CN116793558A - Diaphragm pressure sensing system with feedback - Google Patents

Abstract

The invention relates to a diaphragm pressure sensing system with feedback, which includes a main body, a diaphragm and a feedback component. The main body is provided with an air cavity. The diaphragm is arranged at the opening of the air chamber. When a pressure difference occurs on both sides of the diaphragm, the diaphragm deforms and moves toward the side with less pressure; the feedback component is arranged on the main body, and the feedback component is used to provide a feedback field that acts on the diaphragm. , the diaphragm deforms and produces displacement under the action of the feedback field. When the diaphragm pressure sensing system with feedback detects the environmental pressure to be measured, the air pressure difference on both sides of the diaphragm causes the diaphragm to deform and shift. The displacement value of the diaphragm can be used to determine the environmental pressure to be measured. When it is necessary to expand the pressure range measured by the diaphragm, a feedback field can be formed through the feedback component, so that the diaphragm can deform and displace in the opposite direction to the original deformation displacement direction, so that the air pressure difference on both sides of the diaphragm can be increased, thereby achieving The aforementioned effect of expanding the pressure range measured by the diaphragm.

Description

Diaphragm pressure sensing system with feedback

Technical field

The present invention relates to the technical field of pressure sensing, and in particular to a diaphragm pressure sensing system with feedback.

Background technique

When detecting air pressure or sound pressure, a diaphragm pressure sensor can be used to detect it.

Most of the existing diaphragm pressure sensors are based on diaphragms such as metal films or polymer films for detection. When there is a pressure difference on both sides of the diaphragm, the diaphragm will deflect under the action of the pressure difference. By detecting the pressure of the diaphragm, The pressure difference can be obtained from the deformation displacement value to achieve pressure detection.

However, it is difficult to obtain a pressure sensor with high sensitivity and wide dynamic range due to the influence of the thickness of the diaphragm material and the suspended diameter of the diaphragm.

Contents of the invention

Based on this, it is necessary to provide a diaphragm pressure sensing system with feedback to solve the problem of the small detection range width of the pressure sensor.

A diaphragm pressure sensing system with feedback, including:

A main body, the main body is provided with an air cavity;

A diaphragm, which is disposed at the opening of the air chamber. When a pressure difference occurs on both sides of the diaphragm, the diaphragm deforms and moves toward the side with lower pressure; and

A feedback component is provided on the main body. The feedback component is used to provide a feedback field acting on the diaphragm. The diaphragm deforms and generates displacement under the action of the feedback field.

In one embodiment, the feedback component includes a pole plate, the pole plate is used to electrically connect with a voltage source, the pole plate is disposed at the opening of the air chamber, and the pole plate is connected to the voltage source. Diaphragm spacing setting.

In one embodiment, the number of the polar plates is one, the polar plate is electrically connected to the first electrode of the voltage source, the diaphragm is electrically connected to the second electrode of the voltage source, and the polar plate is electrically connected to the first electrode of the voltage source. The potentials of the diaphragms are different;

Or, the number of the polar plates is one, the polar plates are electrically connected to the first electrode of the voltage source, the diaphragm is grounded, and the potentials of the polar plates and the diaphragm are different;

Or, the number of the polar plates is two, and the two polar plates are spaced apart on both sides of the diaphragm. One of the polar plates is connected to the first electrode of the voltage source, and the other polar plate is connected to the first electrode of the voltage source. Connected to the second electrode of a voltage source, the two plates are at different potentials.

In one embodiment, the value of the maximum deformation displacement of the diaphragm moved under the action of the feedback field generated by the polar plate is D1, and the distance between the polar plate and the diaphragm is D2. , D1<1/2D2.

In one embodiment, a relief ring is further included. The relief ring is disposed between the diaphragm and the pole plate. The relief ring has a relief space for deformation and displacement of the diaphragm.

In one embodiment, the electrode plate includes an insulating ring body and a grid structure disposed in the middle thereof, the grid structure is provided with a plurality of airflow holes, the insulating ring body is connected to the main body, and the A grid structure is provided corresponding to the diaphragm, and the grid structure is used for electrical connection with a voltage source.

In one embodiment, the diaphragm includes a support ring and a membrane body, the support ring is provided with a through hole; the membrane body is disposed on a connecting surface of the support ring, and the membrane body covers the through hole. hole.

In one embodiment, it also includes a baffle and a pressing member, the baffle is arranged at the opening of the main body, the baffle is provided with a mounting groove, and the bottom of the mounting groove is provided with a through groove, The through groove communicates with the air chamber; the installation groove is used to accommodate the diaphragm and the feedback component; the pressing member is detachably provided at the notch of the installation groove.

In one of the embodiments, a pressure ring is further included, and the pressure ring is disposed between the pressing member and the diaphragm;

Or, the pressing ring is disposed between the pressing member and the feedback component.

In one of the embodiments, a pressure compensating component is further included, the pressure compensating component has an airway; the pressure compensating component is connected to the main body, and the airway is connected to the air chamber.

When the above-mentioned diaphragm pressure sensing system with feedback detects the environmental pressure to be measured, the air pressure difference on both sides of the diaphragm causes the diaphragm to deform and displace. The displacement value of the diaphragm can be used to determine the environmental pressure to be measured. When it is necessary to expand the pressure range measured by the diaphragm, a feedback field can be formed through the feedback component, so that the diaphragm can deform and displace in the opposite direction to the original deformation displacement direction, so that the air pressure difference on both sides of the diaphragm can be increased, thereby achieving The aforementioned effect of expanding the pressure range measured by the diaphragm.

Description of the drawings

Figure 1 is an exploded view of a diaphragm pressure sensing system with feedback provided by an embodiment of the present invention.

2A-2D are schematic diagrams of feedback field adjustment of a diaphragm pressure sensing system with feedback provided by an embodiment of the present invention.

3A to 3D are schematic diagrams of feedback field adjustment of a diaphragm pressure sensing system with feedback provided by an embodiment of the present invention.

FIG. 4 is an exploded view of a diaphragm pressure sensing system with feedback provided by another embodiment of the present invention.

Figure 5 is an exploded view of a diaphragm pressure sensing system with feedback provided by yet another embodiment of the present invention.

FIG. 6 is an exploded view of a diaphragm pressure sensing system with feedback provided by yet another embodiment of the present invention.

FIG. 7 is a schematic structural diagram of an electrode plate of a diaphragm pressure sensing system with feedback provided by an embodiment of the present invention.

