CN112718690A - Automatic change wafer tong and spray washing tank equipment of separation - Google Patents
Automatic change wafer tong and spray washing tank equipment of separation Download PDFInfo
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- CN112718690A CN112718690A CN202011631844.8A CN202011631844A CN112718690A CN 112718690 A CN112718690 A CN 112718690A CN 202011631844 A CN202011631844 A CN 202011631844A CN 112718690 A CN112718690 A CN 112718690A
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- Prior art keywords
- branch pipe
- spray
- pipe
- jet
- propelled
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/102—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration with means for agitating the liquid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/048—Overflow-type cleaning, e.g. tanks in which the liquid flows over the tank in which the articles are placed
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/001—Drying-air generating units, e.g. movable, independent of drying enclosure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The application relates to the technical field of semiconductor processing, and discloses a cleaning tank device for automatically spraying and separating a wafer gripper, which comprises a cleaning tank, wherein an overflow groove for overflowing cleaning liquid is formed in the cleaning tank, a cleaning space for accommodating a mechanical arm gripper is formed in the cleaning tank, a spraying assembly, a flow injection assembly and an air injection assembly are arranged on the cleaning tank, the spraying assembly is used for spraying the cleaning liquid to the mechanical arm gripper, the flow injection assembly comprises a flow injection main pipe and a flow injection branch pipe which are mutually communicated, the flow injection branch pipe is arranged at the bottom of a cleaning tank, a plurality of flow injection holes are formed in the side wall of the flow injection branch pipe, when the cleaning liquid is injected into the flow injection main pipe, the cleaning liquid enters the cleaning tank from the flow injection holes in the flow injection branch pipe and drives the cleaning liquid in the cleaning tank to circularly flow, the air injection assembly is used for drying the mechanical arm gripper, and compared with immersion cleaning, a reagent attached to the mechanical, thereby improving the cleaning effect.
Description
Technical Field
The invention relates to the technical field of semiconductor processing, in particular to a cleaning tank device for automatic spraying and separating of a wafer gripper.
Background
The semiconductor equipment usually completes actions of feeding, transmission, discharging and the like through various mechanical arms for wafer transmission, wafers need to be soaked in various different reagents for reaction in a wet process, a mechanical arm clamp clamps the wafers in batches or clamps the wafer baskets and conveys the wafers among various process modules, the mechanical arm clamp comprises two platy clamping parts, the two clamping parts are easily contaminated with the reagents in the clamping process, cross contamination is easily caused when conveying the wafers among the modules, and the process quality of wafer products processed by the wet process is influenced. The existing cleaning mode of the mechanical arm clamp is often immersion cleaning, however, the cleaning mode consumes long time and affects the working efficiency.
Disclosure of Invention
The invention aims to provide cleaning tank equipment for automatic spraying and separating of a wafer gripper, which has the characteristics of effectively cleaning the gripper of a mechanical arm and avoiding polluting residues.
In order to achieve the above purpose, the basic scheme of the invention is as follows:
the utility model provides an automatic change wafer tong sprays washing tank equipment of separation, includes the washing tank, the washing tank is used for holding the washing liquid, be formed with the overflow slot that makes the washing liquid spill over on the washing tank, be formed with the washing space that holds the robotic arm tong in the washing tank, be provided with spray assembly on the washing tank, annotate and flow subassembly and jet-propelled subassembly, spray assembly is used for spraying the washing liquid to the robotic arm tong, the notes flow subassembly includes that the notes that communicate each other flow the person in charge and annotate a branch pipe, the notes flow the branch pipe and set up in the bottom of clean tank, annotate and seted up a plurality of injection holes on the lateral wall of flowing the branch pipe, when to when pouring into the washing liquid in the flow main pipe, the washing liquid gets into in the washing tank and drives the washing liquid circulation in the washing tank by the injection hole on the notes.
Further, the washing tank includes two mutually independent cell bodies, two annotate respectively in the cell body and be used for wasing two clamping part washing liquids, the bottom of cell body all is provided with notes and flows the branch pipe, two the equal fixed connection of cell body compares a whole clean groove on the connecting plate, and the volume of two cell bodies is littleer, can reduce the washing liquid quantity to when the washing liquid flows at less inslot, the flow resistance is little, forms circulation flow more easily to promote the cleaning performance.
Further, the spraying assembly comprises a spraying main pipe and a plurality of spraying branch pipes, each spraying branch pipe is respectively communicated with the spraying main pipe, each spraying branch pipe is arranged above the tank body, two spraying branch pipes are respectively arranged above the tank body, a gap for enabling the clamping part of the mechanical arm clamping hand to pass through is formed between the two spraying branch pipes arranged on the same tank body, and each spraying branch pipe is provided with a plurality of spraying nozzles which are linearly arranged and are used for spraying the clamping part.
