CN206194719U - A material loading manipulator for semiconductor packaging equipment - Google Patents
A material loading manipulator for semiconductor packaging equipment Download PDFInfo
- Publication number
- CN206194719U CN206194719U CN201621146403.8U CN201621146403U CN206194719U CN 206194719 U CN206194719 U CN 206194719U CN 201621146403 U CN201621146403 U CN 201621146403U CN 206194719 U CN206194719 U CN 206194719U
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- China
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- guide rail
- inner support
- lifter plate
- support
- lead frame
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- 239000000463 material Substances 0.000 title claims abstract description 63
- 239000004065 semiconductor Substances 0.000 title claims abstract description 12
- 238000004806 packaging method and process Methods 0.000 title claims abstract description 11
- 239000011347 resin Substances 0.000 claims abstract description 40
- 229920005989 resin Polymers 0.000 claims abstract description 40
- 230000005540 biological transmission Effects 0.000 claims description 9
- 238000009434 installation Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000036632 reaction speed Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 206010053615 Thermal burn Diseases 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000005022 packaging material Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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Abstract
The utility model discloses a material loading manipulator for semiconductor packaging equipment, including traveling system and grab the material device, traveling system includes the guide rail and the outer support of walking on the guide rail, is equipped with the inner support that can follow the outer support curb plate and be level straight line reciprocating motion in the outer support, is equipped with on the inner support and grabs the material device, grabs the material device and includes lead frame grasping system and resin material cake grasping system, and the both ends of grabbing the material device are passed through the spiral handle and are installed on the lifter plate of inner support I, and lifter plate I is the square frame form, I both ends of lifter plate are passed through the linear bearing guide rail and are installed on the inner support, the utility model discloses a traveling system and grab the material device the linkage effect, realized that the automation of lead frame and resin material cake is snatched, the material loading, not only avoided the danger coefficient of artifical material loading, move moreover accurate, the reaction rate is fast, has improved material loading efficiency.
Description
Technical field
The utility model is related to semiconductor chip to seal technology, more particularly to a kind of feeding for semiconductor packaging device
Manipulator.
Background technology
With developing rapidly for electronic industry, current China's encapsulation industry is in strategic upgrading and transformation phase, semiconductor
Sealed in unit develops towards intelligent, integrated extreme direction high.Legacy equipment carried out by artificial chip lead frames and
The feeding of plastic packaging material is put, and efficiency is low and labour intensity is big, while also there are some unsafe factors, such as crushes, damages or scalds
Hinder the hand or arm of workman.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of feeding manipulator for semiconductor packaging device,
The feeding manipulator can safe, quick feeding put, and can automatic charging, improve efficiency, it is ensured that safety.
To achieve the above object, the utility model provides following technical scheme：It is a kind of for semiconductor packaging device
Feeding manipulator, including running gear and material catching apparatus, it is outer that the running gear is walked including guide rail and on guide rail
Support, perpendicular to the side plate of support arm, being provided with support arm can do what horizontal linear was moved back and forth to guide rail along support arm side plate
Inner support, the horizontal linear of inner support is moved back and forth and driven by the motor installed in inner support one end, the inner support
Material catching apparatus are provided with, material catching apparatus include lead frame grabbing system and resin material cake grasping system, lead frame grabbing
System and resin material cake grasping system carry out grasping movement by air cylinder driven, and the two ends of the material catching apparatus pass through spiral
Handle is arranged on the lifter plate I of inner support, and lifter plate I is in square frame shape, and the two ends of the lifter plate I are pacified by Linear bearing guide rail
On inner support, and lifter plate I is driven so as to along Linear bearing guide rail by the lift cylinder installed in the inner support other end
Move up and down.
Preferably, inner support is provided with backboard, two side plates of the backboard perpendicular to inner support in the one end for installing motor
I, the motor is arranged on backboard, and motor by the drive installation of gear I of a pair of meshing two side plates I it
Between power transmission shaft rotation, two ends of power transmission shaft pass the side plate I of correspondence side respectively, and power transmission shaft two ends difference
Gear II is installed, the tooth bar engaged with gear II is provided with the inside of the side plate of the support arm, tooth bar is horizontally disposed, the interior branch
Two side plates I of frame are respectively equipped with the bogie wheel rolled in tooth bar upper surface.