FIG. 8 is a schematic structural diagram of a pole plate of a diaphragm pressure sensing system with feedback provided by another embodiment of the present invention.

Figure 9 is a schematic structural diagram of a pressure sensor provided by an embodiment of the present invention.

Figure 10 is a schematic structural diagram of a pressure sensor provided by another embodiment of the present invention.

Explanation of reference symbols:

100. Main body; 101. Air cavity; 102. Opening; 103. Air port;

200. Diaphragm; 210. Support ring; 211. Through hole; 212. Second connection part; 220. Membrane body;

300. Feedback component; 310. Pole plate; 311. Insulating ring; 312. Grid structure; 313. Air flow hole; 314. Avoidance hole; 315. First connection part;

400. Baffle; 401. Installation slot; 402. Through slot; 403. First limit slot; 404. Second limit slot; 405. Third limit slot;

500. Pressing parts;

600. Avoidance ring; 610. Avoidance space; 620. Limiting part;

700. Sealing gasket; 710. First sealing gasket; 720. Second sealing gasket; 730. Third sealing gasket;

800. Pressure ring;

900. Pressure compensation component; 910. Trachea;

1000. Diaphragm graphene fiber FP cavity detection and demodulation system; 1010. Optical system; 1011. Light source parts; 1012. Circulator; 1013. Optical fiber; 1014. Demodulation device; 1015. Attenuator; 1016. Flange ; 1020. Gas system; 1021. Gas supply parts; 1022. Stabilizing parts; 1023. Pressure reducing valve; 1024. Flow meter; 1025. Three-way valve; 1030. Sound source parts; 1040. Controller.

Detailed ways

In order to make the above objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the invention. However, the present invention can be implemented in many other ways different from those described here. Those skilled in the art can make similar improvements without departing from the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " "Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inside", "Outside", "Clockwise", "Counterclockwise", "Axis" The orientations or positional relationships indicated by "radial direction", "circumferential direction", etc. are based on the orientations or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply the device or device referred to. Elements must have a specific orientation, be constructed and operate in a specific orientation and therefore are not to be construed as limitations of the invention.

In addition, the terms “first” and “second” are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of indicated technical features. Therefore, features defined as "first" and "second" may explicitly or implicitly include at least one of these features. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise expressly and specifically limited.

In the present invention, unless otherwise clearly stated and limited, the terms "installation", "connection", "connection", "fixing" and other terms should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection. , or integrated into one; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be an internal connection between two elements or an interactive relationship between two elements, unless otherwise specified restrictions. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

In the present invention, unless otherwise expressly stated and limited, a first feature being "on" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. touch. Furthermore, the terms "above", "above" and "above" the first feature is above the second feature may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is higher in level than the second feature. "Below", "below" and "beneath" the first feature to the second feature may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature has a smaller horizontal height than the second feature.

It should be noted that when an element is referred to as being "mounted" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is said to be "connected" to another element, it can be directly connected to the other element or there may also be intervening elements present. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation manner.

Referring to FIGS. 1 to 6 , one embodiment of the present invention provides a diaphragm pressure sensing system with feedback, which includes a main body 100 , a diaphragm 200 and a feedback component 300 .

Among them, the main body 100 is provided with an air chamber 101. The air cavity 101 can be filled with gas. The diaphragm 200 is disposed at the opening 102 of the air chamber 101.

In some embodiments, the gas in the air chamber 101 provides a standard pressure P0 to the side of the diaphragm 200 facing the air chamber 101 . The environment to be detected provides the pressure P1 to be measured to the side of the diaphragm 200 away from the air chamber 101. Through the pressure difference between the pressure to be measured P1 and the standard pressure P0, the diaphragm 200 deforms and moves toward the side with lower pressure, that is, , the diaphragm 200 undergoes deformation displacement relative to the initial position S0. In other embodiments, the gas environment to be measured can be connected to the air chamber 101 and provide the pressure P1 to be measured to the side of the diaphragm 200 facing the air chamber 101 , while the external normal atmospheric pressure environment affects the diaphragm 200 away from the air chamber 101 One side provides standard pressure P0. Through the pressure difference between the pressure to be measured P1 and the standard pressure P0, the diaphragm 200 deforms and displaces toward the side with lower pressure, that is, the diaphragm 200 deforms and displaces relative to the initial position S0.

The pressure P1 to be measured in the environment to be measured can be determined through the deformation displacement value generated by the diaphragm 200 . The feedback component 300 is provided on the main body 100 . Feedback component 300 may provide a feedback field. The diaphragm 200 can deform and generate displacement under the action of the feedback field. Among them, the feedback field can be an electric field or a magnetic field. That is to say, the diaphragm 200 can deform and generate displacement under the action of the feedback electric field or the feedback magnetic field.

When the pressure detection range of the diaphragm 200 needs to be widened, a feedback field can be provided through the feedback component 300 to cause the diaphragm 200 to move in the opposite direction of the original displacement direction, thereby changing the total displacement of the diaphragm 200 and realizing pressure detection of the expanded diaphragm 200 scope.

It can be understood that, as shown in FIG. 2A , when the pressure difference on both sides of the diaphragm 200 is 0, the diaphragm 200 is located at the original position S0. As shown in FIG. 2B , when both sides of the diaphragm 200 are subjected to the maximum pressure difference Pa, the diaphragm 200 can deform in the first direction and be displaced to the farthest position S1 . As shown in FIG. 2C , when the feedback component 300 applies a feedback field, the feedback field can cause the diaphragm 200 to deform in a second direction opposite to the first direction, and position the diaphragm 200 at the feedback adjustment position S2. The feedback adjustment position S2 is located on the side of the farthest position S1 close to the original position S0. At this time, the pressure difference on both sides of the diaphragm 200 is still Pa, and the diaphragm 200 can still move toward the first direction at the feedback adjustment position. As shown in FIG. 2D , when the feedback component 300 applies a feedback field and both sides of the diaphragm 200 are subjected to a pressure difference Pb greater than Pa, the diaphragm 200 can still continue to move in the first direction to the corresponding position. The actual pressure P1 (or P1’) of the environment to be detected can be determined through the deformation displacement value of the diaphragm 200 and the diaphragm displacement value affected by the feedback site. The arrangement of the feedback component 300 can expand the range of air pressure detection by the diaphragm pressure sensing system with wide feedback, so that the diaphragm pressure sensing system with feedback can be applied to more scenarios.

