CN209363162U - A kind of silicon powder cleaning plant - Google Patents
A kind of silicon powder cleaning plant Download PDFInfo
- Publication number
- CN209363162U CN209363162U CN201822028991.0U CN201822028991U CN209363162U CN 209363162 U CN209363162 U CN 209363162U CN 201822028991 U CN201822028991 U CN 201822028991U CN 209363162 U CN209363162 U CN 209363162U
- Authority
- CN
- China
- Prior art keywords
- silicon powder
- component
- isolation cover
- pick
- air blowing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 73
- 239000011863 silicon-based powder Substances 0.000 title claims abstract description 69
- 238000004140 cleaning Methods 0.000 title claims abstract description 29
- 238000002955 isolation Methods 0.000 claims abstract description 61
- 238000007664 blowing Methods 0.000 claims abstract description 41
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 26
- 229910052757 nitrogen Inorganic materials 0.000 claims description 13
- 239000007789 gas Substances 0.000 claims description 12
- 238000003860 storage Methods 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 230000009467 reduction Effects 0.000 abstract description 6
- 230000009191 jumping Effects 0.000 abstract description 4
- 238000009413 insulation Methods 0.000 abstract description 3
- 239000000203 mixture Substances 0.000 description 11
- 238000006722 reduction reaction Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 3
- 239000005052 trichlorosilane Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Abstract
The utility model discloses a kind of silicon powder cleaning plants, the silicon powder in the top electrode nest of chassis for clearing up polycrystalline silicon reducing furnace, it include: isolation cover, air blowing component and pick-up component, isolation cover covers in the top of electrode nest, and be connected to respectively with air blowing component and pick-up component, air blowing component is connected with pick-up component, and air blowing component is for blowing afloat the silicon powder in isolation cover, pick-up component starts for drawing the silicon powder that air blowing component is blown afloat, air blowing component prior to pick-up component.In the utility model, isolation cover covers in the top of electrode nest, air blowing component blows afloat the silicon powder in isolation cover in electrode nest, and pick-up component is matched to draw the silicon powder blown afloat, the silicon powder in effective clearing electrode nest, improve the insulation performance of electrode, the efficiency and Quality advance of silicon powder cleaning, effectively avoid reduction furnace stop jumping, so that productive temp is guaranteed and production efficiency is improved, with very high economy, extremely it is suitble in the industry cycle promote the use of.
Description
Technical field
The utility model is related to field of polysilicon production in general, in particular to a kind of silicon powder cleaning plant.
Background technique
Currently, the polysilicon production process of mainstream uses improved Siemens, the main flow of this method are as follows: chlorine both at home and abroad
Gas and hydrogen synthesising hydrogen, hydrogen chloride and silicon powder synthesizing trichlorosilane at a certain temperature, then mention trichlorosilane
It is pure, after high-purity trichlorosilane after purification mixes according to a certain percentage with hydrogen, in 1080 DEG C~1150 DEG C of temperature and pressure
It reacts under conditions of 0.55Mpa and generates elemental silicon, and be deposited on silicon wicking surface, to generate rod-like polycrystal silicon product.
In polysilicon production process, power consumption is restored to reduce, Operating condition adjustment need to be carried out to the different phase of reduction furnace operation,
Especially it need to make moderately to be atomized in reduction furnace by adjusting temperature in the mid-term stage of operation, material concentration is larger when atomization, can exist
Deposition occurs in gas field and generates small silicon powder particle, these small particles part during flowing with air-flow can be fallen
Electrode nest and electrode perimeter on chassis can accumulate in electrode nest with reduction reaction, in cleaning chassis and electrode
When periphery, silicon powder is easy to fall in electrode nest, and electrode nest space is limited, with existing common suction tool cannot completely by
The silicon powder fallen in electrode nest is sucked out, if the silicon powder cleaning in electrode nest is not clean, in silicon rod growth course, and electrode nest
Interior silicon powder can reduce the insulation performance of electrode, lead to reduction furnace stop jumping, influence production efficiency.
