CN118874935B - Semiconductor baffle film removing and cleaning device and cleaning method thereof - Google Patents
Semiconductor baffle film removing and cleaning device and cleaning method thereof Download PDFInfo
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- CN118874935B CN118874935B CN202411388063.9A CN202411388063A CN118874935B CN 118874935 B CN118874935 B CN 118874935B CN 202411388063 A CN202411388063 A CN 202411388063A CN 118874935 B CN118874935 B CN 118874935B
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- baffle
- plate
- electric telescopic
- telescopic rod
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- 238000004140 cleaning Methods 0.000 title claims abstract description 69
- 239000004065 semiconductor Substances 0.000 title claims abstract description 28
- 238000000034 method Methods 0.000 title claims abstract description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 41
- 238000005202 decontamination Methods 0.000 claims abstract description 36
- 230000003588 decontaminative effect Effects 0.000 claims abstract description 36
- 238000003825 pressing Methods 0.000 claims abstract description 11
- 230000008569 process Effects 0.000 claims abstract description 7
- 238000003860 storage Methods 0.000 claims description 74
- 238000012546 transfer Methods 0.000 claims description 21
- 238000001035 drying Methods 0.000 claims description 10
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 8
- 230000001680 brushing effect Effects 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 claims description 7
- 238000000429 assembly Methods 0.000 claims description 3
- 230000000712 assembly Effects 0.000 claims description 3
- 238000002791 soaking Methods 0.000 claims description 3
- 238000012545 processing Methods 0.000 abstract description 2
- 238000000151 deposition Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000005201 scrubbing Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003032 molecular docking Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
- B08B1/12—Brushes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/20—Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/08—Cleaning containers, e.g. tanks
- B08B9/087—Cleaning containers, e.g. tanks by methods involving the use of tools, e.g. brushes, scrapers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B5/00—Drying solid materials or objects by processes not involving the application of heat
- F26B5/08—Drying solid materials or objects by processes not involving the application of heat by centrifugal treatment
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Molecular Biology (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning In General (AREA)
Abstract
The invention discloses a semiconductor baffle film removing and cleaning device and a cleaning method thereof, which belong to the technical field of semiconductor device processing, wherein the cleaning device comprises a cleaning tank, the cleaning tank comprises a decontamination tank and a clean water tank, a supporting piece is fixed in the decontamination tank, a first connecting plate is fixed at one end of the decontamination tank, the top of first connecting plate is fixed with vertical first electric telescopic handle, and the vertical second electric telescopic handle that is fixed with on the output shaft of first electric telescopic handle, be fixed with vertical first connecting strip on the output shaft of second electric telescopic handle, the lower extreme of first connecting strip is fixed with the clamp plate, and the below of clamp plate is equipped with the rubber layer. According to the cleaning device, the elastic supporting piece and the pressing plate capable of lifting and moving left and right are arranged, so that the upper side of the baffle plate in the supporting piece can be rubbed, the baffle plate is controlled to rotate in the decontamination pond, in the rotating process, bristles can brush the outer wall and the end part of the baffle plate, and the brush head can brush the inner wall of the baffle plate.
Description
Technical Field
The invention belongs to the technical field of semiconductor device processing, and particularly relates to a semiconductor baffle film removing and cleaning device and a cleaning method thereof.
Background
The semiconductor baffle is an etching baffle used in the high-end manufacturing process of chip semiconductor, is annular, the film removing of the semiconductor baffle refers to a process in the production process of the semiconductor, the semiconductor is subjected to etching process to obtain a required pattern, but the pattern is etched under the cover protection of a dry film or a wet film, and the etching liquid medicine can corrode conductive metal on the baffle, so that the required pattern is protected by the dry film or the wet film, but after the required pattern is obtained, the dry film or the wet film covered on the baffle is removed, and most of liquid medicine used for removing the film on the baffle is NaOH solution used in factories.
Because the semiconductor baffle is annular, and the diameters of the semiconductor baffles of different specifications are generally different, the semiconductor baffles of different sizes are difficult to brush in batches, the efficiency is low when the semiconductor baffles are brushed one by one, and the semiconductor baffles are usually placed and drained after film stripping and cleaning are finished, however, the draining is often influenced by environment, the drying duration is long for a low-temperature windless environment, the cleaning efficiency is low, and in order to solve the problems, the semiconductor baffle film stripping and cleaning device and the cleaning method are provided.
The foregoing is not necessarily a prior art, and falls within the technical scope of the inventors.
Disclosure of Invention
In order to solve the above problems, an object of the present invention is to provide a method of manufacturing a semiconductor device,
In order to achieve the above purpose, the invention provides a semiconductor baffle film removing and cleaning device which is used for cleaning a baffle plate, wherein the baffle plate is annular and comprises a cleaning tank, the cleaning tank comprises a decontamination tank and a clean water tank, and a supporting piece is fixed in the decontamination tank.
One end of decontamination pond is fixed with first connecting plate, and the top of first connecting plate is fixed with vertical first electric telescopic handle, is fixed with horizontally second electric telescopic handle on the output shaft of first electric telescopic handle perpendicularly, is fixed with vertical first connecting strip on the output shaft of second electric telescopic handle, and the lower extreme of first connecting strip is fixed with the clamp plate, and the below of clamp plate is equipped with the rubber layer.
The support piece comprises a plurality of first shaft sleeves, the first shaft sleeves are fixed on a bottom plate of the decontamination pond, the upper ends of the first shaft sleeves are sleeved with first sliding shafts, rectangular boxes are fixed at the upper ends of the first sliding shafts, first springs are fixedly connected between the rectangular boxes and the first shaft sleeves, bristles are arranged on the inner walls of the rectangular boxes, and the second electric telescopic rods are parallel to the side walls of the rectangular boxes.