It should be noted that the above description is that the test environment causes the diaphragm 200 to deform, and then increases the feedback field, causing the diaphragm 200 to deform in the opposite direction, so as to widen the measurement range. In other testing environments, the feedback field can be increased first to cause the diaphragm 200 to deform to a certain extent, and then the diaphragm pressure sensing system with feedback can be used for detection, so as to widen the measurement range.

For example, as shown in FIGS. 3A to 3D , when the pressure difference on both sides of the diaphragm 200 is 0, the diaphragm 200 is located at the original position S0. Before performing air pressure detection, as shown in FIG. 3B , a feedback field can be applied through the feedback component 300 , and the diaphragm 200 moves to a certain position in the second direction. During the subsequent detection process, refer to FIG. 3C , if both sides of the diaphragm 200 are subject to a pressure difference of Pa, the diaphragm 200 can return to the first position S0. Referring to FIG. 3D , if both sides of the diaphragm 200 are subjected to a pressure difference Pb greater than Pa, the diaphragm 200 moves to a certain position in the first direction. The actual pressure P1 (or P1’) of the environment to be detected can be determined through the deformation displacement value of the diaphragm 200 and the diaphragm displacement value affected by the feedback site. The arrangement of the feedback component 300 can expand the range of air pressure detection by the diaphragm pressure sensing system with wide feedback.

Referring to FIGS. 1-6 , in some embodiments, the diaphragm 200 includes a support ring 210 and a membrane body 220 . The support ring 210 is provided with a through hole 211 . The membrane body 220 is disposed on the connection surface of the support ring 210 . The membrane body 220 covers the through hole 211 . The membrane body 220 can be suspended on the support ring 210 . The membrane body 220 and the support ring 210 can be connected through van der Waals force. When both sides of the portion of the membrane body 220 covering the through hole 211 is subjected to a pressure difference, the membrane body 220 will deform to a corresponding degree according to the magnitude of the pressure difference. The displacement in the middle part of the membrane body 220 (where the displacement is greater during deformation) can be detected by the displacement detection device, and then the pressure difference on both sides of the membrane body 220 can be determined to detect the ambient air pressure to be measured. The arrangement of the support ring 210 can facilitate the installation of the diaphragm 200 on the main body 100 .

In some embodiments, the membrane body 220 may be a graphene membrane body 220 . In some embodiments, the diameter-to-thickness ratio of graphene may range from 1.0×10 ⁶ to 9.9×10 ⁶ , which is in the order of 10 ⁶ . The above-mentioned membrane body 220 has a high sensitivity of 200 μm/Pa.

In some embodiments, the support ring 210 is made of copper, silicon, glass, iron, ceramic or plastic. Using the support ring 210 made of the above material can achieve a better connection between the membrane body 220 and the support ring 210, ensuring that the membrane body 220 can be suspended at the through hole 211 of the support ring 210.

In some embodiments, the connection surface may be provided with a plasma treated layer. By providing a plasma treatment layer, the surface of the connection surface can be more easily connected to the membrane body 220, thereby ensuring that when the air pressure difference on both sides of the membrane body 220 is large, the membrane body 220 is not easily separated from the connection surface, thus ensuring a diaphragm with feedback. reliability of the pressure sensing system.

In some embodiments, the material of the main body 100 can be metal or non-metal, and can be adjusted according to actual conditions. The feedback component 300 may be disposed at the opening 102 of the body 100 so as to be close to the diaphragm 200 to provide a corresponding feedback field. The feedback field can be selected as feedback electric field or feedback magnetic field. By adding a feedback electric field or a feedback magnetic field, the diaphragm 200 can be moved in a direction opposite to the original deformation displacement direction, thereby expanding the air pressure detection range of the diaphragm pressure sensing system with feedback.

The following description takes the feedback component 300 providing a feedback electric field as an example.

Referring to FIGS. 1-8 , in some embodiments, feedback assembly 300 may include a plate 310 . Plate 310 may be electrically connected to a voltage source (not shown in the figure). The electrode plate 310 is disposed at the opening 102 of the air chamber 101 . The electrode plate 310 is spaced apart from the diaphragm 200 . The electrode plate 310 is electrically connected to a voltage source. When the voltage source provides positive or negative pressure, the electric potential of the electrode plate 310 and the diaphragm 200 changes, and an electric field force is generated between the two. The electric field force can drive the diaphragm 200 to move. Displacement. The displacement of the diaphragm 200 can be controlled by the voltage provided by the voltage source, thereby appropriately broadening the air pressure detection range of the diaphragm 200 .

Referring to FIG. 1 , FIG. 4 and FIG. 5 , in some embodiments, the number of electrode plates 310 may be one. The electrode plate 310 is electrically connected to the first electrode (not shown in the figure) of the voltage source, and the diaphragm 200 is electrically connected to the second electrode (not shown in the figure) of the voltage source. The electrode plate 310 and the diaphragm 200 have different potentials. . In some embodiments, the voltages provided by the first electrode and the second electrode have the same sign but different voltage values. In other embodiments, the voltages provided by the first electrode and the second electrode have different signs but have the same voltage value. In some other embodiments, the positive and negative voltages and voltage values provided by the first electrode and the second electrode are different. It can be adjusted according to the actual situation. Through the arrangement of the first electrode and the second electrode, the diaphragm 200 is placed in the feedback electric field, thereby realizing the displacement of the diaphragm 200 under the action of the corresponding electric field force, so as to expand the pressure detection of the wide-band feedback diaphragm pressure sensing system. scope.

It can be understood that the aforementioned diaphragm 200 is electrically connected to the second electrode of the voltage source, and can be electrically connected to the support ring 210 of conductive material through the second electrode of the voltage source (for example, electrically connected through a wire), thereby realizing the connection between the membrane body 220 and The second electrode of the voltage source is electrically connected.

Continuing to refer to FIG. 1 , FIG. 4 and FIG. 5 , in other embodiments, the number of electrode plates 310 is one. The plate 310 is electrically connected to the first electrode of the voltage source. Diaphragm 200 is grounded. That is, when the first electrode of the voltage source is electrically connected to the electrode plate 310, the electrode plate 310 can be a positive voltage or a negative voltage, the potential of the diaphragm 200 is 0, and the electric potentials of the electrode plate 310 and the diaphragm 200 are different. Therefore, under the adsorption effect of the electric field force generated by the electrode plate 310, the diaphragm 200 is displaced in the corresponding direction to expand the pressure detection range of the wide-band feedback diaphragm pressure sensing system.