Therefore, industry needs a kind of silicon powder cleaning plant that can effectively clear up the silicon powder in polycrystalline silicon reducing furnace electrode nest.
Summary of the invention
One main purpose of the utility model is to overcome at least one defect of the above-mentioned prior art, and providing one kind can
The silicon powder cleaning plant of silicon powder effectively in cleaning polycrystalline silicon reducing furnace electrode nest.
For achieving the above object, the utility model adopts the following technical solution:
One aspect according to the present utility model provides a kind of silicon powder cleaning plant, for clearing up polycrystalline silicon reducing furnace
Chassis top electrode nest in silicon powder, comprising: isolation cover, air blowing component and pick-up component, the isolation cover cover in the electrode
The top of nest, and be connected to respectively with the air blowing component and the pick-up component, the air blowing component and the pick-up component connect
It connects, the air blowing component is for blowing afloat the silicon powder in the isolation cover, and the pick-up component is for drawing the air blowing component
The silicon powder blown afloat, the air blowing component start prior to the pick-up component.
An embodiment according to the present utility model, further includes collection assembly, the collection assembly and the pick-up component
Connection, the silicon powder drawn for collecting the pick-up component.
An embodiment according to the present utility model, the air blowing component are connected to storage tank, and can on-off to institute
It states and blows the inactive high pressure gas of chemical property in isolation cover.
An embodiment according to the present utility model, the air blowing component be connected to the storage tank, and being capable of on-off
High pressure nitrogen is blowed into the isolation cover.
An embodiment according to the present utility model, the isolation cover are connected to by airflow line with the air blowing component.
The open edge of an embodiment according to the present utility model, the isolation cover is connected to the upper table on the chassis
Face.
An embodiment according to the present utility model, the open edge of the isolation cover and the upper surface on the chassis seal
Connection.
An embodiment according to the present utility model, the diameter of the isolation cover are greater than the diameter of the electrode nest.
An embodiment according to the present utility model, the diameter of the isolation cover are 2~3 times of the electrode nest diameter.
More than one is arranged in an embodiment according to the present utility model, the isolation cover.
As shown from the above technical solution, it the advantages of the silicon powder cleaning plant of the utility model and has the active effect that
In the utility model, isolation cover covers in the top of electrode nest, and air blowing component is by the silicon powder in isolation cover in electrode nest
It blows afloat, pick-up component is matched to draw the silicon powder blown afloat, and the silicon powder in effective clearing electrode nest improves the insulating properties of electrode
Can, the efficiency and Quality advance of silicon powder cleaning effectively avoid reduction furnace stop jumping, so that productive temp is guaranteed and production efficiency
It is improved, there is very high economy, be extremely suitble in the industry cycle promote the use of.
Detailed description of the invention
In order to illustrate the technical solutions in the embodiments of the present application or in the prior art more clearly, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
The some embodiments recorded in application, for those of ordinary skill in the art, without creative efforts,
Other attached drawings can also be obtained such as these attached drawings.
Fig. 1 is the overall structure diagram of an embodiment of the present invention silicon powder cleaning plant.
Wherein, the reference numerals are as follows:
1, isolation cover；2, air blowing component；21, airflow line；3, pick-up component；31, mixture conduit；4, collection assembly；
5, chassis；51, electrode nest；6, electrode.
Specific embodiment
Example embodiment is described more fully with reference to the drawings.However, example embodiment can be with a variety of shapes
Formula is implemented, and is not understood as limited to embodiment set forth herein；On the contrary, thesing embodiments are provided so that this is practical new
Type will be full and complete, and the design of example embodiment is comprehensively communicated to those skilled in the art.It is identical in figure
Appended drawing reference indicates same or similar structure, thus the detailed description that will omit them.