Preferably, material catching apparatus include symmetrical framework support frame, the lead frame grabbing system and resin material cake
Grasping system is each provided on framework support frame, and the lead frame grabbing system includes being symmetrically mounted on framework support frame both sides
Two pairs of line slideways, paired line slideway is distributed in homonymy, two is provided between paired line slideway and is slided along line slideway
Dynamic driving lever, the bottom even of the driving lever is distributed some pawl arms for clamping lead frame, two driving levers respectively be located at
Jaw connection between two driving levers；The resin material cake grasping system is located at the middle part of framework support frame, the crawl of resin material cake
System includes cylinder I, and the two ends midpoint of framework support frame is respectively equipped with vertical guide rail, and vertical guide rail is provided with lifter plate II, institute
State lifter plate II to be connected with cylinder I by linkage, cylinder I drives lifter plate II to be lifted on vertical guide rail, the lifting
The bottom even of plate II is distributed some groups of resin guide posts, and every group of resin guide post includes four leading perpendicular to framework support frame
To bar, four guide posts are circumferentially distributed, and lifter plate II is provided with push rod between four guide posts, and the length of push rod is less than guiding
The length of bar；The wherein side side plate I of the inner support is provided with cylinder II, and cylinder II drives the cunning being located on framework support frame
Bar does horizontal linear and slides along framework support frame two ends, and the bottom of slide bar is additionally provided with some gear pins, and the gear pin is horizontally disposed with, and
Perpendicular to slide bar, and gear pin quantity is consistent with the quantity of push rod, and its free end is towards push rod.
Using above-mentioned technical proposal, support arm is walked by guide rail, and during to pre-heating station top, lifter plate I is by rising
Drop air cylinder driven and decline, lead frame grabbing system acting, and grip lead frame, then lifter plate I passes through lifting air again
The driving of cylinder and reset, lead frame grabbing system is successfully taken out lead frame；Support arm continues to advance on guide rail, to tree
Stop again during fat material cake top, and resin material cake is gripped by resin material cake grasping system, after successfully gripping resin material cake, outward
Support moves on guide rail, is halted during to plastic package press position, and inner support is in the presence of motor along outer branch
Frame is moved to plastic package die top towards moving in plastic package press, and then lead frame grabbing system and resin material cake are grabbed
System acting is taken, lead frame and resin material cake is put into the relevant position of plastic package die, so as to complete feeding process.It is complete
The inside and outside support of the utility model resets after into feeding process, waits feeding next time.The utility model by running gear and
The linkage effect of material catching apparatus, realizes automatic crawl, the feeding of lead frame and resin material cake, not only avoid on artificial
The danger coefficient of material, and act accurate, reaction speed soon, improve loading efficiency.
Brief description of the drawings
Fig. 1 is the utility model structural representation；
Fig. 2 is the structural representation of the utility model support arm；
Fig. 3 is the structural representation of the utility model inner support；
Fig. 4 is the structural representation of the utility model material catching apparatus；
State diagram when Fig. 5 is material catching apparatus crawl lead frame and resin material cake；
Fig. 6 is the advance schematic diagram of the utility model support arm.
Specific embodiment
Below in conjunction with the accompanying drawings, by the description to embodiment, the utility model is described further：
As shown in figure 1, a kind of feeding manipulator for semiconductor packaging device of the utility model, including running gear 1
And material catching apparatus 2, running gear 1 includes guide rail 3 and the support arm 11 walked on guides 3, and guide rail 3 is perpendicular to support arm
It is provided with and can does the inner support 12 that horizontal linear is moved back and forth, inner support along the side plate of support arm 1 in 11 side plate 111, support arm 1
12 horizontal linear is moved back and forth and driven by the motor 13 installed in the one end of inner support 12, and inner support 12 is provided with material grasping
Device 2, material catching apparatus 2 include lead frame grabbing system and resin material cake grasping system, lead frame grabbing system and
Resin material cake grasping system carries out grasping movement by air cylinder driven, and the two ends of material catching apparatus 2 are installed by spiral handle 121
On the lifter plate I 122 of inner support 12, lifter plate I 122 is in square frame shape, and the two ends of lifter plate I 122 pass through Linear bearing guide rail 123
On inner support 12, and lifter plate I 122 is driven so as to edge by the lift cylinder 124 installed in the other end of inner support 12
Linear bearing guide rail 123 is moved up and down.
