air pressure value of the known air pressure end, the expansion of the air pressure range to be measured is realized. The pressure make-up assembly 900 may be used in conjunction with the feedback assembly 300 to achieve detection of a greater range of atmospheric pressures.

In some embodiments, the diaphragm pressure sensing system with feedback may also include a displacement detection instrument.

The displacement detecting instrument can select a laser displacement meter (not shown in the figure) or a diaphragm type graphene optical fiber FP cavity detection-demodulation system 1000, and can be adjusted according to actual conditions.

The laser displacement meter may include at least a laser and a laser displacement meter demodulator. The laser may emit laser light to the diaphragm 200, and the laser displacement meter demodulator may receive and demodulate the laser light scattered and reflected by the surface of the diaphragm 200 to calculate the distance between the diaphragm 200 and the laser displacement meter demodulator, thereby obtaining the displacement of the diaphragm.

The diaphragm type graphene optical fiber FP cavity detection-demodulation system 1000 refers to that a FP cavity (Fabry-perot cavity) is formed by a graphene diaphragm 320 and an end face of an optical fiber, and displacement generated by the influence of the air pressure on the graphene diaphragm 320 is obtained by demodulating a spectrum or light intensity in the FP cavity.

In embodiments where a laser displacement meter is selected, the diaphragm pressure sensing system with feedback may be used to test the air pressure by placing the body 100 at the test point and aligning the laser displacement meter to the middle of the diaphragm 200. In a specific test procedure, the gas in the air cavity 101 may be the gas with the pressure to be detected, and the gas outside the air cavity 101 is the gas with the known pressure. If the moving direction of the diaphragm 200 is the bottom direction away from the air cavity 101, the air pressure to be detected is negative pressure, and the specific negative pressure value can be calculated by the value measured by the laser displacement meter. If the moving direction of the diaphragm 200 is the cavity bottom direction close to the air cavity 101, the air pressure to be detected is positive pressure, and the specific positive pressure value can be calculated by the numerical value measured by the laser displacement meter. The positive pressure refers to a pressure higher than atmospheric pressure. The negative pressure refers to a pressure less than atmospheric pressure. In another specific test procedure, the gas in the gas chamber 101 is a gas of known gas pressure, and the gas outside the gas chamber 101 is a gas of the gas pressure to be detected. If the moving direction of the diaphragm 200 is the bottom direction of the air chamber 101, the air pressure to be detected is positive pressure. If the moving direction of the diaphragm 200 is the bottom direction away from the air cavity 101, the air pressure to be detected is negative pressure.

When the air pressure measurement range needs to be enlarged, the feedback field can be increased through the feedback assembly 300, and the air pressure in the air cavity 101 can be changed by combining the air supplementing assembly, so that the moving position of the diaphragm 200 is changed, and the detection range of the diaphragm type pressure sensing system with feedback is enlarged. It should be noted that the diaphragm type pressure sensing system with feedback can be used for detecting sound pressure in the environment to be detected besides air pressure. When detecting sound pressure, the difference from detecting air pressure is that a corresponding sound pressure conversion formula is adopted by a numerical formula.

Referring to fig. 5 and 8, in some embodiments, a clearance hole 314 may be provided within the mesh structure 312. When the laser displacement meter is used for detecting the displacement value of the diaphragm 200, the position of the diaphragm 200 can be accurately detected by the light spot generated by the laser displacement meter instead of detecting the position of the polar plate 200 through the arrangement of the avoidance hole 314.

For example, in one embodiment, the polar plate 310 (the avoidance hole 314 is provided), the support ring 210, and the membrane 200 are sequentially disposed along the direction from the bottom of the air cavity 101 to the opening 102. In another embodiment, the plate 310 (with the clearance hole 314), the support ring 210, and the diaphragm 200, the plate 310 (with the clearance hole 314) are sequentially disposed along the direction from the bottom of the air cavity 101 to the opening 102. In another embodiment, the plate 310 (with the clearance hole 314), the support ring 210, the membrane 200, the clearance ring 600, and the plate 310 (with the clearance hole 314) are sequentially disposed along the direction from the bottom of the air cavity 101 to the opening 102.

