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CN118973695A - Bubble generating device and bubble generating system - Google Patents

Bubble generating device and bubble generating system Download PDF

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Publication number
CN118973695A
CN118973695A CN202380032414.XA CN202380032414A CN118973695A CN 118973695 A CN118973695 A CN 118973695A CN 202380032414 A CN202380032414 A CN 202380032414A CN 118973695 A CN118973695 A CN 118973695A
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Prior art keywords
bubble generating
liquid
generating device
vibration plate
liquid tank
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藤本克己
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20Mixing gases with liquids
    • B01F23/23Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/231Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids by bubbling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20Mixing gases with liquids
    • B01F23/23Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/232Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20Mixing gases with liquids
    • B01F23/23Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/237Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media
    • B01F23/2373Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media for obtaining fine bubbles, i.e. bubbles with a size below 100 µm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F31/00Mixers with shaking, oscillating, or vibrating mechanisms
    • B01F31/80Mixing by means of high-frequency vibrations above one kHz, e.g. ultrasonic vibrations

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)

Abstract

本公开提供一种能够实现装置的小型化、低成本化的气泡产生装置和气泡产生系统。本公开所涉及的气泡产生装置(1)安装于液体槽(10),在液体槽(10)的液体中产生微小气泡。气泡产生装置(1)具备:振动板(2),形成有多个开口部,第一面与液体槽(10)的液体接触,第二面与气体接触;振动体(3),支承振动板(2);以及压电元件(4),设置于振动体(3),使振动板(2)振动。对于形成于振动板(2)的多个开口部各自的形状而言,液体侧的开口直径比气体侧的开口直径大。

The present disclosure provides a bubble generating device and a bubble generating system that can realize miniaturization and cost reduction of the device. The bubble generating device (1) involved in the present disclosure is installed in a liquid tank (10) to generate tiny bubbles in the liquid in the liquid tank (10). The bubble generating device (1) comprises: a vibration plate (2) formed with a plurality of openings, a first surface in contact with the liquid in the liquid tank (10), and a second surface in contact with the gas; a vibration body (3) supporting the vibration plate (2); and a piezoelectric element (4) arranged on the vibration body (3) to vibrate the vibration plate (2). With respect to the shapes of the plurality of openings formed in the vibration plate (2), the opening diameter on the liquid side is larger than the opening diameter on the gas side.

Description

气泡产生装置和气泡产生系统Bubble generating device and bubble generating system

技术领域Technical Field

本公开涉及气泡产生装置和气泡产生系统。The present disclosure relates to a bubble generating device and a bubble generating system.

背景技术Background Art

近年来,使用微小气泡来进行水质净化、废水处理、鱼的养殖等,在各种领域,利用微小气泡。因此,产生微小气泡的气泡产生装置得到了开发(日本特开2016-209825号公报(专利文献1)、日本特开2014-150784号公报(专利文献2))。另外,就气泡产生装置而言,除了针对水以外,还使液体燃料、消毒液、化妆液等产生微小气泡的用途开发正在推进。例如,通过在燃料喷射装置设置气泡产生装置,使向活塞喷射的液体燃料包含微小气泡来改善燃料效率已有报道。In recent years, microbubbles have been used for water purification, wastewater treatment, fish farming, etc., and in various fields. Therefore, a bubble generating device that generates microbubbles has been developed (Japanese Patent Publication No. 2016-209825 (Patent Document 1), Japanese Patent Publication No. 2014-150784 (Patent Document 2)). In addition, as for the bubble generating device, in addition to water, the development of the use of liquid fuel, disinfectant, cosmetic liquid, etc. to generate microbubbles is being promoted. For example, it has been reported that a bubble generating device is provided in a fuel injection device so that the liquid fuel injected into the piston contains microbubbles to improve fuel efficiency.

专利文献1:日本特开2016-209825号公报Patent Document 1: Japanese Patent Application Publication No. 2016-209825

专利文献2:日本特开2014-150784号公报Patent Document 2: Japanese Patent Application Publication No. 2014-150784

在日本特开2016-209825号公报(专利文献1)所记载的气泡产生装置中,为了使液体产生微小气泡,在振动板之下设置有供给气体的供给部。该供给部与从气泡产生装置的外部供给原料的原料供给管连接。原料容器经由调整压力的调压器连接于原料供给管。在利用气泡产生装置以气体为原料制作气泡的情况下,原料容器需要使用气瓶等。In the bubble generating device described in Japanese Patent Publication No. 2016-209825 (Patent Document 1), a supply unit for supplying gas is provided under a vibrating plate in order to generate tiny bubbles in a liquid. The supply unit is connected to a raw material supply pipe that supplies raw materials from the outside of the bubble generating device. The raw material container is connected to the raw material supply pipe via a pressure regulator that adjusts the pressure. When using a bubble generating device to make bubbles using gas as a raw material, a gas cylinder or the like is required as the raw material container.

在日本特开2014-150784号公报(专利文献2)所记载的气泡产生装置中,微生物培养所需的规定气体被从压缩机处起穿过振动板的贯通孔供给至培养槽。此时,气泡产生装置中,通过从被自振荡器处施加有高频电压的压电振动元件向振动板施加规定频率的振动而使液体产生微小气泡。In the bubble generating device described in Japanese Patent Publication No. 2014-150784 (Patent Document 2), a predetermined gas required for microbial culture is supplied from a compressor to a culture tank through a through hole of a vibration plate. At this time, in the bubble generating device, a piezoelectric vibration element to which a high-frequency voltage is applied from an oscillator applies vibrations of a predetermined frequency to the vibration plate, thereby generating tiny bubbles in the liquid.

因此,在任一种气泡产生装置中,为了使液体产生微小气泡,都需要从振动板的下侧通过气瓶、压缩机等强制供给气体,这会妨碍装置的小型化、低成本化。Therefore, in any bubble generating device, in order to generate fine bubbles in liquid, it is necessary to forcibly supply gas from the lower side of the vibration plate using a gas cylinder, a compressor, etc., which hinders the miniaturization and cost reduction of the device.

发明内容Summary of the invention

因此,本公开的目的在于提供一种能够实现装置的小型化、低成本化的气泡产生装置和气泡产生系统。Therefore, an object of the present disclosure is to provide a bubble generating device and a bubble generating system that can achieve miniaturization and cost reduction of the device.

本公开的一个方式所涉及的气泡产生装置是安装于液体槽并使液体槽的液体中产生微小气泡的气泡产生装置,具备:振动板,形成有多个开口部,第一面与液体槽的液体接触,第二面与气体接触;振动体,支承振动板;以及压电元件,设置于振动体,使振动板振动。对于形成于振动板的多个开口部各自的形状而言,第一面侧的开口直径比第二面侧的开口直径大。A bubble generating device according to one embodiment of the present disclosure is a bubble generating device that is installed in a liquid tank and generates micro bubbles in the liquid in the liquid tank, and includes: a vibration plate having a plurality of openings formed thereon, a first surface in contact with the liquid in the liquid tank, and a second surface in contact with the gas; a vibration body that supports the vibration plate; and a piezoelectric element that is disposed on the vibration body and vibrates the vibration plate. The plurality of openings formed in the vibration plate each have a shape in which the opening diameter on the first surface side is larger than the opening diameter on the second surface side.

本公开的另一方式所涉及的气泡产生系统具备上述气泡产生装置和液体槽。A bubble generation system according to another aspect of the present disclosure includes the above-mentioned bubble generation device and a liquid tank.

根据本公开,在气泡产生装置中,对于形成于振动板的多个开口部各自的形状而言,第一面侧的开口直径比第二面侧的开口直径大,因此能够通过自然进气使液体产生微小气泡,由于不需要强制供给气体的供给部,因此能够实现装置的小型化、低成本化。According to the present disclosure, in a bubble generating device, with respect to the shapes of the plurality of openings formed on the vibration plate, the opening diameter on the first surface side is larger than the opening diameter on the second surface side, thereby enabling tiny bubbles to be generated in the liquid through natural air intake. Since there is no need for a forced gas supply portion, the device can be miniaturized and cost-effective.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1是使用实施方式所涉及的气泡产生装置的气泡产生系统的概略图。FIG. 1 is a schematic diagram of a bubble generating system using a bubble generating device according to an embodiment.

图2是实施方式所涉及的气泡产生装置的截面立体图。FIG. 2 is a cross-sectional perspective view of the bubble generating device according to the embodiment.

图3是实施方式所涉及的气泡产生装置的头部的剖视图。FIG. 3 is a cross-sectional view of a head portion of the bubble generating device according to the embodiment.

图4是用于说明在实施方式所涉及的气泡产生装置的开口部附近产生的力的概略图。FIG. 4 is a schematic diagram for explaining a force generated near the opening of the bubble generating device according to the embodiment.