As shown in Figure 2,3, inner support 12 is provided with backboard 125 in the one end for installing motor 13, and backboard 125 is perpendicular to interior
Two side plates I 126 of support 12, motor 13 is arranged on backboard 125, and the gear that motor 13 passes through a pair of meshing
Power transmission shaft 132 of I 131 drive installations between two side plates I 126 rotates, and two ends of power transmission shaft 132 pass correspondence respectively
The side plate I 126 of side, and two ends of power transmission shaft 132 are respectively mounted gear II 133, the inner side of the side plate 111 of support arm 11
The tooth bar 112 engaged with gear II 133 is provided with, tooth bar 112 is horizontally disposed, two side plates I 126 of inner support 12 are respectively equipped with
The bogie wheel 127 that the upper surface of tooth bar 112 rolls, the use of bogie wheel 127 ensure that the stability of the movement of inner support 12.
As shown in Figure 4,5, the material catching apparatus 2 that the present embodiment is used include symmetrical framework support frame 21, lead frame
Grasping system and resin material cake grasping system are each provided on framework support frame 21, and lead frame grabbing system includes being symmetrically installed
In two pairs of line slideways 22 of the both sides of framework support frame 21, paired line slideway 22 is distributed in homonymy, paired line slideway
Two driving levers 23 slided along line slideway 22 are provided between 22, the bottom even distribution of driving lever 23 is some for clamping lead frame
The pawl arm 24 of frame 4, two driving levers 23 are connected with the jaw 25 being located between two driving levers 23 respectively.
Resin material cake grasping system includes cylinder I 26, frame located at the middle part of framework support frame 21, resin material cake grasping system
The two ends midpoint of frame support frame 21 is respectively equipped with vertical guide rail 27, and vertical guide rail 27 is provided with lifter plate II 28, lifter plate II 28
It is connected with cylinder I 26 by linkage, cylinder I 26 drives lifter plate II 28 to be lifted on vertical guide rail 27, lifter plate II 28
Bottom even be distributed some groups of resin guide posts 281, every group of resin guide post 281 includes four perpendicular to framework support frame 21
Guide post, four guide posts are circumferentially distributed, and lifter plate II 28 is additionally provided with push rod 282, push rod 282 between four guide posts
Length less than guide post length.
The wherein side side plate I 126 of inner support 12 is provided with cylinder II 29, and cylinder II 29 drives and is located at framework support frame 21
On slide bar 211 do horizontal linear along the two ends of framework support frame 21 and slide, the bottom of slide bar 211 is additionally provided with some gear pins 212, gear
Pin 212 is horizontally disposed with, and perpendicular to slide bar 211, and the gear quantity of pin 212 is consistent with the quantity of push rod 282, its free end direction top
Bar 282.
As shown in fig. 6, the utility model is in feeding process, support arm 11 first is extremely preheated by walking on guides 3
During 5 top of platform, lifter plate I 122 is driven and declined by lift cylinder 124, and then jaw 25 is shunk, and makes dialling for the two ends of jaw 25
Bar 23 is opposite to be moved on line slideway 22, so that pawl arm 24 clamps lead frame 4, then lifter plate I 122 is again by rising
The driving of sending down abnormally ascending cylinder 124 and reset, lead frame grabbing system is successfully taken out lead frame；Support arm 11 continues in guide rail 3
Upper advance, stops again during to resin material 6 top of cake, and I 26 drive link mechanism lifter plate of cylinder II 28 declines, so that installing
Resin guide post 281 on lifter plate II 28 declines, and is against the circumference of resin material cake 6, and then cylinder II 29 shrinks, and makes cunning
Bar 211 is moved towards the middle part of framework support frame 21, so that the free end travel of gear pin 212 is driven to the lower section of resin material cake 6,
Resin material cake 6 is held up, after successfully gripping resin material cake, support arm moves on guides 3, stops during to 7 position of plastic package press
Only advance, inner support 12 in the presence of the motor 13 along support arm 11 towards moving in plastic package press 7, and be moved to plastic packaging
The top of mould 8, then jaw 25 is stretched out, and pawl arm 24 is unclamped lead frame 4, so that lead frame 4 is put into plastic package die 8
It is interior, meanwhile, cylinder II 29 stretches out, and drives gear pin 212 to remove the bottom of resin material cake 6, then drive push rod 282 by cylinder I 26
Ejection resin material cake 6, so that resin material cake 6 is fallen into the relevant position of plastic package die 8, so as to complete feeding process.Complete
The utility model inner support 12, support arm 11 reset after feeding process, wait feeding next time.