Furthermore, the cleaning device also comprises symmetrically distributed connecting tables, wherein the two connecting tables are respectively positioned at two sides of the cleaning pool, one side of each connecting table is provided with a storage table, a plurality of storage boxes for storing baffle plates are arranged on each storage table, and a transfer assembly is arranged on each connecting table in a sliding manner;
further, a first guide rail parallel to the cleaning pool is arranged above the connecting table.
The transfer assembly comprises an electric first sliding block, the first sliding block is located in the first guide rail and slides, a vertical third electric telescopic rod is fixed above the first sliding block, a first driving box is fixed on an output shaft of the third electric telescopic rod, a first motor is fixed in the first driving box, and a first connecting block penetrates through a top plate of the first driving box and is fixed on an output shaft of the first motor.
One side of the first connecting block is fixed with a first cylinder, an output shaft of the first cylinder penetrates through the first connecting block to be fixed with a second driving box, a second motor is fixed in the second driving box, an output shaft of the second motor penetrates through a side plate of the second driving box far away from the first cylinder to be vertically fixed with a fourth electric telescopic rod, and a second connecting block is fixed on an output shaft of the fourth electric telescopic rod.
One side of the second connecting block, which is close to the second motor, is fixed with a third motor, an output shaft of the third motor penetrates through the second connecting block to be fixed with a horizontal second connecting bar, a plurality of second sliding shafts are arranged on the second connecting bar in a sliding mode, the second sliding shafts are perpendicular to the second connecting bar, one end of each second sliding shaft is fixed with a U-shaped supporting plate, the other end of each second sliding shaft is fixed with a second connecting plate, a second spring is fixedly connected between each U-shaped supporting plate and the second connecting bar, and one side, which is far away from the second connecting bar, of each second connecting plate is fixed with a brush head.
Further, the storage table is provided with a feeding assembly in a sliding manner, and the feeding assembly is used for feeding the storage box.
Further, a second guide rail parallel to the first guide rail is arranged on the storage table;
The feeding assembly comprises an electric second sliding block, the second sliding block is located in the second guide rail and slides, a vertical fifth electric telescopic rod is fixed above the second sliding block, a third connecting block is fixed on an output shaft of the fifth electric telescopic rod, a second cylinder is fixed on one side, away from the cleaning tank, of the third connecting block, and a third driving box is fixed on the output shaft of the second cylinder through the third connecting block.
The third drive box internal fixation has the fourth motor, and the output shaft of fourth motor runs through the third drive box and keeps away from the one side curb plate of second cylinder and be fixed with horizontal depositing bucket, and depositing the bung of bucket and being located and keeping away from fourth motor one end, depositing the interior first backup pad that is equipped with arc of bucket, and the one end of first backup pad is located the external world, and the one end that first backup pad is located the external world is fixed with the bung.
The storage barrel is internally provided with a vertical pushing plate in a sliding manner, a third spring is fixedly connected between the pushing plate and the storage barrel, and the pushing plate is positioned at the barrel opening of the storage barrel in a natural state of the third spring.
Further, one end of the first supporting plate, which is close to the barrel cover, is provided with a recess, a third cylinder is fixed at the bottom of the first supporting plate, and an output shaft of the third cylinder penetrates through the first supporting plate to be fixed with an arc-shaped supporting bar.
The feeding assembly further comprises a locking piece used for connecting the barrel cover and the storage barrel, and a gap is reserved between the barrel cover and the storage barrel when the barrel cover is connected with the storage barrel.
Further, the locking piece comprises a connecting sleeve fixed on one side of the barrel cover, a vertical third sliding shaft is arranged on the connecting sleeve in a sliding mode, a driving block is fixed at the upper end of the third sliding shaft, a connecting rod is vertically fixed below the third sliding shaft, an inserting block is fixed on the connecting rod, and the locking piece further comprises a limiting sleeve fixed on one side of the storage barrel.
Further, a first distance sensor is fixed at the center of the bottom plate in the storage box, a second distance sensor is fixed on the second connecting strip, the first distance sensor and the second distance sensor are electrically connected with a preset control system, and the first distance sensor is used for detecting the distance between the maximum baffle plate stored in the storage box and the bottom plate of the storage box.
Furthermore, naOH solution is added into the decontamination pond, and cleaning water is contained in the clean water pond.
The film removing and cleaning method for the semiconductor baffle is applied to the cleaning device and comprises the following steps of:
s1, feeding a baffle;
The locking piece is controlled to be opened through the transferring assembly, the first supporting plate is pulled out of the storage barrel to be of a preset length, then a plurality of baffles are vertically placed on the first supporting plate, and the baffles are inserted into the limiting sleeve through the transferring assembly after placement.
The baffle to be fed is controlled to move to the upper part of the corresponding storage box, the gap is controlled to rotate downwards by starting the fourth motor, and the corresponding baffle is pushed out of the gap into the storage box by starting the third cylinder to control the support bar to move, so that the feeding of the baffle is realized.