In the embodiment of selecting the diaphragm-type graphene optical fiber FP cavity detection-demodulation system 1000, when the diaphragm-type pressure sensing system with feedback tests the air pressure, the main body 100 and the diaphragm 200 can be placed at the detection point, and the diaphragm 200 and the end face of the optical fiber 1013 form an FP cavity. Light is input into the FP cavity and light output from the FP cavity is received through the diaphragm type graphene optical fiber FP cavity detection-demodulation system 1000, the spectrum or the light intensity of the light output from the FP cavity is demodulated to obtain a displacement value generated by the influence of the air pressure on the diaphragm, and finally the corresponding displacement-air pressure value conversion formula is combined to calculate to obtain the air pressure value. The determination of positive or negative pressure may be consistent with the determination of the embodiment described above in which a laser displacement meter is selected. In particular, referring to fig. 9, in some embodiments, a patch-type graphene fiber FP cavity detection-demodulation system 1000 may include an optical system 1010. The optical system 1010 includes a light source 1011, a circulator 1012, an optical fiber 1013, and a demodulation device 1014. The light source 1011 may be an ASE light source or a DFB light source. Wherein, the ASE light source can emit narrow-band light, and the DFB light source can emit wide-band light. In some embodiments, an attenuator 1015 may be disposed between the light source 1011 and the circulator 1012 to attenuate the light energy generated by the light source 1011 to avoid damaging the diaphragm 200 due to the light energy. The circulator 1012 has three light ports, one connected to the light source member 1011 or the attenuator 1015, one connected to the optical fiber 1013, and one connected to the demodulation device 1014. The optical fiber 1013 and the body 100 may be connected by a flange 1016 to form an FP cavity between the end face of the optical fiber 1013 and the diaphragm 200. Light entering the circulator 1012 from the light source 1011 can enter the FP cavity through the optical fiber 1013, and after a series of reflections, the light re-enters the circulator 1012 and enters the demodulation device 1014. The placement of the circulator 1012 may reduce the number of elements of the optical system 1010 and reduce the complexity of the optical system 1010. Demodulation device 1014 may be selected from a PD demodulation device (in conjunction with an ASE light source) or an FBGA spectrometer (in conjunction with a DFB light source). The PD demodulation device can detect the light intensity change, and the FBGA spectrometer can detect the wavelength drift of light with a certain wavelength. After being emitted by the light source 1011, the light enters the circulator 1012 and then enters the FP cavity through the optical fiber 1013. When the graphene diaphragm 320 is displaced, the cavity length of the FP cavity is changed, so that the intensity of light entering the circulator 1012 from the FP cavity and connected to the demodulation device 1014 is changed, or the wavelength of the light is shifted, and the demodulation device 1014 detects the change of the light parameter to reversely calculate and obtain the cavity length change of the FP cavity, thereby obtaining the displacement distance of the graphene diaphragm. That is, the ASE light source can emit light with a single wavelength, and if the cavity length of the FP cavity changes after the light passes through the FP cavity, the intensity of the light reflected by the FP cavity will change, the PD demodulation device can detect the light intensity change, and the cavity length change of the FP cavity can be calculated through the light intensity change. The ASE light source can emit a series of light rays with various wavelengths, after the light rays pass through the FP cavity, if the cavity length of the FP cavity changes, when the light rays with a certain single wavelength are tracked by the FBGA spectrometer, the wavelength of the light rays can drift, and the cavity length change of the FP cavity can be calculated through the wavelength drift amount.

In some embodiments, the patch-type graphene fiber FP cavity detection-demodulation system 1000 further comprises a gas system 1020. The gas system 1020 may include a gas supply 1021 and a flow stabilizing 1022. The gas supply member 1021 may be a gas cylinder, which may be a nitrogen cylinder. In some embodiments, gas system 1020 may further include pressure relief valve 1023, flow meter 1024, and three-way valve 1025. Wherein, the air supply member 1021, the pressure reducing valve 1023, the flow meter 1024, the three-way valve 1025 and the steady flow member 1022 are connected in order. The pressure reducing valve 1023 and the flow meter 1024 can control the gas supply amount of the gas supply member 1021. An opening of the three-way valve 1025 can be vented to atmosphere to facilitate control of the gas entering the flow stabilizing member 1022 to avoid damage to the diaphragm due to excessive gas flow. The flow stabilizing member 1022 may be any one of quartz tube, sub-line tube or steel tube, or other flow stabilizing members 1022 may be selected. Gas may enter the gas cavity 101 through the flow stabilizing members 1022. The air pressure in the air cavity 101 can be adjusted through the air system 1020 so as to change the air pressure at two sides of the diaphragm 200, thereby facilitating more accurate detection results.

Referring to fig. 10, when the diaphragm type pressure sensing system with feedback is used to detect sound pressure, the diaphragm type graphene optical fiber FP cavity detection-demodulation system 1000 may include only the optical system 1010. The light source 1011 in the optical system 1010 may be an ASE light source, and the demodulation device 1014 may be a PD demodulation device. Such an arrangement may achieve a higher detection rate. The sound source 1030 may act directly on the diaphragm 200. In some of these embodiments, the sound source 1030 may be coupled to the controller 1040 such that the controller 1040 may vary the size of the sound source. The sound source 1030 may be a sound emitting element such as a horn. The controller 1040 may be coupled to the demodulation device 1014. The controller 1040 may select a computer. In addition, when the diaphragm type graphene optical fiber FP cavity detection-demodulation system 1000 is used for detecting sound pressure, the method is different from the method for detecting air pressure in that: when calculating the sound pressure value, the displacement value of the diaphragm is combined with a corresponding displacement-sound pressure value conversion formula to calculate.