The utility model is acted on by the linkage of running gear and material catching apparatus, realizes lead frame 4 and resin
Expect automatic crawl, the feeding of cake 6, not only avoid the danger coefficient of artificial loading, and act accurate, reaction speed soon, carry
Loading efficiency high.
Above-described is only preferred embodiment of the present utility model, it is noted that for the ordinary skill of this area
For personnel, on the premise of the utility model creation design is not departed from, various modifications and improvements can be made, these all belong to
In protection domain of the present utility model.
Claims (3)
1. a kind of feeding manipulator for semiconductor packaging device, including running gear (1) and material catching apparatus (2), it is described
The support arm (11) that running gear (1) is walked including guide rail (3) and on guide rail (3), guide rail (3) is perpendicular to support arm (11)
Side plate (111), is provided with and can do the inner support (12) that horizontal linear is moved back and forth along support arm (1) side plate in support arm (1),
The horizontal linear of inner support (12) is moved back and forth and driven by the motor (13) installed in inner support (12) one end, its feature
It is：The inner support (12) is provided with material catching apparatus (2), and material catching apparatus (2) include lead frame grabbing system and resin
Material cake grasping system, lead frame grabbing system and resin material cake grasping system carry out grasping movement by air cylinder driven,
The two ends of the material catching apparatus (2) by spiral handle (121) on the lifter plate I (122) of inner support (12), lifter plate
I (122) in square frame shape, and the two ends of the lifter plate I (122) pass through Linear bearing guide rail (123) on inner support (12), and
Lifter plate I (122) is driven so as to along Linear bearing guide rail by the lift cylinder (124) installed in inner support (12) other end
(123) move up and down.
2. the feeding manipulator for semiconductor packaging device according to claim 1, it is characterised in that：The inner support
(12) backboard (125), two side plates of the backboard (125) perpendicular to inner support (12) are provided with the one end for installing motor (13)
I (126), the motor (13) is on backboard (125), and the gear I that motor (13) passes through a pair of meshing
(131) power transmission shaft (132) rotation of the drive installation between two side plates I (126), two ends difference of power transmission shaft (132)
The side plate I (126) of correspondence side is passed, and two ends of power transmission shaft (132) are respectively mounted gear II (133), the outer branch
The tooth bar (112) engaged with gear II (133) is provided with the inside of the side plate (111) of frame (11), tooth bar (112) is horizontally disposed, institute
Two side plates I (126) for stating inner support (12) are respectively equipped with the bogie wheel (127) rolled in tooth bar (112) upper surface.