Referring to FIG. 6 , in some embodiments, the number of electrode plates 310 may be two. The two electrode plates 310 are spaced apart from each other on both sides of the diaphragm 200 . Among them, one electrode plate 310 is connected to the first electrode of the voltage source, and the other electrode plate 310 is connected to the second electrode of the voltage source. The two plates 310 are at different potentials. When the first electrode, the second electrode and the corresponding plate 310 are electrically connected, the diaphragm 200 is in the corresponding feedback electric field, and the diaphragm 200 is displaced in the corresponding direction under the action of the feedback electric field, thereby broadening the diaphragm pressure of the broadband feedback. Pressure detection range of the sensing system. In the technical solution of providing two electrode plates 310, the positive and negative voltages provided by the first electrode of the voltage source and the second electrode of the voltage source do not need to be changed, that is, only the first electrode of the voltage source and the voltage source need to be changed. The voltage value provided by the second electrode is sufficient.

It should be noted that in the above embodiment of the two electrode plates 310 , the voltages provided by the first electrode of the voltage source and the second electrode of the voltage source may be both positive voltage, negative voltage, or one voltage. Positive pressure and negative pressure. That is, there is only a voltage difference between the two.

It can be understood that in the above embodiment of the two electrode plates 310, the diaphragm 200 can also be connected to the third electrode of the voltage source, and there is a potential difference between the diaphragm 200 and the two electrode plates 310, so that the diaphragm 200 can be It moves under the action of the corresponding feedback electric field. The aforementioned electrical connection between the diaphragm 200 and the third electrode of the voltage source means that the third electrode can be electrically connected to the support ring 210 of conductive material (for example, through a wire), thereby realizing the connection between the membrane body 220 and the voltage source. The second electrode is electrically connected. Wherein, the third electrode may be a ground electrode, so that the potential of the diaphragm 200 is 0.

Referring to FIGS. 1 and 4 to 8 , in some embodiments, the electrode plate 310 may include an insulating ring body 311 and a grid structure 312 disposed in the middle thereof. Grid structure 312 may be electrically connected to a voltage source. A plurality of airflow holes 313 are provided through the grid structure 312 , the insulating ring body 311 is connected to the main body 100 , and the grid structure 312 is arranged corresponding to the diaphragm 200 . By setting the airflow hole 313, it is ensured that the air pressure in the air chamber 101 or the air pressure of the environment to be measured can pass through the airflow hole 313 and act on the diaphragm 200, ensuring that the air pressure difference on both sides of the diaphragm 200 is the actual air pressure difference. The arrangement of the grid structure 312 can make the electric field evenly distributed to the diaphragm 200 to a large extent, so that the feedback field distribution is relatively uniform, and the force exerted on the diaphragm 200 is relatively uniform.

It can be understood that in some embodiments, the insulating ring body 311 can be integrally formed with the grid structure 312. For example, the pole plate 310 can be integrally formed with a PCB board. The insulating ring body 311 can be provided with conductive channels so that the grid structure 312 can be provided with corresponding electrical connection structures to facilitate electrical connection with the voltage source. In some embodiments, the density of the grid structure 312 (the proportion of airflow holes 313) can be designed according to the electrical properties of the material of the diaphragm 200.

In some embodiments, the maximum displacement of the diaphragm 200 under the action of the feedback field generated by the pole plate 310 is D1, the distance between the pole plate 310 and the diaphragm 200 is D2, and D1<1/2D2. Such an arrangement can allow the diaphragm 200 to undergo feedback adjustment under the action of the feedback field, and at the same time, to a large extent, prevent the diaphragm 200 from being damaged due to contact with the substrate.

Referring to FIG. 1 , FIG. 4 and FIG. 6 , in some embodiments, the diaphragm pressure sensing system with feedback further includes an escape ring 600 . The escape ring 600 is disposed between the diaphragm 200 and the electrode plate 310 . The escape ring 600 has an escape space 610 for the diaphragm 200 to move. Through the arrangement of the escape ring 600, the distance between the electrode plate 310 and the diaphragm 200 can be made larger, so that when the diaphragm 200 is deformed due to the maximum air pressure difference, it will not interfere with the electrode plate when it moves to the farthest distance. 310 offset. The arrangement of the escape ring 600 can ensure that the diaphragm 200 has sufficient escape space 610, and at the same time, a relatively uniform grid structure 312 can be provided in the middle of the pole plate 310, so that the feedback electric field generated after it is energized is relatively uniform. Acts on diaphragm 200.

It can be understood that in some embodiments, the support ring 210 may offset the escape ring 600 . The through hole 211 provided in the support ring 210 can be connected with the escape space 610 provided in the escape ring 600 to provide the membrane body 220 with escape. Such an arrangement can reduce the thickness of the escape ring 600, reduce the cost of the escape ring 600, and realize the miniaturization of the diaphragm pressure sensing system with feedback.

It should be noted that the side of the support ring 210 away from the connection surface offsets the displacement ring 600 . The side of the escape ring 600 away from the support ring 210 is against the pole plate 310 . Regardless of whether the connection surface faces the air chamber 101 or is away from the air chamber 101, the electrode plate 310 is disposed on the side of the diaphragm 200 close to the air chamber 101 or away from the air chamber 101. The support ring 210 and the escape ring 600 can provide the membrane body 220 with escape. space to effectively avoid damage to the membrane 220 due to the collision between the membrane 220 and the electrode plate 310 .

For example, in a specific embodiment, along the direction from the bottom of the air chamber 101 to the opening 102, the electrode plate 310, the escape ring 600, the support ring 210 and the diaphragm 200 are arranged in sequence. For another example, in another specific embodiment, along the direction from the bottom of the air chamber 101 to the opening 102, the pole plate 310, the escape ring 600, the support ring 210, the diaphragm 200, the escape ring 600, and the pole are sequentially provided. Plate 310. For example, in another specific embodiment, the diaphragm 200, the support ring 210, the escape ring 600 and the electrode plate 310 are sequentially provided in the direction from the bottom of the air chamber 101 to the opening 102.