Further, the bottom of notes class branch pipe is seted up to the orifice, and sets up a plurality of orifices that set up on same notes class branch pipe and be the straight line and distribute, when annotating the washing liquid into annotating to flowing in the main pipe, the washing liquid through the orifice and strike the bottom of cell body, and the washing liquid disperses into the stranded and upwards flows along the lateral wall of cell body respectively and forms the circulation.
Further, the bottom of the tank body is provided with a drainage assembly, the drainage assembly is used for discharging cleaning liquid after cleaning, the drainage assembly comprises a main drainage pipe and a plurality of branch drainage pipes, the branch drainage pipes are used for communicating the tank body and the main drainage pipe, and the main drainage pipe is provided with a drainage valve for opening or closing the main drainage pipe.
Further, jet-propelled main pipe of jet-propelled subassembly and a plurality of jet-propelled branch pipe, every the top of cell body all with two jet-propelled branch pipe fixed connection, set up in same two jet-propelled branch pipes on the cell body are used for carrying out the drying to two sides of mechanical tong respectively, a plurality of jet-propelled nozzles of fixedly connected with on the jet-propelled pipe set up in same spray nozzle on the jet-propelled pipe is straight line and distributes, and the jet-propelled nozzle orientation sets up another jet-propelled pipe place orientation and downward sloping setting on same cell body.
Furthermore, the material of the groove body is made of transparent PVC material, so that the cleaning state of the clamping part can be conveniently observed through the groove body.
Furthermore, two opposite side surfaces of the tank body are fixedly connected with mounting plates respectively, two first mounting holes are formed in the mounting plates, two ends of the spray branch pipe penetrate through the two opposite first mounting holes respectively and are in running fit with the first mounting holes, the mounting plate of the fixing part is provided with two first through holes, the two first through holes are communicated with the first mounting holes, the fixing part abutting against the outer side surface of the spray branch pipe penetrates through the first through holes, a spray dead angle exists when the clamping part is sprayed from a fixed angle, the problem of incomplete cleaning can occur, the spray branch pipe can rotate in the first mounting holes, the spray nozzle can be driven to rotate when the spray branch pipe rotates, and therefore the angle between the air injection nozzle and the clamping part can be adjusted according to an actual cleaning effect.
Further, overflow groove evenly distributed is in the notch department of cell body, the cross-section of overflow groove is the V font, and when the liquid level was higher than the notch of overflow groove, the washing liquid spills over from the notch department of overflow groove, can avoid the washing liquid backward flow that flows, can strengthen the washing liquid circulation in the cell body through the overflow to promote the cleaning performance.
Further, a plurality of waist shape holes have been seted up on the connecting plate, waist shape hole is used for the mounted position of adjusting connection board, and is a plurality of waist shape hole sets up respectively in the both sides that two cell bodies deviate from each other, the bottom of connecting plate is formed with the back timber of two relative settings, the back timber is used for the installation location, two be formed with the strengthening rib between the back timber, there is certain adjustable scope in waist shape hole on length direction, the installation of being convenient for.
Compared with the prior art, the scheme has the beneficial effects that:
when the mechanical arm clamp extends into the cleaning liquid in the cleaning tank, compared with immersion cleaning, the reagent attached to the mechanical arm clamp is continuously impacted by water flow to be separated from the surface of the mechanical arm, so that the cleaning effect is improved; the injection assembly drives the cleaning liquid in the cleaning tank to flow circularly, the cleaning liquid carrying the reagent leaves the surface of the clamping part along with the flow of the cleaning liquid, and simultaneously drives the fresh cleaning liquid to flow through the surface of the clamping part, so that the used cleaning liquid is prevented from polluting the clamping part again; the cleaning liquid cleaned in the cleaning tank is discharged from the overflow groove, and meanwhile, the cleaning liquid is injected, so that the cleanliness of the cleaning liquid is continuously kept in the cleaning process, and the circulating flow of the cleaning liquid in the tank can be enhanced through overflow, and the cleaning effect is enhanced.
Drawings
FIG. 1 is a schematic view of the overall structure of the embodiment;
FIG. 2 is an enlarged view of a portion of FIG. 1 at A;
FIG. 3 is a schematic cross-sectional view of an embodiment;
FIG. 4 is a schematic view illustrating a flow direction of a cleaning solution in the cleaning tank according to the embodiment;
FIG. 5 is a schematic structural diagram of relative positions of the spray branch pipe, the gas injection branch pipe and the clamping part in the embodiment.