It is described below the difference to the utility model is exemplary, is carried out referring to attached drawing, it is practical that the attached drawing forms this
Novel a part, and the exemplary knot of difference of many aspects of achievable the utility model is wherein shown by way of example
Structure, system and step.It should be understood that other specified schemes of component, structure, exemplary means, system and step can be used, and
And structural and functional modification can be carried out without departing from the scope of the utility model.Although moreover, can in this specification
The different example features of the utility model are described using term " top ", " bottom ", " front ", " rear portion ", " side " etc.
And element, but these terms are used in this article merely for convenience, such as such as attached exemplary direction described in figure.This specification
In any content be not necessarily to be construed that the specific three dimensional direction of Structure of need is just fallen into the scope of the utility model.
Fig. 1 is the overall structure diagram of an embodiment of the present invention silicon powder cleaning plant.
As shown in Figure 1, a kind of silicon powder cleaning plant of the embodiment, the chassis 5 for clearing up polycrystalline silicon reducing furnace is powered on
Silicon powder in pole nest 51, comprising: isolation cover 1, air blowing component 2 and pick-up component 3, isolation cover 1 cover in the top of electrode nest 51, and
It is connected to respectively with air blowing component 2 and pick-up component 3, air blowing component 2 and pick-up component 3 connect, and air blowing component 2 is used for isolation cover
Silicon powder in 1 is blown afloat, and for drawing the silicon powder that air blowing component 2 is blown afloat, air blowing component 2 opens pick-up component 3 prior to pick-up component 3
It is dynamic.
In the embodiment, several pairs of electrodes 6 are vertically fitted on the chassis 5 of polycrystalline silicon reducing furnace, each electrode 6 is installed on
In an electrode nest 51 on chassis 5, in the present embodiment by taking 6 diameter of electrode is 50 millimeters as an example；The isolation cover 1 of silicon powder cleaning plant
Can be it is general cylindrical, may be, for example, bell, the lower end of isolation cover 1 is one open, and the upper end of isolation cover 1 can open up two and connect
Mouthful, one of interface is connected to isolation cover 1 with air blowing component 2 by airflow line 21, so that isolation cover 1 is received from air blowing
The high pressure gas of component 2, another interface is connected to pick-up component 3 by mixture conduit 31, so that the high pressure gas in isolation cover 1
It is drawn component 3 with the mixture of silicon powder to draw, isolation cover 1 can be used the transparent materials such as transparent plastic or glass and be made, can also
It is made of opaque material, the diameter of isolation cover 1 is greater than the diameter of electrode nest 51, and specifically the diameter of isolation cover 1 is electricity
2~3 times of 51 diameter of pole nest, to cover electrode nest 51 completely when in use, with the diameter of isolation cover 1 for 125 in the present embodiment
For millimeter, isolation cover 1 is covered at right above electrode nest 51 when use, and the electrode 6 being plugged in electrode nest 51 is contained in
In isolation cover 1, the open edge of isolation cover 1 is connected to the upper surface on chassis 5, and the settable rubber in open edge of isolation cover 1 is close
Seal so that the open edge of isolation cover 1 and 5 upper surface of chassis are tightly connected, isolation cover 1 it is settable more than one, such as can
Setting one can be tightly connected this isolation cover 1 is corresponding with multiple electrodes nest 51 one by one to which cleaning is more one by one when use
The number of silicon powder or isolation cover 1 in a electrode nest 51 may be configured as it is equal with 51 number of electrode nest, multiple isolation covers 1 with
Multiple electrodes nest 51, which corresponds, to be tightly connected to clear up the silicon powder in multiple electrodes nest 51, the setting number of isolation cover 1 simultaneously
Mesh can be depending on actual demand.It should be noted that the surface in ability embodiment is not proper surface, and
It is tolerance, as long as can cover completely electrode nest 51.