S2, transferring the baffle plate into a decontamination pool;
through placing the baffle one by one in the rectangle box with transporting the subassembly, the concrete operation is:
The second connecting strip is controlled to be inserted into the corresponding baffle, the axis of the third motor is required to penetrate through the center of the largest baffle in the rectangular box, the third motor is started to control the second connecting strip to rotate, if the distance detected by the second distance sensor is the same as the distance detected by the second distance sensor when the second distance sensor faces upwards, the corresponding U-shaped supporting plate is directly controlled to move to correspond to the baffle, the corresponding baffle is taken out of the rectangular box through the fourth electric telescopic rod, the corresponding U-shaped supporting plate is hung on the corresponding U-shaped supporting plate, if the distance detected by the second distance sensor when the second distance sensor faces upwards is different from the distance detected by the second electric telescopic rod when the second distance sensor faces downwards, the corresponding U-shaped supporting plate is controlled to move to correspond to the baffle, the smallest baffle in the rectangular box is lifted up through the fourth electric telescopic rod, the corresponding baffle is taken out through the first air cylinder, the corresponding baffle is hung on the corresponding U-shaped supporting plate, and the baffle on the U-shaped supporting plate is controlled to be placed in the corresponding rectangular box after all the U-shaped supporting plates are hung in the baffle.
S3, soaking;
The second electric telescopic rod is started to control the pressing plate to move to the position above the baffle plate in the decontamination pond, and the first electric telescopic rod is started to control the pressing plate to descend to press the baffle plate, so that the baffle plate is fully immersed in the decontamination pond, and the decontamination pond is soaked for a preset period of time.
S4, brushing;
The corresponding second connecting strips are controlled to descend by starting the corresponding fourth electric telescopic rods, so that the brush heads are propped against the inner walls of the corresponding baffles, the upper sides of the baffles are rubbed by starting the second electric telescopic rods, the upper sides of the baffles are enabled to be positioned in a decontamination pool to rotate, bristles in the rectangular box brush the outer walls and the end parts of the baffles in the rotating process, and the brush heads brush the inner walls of the baffles.
S5, cleaning;
The control U-shaped backup pad lifts up corresponding baffle, and in the baffle immersed clean water tank was passed through first slider and fourth electric telescopic handle cooperation, the baffle was located clean water tank horizontal hunting through starting first slider control baffle.
S6, spin-drying;
Corresponding U-shaped supporting plates on the two transfer assemblies are controlled to be clamped on the inner walls of the two sides of the corresponding baffle plates respectively, then the two second motors are adjusted to be coaxial, the second motors are started to control the baffle plates to rotate so as to throw out water on the baffle plates, and after drying is finished, the baffle plates are stored into corresponding storage boxes again to wait for use.
S7, brushing a clean water tank;
The brush head is controlled to be contacted with the corresponding inner wall on the clean water tank, and the brush head is controlled to move up and down on the inner wall of the transfer assembly by starting the second motor and the fourth electric telescopic rod to realize the scrubbing of the side wall of the clean water tank.
The brush head is controlled to contact with a bottom plate in the clean water tank, and the brush head is controlled to move left and right by starting the first sliding block. And cleaning the bottom plate of the clean water tank.
The semiconductor baffle film removing and cleaning device and the cleaning method thereof provided by the invention have the following beneficial effects:
1. According to the cleaning device, the elastic supporting piece and the pressing plate which can be lifted and moved left and right are arranged, so that the upper side of the baffle plate in the supporting piece can be rubbed, the baffle plate is controlled to rotate in the decontamination pond, in the rotating process, bristles can brush the outer wall and the end part of the baffle plate, the brush head can brush the inner wall of the baffle plate, and therefore the baffle plate can be brushed in all directions, and meanwhile, the cleaning device can brush the baffle plates with different diameters and has high applicability;
2. According to the cleaning device, the transfer group is arranged, so that the locking piece can be controlled to be opened and closed, the transfer of the baffle plate can be completed, the scrubbing of the inner wall of the baffle plate can be realized by the auxiliary decontamination pool, meanwhile, the two transfer components can be matched for use during spin-drying, the baffle plate is controlled to rotate at a high speed, the drying efficiency of the baffle plate is improved, multiple purposes can be realized, and the equipment cost is reduced;
3. The cleaning device disclosed by the invention has the advantages that the brush head is controlled to contact with the corresponding inner wall on the clean water tank, the brush head is controlled to move up and down on the inner wall of the transfer assembly by starting the second motor and the fourth electric telescopic rod in a matched manner, so that the side wall of the clean water tank is brushed, the brush head is controlled to contact with the bottom plate in the clean water tank, and the first sliding block is started to control the brush head to move left and right, so that the bottom plate of the clean water tank is cleaned, therefore, the cleaning device can realize automatic brushing of the clean water tank, and labor is saved;
4. According to the cleaning device, the plurality of baffles with different sizes are nested together for storage, and the nested baffles can be placed into the corresponding rectangular boxes one by one through the transfer assembly, so that the storage quantity of the baffles can be increased, the feeding frequency is reduced, and the volume of equipment is reduced.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and do not constitute a limitation on the invention. In the drawings:
Fig. 1 is a schematic structural view of a semiconductor baffle film-removing cleaning device according to the present invention.
FIG. 2 is a schematic view of the structure of the cleaning tank of the present invention.
FIG. 3 is a schematic view showing the internal structure of the decontamination tank of the present invention.
FIG. 4 is a schematic view of a portion of the structure of the docking station and transfer assembly of the present invention.
Fig. 5 is an enlarged schematic view of the structure at a in fig. 4.
Fig. 6 is an enlarged schematic view of the structure at B in fig. 1.
Fig. 7 is a schematic cross-sectional view of a part of the structure of the feeding assembly of the present invention.
Fig. 8 is a schematic view of a part of the structure of the feeding assembly of the present invention.
Fig. 9 is a schematic view of the baffle of the present invention stored in the storage box.