Reference numerals in the drawings of the specification include:
1. a trough body; 11. an overflow trough; 12. a drain hole; 2. a connecting plate; 21. a waist-shaped hole; 22. a top beam; 23. reinforcing ribs; 3. spraying a main pipe; 31. spraying branch pipes; 4. a main pipe for injecting fluid; 41. a flow injection branch pipe; 42. an orifice; 5. a main drainage pipe; 51. a drain branch pipe; 52. a drain valve; 6. mounting a plate; 61. a first mounting hole; 62. a second mounting hole; 63. a first through hole; 64. a second through hole; 7. a main air injection pipe; 71. a gas injection branch pipe; 81. a first column of impinging liquid; 82. a second column of impinging liquid; 83. a third impacting liquid column; 9. a clamping portion.
Detailed Description
The invention will be described in further detail by means of specific embodiments with reference to the accompanying drawings:
example (b):
the utility model provides an automatic change wafer tong sprays washing tank equipment of separation, as shown in figure 1, includes the washing tank, and the washing tank is used for holding the washing liquid, and the washing liquid adopts the pure water, is formed with the washing space that makes the robotic arm tong stretch into in the washing tank, is provided with the subassembly that sprays that is used for spraying the washing liquid to the robotic arm tong on the washing tank, is provided with the notes subassembly in the washing tank. The washing tank comprises two mutually independent tank bodies 1, the material of the tank bodies 1 is made of transparent PVC material, two tank bodies 1 are respectively filled with cleaning liquid of a clamping part 9 for cleaning the two tank bodies, the tank bodies 1 are fixedly connected to a connecting plate 2, a plurality of overflow grooves 11 enabling the cleaning liquid to overflow are uniformly distributed at the notches of the tank bodies 1, and the cross sections of the overflow grooves 11 are V-shaped.
As shown in fig. 1 and fig. 2, the spraying assembly includes a main spraying pipe 3 and a plurality of branch spraying pipes 31, each branch spraying pipe 31 is parallel to each other and is respectively communicated with the main spraying pipe 3, two oppositely-arranged mounting plates 6 are mounted on the notches of the tank body 1, two first mounting holes 61 are respectively formed in the mounting plates 6, two ends of each branch spraying pipe 31 respectively penetrate through the two opposite first mounting holes 61 and are in running fit with the first mounting holes 61, two first through holes 63 are formed in the mounting plates 6, each first through hole 63 is communicated with one of the first mounting holes 61, and a fixing member (not shown in the figure) abutting against the outer side surface of the branch spraying pipe 31 penetrates through the first through hole 63. A gap for allowing the clamping portion 9 to pass through is formed between the two spray branch pipes 31 arranged on the same tank body 1, a plurality of spray nozzles (not shown in the figure) are linearly arranged on each spray branch pipe 31, and the spray nozzles are used for spraying the clamping portion 9 and are arranged on the same spray branch pipe 31 in a matrix arrangement. The position of the spray nozzle can be changed by rotating the spray branch pipe 31, when the axis of the spray nozzle is vertical to the surface of the clamping part 9, the vertical impact force of the cleaning liquid sprayed by the spray nozzle on the surface of the clamping part 9 is the largest, and the cleaning effect on the surface of the clamping part 9 is the best at the moment; when the axis of the spray nozzle is not perpendicular to the surface of the clamping portion 9, the impact force of the cleaning liquid sprayed from the spray nozzle on the clamping portion 9 can be decomposed into a component perpendicular to the surface of the clamping portion 9 and a component parallel to the surface of the clamping portion 9, the component in the vertical direction is smaller than the vertical impact force in the vertical state, and the corresponding cleaning effect on the surface of the clamping portion 9 is also smaller than the cleaning effect when the spray nozzle is arranged perpendicular to the clamping portion 9.
As shown in fig. 5, the right side of the clamping portion 9 is a clamping surface and is in a vertical state, the left side is an inclined plane with an inclination angle of seventy-five degrees with respect to the horizontal plane, the spraying direction of the cleaning liquid sprayed by the spray nozzles on the left side spray branch pipe 31 is perpendicular to the left side of the clamping portion 9, the spraying direction of the cleaning liquid sprayed by the spray nozzles on the right side spray branch pipe 31 is perpendicular to the right side of the clamping portion 9, the impact force generated by the spraying of the cleaning liquid can effectively impact the reagent attached to the surface of the clamping portion 9, the adhesive force of the reagent solidified on the surface of the clamping portion 9 is reduced, and the reagent is completely separated from the surface of the clamping portion by matching with the subsequent immersion of the clamping portion in the tank body 1, so as to achieve the best cleaning effect on the two sides of the clamping portion 9 of.