In the embodiment, air blowing component 2 may include air inlet pipeline, valve body, booster, airflow line 21, air inlet pipeline one
End connection storage tank, the other end are connected to valve body, and valve body is further connected to booster, and booster is further connected to airflow line
21, airflow line 21 is further connected to isolation cover 1, wherein storage tank is used for the inactive gas of storage of chemical property, chemistry
The inactive gas of property can be the rare gas such as helium, argon gas, be also possible to nitrogen or other suitable gas, based at
This comprehensively considers with effect, and the inactive gas of chemical property selects nitrogen in the present embodiment；The settable function of valve body is different
Multiple valve bodies, multiple valve bodies may be disposed at import and/or the exit of booster, and multiple valve bodies regulate and control the specific of nitrogen jointly
The on-off of pressure value and nitrogen supply；Booster can be booster pump or pressurized cylinder or other applicable boosters, visually
Specific requirements setting.The intracorporal nitrogen of storage tank enters booster through valve body and air inlet pipeline, and booster is by the pressure value of nitrogen
It is exported after increasing to scheduled pressure value, and then high pressure nitrogen is spraying into isolation cover 1 after remaining valve body and airflow line 21,
High pressure nitrogen blows afloat the silicon powder in electrode nest 51 that isolation cover 1 covers, silicon powder be scattered in the space in isolation cover 1 in order to
Pick-up component 3 is drawn.
In the embodiment, pick-up component 3 may include shell, motor and impeller, and shell is equipped with entrance and exit, the system of shell
The visual actual conditions of producing material material select, and the shape of shell can also be determined according to specific requirements, it is not limited here, pick-up component 3
Shell setting can be connect by connector or other suitable connection types with the shell of 2 booster of air blowing component, shell
Entrance is connected to isolation cover 1 by mixture conduit 31, and impeller is set to enclosure interior, and the sucking disk of impeller is towards shell
Entrance, motor drive connection impeller shaft are rotated with impeller, the outlet collection assembly 4 of 3 shell of pick-up component.When use
Air blowing component 2 first starts, and the electric motor starting of pick-up component 3, the scheduled duration were not necessarily to after component 2 of blowing runs scheduled duration
Long, in the present embodiment by taking scheduled duration is 0.5 minute as an example, motor impeller rotates to generate negative pressure in shell, this
Negative pressure is acted on inside isolation cover 1 by mixture conduit 31, thus the air blowing group that will start prior to 3 scheduled duration of pick-up component
The silicon powder that part 2 is blown afloat passes through in 31 suction casing of mixture conduit.
In the embodiment, collection assembly 4 may include collecting tank and cyclone separator, the settable mixture in the top of collecting tank
The bottom of feed inlet and air stream outlet, collecting tank may be configured as funnel-shaped bottom portion, assemble under the effect of gravity convenient for silicon powder, funnel
Shape bottom can be equipped with silicon powder discharge port, and the upper port of mixture feed inlet can convexedly stretch in outer at the top of collecting tank and connection pick-up component
The lower port of the outlet of 3 shells, mixture feed inlet is connected to cyclone separator, and cyclone separator is settable multiple, multiple whirlwind
Separator can arrange that cyclone separator upper end can be equipped with the air-flow with collecting tank around the vertical centerline of collecting tank at circumference array
The interface of outlet, the settable valve in the lower end of cyclone separator.The mixing of silicon powder and high pressure nitrogen that pick-up component 3 is drawn
Object enters cyclone separator by the mixture feed inlet of 4 collecting tank of collection assembly, and mixture is separated into pure by cyclone separator
Net nitrogen and pure silicon powder, pure nitrogen are discharged through the air stream outlet of collecting tank, and pure silicon powder is opened through cyclone separator lower end
Valve discharge, and be gathered in the funnel-shaped bottom portion of collecting tank under the effect of gravity, the silicon powder discharge port of funnel-shaped bottom portion opened
It opens and can be taken off pure silicon powder in order to recycle.