In the figure, 1, a decontamination pool; 2, a clean water tank; 3, a supporting piece; 4, connecting table, 5, depositing table, 6, depositing box, 7, transferring assembly, 8, feeding assembly, 10, baffle, 11, first connecting plate, 12, first electric telescopic rod, 13, second electric telescopic rod, 14, first connecting bar, 15, pressing plate, 31, first shaft sleeve, 32, first sliding shaft, 33, rectangular box, 34, first spring, 35, brush hair, 41, first guide rail, 51, second guide rail, 61, first distance sensor, 71, first slide block, 72, third electric telescopic rod, 73, first driving box, 74, first motor, 75, first connecting block, 76, first cylinder, 77, second driving box, 78, second motor, 79, fourth electric telescopic rod, 711, second connecting block, 713, third motor, 714, second connecting bar, 715, second sliding shaft, 716, U-shaped supporting plate, 717, second connecting plate, 718, second spring, 719, brush head, 720, second distance sensor, 73, first driving box, 74, first motor, 75, first connecting block, 76, first cylinder, 77, second driving box, 78, second motor, 79, fourth electric telescopic rod, 711, second connecting block, 713, third motor, 714, second connecting bar, 715, second sliding shaft, 716, U-shaped supporting plate, 717, second connecting plate, 718, second spring, 719, brush head, 720, second distance sensor, 81, second sliding block, 74, second driving box, 74, first motor, 83, flexible rod, 819, flexible rod, flexible connecting block, flexible rod, flexible rod, flexible connecting rod, flexible and flexible.
Detailed Description
In order to more clearly illustrate the general inventive concept, a detailed description is given below by way of example with reference to the accompanying drawings.
In the description of the present invention, it should be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present invention and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed, mechanically connected, electrically connected, or in communication, directly connected, or indirectly connected via an intervening medium, or in communication between two elements or in an interaction relationship between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present invention, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. In the description of the present specification, the description with reference to the terms "one aspect," "some aspects," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the aspect or example is included in at least one aspect or example of the present invention. In this specification, the schematic representations of the above terms are not necessarily for the same scheme or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more aspects or examples.
The embodiment of the invention provides a semiconductor baffle film-removing cleaning device which is used for cleaning a baffle plate 10, as shown in fig. 1, the baffle plate 10 is annular, the cleaning device comprises a cleaning tank, the cleaning tank comprises a decontamination tank 1 and a clean water tank 2, naOH solution is added in the decontamination tank 1, cleaning water is contained in the clean water tank 2, a supporting piece 3 is fixed in the decontamination tank 1, the cleaning device further comprises symmetrically distributed connecting tables 4, two connecting tables 4 are respectively positioned on two sides of the cleaning tank, a storage table 5 is arranged on one side of the connecting table 4, a plurality of storage boxes 6 for storing the baffle plate 10 are placed on the storage table 5, a transfer assembly 7 is arranged on the connecting table 4 in a sliding manner, and a feeding assembly 8 for feeding the storage boxes 6 is arranged on the storage table 5 in a sliding manner.
The one end of decontamination pond 1 is fixed with first connecting plate 11, and as shown in fig. 2, the top of first connecting plate 11 is fixed with vertical first electric telescopic handle 12, is fixed with horizontal second electric telescopic handle 13 on the output shaft of first electric telescopic handle 12 perpendicularly, is fixed with vertical first connecting strip 14 on the output shaft of second electric telescopic handle 13, and the lower extreme of first connecting strip 14 is fixed with clamp plate 15, and the below of clamp plate 15 is equipped with the rubber layer.
The support 3 comprises a plurality of first shaft sleeves 31, as shown in fig. 3, the first shaft sleeves 31 are fixed on the bottom plate of the decontamination pond 1, the upper ends of the first shaft sleeves 31 are sleeved with first sliding shafts 32, rectangular boxes 33 are fixed at the upper ends of the first sliding shafts 32, first springs 34 are fixedly connected between the rectangular boxes 33 and the first shaft sleeves 31, bristles 35 are arranged on the inner walls of the rectangular boxes 33, and the second electric telescopic rods 13 are parallel to the side walls of the rectangular boxes 33.
A first guide rail 41 parallel to the washing tub is provided above the connection table 4, as shown in fig. 4.
The transfer assembly 7 comprises an electric first sliding block 71, the first sliding block 71 is located in the first guide rail 41 to slide, a vertical third electric telescopic rod 72 is fixed above the first sliding block 71, a first driving box 73 is fixed on an output shaft of the third electric telescopic rod 72, a first motor 74 is fixed in the first driving box 73, and a first connecting block 75 penetrates through a top plate of the first driving box 73 and is fixed on an output shaft of the first motor 74.
A first air cylinder 76 is fixed on one side of the first connecting block 75, a second driving box 77 is fixed on an output shaft of the first air cylinder 76 penetrating through the first connecting block 75, a second motor 78 is fixed in the second driving box 77, a fourth electric telescopic rod 79 is vertically fixed on one side plate, far away from the first air cylinder 76, of the output shaft of the second motor 78 penetrating through the second driving box 77, and a second connecting block 711 is fixed on an output shaft of the fourth electric telescopic rod 79 as shown in fig. 5.
The second connecting block 711 is close to one side of second motor 78 and is fixed with third motor 713, the output shaft of third motor 713 runs through second connecting block 711 and is fixed with horizontal second connecting strip 714, slide on the second connecting strip 714 and be equipped with a plurality of second sliding shafts 715, second sliding shaft 715 is perpendicular with second connecting strip 714, one end of second sliding shaft 715 is fixed with U-shaped backup pad 716, the other end is fixed with second connecting plate 717, fixedly connected with second spring 718 between U-shaped backup pad 716 and the second connecting strip 714, one side that second connecting plate 717 kept away from second connecting strip 714 is fixed with brush head 719, fourth electric telescopic handle 79 and third motor 713 are wireless device.
The storage table 5 is provided with a second rail 51 parallel to the first rail 41, as shown in fig. 6.