图5是变形例1所涉及的气泡产生装置的剖视图。FIG. 5 is a cross-sectional view of the bubble generating device according to Modification 1. FIG.

图6是变形例2所涉及的气泡产生装置的剖视图。FIG. 6 is a cross-sectional view of a bubble generating device according to Modification 2. FIG.

图7是用于对气泡产生装置的安装位置进行说明的气泡产生系统的概略图。FIG. 7 is a schematic diagram of the bubble generating system for explaining the installation position of the bubble generating device.

图8是用于对气泡产生装置的另一安装位置进行说明的气泡产生系统的概略图。FIG. 8 is a schematic diagram of the bubble generating system for explaining another installation position of the bubble generating device.

具体实施方式DETAILED DESCRIPTION

(实施方式)(Implementation Method)

以下,一边参照附图一边对实施方式所涉及的气泡产生装置和气泡产生系统详细进行说明。此外,对图中的相同或者相当部分标注相同附图标记,不重复其说明。Hereinafter, the bubble generating device and the bubble generating system according to the embodiment will be described in detail with reference to the accompanying drawings. In addition, the same reference numerals are attached to the same or corresponding parts in the drawings, and the description thereof will not be repeated.

首先,图1是使用实施方式所涉及的气泡产生装置1的气泡产生系统100的概略图。图1所示的气泡产生装置1例如是设置于存积水、汽油、煤油等液体的液体槽10的上部且被用于使液体槽10的液体产生微小气泡200的气泡产生系统100。此外,气泡产生系统100例如能够应用于水质净化装置、废水处理装置、鱼的养殖用水槽、燃料喷射装置等各种系统。First, FIG. 1 is a schematic diagram of a bubble generating system 100 using a bubble generating device 1 according to an embodiment. The bubble generating device 1 shown in FIG. 1 is, for example, a bubble generating system 100 that is disposed on the upper portion of a liquid tank 10 storing a liquid such as water, gasoline, or kerosene and is used to generate microbubbles 200 in the liquid in the liquid tank 10. In addition, the bubble generating system 100 can be applied to various systems such as a water purification device, a wastewater treatment device, a fish farming tank, and a fuel injection device.

另外,液体槽10根据应用的系统而使所导入的液体不同,如果是水质净化装置,则导入的液体为水,但如果是燃料喷射装置,则导入的液体为液体燃料。另外,液体槽10只要能够暂时存积液体即可,还包括在导入液体的管中使液体始终在该管中流动那种结构。In addition, the liquid tank 10 has different liquids introduced depending on the system used. If it is a water purification device, the introduced liquid is water, but if it is a fuel injection device, the introduced liquid is liquid fuel. In addition, the liquid tank 10 only needs to be able to temporarily store liquid, and also includes a structure in which the liquid is always flowing in the pipe for introducing the liquid.

气泡产生装置1具备振动板2、振动体3以及压电元件4。从在设置于液体槽10的上部的盖部上开设的孔处插入气泡产生装置1,在设置有振动板2的振动体3的具备被液体浸泡的位置处,用保持法兰5将气泡产生装置1固定于液体槽10的盖部。通过利用压电元件4使被液体浸泡的振动板2振动,由此从形成于振动板2的多个细孔(开口部)处产生微小气泡200。此外,振动板2设置为,一个面(第一面)与液体槽10的液体接触,另一个面(第二面)与气体接触。The bubble generating device 1 includes a vibration plate 2, a vibration body 3, and a piezoelectric element 4. The bubble generating device 1 is inserted from a hole formed in a cover provided on the upper part of the liquid tank 10, and the bubble generating device 1 is fixed to the cover of the liquid tank 10 by a retaining flange 5 at a position of the vibration body 3 provided with the vibration plate 2 and provided with the liquid immersed. By vibrating the vibration plate 2 immersed in the liquid by the piezoelectric element 4, microbubbles 200 are generated from a plurality of pores (openings) formed in the vibration plate 2. In addition, the vibration plate 2 is provided so that one surface (first surface) contacts the liquid in the liquid tank 10, and the other surface (second surface) contacts the gas.

图2是实施方式所涉及的气泡产生装置1的截面立体图。如图2所示,气泡产生装置1由振动板2、对振动板2的周缘部进行固定的头部31、和与头部31相连的筒状体32构成。筒状体32是所谓的朗之万(Langevin)型振子。筒状体32是由上侧金属环32a和下侧金属环32b夹持两个压电元件4并用紧固用螺栓34固定的构造。FIG2 is a cross-sectional perspective view of the bubble generating device 1 according to the embodiment. As shown in FIG2 , the bubble generating device 1 is composed of a vibration plate 2, a head 31 for fixing the peripheral portion of the vibration plate 2, and a cylindrical body 32 connected to the head 31. The cylindrical body 32 is a so-called Langevin type vibrator. The cylindrical body 32 is a structure in which two piezoelectric elements 4 are clamped by an upper metal ring 32a and a lower metal ring 32b and fixed by a fastening bolt 34.

两个压电元件4采用将第一压电元件41和极化方向与第一压电元件41相反的第二压电元件42重叠起来这种结构。向第一压电元件41及第二压电元件42供给电力的端子43、44被从上侧金属环32a、下侧金属环32b与第一压电元件41、第二压电元件42之间引出,并通过布线来与图1所示的控制器20电连接。The two piezoelectric elements 4 have a structure in which a first piezoelectric element 41 and a second piezoelectric element 42 having a polarization direction opposite to that of the first piezoelectric element 41 are overlapped. Terminals 43 and 44 for supplying power to the first piezoelectric element 41 and the second piezoelectric element 42 are drawn out from between the upper metal ring 32a, the lower metal ring 32b and the first piezoelectric element 41 and the second piezoelectric element 42, and are electrically connected to the controller 20 shown in FIG. 1 through wiring.

通过从控制器20向第一压电元件41、第二压电元件42供给电力,以取决于包括头部31及筒状体32在内的在长度方向上的尺寸的共振频率来驱动筒状体32,由此在振动板2处获得较大的位移。由于在筒状体32的共振中存在多个高阶的振动模式,因此能够从多个共振频率中选择一个共振频率。另外,通过将从上侧金属环32a连接于头部31这部分的直径缩小到比其他部分小,能够进一步放大振动板2的位移。By supplying power from the controller 20 to the first piezoelectric element 41 and the second piezoelectric element 42, the cylindrical body 32 is driven at a resonance frequency depending on the length direction of the head 31 and the cylindrical body 32, thereby obtaining a large displacement at the vibration plate 2. Since there are multiple high-order vibration modes in the resonance of the cylindrical body 32, it is possible to select a resonance frequency from multiple resonance frequencies. In addition, by reducing the diameter of the portion connected to the head 31 from the upper metal ring 32a to be smaller than other portions, the displacement of the vibration plate 2 can be further amplified.

此外,如图2所示,在上侧金属环32a、下侧金属环32b以及紧固用螺栓34的中心部设置有贯通孔35,该贯通孔35成为向振动板2导入气体的导入部。上侧金属环32a、下侧金属环32b以及紧固用螺栓34使用不锈钢、铝等。第一压电元件41、第二压电元件42使用PZT(锆钛酸铅)、KNN((K,Na)NbO3)等陶瓷、钽酸锂以及铌酸锂等压电晶体。2, a through hole 35 is provided at the center of the upper metal ring 32a, the lower metal ring 32b, and the fastening bolt 34, and the through hole 35 serves as an inlet for introducing gas into the vibration plate 2. The upper metal ring 32a, the lower metal ring 32b, and the fastening bolt 34 are made of stainless steel, aluminum, etc. The first piezoelectric element 41 and the second piezoelectric element 42 are made of ceramics such as PZT (lead zirconate titanate), KNN ((K, Na) NbO 3 ), and piezoelectric crystals such as lithium tantalate and lithium niobate.

具体而言,筒状体32由SUSU304材料形成,上侧金属环32a的直径为16mm,包括头部在内的高度为46.5mm,下侧金属环32b的直径为16mm,高度为10mm。第一压电元件41、第二压电元件42的直径分别为16mm,厚度为2.55mm。振动体3的全长为63mm左右。筒状体32的共振频率也取决于头部31的形状,但在半波长的共振的情况下,为约45kHz前后。Specifically, the cylindrical body 32 is formed of SUSU304 material, the diameter of the upper metal ring 32a is 16 mm, the height including the head is 46.5 mm, and the diameter of the lower metal ring 32b is 16 mm and the height is 10 mm. The diameters of the first piezoelectric element 41 and the second piezoelectric element 42 are 16 mm and 2.55 mm respectively. The total length of the vibrating body 3 is about 63 mm. The resonance frequency of the cylindrical body 32 also depends on the shape of the head 31, but in the case of half-wavelength resonance, it is about 45 kHz.