The diaphragm type pressure sensing system with feedback has the advantages of simple testing method, high sensitivity and wider pressure value range when testing air pressure or sound pressure.

In some embodiments, feedback assembly 300 may also provide a feedback magnetic field. That is, the diaphragm 200 may move under the influence of the feedback magnetic field. It will be appreciated that in some of these embodiments, an electromagnet may be provided to provide the feedback magnetic field. That is, the electromagnet is disposed at the opening 102 of the main body 100. The displacement degree of the diaphragm 200 is changed by changing the intensity of the magnetic field generated by the electromagnet through the magnitude of the current. In other of these embodiments, the feedback magnetic field may be provided by providing a permanent magnet. The number of the permanent magnets is increased or decreased to change the magnetic field strength, thereby changing the displacement degree of the diaphragm 200.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.

Claims (10)

1. A diaphragm pressure sensing system with feedback, characterized in that it comprises: a main body, the main body is provided with an air cavity; a diaphragm, the diaphragm is arranged at the opening of the air cavity, and when a pressure difference is generated on both sides of the diaphragm, the diaphragm deforms and displaces toward the side where the pressure is lower; and A feedback assembly, the feedback assembly is arranged on the main body, the feedback assembly includes a pole plate, the pole plate is used for electrical connection with a voltage source, the pole plate is arranged at the opening of the air cavity, the The pole plate is spaced apart from the diaphragm. 2. The diaphragm type pressure sensing system with feedback according to claim 1, characterized in that, the number of the pole plate is one, the pole plate is electrically connected to the first electrode of the voltage source, and the membrane The plate is electrically connected to the second electrode of the voltage source, and the potential of the plate is different from that of the diaphragm; Or, the number of the pole plate is one, the pole plate is electrically connected to the first electrode of the voltage source, the diaphragm is grounded, and the potential of the pole plate is different from that of the diaphragm; Or, the number of the pole plates is two, and the two pole plates are respectively arranged at intervals on both sides of the diaphragm, one of the pole plates is connected to the first electrode of the voltage source, and the other of the pole plates Connected to the second electrode of the voltage source, the potentials of the two plates are different. 3. The diaphragm-type pressure sensing system with feedback according to claim 1, wherein the value of the maximum deformation displacement of the diaphragm moving under the action of the feedback field generated by the polar plate is D1, The distance between the pole plate and the diaphragm is D2, D1<1/2D2. 4. The diaphragm-type pressure sensing system with feedback according to claim 1, further comprising an escape ring, the escape ring is arranged between the diaphragm and the pole plate, so that The displacement ring has a displacement space for the deformation and displacement of the diaphragm. 5. The diaphragm-type pressure sensing system with feedback according to claim 1, wherein the pole plate comprises an insulating ring body and a grid structure arranged in the middle thereof, and the grid structure runs through multiple The insulating ring is connected to the main body, the grid structure is arranged correspondingly to the diaphragm, and the grid structure is used for electrical connection with a voltage source. 6. The diaphragm type pressure sensing system with feedback according to claim 1, wherein the diaphragm comprises a support ring and a membrane body, the support ring is provided with a through hole; the membrane body is arranged on the The connecting surface of the support ring, the membrane covers the through hole. 7. The diaphragm pressure sensing system with feedback according to claim 1, further comprising a baffle and a pressing member, the baffle is arranged at the opening of the main body, the The baffle is provided with an installation groove, and the bottom of the installation groove is provided with a through groove, and the through groove communicates with the air cavity; the installation groove is used to accommodate the diaphragm and the feedback assembly; the pressing member It is detachably arranged at the notch of the installation groove. 8. The diaphragm-type pressure sensing system with feedback according to claim 7, further comprising a pressure ring, the pressure ring being arranged between the pressing member and the diaphragm; Or, the pressing ring is arranged between the pressing member and the feedback assembly. 9. The diaphragm type pressure sensing system with feedback according to claim 1, further comprising a pressure supplement assembly, the pressure supplement assembly has an air passage; the pressure supplement assembly is connected to the main body, and the pressure supplement assembly is connected to the main body, and the The airway communicates with the air cavity. 10. The diaphragm pressure sensing system with feedback according to any one of claims 1-9, further comprising a displacement detection device, the displacement detection device is arranged at the opening of the main body, the The displacement detection device is used to detect the displacement of the diaphragm.