The feeding assembly 8 comprises an electric second sliding block 81, the second sliding block 81 is located in the second guide rail 51 to slide, a vertical fifth electric telescopic rod 82 is fixed above the second sliding block 81, a third connecting block 83 is fixed on an output shaft of the fifth electric telescopic rod 82, a second air cylinder 84 is fixed on one side, far away from the cleaning pool, of the third connecting block 83, and a third driving box 85 penetrates through the third connecting block 83 and is fixed on an output shaft of the second air cylinder 84.
The third drive box 85 is internally fixed with a fourth motor 86, an output shaft of the fourth motor 86 penetrates through one side plate, far away from the second air cylinder 84, of the third drive box 85 and is fixedly provided with a transverse storage barrel 87, a barrel opening of the storage barrel 87 is located at one end far away from the fourth motor 86, as shown in fig. 7, a circular arc-shaped first support plate 88 is arranged in the storage barrel 87 in a sliding mode, one end of the first support plate 88 is located outside, and one end of the first support plate 88 located outside is fixedly provided with a barrel cover 89.
The storage barrel 87 is slidably provided with a vertical push plate 811, a third spring 810 is fixedly connected between the push plate 811 and the storage barrel 87, and the push plate 811 is positioned at the barrel opening of the storage barrel 87 in a natural state of the third spring 810.
One end of the first supporting plate 88, which is close to the barrel cover 89, is provided with a recess 812, a third cylinder 813 is fixed at the bottom of the first supporting plate 88, an output shaft of the third cylinder 813 penetrates through the first supporting plate 88 to be fixed with an arc-shaped supporting bar 814, and the supporting bar 814 can be placed in the recess 812 by contracting the third cylinder 813.
The loading assembly 8 further includes a locking member for connecting the lid 89 to the storage tub 87, as shown in fig. 8, when the lid 89 is connected to the storage tub 87, a gap is left between the lid 89 and the storage tub 87, so that the baffle 10 can be removed from the storage tub 87.
The locking piece comprises a connecting sleeve 815 fixed on one side of the barrel cover 89, a vertical third sliding shaft 816 is arranged on the connecting sleeve 815 in a sliding manner, a driving block 817 is fixed at the upper end of the third sliding shaft 816, a connecting rod 818 is vertically fixed below the third sliding shaft 816, an inserting block 819 is fixed on the connecting rod 818, the locking piece further comprises a limiting sleeve 820 fixed on one side of the storage barrel 87, and when the inserting block 819 is inserted into the limiting sleeve 820, the connection between the barrel cover 89 and the storage barrel 87 is realized.
The center of the bottom plate in the storage box 6 is fixed with a first distance sensor 61, as shown in fig. 9, the second connecting strip 714 is fixed with a second distance sensor 720, the first distance sensor 61 and the second distance sensor 720 are electrically connected with a preset control system, and the first distance sensor 61 is used for detecting the distance between the largest baffle 10 stored in the storage box 6 and the bottom plate of the storage box 6, and is marked as H (as a measured value).
Assuming that the inner length of the storage box 6 is 2X0 (fixed value), the height is H0 (fixed value), and the radius of the largest baffle 10 stored in the storage box 6 is r, it can be obtained according to the pythagorean theorem that X0 2+(H+r-H0)2＝r2, the r value can be calculated, and the center position of the largest baffle 10 can be obtained, and the center coordinates of the largest baffle 10 are (0, h+r) with the first distance sensor 61 as the origin coordinates.
The film removing and cleaning method for the semiconductor baffle is applied to the cleaning device and comprises the following steps of:
S1, feeding a baffle 10;
The locking piece is controlled to be opened through the transferring assembly 7, and the locking piece is specifically operated by controlling one U-shaped supporting plate 716 to be clamped on the driving block 817 through the cooperation of the first sliding block 71, the fourth electric telescopic rod 79 and the first air cylinder 76, and lifting the driving block 817 through contracting the fourth electric telescopic rod 79 or extending the third electric telescopic rod 72, so that the inserting block 819 is removed from the limiting sleeve 820.
The first supporting plate 88 is pulled out of the storage barrel 87 by starting the first air cylinder 76 for a preset length, then a plurality of baffles 10 are vertically placed on the first supporting plate 88, the baffles 10 with different sizes can be nested together and then vertically placed on the first supporting plate 88, after placement is completed, the inserting blocks 819 are controlled to be inserted into the limiting sleeve 820 through the transfer assembly 7, and under the action of the third spring 810, the baffles 10 to be fed correspond to gaps between the barrel cover 89 and the storage barrel 87.
The baffle 10 to be fed is controlled to move to the upper side of the corresponding storage box 6 through the cooperation of the second sliding block 81, the fifth electric telescopic rod 82 and the second air cylinder 84, the gap is controlled to rotate downwards through starting the fourth motor 86, and the corresponding baffle 10 is pushed out of the gap into the storage box 6 through starting the third air cylinder 813 to control the support strip 814 to move, so that the feeding of the baffle 10 is realized.