In some embodiments, the diaphragm pressure sensing system with feedback may further include a baffle 400 and a pressing member 500 . The baffle 400 may be disposed at the opening 102 of the main body 100 . The baffle 400 is provided with a mounting slot 401 . A through-slot 402 is provided at the bottom of the mounting slot 401. The slot 402 communicates with the air chamber 101 . The mounting groove 401 can accommodate the diaphragm 200 and the feedback assembly 300 . The pressing member 500 is detachably disposed at the opening 102 of the installation groove 401. The arrangement of the baffle 400 can facilitate the installation of the diaphragm 200 and the feedback assembly 300 to the opening 102 of the main body 100 . The structural complexity of the main body 100 is reduced, and the manufacturing difficulty of the main body 100 is reduced. The arrangement of the pressing member 500 can facilitate the disassembly and assembly of the diaphragm 200 and the feedback assembly 300 .

In some embodiments, the baffle 400 is detachably connected to the main body 100, for example, the two can be detachably connected through threaded connection, snap connection, or bolt connection. Such an arrangement can facilitate the maintenance or replacement of the main body 100 and the baffle 400, and reduce the cost of maintenance and replacement. In addition, the baffle 400 with installation slots 401 of different sizes can also be connected to the main body 100 to connect membrane bodies 220 and feedback components 300 of different sizes and models to the main body 100, thereby reducing replacement costs.

In some embodiments, the projected size of the baffle 400 may be larger than the projected size of the main body 100 when projected onto a plane where the opening 102 of the main body 100 is located. Such an arrangement can facilitate the disassembly and assembly of the baffle 400 and the connection or separation of the two.

In some embodiments, the baffle 400 may be provided with a first limiting groove 403 . Correspondingly, the pole plate 310 can be provided with a first connecting portion 315, and the first connecting portion 315 can be connected to the outer wall of the insulating ring body 311. The connection method between the two can be integrally formed, or can be separated and then installed integrally. . The first connection part 315 may be electrically connected to an external wire to facilitate electrical connection between the electrode plate 310 and the voltage source. When the electrode plate 310 is located in the installation groove 401, at least part of the first connecting portion 315 is accommodated in the first limiting groove 403. The provision of the first connecting portion 315 can also realize the baffle 400 to limit the position of the electrode plate 310.

It can be understood that conductive holes (not shown in the figure) can be provided in the first limiting groove 403, and the conductive holes can allow wires to pass through, so as to facilitate the electrical connection between the electrode plate 310 and the corresponding voltage source.

In some embodiments, the baffle 400 may be provided with a second limiting groove 404 . Correspondingly, the support ring 210 may be provided with a second connecting portion 212 . The second connecting part 212 may be disposed on the outer edge of the support ring 210 . The second connection part 212 may be electrically connected to external wires to facilitate electrical connection between the support ring 210 and the voltage source. When the support ring 210 is located in the installation groove 401, at least part of the second connecting part 212 is accommodated in the second limiting groove 404. The provision of the second connecting part 212 can also realize the baffle 400 to limit the supporting ring 210.

It can be understood that in some embodiments, conductive holes may also be provided in the second connection part 212, and the conductive holes may allow wires to pass through, so as to facilitate the electrical connection between the support ring 210 and the corresponding voltage source, so as to realize the connection between the membrane body 220 and the voltage source. Electrical connection.

It can be understood that the first limiting groove 403 and the second limiting groove 404 can be arranged at intervals. Such an arrangement can realize the independent arrangement of the pole plate 310 and the support ring 210, so as to avoid insufficient space between the pole plate 310 and the diaphragm 200 when they are connected to external wires, and also to avoid the pole plate 310 and the diaphragm 200 from interfering with each other. And cause short circuit.

In some embodiments, the baffle 400 may also be provided with a third limiting groove 405 . Correspondingly, the position-removing ring 600 is provided with a limiting portion 620 . The limiting portion 620 can be disposed on the outer edge of the ring structure of the position-removing ring 600 . When the support ring 210 is located in the installation groove 401, at least part of the limiting portion 620 is accommodated in the third limiting groove 405, so that the baffle 400 limits the positioning ring 600.

It can be understood that the number of first limiting slots 403 can be adjusted according to the number of pole plates 310 . The third limiting groove 405 can be adjusted according to the number of the limiting rings 600 . The first limiting groove 403, the second limiting groove 404, and the third limiting groove 405 are arranged at intervals.

In some embodiments, the pressing member 500 can be detachably connected to the baffle 400 to facilitate the disassembly and assembly of the diaphragm 200 and the feedback assembly 300 .

In the embodiments shown in Figures 1 and 4-6, the pressing member 500 can select a pressing clip. One end of the compression clamp is movably mounted on the baffle 400 . The other end of the compression clamp is used to contact the notch of the installation groove 401 so as to press the diaphragm 200 and the feedback assembly 300 into the installation groove 401 .

It can be understood that the number of compression clips may be multiple, and the plurality of compression clips are circumferentially spaced along the notch of the mounting groove 401 . Such an arrangement can disperse the stress on the diaphragm 200, making it balanced and less likely to break.

In other embodiments, the pressing member 500 may selectively press the hanging cover (not shown in the figure). The compression screw cap has a through communication hole 211, and the communication hole 211 can be connected with the ambient air pressure to be measured. The notch of the compression screw cap and the mounting groove 401 may be threaded. The screw cap can be pressed against the diaphragm 200 or the feedback assembly 300 so that the diaphragm 200 and the feedback assembly 300 are fixed in the installation slot 401 .

In some embodiments, the diaphragm pressure sensing system with feedback may further include a pressure ring 800 . The pressing ring 800 may be disposed between the pressing member 500 and the diaphragm 200 . When the diaphragm 200 is installed at the notch of the installation groove 401, the pressing member 500 directly offsets the diaphragm 200, which may easily cause the diaphragm 200 to be damaged due to excessive local stress. Therefore, the arrangement of the pressure ring 800 allows the pressing member 500 to first act on a part of the pressure ring 800 and then act on the diaphragm 200 through the pressure ring 800 . Such an arrangement can disperse the local force on the diaphragm 200 and effectively reduce the damage of the diaphragm 200 due to excessive local force.

In some embodiments, the material of the pressing ring 800 can be a denser metal or alloy, such as iron.

It can be understood that in other embodiments, the feedback assembly 300 is disposed at the notch of the installation groove 401 , that is, the pole plate 310 is disposed at the notch of the installation groove 401 . The pressing ring 800 is disposed between the pressing member 500 and the feedback assembly 300 . The arrangement of the pressure ring 800 can reduce the deformation of the electrode plate 310 due to excessive local stress.

Through the arrangement of the baffle 400, the pressing member 500 and the pressing ring 800, the diaphragm 200 and the feedback component 300 can be relatively stably arranged in the installation groove 401, and the parts of the diaphragm 200 and the feedback component 300 are not easily stressed. Large enough to cause deformation or even damage.