3. the feeding manipulator for semiconductor packaging device according to claim 2, it is characterised in that：The material grasping dress
Putting (2) includes symmetrical framework support frame (21), and the lead frame grabbing system and resin material cake grasping system are each provided at
On framework support frame (21), the lead frame grabbing system includes that two couple for being symmetrically mounted on framework support frame (21) both sides is straight
Line guide rail (22), paired line slideway (22) is distributed in homonymy, and two are provided with along straight line between paired line slideway (22)
The driving lever (23) that guide rail (22) is slided, the bottom even of the driving lever (23) is distributed some pawls for clamping lead frame (4)
Arm (24), two driving levers (23) are connected with the jaw (25) being located between two driving levers (23) respectively；The resin material cake crawl
System includes cylinder I (26), the two of framework support frame (21) located at the middle part of framework support frame (21), resin material cake grasping system
End midpoint is respectively equipped with vertical guide rail (27), and vertical guide rail (27) is provided with lifter plate II (28), and the lifter plate II (28) leads to
Cross linkage to be connected with cylinder I (26), cylinder I (26) drives lifter plate II (28) to be lifted on vertical guide rail (27), described
The bottom even of lifter plate II (28) is distributed some groups of resin guide posts (281), and every group of resin guide post (281) is hung down including four
Directly in the guide post of framework support frame (21), four guide posts are circumferentially distributed, and lifter plate II (28) is between four guide posts
It is additionally provided with push rod (282), the length of the length less than guide post of push rod (282)；The wherein side side plate I of the inner support (12)
(126) cylinder II (29) is provided with, cylinder II (29) drives the slide bar (211) being located on framework support frame (21) to be supported along framework
Horizontal linear slip is done at frame (21) two ends, and the bottom of slide bar (211) is additionally provided with some gears pin (212), described gear pin (212) level
Set, and perpendicular to slide bar (211), and gear pin (212) quantity is consistent with the quantity of push rod (282), its free end is towards push rod
(282)。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621146403.8U CN206194719U (en) | 2016-10-21 | 2016-10-21 | A material loading manipulator for semiconductor packaging equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621146403.8U CN206194719U (en) | 2016-10-21 | 2016-10-21 | A material loading manipulator for semiconductor packaging equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206194719U true CN206194719U (en) | 2017-05-24 |
Family
ID=58733511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621146403.8U Active CN206194719U (en) | 2016-10-21 | 2016-10-21 | A material loading manipulator for semiconductor packaging equipment |
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| Country | Link |
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| CN (1) | CN206194719U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107507796A (en) * | 2017-07-30 | 2017-12-22 | 江苏鲁汶仪器有限公司 | A kind of wafer transmission system |
| CN109037108A (en) * | 2018-08-02 | 2018-12-18 | 安徽大华半导体科技有限公司 | A kind of material cake feeding device with defects detection function |
| CN109698150A (en) * | 2018-12-29 | 2019-04-30 | 铜陵富仕三佳机器有限公司 | A kind of band clamping device for full-automatic semiconductor packaging device |
| CN112874842A (en) * | 2020-12-24 | 2021-06-01 | 铜陵蓝盾丰山微电子有限公司 | Material receiving equipment for lead frame and material receiving method thereof |
| CN115724156A (en) * | 2022-11-10 | 2023-03-03 | 广西观在自动化设备有限公司 | Grabbing device and grabbing method for integrated circuit plastic package material |
| CN118269118A (en) * | 2024-04-09 | 2024-07-02 | 苏州玖钧智能装备有限公司 | Large-span walking module robot used in silicon wafer cleaning field and operation process thereof |
-
2016
- 2016-10-21 CN CN201621146403.8U patent/CN206194719U/en active Active
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107507796A (en) * | 2017-07-30 | 2017-12-22 | 江苏鲁汶仪器有限公司 | A kind of wafer transmission system |
| CN107507796B (en) * | 2017-07-30 | 2019-10-25 | 江苏鲁汶仪器有限公司 | A kind of wafer transmission system |
| CN109037108A (en) * | 2018-08-02 | 2018-12-18 | 安徽大华半导体科技有限公司 | A kind of material cake feeding device with defects detection function |
| CN109037108B (en) * | 2018-08-02 | 2020-09-08 | 安徽大华半导体科技有限公司 | Material cake feeding device with defect detection function |
| CN109698150A (en) * | 2018-12-29 | 2019-04-30 | 铜陵富仕三佳机器有限公司 | A kind of band clamping device for full-automatic semiconductor packaging device |
| CN112874842A (en) * | 2020-12-24 | 2021-06-01 | 铜陵蓝盾丰山微电子有限公司 | Material receiving equipment for lead frame and material receiving method thereof |
| CN112874842B (en) * | 2020-12-24 | 2023-07-07 | 铜陵蓝盾丰山微电子有限公司 | Material receiving equipment for lead frame and material receiving method thereof |
| CN115724156A (en) * | 2022-11-10 | 2023-03-03 | 广西观在自动化设备有限公司 | Grabbing device and grabbing method for integrated circuit plastic package material |
| CN118269118A (en) * | 2024-04-09 | 2024-07-02 | 苏州玖钧智能装备有限公司 | Large-span walking module robot used in silicon wafer cleaning field and operation process thereof |
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