S2, transferring the baffle plate 10 into the decontamination pool 1;
By placing the baffles 10 one by one in the rectangular box 33 by the transfer assembly 7, the specific operations are:
The first slider 71, the fourth electric telescopic rod 79 and the first cylinder 76 cooperate to control the second connecting bar 714 to be inserted into the corresponding baffle 10, and if the axis of the third motor 713 passes through the center of the largest baffle 10 in the rectangular box 33, the third motor 713 is started to control the second connecting bar 714 to rotate, if the distance detected by the second distance sensor 720 is the same as the distance detected by the downward direction, only one baffle 10 in the rectangular box 33 is indicated, the corresponding U-shaped support plate 716 can be directly controlled to move to correspond to the baffle 10, the corresponding baffle 10 is taken out from the rectangular box 33 by contracting the fourth electric telescopic rod 79, the corresponding baffle 10 is hung on the corresponding U-shaped support plate 716, if the distance detected by the second distance sensor 720 is different from the distance detected by the downward direction, the smaller baffle 10 is indicated to be nested in the baffle 10, the corresponding U-shaped support plate 716 is controlled to move to correspond to the baffle 10, the smallest baffle 10 in the rectangular box 33 is lifted by contracting the fourth electric telescopic rod 79, the corresponding U-shaped support plate 10 is taken out by starting the first cylinder 76, and all the corresponding U-shaped support plates 716 are hung on the corresponding U-shaped support plate 10 are hung on the corresponding U-shaped support plate 716, and the first U-shaped support plate 10 is controlled to be hung on the corresponding U-shaped support plate 716, and the first cylinder 76 is matched to the corresponding U-shaped support plate 10 is hung in the first U-shaped support plate 716, and the corresponding U-shaped support plate 10 is hung on the first cylinder 76, and the corresponding U-shaped support plate 716 is hung on the baffle 10 is all the baffle 10 is hung on the corresponding U-shaped support plate 10.
S3, soaking;
The pressing plate 15 is controlled to move to the position above the baffle plate 10 in the decontamination pond 1 by starting the second electric telescopic rod 13, and the baffle plate 10 is pressed by controlling the pressing plate 15 to descend by starting the first electric telescopic rod 12, so that the baffle plate is immersed in the decontamination pond 1 completely for a preset period of time;
S4, brushing;
The corresponding second connecting strips 714 are controlled to descend by starting the corresponding fourth electric telescopic rods 79, so that the brush heads 719 are propped against the inner walls of the corresponding baffles 10, the upper sides of the baffles 10 are rubbed by starting the second electric telescopic rods 13, the upper sides of the baffles 10 are positioned in the decontamination pond 1 to rotate, the bristles 35 in the rectangular box 33 can brush the outer walls and the end parts of the baffles 10 in the rotating process, and the brush heads 719 can brush the inner walls of the baffles 10, so that the baffles 10 are brushed in all directions.
S5, cleaning;
The U-shaped supporting plate 716 is controlled to lift the corresponding baffle 10 by starting the corresponding fourth electric telescopic rod 79, the baffle 10 is immersed into the clean water tank 2 by matching the first sliding block 71 and the fourth electric telescopic rod 79, and the baffle 10 is controlled to swing left and right in the clean water tank 2 by starting the first sliding block 71 and is cleaned.
S6, spin-drying;
Corresponding U-shaped supporting plates 716 on the two transfer assemblies 7 are controlled to be respectively clamped on the inner walls of the two sides of the corresponding baffle plates 10, then the two second motors 78 are adjusted to be coaxial, the second motors 78 are started to control the baffle plates 10 to rotate so as to throw out water on the baffle plates, the drying speed of the baffle plates is improved, and after the drying is finished, the baffle plates 10 are stored in the corresponding storage boxes 6 again and wait for use.
S7, brushing the clean water tank 2;
the brush head 719 is controlled to be contacted with the corresponding inner wall on the clean water tank 2 through the cooperation of the first sliding block 71, the first motor 74, the second motor 78, the fourth electric telescopic rod 79 and the third motor 713, and the brush head 719 is controlled to move up and down on the inner wall of the transfer assembly 7 through the cooperation of the second motor 78 and the fourth electric telescopic rod 79, so that the side wall of the clean water tank 2 is scrubbed;
The brush head 719 is controlled to be contacted with the bottom plate in the clean water tank 2 through the first sliding block 71, the first air cylinder 76 and the fourth electric telescopic rod 79, and the cleaning of the bottom plate of the clean water tank 2 can be realized by starting the first sliding block 71 to control the brush head 719 to move left and right, so that the cleaning device can realize automatic brushing of the clean water tank 2, and labor is saved.
In this specification, each embodiment is described in a progressive manner, and identical and similar parts of each embodiment are all referred to each other, and each embodiment mainly describes differences from other embodiments. In particular, for system embodiments, since they are substantially similar to method embodiments, the description is relatively simple, as relevant to see a section of the description of method embodiments.
The foregoing is merely exemplary of the present invention and is not intended to limit the present invention. Various modifications and variations of the present invention will be apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the invention are to be included in the scope of the claims of the present invention.