由于筒状体32为利用紧固用螺栓34紧固上侧金属环32a和下侧金属环32b这种构造,因此,对第一压电元件41、第二压电元件42施加有压缩力的偏压。因此,所形成的结构为,即使在第一压电元件41、第二压电元件42上采用对拉伸应力的抗性小的压电陶瓷,向第一压电元件41、第二压电元件42供给大电力来进行了驱动的情况下,第一压电元件41、第二压电元件42也不易破坏。此外,由于上侧金属环32a和下侧金属环32b为相同电位,因此需要在两个压电元件4的中间夹持施加电极。该施加电极与端子43电连接。Since the cylindrical body 32 is structured such that the upper metal ring 32a and the lower metal ring 32b are fastened by the fastening bolts 34, a compressive bias is applied to the first piezoelectric element 41 and the second piezoelectric element 42. Therefore, the structure formed is that even if piezoelectric ceramics with low resistance to tensile stress are used for the first piezoelectric element 41 and the second piezoelectric element 42, and a large power is supplied to the first piezoelectric element 41 and the second piezoelectric element 42 to drive, the first piezoelectric element 41 and the second piezoelectric element 42 are not easily damaged. In addition, since the upper metal ring 32a and the lower metal ring 32b are at the same potential, it is necessary to sandwich an applied electrode between the two piezoelectric elements 4. The applied electrode is electrically connected to the terminal 43.

此外,对于筒状体32而言,如果不需要向第一压电元件41、第二压电元件42供给大电力来进行驱动,则也可以不是用紧固用螺栓34紧固的构造,而是由上侧金属环32a和下侧金属环32b夹持一个压电元件4并进行粘接这种构造。另外,筒状体32也可以为仅具有上侧金属环32a的构造,为将压电元件4粘接在该上侧金属环32a的底面的构造。无论筒状体32采用哪种构造,都能够降低制造成本。Furthermore, if it is not necessary to supply a large amount of power to the first piezoelectric element 41 and the second piezoelectric element 42 for driving, the cylindrical body 32 may be configured not to be fastened by the fastening bolts 34, but to have a structure in which one piezoelectric element 4 is sandwiched between the upper metal ring 32a and the lower metal ring 32b and bonded. Alternatively, the cylindrical body 32 may have only the upper metal ring 32a, and the piezoelectric element 4 may be bonded to the bottom surface of the upper metal ring 32a. Regardless of which structure the cylindrical body 32 adopts, the manufacturing cost can be reduced.

图3是实施方式所涉及的气泡产生装置1的头部31的剖视图。头部31设置在筒状体32的上部,呈圆锥台形状。此外,图3所示的头部31的形状是一个例子,并不限定于圆锥台形状,也可以是圆筒形状等其他形状。另外,头部31可以与筒状体32分开地形成并与筒状体32连接,也可以一体地形成。FIG3 is a cross-sectional view of a head 31 of the bubble generating device 1 according to the embodiment. The head 31 is disposed on the upper portion of the cylindrical body 32 and is in the shape of a truncated cone. In addition, the shape of the head 31 shown in FIG3 is an example and is not limited to a truncated cone shape, and may also be other shapes such as a cylindrical shape. In addition, the head 31 may be formed separately from the cylindrical body 32 and connected to the cylindrical body 32, or may be formed integrally with the cylindrical body 32.

头部31通过粘接剂、焊接等将振动板2固定在圆锥台形状的上周缘部。振动板2例如由树脂板、金属板、Si或SOI(Silicon On Insulator:绝缘体上硅)基板、多孔的陶瓷板、玻璃板等形成。具体而言,振动板2的外径Rc为9mm,振动板2使用中央部的厚度比周缘部的厚度薄的板,例如周缘部的厚度为0.15mm,中央部的厚度为0.05mm。The head 31 fixes the vibration plate 2 to the upper peripheral portion of the truncated cone shape by adhesive, welding, etc. The vibration plate 2 is formed of, for example, a resin plate, a metal plate, a Si or SOI (Silicon On Insulator) substrate, a porous ceramic plate, a glass plate, etc. Specifically, the outer diameter Rc of the vibration plate 2 is 9 mm, and the vibration plate 2 uses a plate whose thickness in the central portion is thinner than that in the peripheral portion, for example, the thickness in the peripheral portion is 0.15 mm, and the thickness in the central portion is 0.05 mm.

振动板2在厚度变薄的中央部设置有185个开口部2a。如图3所示,各个开口部2a的截面形状成为一个面侧(液体侧)的开口直径Ra比另一个面侧(气体侧)的开口直径Rb大(Ra>Rb)的锥形。此外,开口部2a的截面形状并不限定于锥形,只要至少液体侧的开口直径Ra比气体侧的开口直径Rb大,则也可以是台阶形状等任意形状。具体而言,液体侧的开口直径Ra为约70μm,气体侧的开口直径Rb为约10μm。The vibration plate 2 is provided with 185 openings 2a in the central portion where the thickness becomes thinner. As shown in FIG3 , the cross-sectional shape of each opening 2a is a cone in which the opening diameter Ra of one side (liquid side) is larger than the opening diameter Rb of the other side (gas side) (Ra>Rb). In addition, the cross-sectional shape of the opening 2a is not limited to a cone, and may be any shape such as a step shape as long as at least the opening diameter Ra of the liquid side is larger than the opening diameter Rb of the gas side. Specifically, the opening diameter Ra of the liquid side is about 70 μm, and the opening diameter Rb of the gas side is about 10 μm.

在气泡产生装置1中,通过以开口直径大的开口直径Ra为液体侧、开口直径小的开口直径Rb为气体侧的方式将振动板2安装于头部31,使振动板2进行上下振动的活塞振动,由此能够通过自然进气使液体产生微小气泡200。相反,在以开口直径大的开口直径Ra为气体侧、开口直径小的开口直径Rb为液体侧的方式将振动板2安装于头部31的情况下,如果不施加20kPa~40kPa的气压,则不能使液体产生微小气泡200。即,在相反的情况下,气泡产生装置1需要压缩机。In the bubble generating device 1, the vibration plate 2 is mounted on the head 31 in such a manner that the opening diameter Ra with a large opening diameter is on the liquid side and the opening diameter Rb with a small opening diameter is on the gas side, and the vibration plate 2 is made to perform piston vibration that vibrates up and down, thereby enabling the liquid to generate fine bubbles 200 by natural air intake. On the contrary, when the vibration plate 2 is mounted on the head 31 in such a manner that the opening diameter Ra with a large opening diameter is on the gas side and the opening diameter Rb with a small opening diameter is on the liquid side, the liquid cannot generate fine bubbles 200 unless a gas pressure of 20 kPa to 40 kPa is applied. That is, in the opposite case, the bubble generating device 1 requires a compressor.

在气泡产生装置1中,可以认为的是,在以开口直径大的开口直径Ra为液体侧、开口直径小的开口直径Rb为气体侧的方式将振动板2安装于头部31,使振动板2活塞驱动的情况下,产生通过自然进气向液体送入气体的泵浦效应。该泵浦效应能够基于伯努利定律进行说明。具体而言,可以认为的是,在以开口直径大的开口直径Ra为液体侧、开口直径小的开口直径Rb为气体侧的方式将振动板2安装于头部31,使振动板2活塞驱动的情况下,由于在开口直径小的部分流速增加,因此形成压力低的部分,产生从气体侧将气体吸上来的泵浦效应。另外,也可以认为:在振动板2由于活塞振动而朝下方向位移时,从开口直径小的开口部2a侧进入的气体沿着开口部2a的截面形状扩散,并且通过振动板2朝上方向位移而被锥形的部分推起,由此产生泵浦效应。In the bubble generating device 1, it can be considered that when the vibration plate 2 is mounted on the head 31 in such a manner that the opening diameter Ra with a large opening diameter is the liquid side and the opening diameter Rb with a small opening diameter is the gas side, and when the vibration plate 2 is driven by a piston, a pumping effect of sending gas into the liquid by natural air intake is generated. This pumping effect can be explained based on Bernoulli's principle. Specifically, it can be considered that when the vibration plate 2 is mounted on the head 31 in such a manner that the opening diameter Ra with a large opening diameter is the liquid side and the opening diameter Rb with a small opening diameter is the gas side, and when the vibration plate 2 is driven by a piston, since the flow rate increases in the part with a small opening diameter, a part with a low pressure is formed, and a pumping effect of sucking gas up from the gas side is generated. In addition, it can also be considered that: when the vibration plate 2 is displaced in the downward direction due to the piston vibration, the gas entering from the opening portion 2a side with a small opening diameter diffuses along the cross-sectional shape of the opening portion 2a, and is pushed up by the tapered portion due to the displacement of the vibration plate 2 in the upward direction, thereby generating a pumping effect.