Referring to Figures 1 and 4-6, in some embodiments, the diaphragm pressure sensing system with feedback may further include a sealing gasket 700. The sealing gasket 700 can improve the sealing performance of the diaphragm pressure sensing system with feedback.

In some of these embodiments, sealing gasket 700 may include first sealing gasket 710 . The first sealing gasket 710 may be disposed between the diaphragm 200 and the main body 100 to improve the sealing effect between the diaphragm 200 and the main body 100 . It can be understood that in some embodiments, the diaphragm pressure sensing system with feedback includes a baffle 400 , a first sealing gasket 710 is disposed at the bottom of the mounting groove 401 , and the first sealing gasket 710 can offset the support ring 210 , to improve the sealing effect between the diaphragm 200 and the baffle 400 , and further improve the sealing effect between the diaphragm 200 and the main body 100 . In another specific embodiment, the diaphragm 200 may be directly connected to the main body 100 . The first sealing gasket 710 is disposed between the main body 100 and the support ring 210 and is used to improve the sealing effect between the membrane body 220 and the main body 100 .

In some embodiments, sealing gasket 700 may include a second sealing gasket 720 . The second sealing gasket 720 may be disposed between the membrane body 220 and the pressing member 500 . It can be understood that in one of the specific embodiments, a pressure ring 800 is provided between the pressing member 500 and the membrane body 220. Therefore, the second sealing gasket 720 is provided between the pressure ring 800 and the support ring 210 to improve the pressure ring 800. and the sealing effect between the membrane body 220. In another specific embodiment, the diaphragm pressure sensing system with feedback does not include the pressure ring 800 , and the second sealing gasket 720 can be disposed between the pressure member 500 and the support ring 210 to improve the contact between the pressure member 500 and the support ring 210 . The sealing effect between the membrane bodies 220.

In some embodiments, a diaphragm pressure sensing system with feedback includes a baffle 400 . The sealing gasket 700 may include a third sealing gasket 730 . The third sealing gasket 730 may be disposed between the main body 100 and the baffle 400 to improve the sealing effect between the main body 100 and the baffle 400 .

It can be understood that the specific widths of the first sealing gasket 710, the second sealing gasket 720, and the third sealing gasket 730 can be adjusted according to actual conditions.

Referring to FIG. 1 , FIG. 4 and FIG. 6 , in some embodiments, the diaphragm pressure sensing system with feedback may further include a pressure compensation component 900 . The pressure compensating assembly 900 has an airway. The pressure compensating assembly 900 is connected with the main body 100 . And the airway is connected with the air cavity 101. During the actual assembly process, the sealing state between the diaphragm 200 and the main body 100 may not be good, resulting in air leakage between the diaphragm 200 and the main body 100 . By arranging the pressure compensating assembly 900, gas can be supplemented in the air chamber 101. That is to say, if there is an air leakage amount of Q (unit: Cfm) between the diaphragm 200 and the main body 100 . When the pressure sensing probe is detecting negative pressure, the pressure compensation component 900 can input the air volume Q into the air chamber 101 to ensure that the air pressure difference on both sides of the diaphragm 200 is the actual air pressure difference, ensuring that the detection data is accurate, or when the pressure When the sensing probe detects positive pressure, the pressure compensation component 900 can output the air volume Q into the air chamber 101 to ensure that the air pressure difference on both sides of the diaphragm 200 is the actual air pressure difference and ensure that the detection data is accurate.

In some embodiments, the pressure compensation assembly 900 may include a pressure generating device, a flow controller, and an air tube 910 . The pressure generating device can generate positive pressure or negative pressure, and the flow controller can control the flow rate in the air pipe 910 . The trachea 910 can be connected to the main body 100, and the airway is connected to the air chamber 101. The air tube 910 can be connected to the side wall or the bottom wall of the main body 100 according to actual conditions. The flow controller can more accurately control the amount of air added or discharged, thereby realizing pressure compensation, ensuring that the air pressure difference on both sides of the diaphragm 200 is the actual air pressure difference, and ensuring accurate detection data.

In some specific embodiments, the pressure generating device may include a positive pressure generating device and a negative pressure generating device. The positive pressure generating device may be a gas cylinder or an air compressor. The negative pressure generating device can be an air extractor or a vacuum pump.

In some embodiments, the pressure compensation assembly 900 can change the original air pressure in the air chamber 101 to detect different environments to be measured. It can be understood that in the above embodiments, the sealing state between the diaphragm 200 and the main body 100 may be better, or there may be a certain amount of air leakage. If the sealing state between the diaphragm 200 and the main body 100 is good, it is only necessary to change the air pressure in the air chamber 101 before detection. If there is a certain amount of air leakage between the diaphragm 200 and the main body 100, the pressure compensation component 900 can also maintain the working state during the detection process to ensure that the air pressure difference on both sides of the diaphragm 200 is the actual air pressure difference and ensure the detection data. precise.

It should be noted that the above pressure compensating component 900 is also equivalent to a feedback component 300 . That is, by changing the original air pressure value at the known air pressure end, the range of air pressure to be measured is expanded. The pressure compensation component 900 can cooperate with the feedback component 300 to achieve detection of a larger air pressure range.

In some embodiments, the diaphragm pressure sensing system with feedback may also include a displacement detection instrument.

The displacement detection instrument can choose a laser displacement meter (not shown in the figure) or a diaphragm graphene fiber FP cavity detection and demodulation system 1000, which can be adjusted according to the actual situation.

Wherein, the laser displacement meter may at least include a laser and a laser displacement meter demodulator. The laser can emit laser light to the diaphragm 200, and the laser displacement meter demodulator can receive the laser light scattered and reflected by the surface of the diaphragm 200 and demodulate it to calculate the distance between the diaphragm 200 and the laser displacement meter demodulator. Thus, the displacement of the diaphragm is obtained.

The diaphragm-type graphene fiber FP cavity detection and demodulation system 1000 means that the graphene diaphragm 320 and the end face of the optical fiber form a FP cavity (Fabry-Pérot cavity), and by detecting the inside of the FP cavity The spectrum or light intensity is demodulated to obtain the displacement caused by the influence of air pressure on the graphene diaphragm 320.