In the utility model, isolation cover 1 covers in the top of electrode nest 51, and air blowing component 2 will be in isolation cover 1 in electrode nest 51
Silicon powder blow afloat, pick-up component 3 is matched to draw the silicon powder that is blown afloat, and the silicon powder in effective clearing electrode nest 51 improves electricity
The insulation performance of pole 6, the efficiency and Quality advance of silicon powder cleaning, effectively avoids reduction furnace stop jumping, so that productive temp is protected
It demonstrate,proves and production efficiency is improved, there is very high economy, be extremely suitble in the industry cycle promote the use of.
The utility model person of an ordinary skill in the technical field should be appreciated that institute in above-mentioned specific embodiment part
What the specific structure and technical process shown was merely exemplary, and not restrictive.Moreover, the affiliated technology neck of the utility model
The those of ordinary skill in domain can be combined with structure various technical characteristics shown in the above according to various possible modes
The technical solution of Cheng Xin, or other changes are carried out, and belong within the scope of the utility model.
Claims (10)
1. a kind of silicon powder cleaning plant, which is characterized in that the silicon powder in the top electrode nest of chassis for clearing up polycrystalline silicon reducing furnace,
It include: isolation cover, air blowing component and pick-up component, the isolation cover covers in the top of the electrode nest, and blows respectively with described
Pneumatic module is connected to the pick-up component, and the air blowing component is connected with the pick-up component, and the air blowing component is used for institute
The silicon powder stated in isolation cover is blown afloat, and the pick-up component is for drawing the silicon powder that the air blowing component is blown afloat, the air blowing component
Start prior to the pick-up component.
2. silicon powder cleaning plant as described in claim 1, which is characterized in that further include collection assembly, the collection assembly with
The pick-up component connection, the silicon powder drawn for collecting the pick-up component.
3. silicon powder cleaning plant as described in claim 1, which is characterized in that the air blowing component is connected to storage tank, and energy
The inactive high pressure gas of chemical property is blowed to enough on-off into the isolation cover.
4. silicon powder cleaning plant as claimed in claim 3, which is characterized in that the air blowing component is connected to the storage tank,
And high pressure nitrogen can be blowed to on-off into the isolation cover.
5. silicon powder cleaning plant as described in claim 1, which is characterized in that the isolation cover is blown by airflow line with described
Pneumatic module connection.
6. silicon powder cleaning plant as described in claim 1, which is characterized in that the open edge of the isolation cover is connected to described
The upper surface on chassis.
7. silicon powder cleaning plant as claimed in claim 6, which is characterized in that the open edge and the chassis of the isolation cover
Upper surface be tightly connected.
8. silicon powder cleaning plant as described in claim 1, which is characterized in that the diameter of the isolation cover is greater than the electrode nest
Diameter.
9. silicon powder cleaning plant as claimed in claim 8, which is characterized in that the diameter of the isolation cover is that the electrode nest is straight
2~3 times of diameter.
10. the silicon powder cleaning plant as described in claim 1-9 is any, which is characterized in that more than one is arranged in the isolation cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822028991.0U CN209363162U (en) | 2018-12-04 | 2018-12-04 | A kind of silicon powder cleaning plant |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822028991.0U CN209363162U (en) | 2018-12-04 | 2018-12-04 | A kind of silicon powder cleaning plant |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209363162U true CN209363162U (en) | 2019-09-10 |
Family
ID=67835070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822028991.0U Active CN209363162U (en) | 2018-12-04 | 2018-12-04 | A kind of silicon powder cleaning plant |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209363162U (en) |
-
2018
- 2018-12-04 CN CN201822028991.0U patent/CN209363162U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 810007 No.1, Jinsi Road, Chengdong economic and Technological Development Zone, Xining City, Qinghai Province Patentee after: Asia silicon (Qinghai) Co.,Ltd. Address before: 810007 Qinghai city of Xining Province Economic and Technological Development Zone No. 1 gold Guilu Patentee before: ASIA SILICON (QINGHAI) Co.,Ltd. |
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| CP03 | Change of name, title or address |