在气泡产生装置1中,为了产生泵浦效应,优选使振动板2不弯曲就进行上下振动的活塞振动。在容易弯曲的振动板2中,在液体中纵向振动被吸收,作为“柔软的弹簧”发挥功能,泵浦效应降低。因此,优选使不易弯曲的振动板2进行活塞振动。在气泡产生装置1中产生的泵浦效应能够被理解为,使气体从气体侧朝向液体侧的单一方向上这种流动产生的现象。此外,在气泡产生装置1中产生的泵浦效应能够通过变更共振频率(振动模式)、头部31的高度、振动板2的外径Rc、保持振动板2的内径Rd等参数而最佳化。In the bubble generating device 1, in order to generate a pumping effect, it is preferred to perform piston vibration in which the vibration plate 2 vibrates up and down without bending. In the vibration plate 2 that is easy to bend, the longitudinal vibration is absorbed in the liquid, and it functions as a "soft spring", and the pumping effect is reduced. Therefore, it is preferred to perform piston vibration on the vibration plate 2 that is not easy to bend. The pumping effect generated in the bubble generating device 1 can be understood as a phenomenon caused by the flow of gas in a single direction from the gas side to the liquid side. In addition, the pumping effect generated in the bubble generating device 1 can be optimized by changing parameters such as the resonance frequency (vibration mode), the height of the head 31, the outer diameter Rc of the vibration plate 2, and the inner diameter Rd of the vibration plate 2.

如图1所示,在将气泡产生装置1设置在液体槽10的上部的情况下,来自开口部2a的液体泄漏不成为问题,但在将气泡产生装置1设置在液体槽10的底面的情况下,因以使开口直径大的开口直径Ra为液体侧、开口直径小的开口直径Rb为气体侧的方式将振动板2安装于头部31,故而来自开口部2a的液体泄漏成为问题。As shown in Figure 1, when the bubble generating device 1 is set on the upper part of the liquid tank 10, liquid leakage from the opening portion 2a does not become a problem, but when the bubble generating device 1 is set on the bottom surface of the liquid tank 10, the vibration plate 2 is installed on the head 31 in such a manner that the opening diameter Ra with a larger opening diameter is on the liquid side and the opening diameter Rb with a smaller opening diameter is on the gas side, so liquid leakage from the opening portion 2a becomes a problem.

因此,对来自开口部2a的液体泄漏进行研究。图4是用于说明在实施方式所涉及的气泡产生装置1的开口部2a附近产生的力的概略图。图4的(a)是从开口部2a滴下的液体的量小的情况下的概略图,图4的(b)是从开口部2a滴下的液体的量大的情况下的概略图。Therefore, the leakage of liquid from the opening 2a is studied. FIG4 is a schematic diagram for explaining the force generated near the opening 2a of the bubble generating device 1 according to the embodiment. FIG4(a) is a schematic diagram when the amount of liquid dripping from the opening 2a is small, and FIG4(b) is a schematic diagram when the amount of liquid dripping from the opening 2a is large.

首先,将设置于振动板2的一个开口部2a的气体侧的开口直径设为Rb(m),将液体(这里,认为是水)的深度设为h(m),将位于气体侧的开口部2a的液体与界面的接触角设为θ(°),将从开口部2a滴下的液体的重量设为m(kg)。由于液体(水)的表面张力为γ=0.728N/m,因此在图中向上产生力F1。该力F1表示为式子1。First, let the opening diameter of an opening 2a on the gas side of the vibration plate 2 be Rb (m), let the depth of the liquid (here, water) be h (m), let the contact angle between the liquid and the interface of the opening 2a on the gas side be θ (°), and let the weight of the liquid dripping from the opening 2a be m (kg). Since the surface tension of the liquid (water) is γ = 0.728 N/m, an upward force F1 is generated in the figure. This force F1 is expressed as Formula 1.

F1=2π×(Rb/2)×γ×cosθF1=2π×(Rb/2)×γ×cosθ

=0.728π(Rb)cosθ(N)···(式子1)=0.728π(Rb)cosθ(N)···(Formula 1)

由于施加于开口部2a的液体的压力(水压)相对于液体的深度1m为0.1气压=10130N/m2,开口部2a的截面积为π×(Rb/2)2(m2),因此在图中向下产生力F2。该力F2表示为式子2。Since the pressure (water pressure) of the liquid applied to the opening 2a is 0.1 atmospheric pressure = 10130 N/ m2 relative to the depth 1m of the liquid and the cross-sectional area of the opening 2a is π×(Rb/2) 2 ( m2 ), a force F2 is generated downward in the figure.

F2=10130×h×π×(Rb/2)2(N)···(式子2)F2=10130×h×π×(Rb/2) 2 (N)···(Formula 2)

若认为滴下的液体的质量m即使是最大也就是开口直径Rb的球,则成为4×π×(Rb/2)2/3(kg),因此在图中向下产生重力mg。该重力mg表示为式子3。If the mass m of the dripping liquid is considered to be 4×π×(Rb/2) 2 /3 (kg) even if it is a sphere with the largest opening diameter Rb, a downward gravity mg is generated in the figure. The gravity mg is expressed as Equation 3.

mg(max)=9.8×π×(Rb)2/3(N)···(式子3)mg(max)=9.8×π×(Rb) 2 /3(N)···(Formula 3)

因此,如图4的(a)所示,只要F1>F2+mg的关系成立,液体就不会从振动板2的开口部2a泄漏。具体而言,若考虑振动板2的开口部2a的开口直径为细气泡(小于100μm)~超细气泡(小于1μm),则开口部2a的开口直径Rb成为1×10-7~1×10-5(m)的区域。若接触角假设为20°,则力F1成为2.15×10-7~2.15×10-5(N)的范围,即使假设将液体的深度(h)设为1m,力F2也成为7.96×10-11~7.96×10-7(N)的范围。由于重力mg在最大的情况下成为1.02×10-20~1.02×10-14(N)的范围,因此,大体上利用力F1与力F2的关系来决定液体是否从振动板2的开口部2a泄漏。在接触角为20°的情况下,计算上,只要开口部2a的开口直径为26μm以下,则满足F1>F2+mg的关系,因此液体不会从振动板2的开口部2a泄漏。此外,使开口部2a的开口直径为26μm以下的结果是液体的深度(h)为1m的情况,如果液体的深度(h)例如为0.1m(10cm),则即使开口部2a的开口直径为100μm,液体也不会从振动板2的开口部2a泄漏。Therefore, as shown in FIG4 (a), as long as the relationship of F1>F2+mg holds, the liquid will not leak from the opening 2a of the vibration plate 2. Specifically, if the opening diameter of the opening 2a of the vibration plate 2 is considered to be a fine bubble (less than 100 μm) to an ultrafine bubble (less than 1 μm), the opening diameter Rb of the opening 2a becomes a region of 1× 10-7 to 1× 10-5 (m). If the contact angle is assumed to be 20°, the force F1 becomes a range of 2.15× 10-7 to 2.15× 10-5 (N), and even if the depth (h) of the liquid is assumed to be 1 m, the force F2 becomes a range of 7.96× 10-11 to 7.96× 10-7 (N). Since the gravity mg is in the range of 1.02× 10-20 to 1.02× 10-14 (N) when it is at its maximum, the relationship between the force F1 and the force F2 is generally used to determine whether the liquid leaks from the opening 2a of the vibration plate 2. In the case where the contact angle is 20°, as long as the opening diameter of the opening 2a is 26μm or less, the relationship of F1>F2+mg is satisfied, so the liquid will not leak from the opening 2a of the vibration plate 2. In addition, the result of making the opening diameter of the opening 2a 26μm or less is the case where the depth (h) of the liquid is 1m. If the depth (h) of the liquid is, for example, 0.1m (10cm), the liquid will not leak from the opening 2a of the vibration plate 2 even if the opening diameter of the opening 2a is 100μm.

这里,在接触角为0°的情况下,当使用式子1~式子3求出开口部2a的开口直径Rb和液体的深度h、水的表面张力为1的液体的表面张力比γa之间的关系时,能够如式子4那样求出。Here, when the contact angle is 0°, when the relationship between the opening diameter Rb of the opening 2a, the depth h of the liquid, and the surface tension ratio γa of the liquid with the surface tension of water being 1 is obtained using Formulas 1 to 3, it can be obtained as in Formula 4.

Rb<28×10-6×(γa)/h···(式子4)Rb<28×10 -6 ×(γa)/h···(Formula 4)

如果液体的深度h为1m,液体为水(γa=1),则求出开口部2a的开口直径Rb小于28μm。即,只要开口部2a的开口直径Rb小于28μm,则液体不会从振动板2的开口部2a泄漏,不需要输送空气的压缩机等,能够使液体产生微小气泡200。If the depth h of the liquid is 1m and the liquid is water (γa=1), the opening diameter Rb of the opening 2a is less than 28μm. That is, as long as the opening diameter Rb of the opening 2a is less than 28μm, the liquid will not leak from the opening 2a of the vibration plate 2, and a compressor for conveying air is not required, and the liquid can generate microbubbles 200.