In the embodiment where a laser displacement meter is used, when the diaphragm pressure sensing system with feedback is used to test the air pressure, the main body 100 can be placed at the detection point, and the laser displacement meter can be aligned with the middle of the diaphragm 200 . In a specific test process, the gas in the air chamber 101 can be the gas whose pressure is to be detected, and the gas outside the air chamber 101 can be the gas with a known pressure. If the movement direction of the diaphragm 200 is away from the bottom of the air cavity 101, the air pressure to be detected is negative pressure, and the specific negative pressure value can be calculated based on the value measured by the laser displacement meter. If the movement direction of the diaphragm 200 is close to the bottom of the air cavity 101, the air pressure to be detected is a positive pressure, and the specific positive pressure value can be calculated based on the value measured by the laser displacement meter. It should be noted that the aforementioned positive pressure refers to pressure greater than atmospheric pressure. The aforementioned negative pressure refers to pressure less than atmospheric pressure. In another specific test process, the gas in the air chamber 101 is a gas with a known pressure, and the gas outside the air chamber 101 is a gas whose pressure is to be detected. If the moving direction of the diaphragm 200 is close to the bottom of the air chamber 101, the air pressure to be detected is a positive pressure. If the moving direction of the diaphragm 200 is away from the bottom of the air chamber 101, the air pressure to be detected is negative pressure.

When it is necessary to expand the air pressure measurement range, the feedback field can be increased through the feedback component 300, and the air pressure in the air chamber 101 can be changed in combination with the air supply component, thereby changing the moving position of the diaphragm 200 and realizing diaphragm pressure transmission with feedback. The detection range of the sensing system is expanded. It should be noted that the above-mentioned diaphragm pressure sensing system with feedback can be used to detect not only air pressure, but also sound pressure in the environment to be measured. When detecting sound pressure, the difference from detecting air pressure is that the corresponding sound pressure conversion formula is used through the numerical formula.

Referring to FIG. 5 and FIG. 8 , in some embodiments, relief holes 314 may be provided inside the grid structure 312 . When a laser displacement meter is used to detect the displacement value of the diaphragm 200, the light spot generated by the laser displacement meter can accurately detect the displacement value of the diaphragm 200 through the setting of the escape hole 314, instead of detecting the position of the plate 200. .

For example, in a specific embodiment, along the direction from the bottom of the air chamber 101 to the opening 102, the electrode plate 310 (with the escape hole 314 provided), the support ring 210 and the diaphragm 200 are sequentially provided. In another specific embodiment, along the direction from the bottom of the air chamber 101 to the opening 102, the electrode plate 310 (with the escape hole 314), the support ring 210, the diaphragm 200, and the electrode plate 310 (with the escape hole 314 are provided) are sequentially provided. hole 314). In another specific embodiment, along the direction from the bottom of the air chamber 101 to the opening 102, the electrode plate 310 (with the escape hole 314), the support ring 210, the diaphragm 200, the escape ring 600, and the electrode plate are sequentially provided. 310 (provide escape holes 314).

In the embodiment in which the diaphragm-type graphene fiber FP cavity detection and demodulation system 1000 is selected, when the diaphragm-type pressure sensing system with feedback is used to test the air pressure, the main body 100 and the diaphragm 200 can be placed at the detection point, The diaphragm 200 and the end face of the optical fiber 1013 form an FP cavity. The diaphragm graphene optical fiber FP cavity detection and demodulation system 1000 inputs light into the FP cavity and receives the output light of the FP cavity, and demodulates the spectrum or light intensity of the output light in the FP cavity to obtain the diaphragm. The displacement value caused by the influence of air pressure is finally calculated in combination with the corresponding displacement-air pressure value conversion formula to obtain the air pressure value. The judgment of positive pressure or negative pressure can be consistent with the judgment method of the aforementioned embodiment using a laser displacement meter. Specifically, referring to FIG. 9 , in some embodiments, the diaphragm graphene fiber FP cavity detection and demodulation system 1000 may include an optical system 1010 . Among them, the optical system 1010 includes a light source component 1011, a circulator 1012, an optical fiber 1013 and a demodulation device 1014. Among them, the light source component 1011 can select an ASE light source or a DFB light source. Among them, the ASE light source can emit narrow-band light, and the DFB light source can emit broadband light. In some embodiments, an attenuator 1015 can be disposed between the light source component 1011 and the circulator 1012 to attenuate the light energy generated by the light source component 1011 to prevent the diaphragm 200 from being damaged by excessive light energy. The circulator 1012 has three optical ports, one optical port is connected to the light source component 1011 or the attenuator 1015, one optical port is connected to the optical fiber 1013, and one optical port is connected to the demodulation device 1014. The optical fiber 1013 and the main body 100 can be connected through the flange 1016 to form an FP cavity between the end surface of the optical fiber 1013 and the diaphragm 200 . The light entering the circulator 1012 from the light source component 1011 can enter the FP cavity through the optical fiber 1013. After a series of reflections, the light enters the circulator 1012 again and enters the demodulation device 1014. The arrangement of the circulator 1012 can simplify the number of components of the optical system 1010 and reduce the complexity of the optical system 1010 . The demodulation device 1014 can select a PD demodulation device (cooperating with the ASE light source) or an FBGA spectrometer (cooperating with the DFB light source). The PD demodulation device can detect changes in light intensity, and the FBGA spectrometer can detect the wavelength drift of a certain wavelength of light. After the light is emitted from the light source component 1011, it enters the circulator 1012, and then enters the FP cavity through the optical fiber 1013. When the graphene diaphragm 320 is displaced, the cavity length of the FP cavity will change, thereby causing the intensity of the light entering the circulator 1012 from the FP cavity and connected to the demodulation device 1014 to change, or the wavelength of the light to drift. The adjustment device 1014 detects changes in light parameters and can back-calculate and obtain the cavity length changes of the FP cavity, thereby obtaining the displacement distance of the graphene diaphragm. That is, the ASE light source can emit light of a single wavelength. After the light passes through the FP cavity, if the cavity length of the FP cavity changes, the intensity of the light reflected by the FP cavity will change. The PD demodulation device can detect the change in light intensity. The change in cavity length of the FP cavity can be calculated by the change in light intensity. The ASE light source can emit a series of light of multiple wavelengths. After the light passes through the FP cavity, if the cavity length of the FP cavity changes, and the light of a single wavelength is tracked through the FBGA spectrometer, the wavelength of the light will drift. According to the wavelength drift amount The cavity length change of the FP cavity can be calculated.