Claims (4)
1. The semiconductor baffle film removing and cleaning device is used for cleaning a baffle (10), the baffle (10) is annular, and the cleaning device comprises a cleaning tank, and is characterized in that the cleaning tank comprises a decontamination tank (1) and a clean water tank (2), and a supporting piece (3) is fixed in the decontamination tank (1);
A first connecting plate (11) is fixed at one end of the decontamination pond (1), a vertical first electric telescopic rod (12) is fixed above the first connecting plate (11), a horizontal second electric telescopic rod (13) is vertically fixed on an output shaft of the first electric telescopic rod (12), a vertical first connecting strip (14) is fixed on an output shaft of the second electric telescopic rod (13), a pressing plate (15) is fixed at the lower end of the first connecting strip (14), and a rubber layer is arranged below the pressing plate (15);
The support piece (3) comprises a plurality of first shaft sleeves (31), the first shaft sleeves (31) are fixed on the bottom plate of the decontamination pond (1), the upper ends of the first shaft sleeves (31) are sleeved with first sliding shafts (32), rectangular boxes (33) are fixed at the upper ends of the first sliding shafts (32), first springs (34) are fixedly connected between the rectangular boxes (33) and the first shaft sleeves (31), bristles (35) are arranged on the inner walls of the rectangular boxes (33), and the second electric telescopic rods (13) are parallel to the side walls of the rectangular boxes (33);
The cleaning device further comprises symmetrically distributed connecting tables (4), wherein the two connecting tables (4) are respectively positioned at two sides of the cleaning pool, a storage table (5) is arranged at one side of the connecting table (4), a plurality of storage boxes (6) for storing baffle plates (10) are arranged on the storage table (5), and a transfer assembly (7) is arranged on the connecting table (4) in a sliding mode;
a first guide rail (41) parallel to the cleaning pool is arranged above the connecting table (4);
The transfer assembly (7) comprises an electric first sliding block (71), the first sliding block (71) is located in a first guide rail (41) to slide, a vertical third electric telescopic rod (72) is fixed above the first sliding block (71), a first driving box (73) is fixed on an output shaft of the third electric telescopic rod (72), a first motor (74) is fixed in the first driving box (73), and a first connecting block (75) is fixed on an output shaft of the first motor (74) penetrating through a top plate of the first driving box (73);
A first air cylinder (76) is fixed on one side of the first connecting block (75), a second driving box (77) is fixed on an output shaft of the first air cylinder (76) penetrating through the first connecting block (75), a second motor (78) is fixed in the second driving box (77), a fourth electric telescopic rod (79) is vertically fixed on one side plate, far away from the first air cylinder (76), of the output shaft of the second motor (78) penetrating through the second driving box (77), and a second connecting block (711) is fixed on the output shaft of the fourth electric telescopic rod (79);
A third motor (713) is fixed on one side, close to the second motor (78), of the second connecting block (711), a horizontal second connecting strip (714) is fixed on an output shaft of the third motor (713) penetrating through the second connecting block (711), a plurality of second sliding shafts (715) are arranged on the second connecting strip (714) in a sliding mode, the second sliding shafts (715) are perpendicular to the second connecting strip (714), a U-shaped supporting plate (716) is fixed at one end of each second sliding shaft (715), a second connecting plate (717) is fixed at the other end of each second sliding shaft, a second spring (718) is fixedly connected between each U-shaped supporting plate (716) and the corresponding second connecting strip (714), and a brush head (719) is fixed on one side, far away from the second connecting strip (714), of each second connecting plate (717);
A first distance sensor (61) is fixed at the center of a bottom plate in the storage box (6), a second distance sensor (720) is fixed on the second connecting strip (714), the first distance sensor (61) and the second distance sensor (720) are electrically connected with a preset control system, and the first distance sensor (61) is used for detecting the distance between the largest baffle (10) stored in the storage box (6) and the bottom plate of the storage box (6);
A feeding assembly (8) for feeding the storage box (6) is arranged on the storage table (5) in a sliding manner;
a second guide rail (51) parallel to the first guide rail (41) is arranged on the storage table (5);
The feeding assembly (8) comprises an electric second sliding block (81), the second sliding block (81) is positioned in a second guide rail (51) to slide, a vertical fifth electric telescopic rod (82) is fixed above the second sliding block (81), a third connecting block (83) is fixed on an output shaft of the fifth electric telescopic rod (82), a second air cylinder (84) is fixed on one side, far away from the cleaning pool, of the third connecting block (83), and a third driving box (85) is fixed on an output shaft of the second air cylinder (84) penetrating through the third connecting block (83);
A fourth motor (86) is fixed in the third driving box (85), an output shaft of the fourth motor (86) penetrates through one side plate, far away from the second air cylinder (84), of the third driving box (85) and is fixedly provided with a transverse storage barrel (87), a barrel opening of the storage barrel (87) is positioned at one end far away from the fourth motor (86), a circular arc-shaped first supporting plate (88) is arranged in the storage barrel (87) in a sliding mode, one end of the first supporting plate (88) is positioned outside, and one end of the first supporting plate (88) is fixedly provided with a barrel cover (89);
a vertical pushing plate (811) is arranged in the storage barrel (87) in a sliding manner, a third spring (810) is fixedly connected between the pushing plate (811) and the storage barrel (87), and the pushing plate (811) is positioned at a barrel opening of the storage barrel (87) in a natural state of the third spring (810);
A recess (812) is formed in one end, close to the barrel cover (89), of the first supporting plate (88), a third air cylinder (813) is fixed at the bottom of the first supporting plate (88), and an output shaft of the third air cylinder (813) penetrates through the first supporting plate (88) to be fixed with an arc-shaped supporting bar (814);
The feeding assembly (8) further comprises a locking piece used for connecting the barrel cover (89) with the storage barrel (87), and when the barrel cover (89) is connected with the storage barrel (87), a gap is reserved between the barrel cover (89) and the storage barrel (87).
2. The semiconductor baffle film removing and cleaning device according to claim 1, wherein NaOH solution is added into the decontamination tank (1), and cleaning water is contained in the clean water tank (2).
3. The semiconductor baffle film removing and cleaning device according to claim 2, wherein the locking piece comprises a connecting sleeve (815) fixed on one side of a barrel cover (89), a vertical third sliding shaft (816) is arranged on the connecting sleeve (815) in a sliding mode, a driving block (817) is fixed at the upper end of the third sliding shaft (816), a connecting rod (818) is vertically fixed below the third sliding shaft, an inserting block (819) is fixed on the connecting rod (818), and the locking piece further comprises a limiting sleeve (820) fixed on one side of a storage barrel (87).