另外,即使在接触角假设为80°的情况下,当使用式子1~式子3求出开口部2a的开口直径Rb和液体的深度h、水的表面张力为1的液体的表面张力比γa之间的关系时,也能够如式子5那样求出。In addition, even when the contact angle is assumed to be 80°, when using Formulas 1 to 3 to calculate the relationship between the opening diameter Rb of the opening 2a, the depth h of the liquid, and the surface tension ratio γa of the liquid where the surface tension of water is 1, it can also be calculated as in Formula 5.

Rb<5×10-6×(γa)/h···(式子5)Rb<5× 10-6 ×(γa)/h···(Formula 5)

如果液体的深度h为1m,液体为水(γa=1),则求出开口部2a的开口直径Rb小于5μm。即,只要开口部2a的开口直径Rb小于5μm,则液体不会从振动板2的开口部2a泄漏,不需要输送空气的压缩机等,能够使液体产生微小气泡200。If the depth h of the liquid is 1m and the liquid is water (γa=1), the opening diameter Rb of the opening 2a is less than 5μm. That is, as long as the opening diameter Rb of the opening 2a is less than 5μm, the liquid will not leak from the opening 2a of the vibration plate 2, and a compressor for conveying air is not required, and the liquid can generate microbubbles 200.

对于振动板2而言,如上所述,板厚较厚且不易弯曲的振动板更合适。另外,一方面,开口部2a的开口直径Rb与所产生的微小气泡200的尺寸有关,为了制作在液体中长久地停留的所谓的100μm以下的尺寸的微气泡,优选为20μm以下的开口直径。另一方面,开口部2a的微细化和加工的极限与由开口直径Rb和振动板2的板厚获得的纵横比有关,纵横比超过10的加工中,制造成本飞跃性地提高。因此,形成微小的开口直径Rb成为使振动板2的板厚变厚的制约。此外,通过使开口部2a的截面形状为锥形,能够缓和使振动板2的板厚变厚的制约。但是,使开口部2a的截面形状为锥形,由此受开口直径Ra限制的开口部2a的间距间隔成为制造时的新的制约。As for the vibration plate 2, as described above, a vibration plate with a thicker plate thickness and less prone to bending is more suitable. In addition, on the one hand, the opening diameter Rb of the opening portion 2a is related to the size of the generated microbubbles 200. In order to produce so-called microbubbles with a size of less than 100 μm that stay in the liquid for a long time, an opening diameter of less than 20 μm is preferred. On the other hand, the limit of the miniaturization and processing of the opening portion 2a is related to the aspect ratio obtained by the opening diameter Rb and the plate thickness of the vibration plate 2. In the processing with an aspect ratio exceeding 10, the manufacturing cost increases dramatically. Therefore, forming a small opening diameter Rb becomes a constraint on thickening the plate thickness of the vibration plate 2. In addition, by making the cross-sectional shape of the opening portion 2a conical, the constraint of thickening the plate thickness of the vibration plate 2 can be alleviated. However, by making the cross-sectional shape of the opening portion 2a conical, the spacing interval of the opening portion 2a, which is limited by the opening diameter Ra, becomes a new constraint during manufacturing.

考虑到制造,振动板2为金属制是简单的,但在通常的蚀刻技术中,只能形成与板厚相同程度的开口直径,因此需要使用特殊的镀覆技术来形成振动板2。尽管如此,由开口直径Rb与振动板2的板厚获得的纵横比也被限制为10左右,因此如果将开口直径Rb设为10μm,则振动板2的板厚最大也被限制为100μm的厚度。通过使用MEMS(Micro ElectroMechanical Systems:微机电系统)技术,除了使开口部2a的截面形状为锥形以外,还能够通过从正反面形成不同的开口直径的孔来加工开口部。另外,如果振动板2的材料使用陶瓷、玻璃,则能够引用喷砂技术、激光加工技术进行非对称的孔加工。开口部2a的开口直径Rb优选为1μm~20μm左右。Considering the manufacturing, it is simple to make the vibration plate 2 out of metal, but in the conventional etching technology, only an opening diameter of the same degree as the plate thickness can be formed, so it is necessary to use a special plating technology to form the vibration plate 2. Nevertheless, the aspect ratio obtained by the opening diameter Rb and the plate thickness of the vibration plate 2 is also limited to about 10, so if the opening diameter Rb is set to 10μm, the maximum thickness of the vibration plate 2 is also limited to 100μm. By using MEMS (Micro ElectroMechanical Systems) technology, in addition to making the cross-sectional shape of the opening 2a conical, the opening can also be processed by forming holes with different opening diameters from the front and back. In addition, if ceramics or glass are used as the material of the vibration plate 2, sandblasting technology and laser processing technology can be used for asymmetric hole processing. The opening diameter Rb of the opening 2a is preferably about 1μm to 20μm.

在气泡产生装置1中,除了通过实现基于振动板2获得的泵浦效应而不需要输送空气的压缩机等这种优点之外,还具有能够通过振动板2的驱动量来控制所产生的微小气泡200的气体量这个优点。特别是在使用压缩机的情况下,当施加于振动板2的气压高时,从开口部2a进入的气体不被振动板2剥离破坏而被作为较大的气泡输出,有时会吸收掉其他微小气泡。在气泡产生装置1中,通过泵浦效应而不会产生气体被过度地供给到液体中这种情况,因此还具有不需要控制压缩机等的复杂控制的优点。In the bubble generating device 1, in addition to the advantage that a compressor for conveying air is not required by realizing the pumping effect obtained by the vibration plate 2, there is also the advantage that the amount of gas in the generated micro-bubbles 200 can be controlled by the driving amount of the vibration plate 2. In particular, when a compressor is used, when the air pressure applied to the vibration plate 2 is high, the gas entering from the opening 2a is not separated and destroyed by the vibration plate 2 and is output as a larger bubble, which sometimes absorbs other micro-bubbles. In the bubble generating device 1, the pumping effect does not cause the situation where the gas is excessively supplied to the liquid, so there is also the advantage that complex control such as controlling the compressor is not required.

如上所述,实施方式所涉及的气泡产生装置1安装于液体槽10,在液体槽10的液体中产生微小气泡。气泡产生装置1具备:振动板2,形成有多个开口部2a,第一面与液体槽10的液体接触,第二面与气体接触;振动体3,支承振动板2;以及压电元件4,设置于振动体3,使振动板2振动。对于形成于振动板2的多个开口部2a各自的形状而言,液体侧的开口直径Ra比气体侧的开口直径Rb大。As described above, the bubble generating device 1 according to the embodiment is mounted on the liquid tank 10 and generates micro bubbles in the liquid in the liquid tank 10. The bubble generating device 1 includes: a vibration plate 2 having a plurality of openings 2a formed therein, a first surface of which is in contact with the liquid in the liquid tank 10 and a second surface of which is in contact with the gas; a vibration body 3 that supports the vibration plate 2; and a piezoelectric element 4 that is provided on the vibration body 3 and vibrates the vibration plate 2. The plurality of openings 2a formed in the vibration plate 2 each have a shape such that the opening diameter Ra on the liquid side is larger than the opening diameter Rb on the gas side.

由此,在气泡产生装置1中,对于形成于振动板2的多个开口部2a各自的形状而言,液体侧的开口直径Ra比气体侧的开口直径Rb大,因此能够通过自然进气使液体产生微小气泡,由于不需要强制供给气体的压缩机等,因此能够实现装置的小型化、低成本化。Therefore, in the bubble generating device 1, with respect to the shapes of the plurality of opening portions 2a formed on the vibration plate 2, the opening diameter Ra on the liquid side is larger than the opening diameter Rb on the gas side. Therefore, it is possible to generate tiny bubbles in the liquid through natural air intake. Since there is no need for a compressor for forced supply of gas, the device can be miniaturized and cost-effective.

气泡产生系统100具备气泡产生装置1和液体槽10。由此,能够实现气泡产生系统的小型化、低成本化。The bubble generation system 100 includes the bubble generation device 1 and the liquid tank 10. Thus, it is possible to achieve miniaturization and cost reduction of the bubble generation system.