In some embodiments, the diaphragm graphene fiber FP cavity detection and demodulation system 1000 further includes a gas system 1020 . The gas system 1020 may include a gas supply component 1021 and a flow stabilizing component 1022. The gas supply part 1021 can be a gas cylinder, and the gas cylinder can be a nitrogen cylinder. In some embodiments, the gas system 1020 may also include a pressure reducing valve 1023, a flow meter 1024, and a three-way valve 1025. Among them, the air supply part 1021, the pressure reducing valve 1023, the flow meter 1024, the three-way valve 1025 and the flow stabilizing part 1022 are connected in sequence. The pressure reducing valve 1023 and the flow meter 1024 can control the gas supply amount of the gas supply member 1021. One opening of the three-way valve 1025 can be connected to the atmosphere, so as to control the gas entering the flow stabilizing member 1022 and avoid damage to the diaphragm caused by excessive gas flow. The flow stabilizing component 1022 can be any one of quartz tube, acrylic tube or steel pipe, or other flow stabilizing component 1022 can be selected. Gas can enter the gas chamber 101 through the flow stabilizing member 1022. The air pressure in the air chamber 101 can be adjusted through the gas system 1020, so that the air pressure on both sides of the diaphragm 200 can change, thereby making the detection results more accurate.

Referring to FIG. 10 , when the above-described diaphragm pressure sensing system with feedback is used to detect sound pressure, the diaphragm graphene fiber FP cavity detection and demodulation system 1000 may only include an optical system 1010 . Among them, the light source component 1011 in the optical system 1010 can be an ASE light source, and the demodulation device 1014 can be a PD demodulation device. Such a setting can achieve a higher detection rate. The sound source component 1030 can directly act on the diaphragm 200 . In some embodiments, the sound source piece 1030 can be connected to the controller 1040 so that the controller 1040 can change the size of the sound source. The sound source component 1030 may be a speaker or other sound-generating component. Controller 1040 may be connected to demodulation device 1014. Controller 1040 may select a computer. In addition, when using the diaphragm graphene fiber FP cavity detection and demodulation system 1000 to detect sound pressure, the difference from the method of detecting air pressure is that when calculating the sound pressure value, the displacement value of the diaphragm is combined with the corresponding displacement-sound pressure Value conversion formula is used for calculation.

When testing air pressure or sound pressure, any of the above-mentioned diaphragm pressure sensing systems with feedback has a simple test method, high sensitivity, and a wide range of pressure values.

In some embodiments, feedback component 300 may also provide a feedback magnetic field. That is, the diaphragm 200 can move under the action of the feedback magnetic field. It can be understood that in some embodiments, an electromagnet may be provided to provide a feedback magnetic field. That is, the electromagnet is provided at the opening 102 of the main body 100 . The intensity of the magnetic field generated by the electromagnet is changed by passing the current, thereby changing the degree of displacement of the diaphragm 200 . In other embodiments, permanent magnets may be provided to provide feedback magnetic fields. The intensity of the magnetic field is changed by increasing or decreasing the number of permanent magnets, thereby changing the degree of displacement of the diaphragm 200 .

The technical features of the above-described embodiments can be combined in any way. To simplify the description, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, All should be considered to be within the scope of this manual.

The above-mentioned embodiments only express several implementation modes of the present invention, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the invention. It should be noted that, for those of ordinary skill in the art, several modifications and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the scope of protection of the patent of the present invention should be determined by the appended claims.

Claims (10)

1. A diaphragm pressure sensing system with feedback, comprising:

the main body is provided with an air cavity;

the diaphragm is arranged at the opening of the air cavity, and when pressure difference is generated at two sides of the diaphragm, the diaphragm deforms and moves towards the side with smaller pressure; and

The feedback assembly is arranged on the main body and is used for providing a feedback field acting on the diaphragm, and the diaphragm deforms to generate displacement under the action of the feedback field.

2. The diaphragm pressure sensing system of claim 1 where the feedback assembly comprises a plate for electrical connection to a voltage source, the plate being disposed at the opening of the air cavity, the plate being spaced from the diaphragm.

3. The diaphragm pressure sensing system with feedback of claim 2, wherein the number of plates is one, the plates are electrically connected to a first electrode of a voltage source, the diaphragm is electrically connected to a second electrode of the voltage source, and the plates are at a different potential than the diaphragm;

or the number of the polar plates is one, the polar plates are electrically connected with a first electrode of a voltage source, the diaphragm is grounded, and the polar plates and the diaphragm have different potentials;

Or the number of the polar plates is two, the two polar plates are respectively arranged at two sides of the diaphragm at intervals, one polar plate is connected with a first electrode of a voltage source, the other polar plate is connected with a second electrode of the voltage source, and the potentials of the two polar plates are different.

4. The pressure sensing system of claim 2, wherein the diaphragm moves by the feedback field generated by the plate to a maximum deformation displacement of D1, and the plate is spaced from the diaphragm by a distance D2, D1 < 1/2D2.

5. The diaphragm pressure sensing system with feedback of claim 2, further comprising a standoff ring disposed between the diaphragm and the plate, the standoff ring having a standoff space for deformation displacement of the diaphragm.

6. The diaphragm pressure sensing system with feedback of claim 2, wherein the polar plate comprises an insulating ring body and a grid structure arranged in the middle of the insulating ring body, the grid structure is provided with a plurality of air flow holes in a penetrating manner, the insulating ring body is connected with the main body, the grid structure is arranged corresponding to the diaphragm, and the grid structure is used for being electrically connected with a voltage source.

7. The diaphragm pressure sensing system with feedback of claim 1, wherein the diaphragm comprises a support ring and a diaphragm body, the support ring having a through hole; the membrane body is arranged on the connecting surface of the supporting ring, and the membrane body covers the through hole.

8. The diaphragm type pressure sensing system with feedback of claim 1, further comprising a baffle and a pressing member, wherein the baffle is disposed at the opening of the main body, the baffle is provided with a mounting groove, the bottom of the mounting groove is provided with a through groove, and the through groove is communicated with the air cavity; the mounting groove is used for accommodating the diaphragm and the feedback assembly; the compressing piece is detachably arranged at the notch of the mounting groove.

9. The diaphragm pressure sensing system with feedback of claim 8, further comprising a pressure ring disposed between the hold down and the diaphragm;

or, the compression ring is arranged between the compression piece and the feedback assembly.

10. The fed back diaphragm pressure sensing system of any of claims 1-9, further comprising a pressure supplementing assembly having an air passage; the pressure supplementing assembly is connected with the main body, and the air channel is communicated with the air cavity.