4. A method for cleaning a semiconductor baffle plate film, which is applied to the cleaning device of claim 3, characterized in that the cleaning method comprises the following steps:
s1, feeding a baffle (10);
The locking piece is controlled to be opened through the transferring assembly (7), the first supporting plate (88) is pulled out of the storage barrel (87) for a preset length, then a plurality of baffles (10) are vertically placed on the first supporting plate (88), and after placement is completed, the inserting blocks (819) are controlled to be inserted into the limiting sleeve (820) through the transferring assembly (7);
Controlling the baffle plates (10) to be fed to move above the corresponding storage boxes (6), controlling the gaps to rotate downwards by starting a fourth motor (86), pushing the corresponding baffle plates (10) out of the gaps into the storage boxes (6) by starting a third cylinder (813) to control the support bars (814) to move, and realizing the feeding of the baffle plates (10);
s2, transferring the baffle (10) into a decontamination pool (1);
By placing the baffles (10) one by one in a rectangular box (33) by a transfer assembly (7), the device is specifically operated as:
The second connecting strip (714) is controlled to be inserted into the corresponding baffle (10), the axis of the third motor (713) needs to pass through the center of the largest baffle (10) in the rectangular box (33), the third motor (713) is started to control the second connecting strip (714) to rotate, if the distance detected by the second distance sensor (720) is the same as the distance detected by the second distance sensor when the second distance sensor is upward, the corresponding U-shaped support plate (716) is directly controlled to be moved to correspond to the baffle (10), the corresponding baffle (10) is taken out from the rectangular box (33) by contracting the fourth electric telescopic rod (79), the corresponding baffle (10) is hung on the corresponding U-shaped support plate (716), if the distance detected by the second distance sensor (720) is different from the distance detected by the second distance sensor when the second distance sensor is downward, the corresponding U-shaped support plate (716) is controlled to be moved to correspond to the baffle (10), the smallest baffle (10) in the rectangular box (33) is lifted by contracting the fourth electric telescopic rod (79), the corresponding baffle (10) is taken out by the first air cylinder (76), all the corresponding U-shaped support plate (716) is hung on the corresponding U-shaped support plate (716) is controlled to be hung on the corresponding U-shaped support plate (10) when the U-shaped support plate (716) is hung on the corresponding U-shaped support plate (10);
S3, soaking;
The pressing plate (15) is controlled to move to the position above the baffle plate (10) in the decontamination pond (1) by starting the second electric telescopic rod (13), and the baffle plate (10) is pressed by controlling the pressing plate (15) to descend by starting the first electric telescopic rod (12), so that the baffle plate is immersed in the decontamination pond (1) completely for a preset period of time;
S4, brushing;
The corresponding second connecting strips (714) are controlled to descend by starting the corresponding fourth electric telescopic rods (79), so that the brush heads (719) are propped against the inner walls of the corresponding baffles (10), the upper sides of the baffles (10) are rubbed by starting the second electric telescopic rods (13), the upper sides of the baffles are positioned in the decontamination pond (1) to rotate, the bristles (35) in the rectangular box (33) brush the outer walls and the end parts of the baffles (10) in the rotating process, and the brush heads (719) brush the inner walls of the baffles (10);
S5, cleaning;
The U-shaped supporting plate (716) is controlled to lift the corresponding baffle (10), the baffle (10) is immersed into the clean water tank (2) through the cooperation of the first sliding block (71) and the fourth electric telescopic rod (79), and the baffle (10) is controlled to swing left and right in the clean water tank (2) through starting the first sliding block (71);
S6, spin-drying;
The U-shaped supporting plates (716) on the two transfer assemblies (7) are controlled to be respectively clamped on the inner walls of the two sides of the corresponding baffle plates (10), then the two second motors (78) are adjusted to be coaxial, the second motors (78) are started to control the baffle plates (10) to rotate so as to throw out water on the baffle plates, and after drying is finished, the baffle plates (10) are stored in the corresponding storage boxes (6) again to wait for use;
S7, brushing a clean water tank (2);
the brush head (719) is controlled to be contacted with the corresponding inner wall on the clean water tank (2), and the brush head (719) is controlled to move up and down on the inner wall of the transfer assembly (7) by starting the second motor (78) and the fourth electric telescopic rod (79) to brush the side wall of the clean water tank (2);
The brush head (719) is controlled to be contacted with a bottom plate in the clean water tank (2), and the first sliding block (71) is started to control the brush head (719) to move left and right so as to clean the bottom plate of the clean water tank (2).
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|---|---|---|---|
| CN202411388063.9A CN118874935B (en) | 2024-10-08 | 2024-10-08 | Semiconductor baffle film removing and cleaning device and cleaning method thereof |
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| CN202411388063.9A CN118874935B (en) | 2024-10-08 | 2024-10-08 | Semiconductor baffle film removing and cleaning device and cleaning method thereof |
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| CN218854950U (en) * | 2022-11-22 | 2023-04-14 | 江苏英思特半导体科技有限公司 | Inside and outside wiper mechanism of full-automatic acid tank quartz capsule roll |
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| JP4324527B2 (en) * | 2004-09-09 | 2009-09-02 | 東京エレクトロン株式会社 | Substrate cleaning method and developing apparatus |
| KR102123054B1 (en) * | 2017-08-29 | 2020-06-26 | 신진메딕스(주) | Washer for medical equipment |
| CN211802593U (en) * | 2020-03-24 | 2020-10-30 | 浙江先创汽车零部件有限公司 | Nut cleaning device |
| CN112378219A (en) * | 2020-10-29 | 2021-02-19 | 芜湖锋珉信息科技有限公司 | Bearing inner and outer ring cleaning, rotating and drying equipment |
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| CN218854950U (en) * | 2022-11-22 | 2023-04-14 | 江苏英思特半导体科技有限公司 | Inside and outside wiper mechanism of full-automatic acid tank quartz capsule roll |
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