(变形例1)(Variant 1)

在图2所示的气泡产生装置1中,说明了振动体3是朗之万型振子,但不限于此,只要是使振动板2进行上下振动的活塞振动的振动体,则可以是任意构造。图5是变形例1所涉及的气泡产生装置1A的剖视图。此外,对图5所示的气泡产生装置1A中的与图2所示的气泡产生装置1相同的结构标注相同的附图标记,不重复详细的说明。另外,在图5所示的气泡产生装置1A中,省略了振动板2的图示。In the bubble generating device 1 shown in FIG2 , the vibrating body 3 is described as a Langevin type vibrator, but it is not limited to this. As long as it is a vibrating body of piston vibration that causes the vibration plate 2 to vibrate up and down, it can be of any structure. FIG5 is a cross-sectional view of the bubble generating device 1A involved in the modification 1. In addition, the same reference numerals are marked for the same structure in the bubble generating device 1A shown in FIG5 as in the bubble generating device 1 shown in FIG2 , and the detailed description is not repeated. In addition, in the bubble generating device 1A shown in FIG5 , the illustration of the vibration plate 2 is omitted.

在气泡产生装置1A中,利用压电元件4经由振动体3A使振动板2振动。图5所示的振动体3A包括头部31、弹簧部32c、筒状体33a、凸边部34a。In the bubble generating device 1A, the vibration plate 2 is vibrated via the vibration body 3A by the piezoelectric element 4. The vibration body 3A shown in Fig. 5 includes a head portion 31, a spring portion 32c, a cylindrical body 33a, and a flange portion 34a.

弹簧部32c在位于支承头部31那个位置的外侧的位置受筒状体33a支承。筒状体33a为圆筒状的形状。筒状体33a通过一端支承弹簧部32c。筒状体33a的与弹簧部32c侧相反一侧的端部被凸边部34a支承。凸边部34a是板状的部件,支承圆筒状的筒状体33a的底面,并从支承筒状体33a的位置朝向外侧延伸。The spring portion 32c is supported by the cylindrical body 33a at a position located outside the position of the support head 31. The cylindrical body 33a is cylindrical in shape. The cylindrical body 33a supports the spring portion 32c through one end. The end of the cylindrical body 33a on the side opposite to the spring portion 32c is supported by the flange portion 34a. The flange portion 34a is a plate-shaped member that supports the bottom surface of the cylindrical cylindrical body 33a and extends outward from the position supporting the cylindrical body 33a.

在凸边部34a的下表面,与凸边部34a的形状相匹配地设置有中空圆状的压电元件4。压电元件4在筒状体33a的贯通方向(图中为上下方向)上振动。压电元件4在筒状体33a的贯通方向上振动,由此,使弹簧部32c在筒状体33a的贯通方向上振动,使头部31大致均匀地沿上下方向位移。此外,压电元件4也可以设置在凸边部34a的上表面。On the lower surface of the flange portion 34a, a hollow circular piezoelectric element 4 is provided to match the shape of the flange portion 34a. The piezoelectric element 4 vibrates in the through direction of the cylindrical body 33a (the up-down direction in the figure). The piezoelectric element 4 vibrates in the through direction of the cylindrical body 33a, thereby causing the spring portion 32c to vibrate in the through direction of the cylindrical body 33a, causing the head 31 to be displaced approximately uniformly in the up-down direction. In addition, the piezoelectric element 4 may also be provided on the upper surface of the flange portion 34a.

筒状体33a的内侧与设置于头部31的贯通孔35相连,筒状体33a的内侧及贯通孔35成为向振动板2导入气体的导入部。在筒状体33a的外侧设置有凸缘36,利用该凸缘36将气泡产生装置1A固定于液体槽10。筒状体33a的形成有该凸缘36的侧面成为振动的节点,不将压电元件4的振动传递到液体槽10,能够利用与该凸缘36接合的支承部件使液体侧与气体侧分离。The inner side of the cylindrical body 33a is connected to the through hole 35 provided in the head 31, and the inner side of the cylindrical body 33a and the through hole 35 serve as an inlet portion for introducing gas into the vibration plate 2. A flange 36 is provided on the outer side of the cylindrical body 33a, and the bubble generating device 1A is fixed to the liquid tank 10 by the flange 36. The side surface of the cylindrical body 33a where the flange 36 is formed serves as a vibration node, and the vibration of the piezoelectric element 4 is not transmitted to the liquid tank 10, and the liquid side and the gas side can be separated by a support member joined to the flange 36.

(变形例2)(Variant 2)

图6是变形例2所涉及的气泡产生装置1B的剖视图。此外,对图6所示的气泡产生装置1B中的与图2所示的气泡产生装置1相同的结构标注相同的附图标记,不重复详细的说明。另外,在图6所示的气泡产生装置1B中,省略了振动板2的图示。FIG6 is a cross-sectional view of the bubble generating device 1B according to Modification 2. In addition, the same reference numerals are given to the same structures in the bubble generating device 1B shown in FIG6 as those in the bubble generating device 1 shown in FIG2 , and detailed descriptions thereof will not be repeated. In addition, in the bubble generating device 1B shown in FIG6 , the vibrating plate 2 is omitted from illustration.

在气泡产生装置1B中,利用压电元件4经由振动体3B使振动板2振动。图6所示的振动体3B包括头部31、弹簧部32d、筒状体33b、配重部34b。In the bubble generating device 1B, the vibration plate 2 is vibrated via the vibration body 3B by the piezoelectric element 4. The vibration body 3B shown in Fig. 6 includes a head 31, a spring portion 32d, a cylindrical body 33b, and a weight portion 34b.

弹簧部32d在位于支承头部31那个位置的外侧的位置受筒状体33b支承。筒状体33b为圆筒状的形状。筒状体33b通过一端支承弹簧部32d。筒状体33b在与弹簧部32d侧相反一侧的端部的外侧具有配重部34b。此外,筒状体33b及配重部34b设置于在利用压电元件4使弹簧部32d振动的情况下使筒状体33b的侧面的位移量为规定范围内的位置。The spring portion 32d is supported by the cylindrical body 33b at a position located outside the position of the support head 31. The cylindrical body 33b is cylindrical in shape. The cylindrical body 33b supports the spring portion 32d through one end. The cylindrical body 33b has a counterweight portion 34b on the outside of the end portion on the side opposite to the spring portion 32d side. In addition, the cylindrical body 33b and the counterweight portion 34b are arranged at a position where the displacement of the side surface of the cylindrical body 33b is within a specified range when the spring portion 32d is vibrated by the piezoelectric element 4.

在弹簧部32d的下表面,与弹簧部32d的形状相匹配地设置有中空圆状的压电元件4。压电元件4在设置于头部31的贯通孔35的贯通方向(图中为上下方向)上振动。压电元件4在贯通孔35的贯通方向上振动,由此使弹簧部32d在贯通孔35的贯通方向上振动,使头部31大致均匀地沿上下方向位移。On the lower surface of the spring portion 32d, a hollow circular piezoelectric element 4 is provided to match the shape of the spring portion 32d. The piezoelectric element 4 vibrates in the through-hole 35 provided in the head portion 31 (the up-down direction in the figure). The piezoelectric element 4 vibrates in the through-hole 35, thereby vibrating the spring portion 32d in the through-hole 35, and displacing the head portion 31 substantially uniformly in the up-down direction.

筒状体33b的内侧、设置于压电元件4的孔以及设置于头部31的贯通孔35相连,成为从筒状体33b的内侧起经过贯通孔35向振动板2导入气体的导入部。虽然未图示,但在筒状体33b的外侧设置有凸缘,利用该凸缘将气泡产生装置1B固定于液体槽10。筒状体33b的形成有该凸缘的侧面成为振动的节点,不将压电元件4的振动传递到液体槽10,能够利用与该凸缘接合的支承部件使液体侧与气体侧分离。The inner side of the cylindrical body 33b, the hole provided in the piezoelectric element 4, and the through hole 35 provided in the head 31 are connected to form an introduction portion for introducing gas from the inner side of the cylindrical body 33b through the through hole 35 to the vibration plate 2. Although not shown, a flange is provided on the outer side of the cylindrical body 33b, and the bubble generating device 1B is fixed to the liquid tank 10 by the flange. The side surface of the cylindrical body 33b formed with the flange becomes a node of vibration, and the vibration of the piezoelectric element 4 is not transmitted to the liquid tank 10, and the liquid side and the gas side can be separated by the support member connected to the flange.

对将气泡产生装置1B固定于液体槽10的气泡产生系统进行说明。图7是用于对气泡产生装置的安装位置进行说明的气泡产生系统的概略图。The following describes a bubble generating system that fixes the bubble generating device 1B to the liquid tank 10. Fig. 7 is a schematic diagram of the bubble generating system for explaining the attachment position of the bubble generating device.

图8是用于对气泡产生装置的另一安装位置进行说明的气泡产生系统的概略图。此外,对图7及图8所示的气泡产生系统中的与图1所示的气泡产生系统100相同的结构标注相同的附图标记,不重复详细的说明。Fig. 8 is a schematic diagram of the bubble generating system for explaining another installation position of the bubble generating device. The same components of the bubble generating system shown in Figs. 7 and 8 as those of the bubble generating system 100 shown in Fig. 1 are denoted by the same reference numerals, and detailed description thereof will not be repeated.

在图7的(a)所示的气泡产生系统100A中,气泡产生装置1B固定在液体槽10的底面,使得至少支承振动板2的振动体3B的局部被液体槽10的液体浸泡。在图7的(b)所示的气泡产生系统100B中,气泡产生装置1B固定在液体槽10的侧面,使得至少支承振动板2的振动体3B的局部被液体槽10的液体浸泡。In the bubble generating system 100A shown in FIG. 7( a ), the bubble generating device 1B is fixed to the bottom surface of the liquid tank 10 so that at least a portion of the vibrating body 3B supporting the vibrating plate 2 is immersed in the liquid of the liquid tank 10. In the bubble generating system 100B shown in FIG. 7( b ), the bubble generating device 1B is fixed to the side surface of the liquid tank 10 so that at least a portion of the vibrating body 3B supporting the vibrating plate 2 is immersed in the liquid of the liquid tank 10.

在图8所示的气泡产生系统100C中,气泡产生装置1B的安装位置比液体槽10的液面靠上侧,气泡产生装置1B朝向液体槽10的底面固定,使得至少支承振动板2的振动体3B的局部被液体槽10的液体浸泡。In the bubble generating system 100C shown in Figure 8, the installation position of the bubble generating device 1B is higher than the liquid surface of the liquid tank 10, and the bubble generating device 1B is fixed toward the bottom surface of the liquid tank 10 so that at least a portion of the vibrating body 3B supporting the vibration plate 2 is immersed in the liquid of the liquid tank 10.

在图7及图8中对气泡产生装置1B向液体槽10安装的安装位置进行了说明,但气泡产生装置1及气泡产生装置1A也能够相对于液体槽10安装在同样的位置。此外,与采用朗之万型振子的振动体3的气泡产生装置1相比,在气泡产生装置1A及气泡产生装置1B中,由于沉入液体中的振动体3A、3B的部分少,因此容易安装于液体槽10的底面,不必选择液体槽10的面而进行安装。7 and 8 illustrate the installation position of the bubble generating device 1B in the liquid tank 10, but the bubble generating device 1 and the bubble generating device 1A can also be installed in the same position relative to the liquid tank 10. In addition, compared with the bubble generating device 1 using the vibrating body 3 of the Langevin type vibrator, the bubble generating device 1A and the bubble generating device 1B can be easily installed on the bottom surface of the liquid tank 10 because the vibrating body 3A, 3B is less immersed in the liquid, and it is not necessary to select the surface of the liquid tank 10 for installation.

(方式)(Way)

(1)本公开的气泡产生装置是安装于液体槽,在液体槽的液体中产生微小气泡的气泡产生装置,具备:振动板,形成有多个开口部,第一面与液体槽的液体接触,第二面与气体接触;振动体,支承振动板;以及压电元件,设置于振动体,并使振动板振动,对于形成于振动板的多个开口部各自的形状而言,第一面侧的开口直径比第二面侧的开口直径大。(1) The bubble generating device disclosed in the present invention is a bubble generating device installed in a liquid tank and generates tiny bubbles in the liquid in the liquid tank, comprising: a vibration plate, which is formed with a plurality of openings, a first surface of which is in contact with the liquid in the liquid tank, and a second surface of which is in contact with the gas; a vibration body, which supports the vibration plate; and a piezoelectric element, which is arranged on the vibration body and causes the vibration plate to vibrate, wherein the opening diameter on the first surface side is larger than the opening diameter on the second surface side with respect to the shapes of the plurality of openings formed on the vibration plate.

根据本公开的气泡产生装置,对于形成于振动板的多个开口部各自的形状而言,第一面侧的开口直径比第二面侧的开口直径大,因此能够通过自然进气使液体产生微小气泡,由于不需要强制供给气体的供给部,因此能够实现装置的小型化、低成本化。According to the bubble generating device disclosed in the present invention, with respect to the shapes of the plurality of openings formed on the vibration plate, the opening diameter on the first surface side is larger than the opening diameter on the second surface side, so that tiny bubbles can be generated in the liquid through natural air intake. Since there is no need for a forced gas supply portion, the device can be miniaturized and cost-effective.

(2)根据(1)所记载的气泡产生装置,多个开口部各自的截面形状为锥形。由此,气泡产生装置容易通过自然进气使液体产生微小气泡。(2) According to the bubble generating device described in (1), each of the plurality of openings has a tapered cross-sectional shape. Thus, the bubble generating device can easily generate fine bubbles in the liquid by natural air intake.

(3)根据(1)或(2)所记载的气泡产生装置,在将第一面侧的开口直径设为Rb,将从振动板到液体槽的液面的距离设为h,将水的表面张力为1的液体的表面张力比设为γa的情况下,满足Rb<28×10-6×(γa)/h的关系。由此,在气泡产生装置中,液体不会从振动板的开口部泄漏。(3) According to the bubble generating device described in (1) or (2), when the opening diameter of the first surface side is set to Rb, the distance from the vibration plate to the liquid surface of the liquid tank is set to h, and the surface tension ratio of the liquid whose surface tension is 1 is set to γa, the relationship of Rb<28× 10-6 ×(γa)/h is satisfied. As a result, in the bubble generating device, the liquid does not leak from the opening of the vibration plate.

(4)根据(1)或(2)所记载的气泡产生装置,在将第一面侧的开口直径设为Rb,将从振动板到液体槽的液面的距离设为h,将水的表面张力为1的液体的表面张力比设为γa的情况下,满足Rb<5×10-6×(γa)/h的关系。由此,在气泡产生装置中,液体不会从振动板的开口部泄漏。(4) According to the bubble generating device described in (1) or (2), when the opening diameter of the first surface side is set to Rb, the distance from the vibration plate to the liquid surface of the liquid tank is set to h, and the surface tension ratio of the liquid whose surface tension is 1 is set to γa, the relationship of Rb<5× 10-6 ×(γa)/h is satisfied. As a result, in the bubble generating device, the liquid does not leak from the opening of the vibration plate.

(5)根据(1)~(4)中任一项所记载的气泡产生装置,振动体由朗之万型振子构成。由此,气泡产生装置容易使振动板进行上下振动的活塞振动。(5) The bubble generating device according to any one of (1) to (4), wherein the vibrating body is formed of a Langevin type vibrator. This makes it easier for the bubble generating device to cause the vibrating plate to perform piston vibration in which the vibrating plate vibrates up and down.

(6)根据(1)~(4)中任一项所记载的气泡产生装置,振动体包括:头部,对振动板进行支承;板状的弹簧部,对头部进行支承;筒状体,在位于比对头部进行支承的位置靠外侧的位置处支承弹簧部的一端;以及板状的凸边部,设置于筒状体的端部,且从筒状体的位置向外侧延伸,压电元件设置于凸边部的靠筒状体侧的第一面或者与第一面相反一侧的第二面。由此,气泡产生装置容易使振动板进行上下振动的活塞振动。(6) The bubble generating device according to any one of (1) to (4), wherein the vibrating body comprises: a head portion supporting the vibrating plate; a plate-shaped spring portion supporting the head portion; a cylindrical body supporting one end of the spring portion at a position located outside the position supporting the head portion; and a plate-shaped flange portion provided at the end of the cylindrical body and extending outward from the position of the cylindrical body, wherein the piezoelectric element is provided on a first surface of the flange portion on the cylindrical body side or on a second surface on the opposite side to the first surface. Thus, the bubble generating device can easily cause the vibrating plate to vibrate in a piston manner so as to vibrate up and down.

(7)根据(1)~(4)中任一项所记载的气泡产生装置,振动体包括:头部,对振动板进行支承;板状的弹簧部,对头部进行支承;筒状体,在位于比对头部进行支承的位置靠外侧的位置处支承弹簧部的一端;以及配重部,设置于筒状体的端部,压电元件设置于弹簧部的受筒状体支承的面。由此,气泡产生装置容易使振动板进行上下振动的活塞振动。(7) The bubble generating device according to any one of (1) to (4), wherein the vibrating body includes: a head portion supporting the vibrating plate; a plate-shaped spring portion supporting the head portion; a cylindrical body supporting one end of the spring portion at a position located outside the position supporting the head portion; and a weight portion provided at an end of the cylindrical body, wherein the piezoelectric element is provided on a surface of the spring portion supported by the cylindrical body. Thus, the bubble generating device can easily cause the vibrating plate to vibrate in a piston manner so as to vibrate up and down.

(8)本公开的气泡产生系统具备(1)~(7)中任一项所记载的气泡产生装置和液体槽。由此,气泡产生系统能够实现装置的小型化、低成本化。(8) The bubble generation system of the present disclosure includes the bubble generation device described in any one of (1) to (7) and a liquid tank. Thus, the bubble generation system can achieve miniaturization and cost reduction of the device.

(9)根据(8)所记载的气泡产生系统,气泡产生装置固定在液体槽的底面或侧面,使至少对振动板进行支承的振动体的局部被液体槽的液体浸泡。由此,气泡产生系统能够从液体槽的底面或侧面在液体中产生微小气泡。(9) According to the bubble generating system described in (8), the bubble generating device is fixed to the bottom surface or side surface of the liquid tank so that at least a part of the vibrating body supporting the vibrating plate is immersed in the liquid of the liquid tank. Thus, the bubble generating system can generate micro bubbles in the liquid from the bottom surface or side surface of the liquid tank.

(10)根据(8)所记载的气泡产生系统,气泡产生装置使安装位置比液体槽的液面靠上侧,并朝向液体槽的底面固定,使至少对振动板进行支承的振动体的局部被液体槽的液体浸泡。由此,气泡产生系统能够从液体槽的上表面在液体中产生微小气泡。(10) According to the bubble generating system described in (8), the bubble generating device is installed at a position higher than the liquid surface of the liquid tank and fixed toward the bottom surface of the liquid tank, so that at least a portion of the vibrating body supporting the vibrating plate is immersed in the liquid of the liquid tank. Thus, the bubble generating system can generate micro bubbles in the liquid from the upper surface of the liquid tank.

本次公开的实施方式在所有方面都是例示,不应认为是对本发明进行的限制。本公开的范围由权利要求书表示而不是由上述说明表示,包含与权利要求书等同的意思和范围内的全部变更。The embodiments disclosed herein are illustrative in all aspects and should not be construed as limiting the present invention. The scope of the present disclosure is indicated by the claims rather than the above description, and includes all modifications within the meaning and scope equivalent to the claims.

附图标记说明Description of Reference Numerals

1、1A、1B…气泡产生装置;2…振动板;2a…开口部;3、3A、3B…振动体;4、41、42…压电元件;5…保持法兰;10…液体槽;20…控制器;31…头部;32、33a、33b…筒状体;32a…上侧金属环;32b…下侧金属环;32c、32d…弹簧部;34…紧固用螺栓;34a…凸边部;34b…配重部;35…贯通孔;36…凸缘;43、44…端子;100、100A~100C…气泡产生系统;200…气泡。1. 1A, 1B…bubble generating device; 2…vibrating plate; 2a…opening; 3. 3A, 3B…vibrating body; 4. 41, 42…piezoelectric element; 5…holding flange; 10…liquid tank; 20…controller; 31…head; 32. 33a, 33b…cylindrical body; 32a…upper metal ring; 32b…lower metal ring; 32c, 32d…spring part; 34…fastening bolt; 34a…flange; 34b…weight part; 35…through hole; 36…flange; 43, 44…terminals; 100, 100A~100C…bubble generating system; 200…bubble.

Claims (10)

1.一种气泡产生装置,其安装于液体槽,在所述液体槽的液体中产生微小气泡,其中,1. A bubble generating device, which is installed in a liquid tank and generates micro bubbles in the liquid in the liquid tank, wherein: 所述气泡产生装置具备:The bubble generating device comprises: 振动板,形成有多个开口部,第一面与所述液体槽的液体接触,第二面与气体接触;a vibration plate having a plurality of openings formed therein, a first surface of the vibration plate being in contact with the liquid in the liquid tank, and a second surface of the vibration plate being in contact with the gas; 振动体,支承所述振动板;和a vibrating body supporting the vibrating plate; and 压电元件,设置于所述振动体,使所述振动板振动,A piezoelectric element is provided on the vibrating body to vibrate the vibrating plate. 对于形成于所述振动板的所述多个开口部各自的形状而言,所述第一面侧的开口直径比所述第二面侧的开口直径大。The plurality of openings formed in the vibration plate each have a shape in which an opening diameter on the first surface side is larger than an opening diameter on the second surface side. 2.根据权利要求1所述的气泡产生装置,其中,2. The bubble generating device according to claim 1, wherein: 所述多个开口部各自的截面形状为锥形。Each of the plurality of openings has a tapered cross-sectional shape. 3.根据权利要求1或2所述的气泡产生装置,其中,3. The bubble generating device according to claim 1 or 2, wherein: 在将所述第一面侧的开口直径设为Rb,将从所述振动板到所述液体槽的液面的距离设为h,将水的表面张力为1的液体的表面张力比设为γa的情况下,满足Rb<28×10-6×(γa)/h的关系。When the opening diameter of the first surface side is Rb, the distance from the vibration plate to the liquid surface of the liquid tank is h, and the surface tension ratio of the liquid whose surface tension is 1 is γa, the relationship of Rb<28×10 −6 ×(γa)/h is satisfied. 4.根据权利要求1或2所述的气泡产生装置,其中,4. The bubble generating device according to claim 1 or 2, wherein: 在将所述第一面侧的开口直径设为Rb,将从所述振动板到所述液体槽的液面的距离设为h,将水的表面张力为1的液体的表面张力比设为γa的情况下,满足Rb<5×10-6×(γa)/h的关系。When the opening diameter of the first surface side is Rb, the distance from the vibration plate to the liquid surface of the liquid tank is h, and the surface tension ratio of the liquid whose surface tension is 1 is γa, the relationship of Rb<5×10 −6 ×(γa)/h is satisfied. 5.根据权利要求1~4中任一项所述的气泡产生装置,其中,5. The bubble generating device according to any one of claims 1 to 4, wherein: 所述振动体由朗之万型振子构成。The vibrating body is composed of a Langevin type vibrator. 6.根据权利要求1~4中任一项所述的气泡产生装置,其中,6. The bubble generating device according to any one of claims 1 to 4, wherein: 所述振动体包括:The vibrating body comprises: 头部,支承所述振动板;A head portion, supporting the vibration plate; 板状的弹簧部,支承所述头部;a plate-shaped spring portion supporting the head; 筒状体,在位于比支承所述头部的位置靠外侧的位置处支承所述弹簧部的一端;以及a cylindrical body that supports one end of the spring portion at a position located outside a position that supports the head portion; and 板状的凸边部,设置于所述筒状体的端部,从所述筒状体的位置向外侧延伸,The plate-shaped flange portion is provided at the end of the cylindrical body and extends outward from the position of the cylindrical body. 所述压电元件设置于所述凸边部的靠所述筒状体侧的第一面或者与所述第一面相反一侧的第二面。The piezoelectric element is provided on a first surface of the flange portion on the cylindrical body side or a second surface on the opposite side to the first surface. 7.根据权利要求1~4中任一项所述的气泡产生装置,其中,7. The bubble generating device according to any one of claims 1 to 4, wherein: 所述振动体包括:The vibrating body comprises: 头部,支承所述振动板;A head portion, supporting the vibration plate; 板状的弹簧部,支承所述头部;a plate-shaped spring portion supporting the head; 筒状体,在位于比支承所述头部的位置靠外侧的位置处支承所述弹簧部的一端;以及a cylindrical body that supports one end of the spring portion at a position located outside a position that supports the head portion; and 配重部,设置于所述筒状体的端部,A counterweight portion is provided at the end of the cylindrical body, 所述压电元件设置于所述弹簧部的受所述筒状体支承的面。The piezoelectric element is provided on a surface of the spring portion supported by the cylindrical body. 8.一种气泡产生系统,其中,具备:8. A bubble generating system, comprising: 权利要求1~7中任一项所述的所述气泡产生装置;和The bubble generating device according to any one of claims 1 to 7; and 所述液体槽。The liquid tank. 9.根据权利要求8所述的气泡产生系统,其中,9. The bubble generating system according to claim 8, wherein: 所述气泡产生装置固定在所述液体槽的底面或侧面,使至少对所述振动板进行支承的所述振动体的局部被所述液体槽的液体浸泡。The bubble generating device is fixed to the bottom surface or the side surface of the liquid tank so that at least a part of the vibrating body supporting the vibrating plate is immersed in the liquid of the liquid tank. 10.根据权利要求8所述的气泡产生系统,其中,10. The bubble generating system according to claim 8, wherein: 所述气泡产生装置使安装位置比所述液体槽的液面靠上侧,并朝向所述液体槽的底面固定,使至少对所述振动板进行支承的所述振动体的局部被所述液体槽的液体浸泡。The bubble generating device is mounted above the liquid surface of the liquid tank and fixed toward the bottom surface of the liquid tank so that at least a portion of the vibrating body supporting the vibration plate is immersed in the liquid of the liquid tank.
CN202380032414.XA 2022-05-30 2023-01-24 Bubble generating device and bubble generating system Pending CN118973695A (en)

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