As shown in fig. 1, a plurality of waist-shaped holes 21 are formed in the connecting plate 2, the waist-shaped holes 21 are used for adjusting the installation position of the connecting plate 2, the waist-shaped holes 21 are respectively arranged on two sides of the two groove bodies 1 which deviate from each other, two top beams 22 which are oppositely arranged are formed at the bottom of the connecting plate 2, the top beams 22 are used for installation and positioning, and reinforcing ribs 23 are formed between the two top beams 22.
As shown in fig. 1 and 3, the injection assembly comprises an injection main pipe 4 and two injection branch pipes 41, the two injection branch pipes 41 are communicated with the injection main pipe 4, the injection branch pipes 41 are arranged at the bottom of the tank body 1, one end of each injection branch pipe 41 penetrates through the side wall of the tank body 1, and the other end of each injection branch pipe 41 is rotatably connected with the inner side wall of the tank body 1 and used for adjusting the installation angle. The bottom of the injection branch pipe 41 is provided with an injection hole 42 which is linearly arranged, and the injection hole 42 is used for injecting the cleaning liquid into the tank body 1.
As shown in fig. 4, the orifices 42 are arranged in two rows, the distance between each of the two rows of orifices 42 and the corresponding inner wall of the groove body is equal, the included angle between the axis of each orifice 42 and the horizontal plane is forty-five degrees, when cleaning liquid is injected into the injection main pipe 4, the cleaning liquid is sprayed out from the injection hole 42 to form a first impact liquid column 81, the first impact liquid column 81 impacts the bottom surface of the tank body 1 in a direction of being inclined downwards by forty-five degrees and rebounds to form a second impact liquid column 82, the second impact liquid column 82 impacts the side wall of the tank body 1 to form a third impact liquid column 83, the third impact liquid columns 83 on two sides of the injection branch pipe 41 comprise a motion component in the vertical direction and a motion component in the horizontal direction, the cleaning liquid at the liquid level is driven to fluctuate up and down and converge to the middle position of the notch to form backflow, and the flow strength of the first impact liquid column 81, the second impact liquid column 82, the third impact liquid column 83 and the backflow decreases gradually. The washing liquid of stranded impact liquid post in lasting cell body 1 in to cell body 1 carries out circulation disturbance to improve the liquid tension of the washing liquid in the cell body 1, thereby improve the cleaning performance to clamping part 9, make the reagent that attaches to on clamping part 9 can break away from each other with clamping part 9 under the disturbance of the washing liquid that lasts.
As shown in fig. 3, a drainage assembly is disposed at the bottom of the tank body 1, the drainage assembly is used for draining cleaning liquid after cleaning, the drainage assembly comprises a main drainage pipe 5 and a branch drainage pipe 51, a drainage hole 12 is disposed at the bottom of the tank body 1, the drainage hole 12 is fixedly connected with the branch drainage pipe 51, the branch drainage pipe 51 passes through the connecting plate 2 and is communicated with the main drainage pipe 5, and a drainage valve 52 for opening or closing the main drainage pipe 5 is disposed on the main drainage pipe 5.
As shown in fig. 1, a gas injection assembly is arranged above the spray assembly, the gas injection assembly is used for injecting gas to the clamping portion 9 to separate liquid from the clamping portion 9, a gas injection main pipe 7 and a plurality of gas injection branch pipes 71 are arranged on each mounting plate 6, two second mounting holes 62 are arranged on the first mounting holes 61, two ends of each gas injection branch pipe 71 are rotatably connected with the two opposite second mounting holes 62, two second through holes 64 are arranged on the mounting plate 6, each second through hole 64 is communicated with one second mounting hole 62, a fixing member (not shown in the figure) abutting against the outer side surface of the spray branch pipe 31 penetrates through the second through hole 64, the two gas injection branch pipes 71 arranged on the same tank body 1 are respectively used for drying two side surfaces of the mechanical gripper, and a plurality of gas injection nozzles (not shown in the figure) are fixedly connected to the gas injection pipes, the spray nozzles arranged on the same gas injection pipe are linearly distributed, and in order to spray liquid downwards, the gas injection nozzles are arranged in the direction of the other gas injection pipe on the same tank body 1 and in a downward inclination manner, so that splashing of the sprayed liquid can be reduced, and other equipment is prevented from being polluted.
As shown in fig. 5, the angle between the axis of the gas injection nozzle on the left gas injection branch pipe 71 and the horizontal plane is forty-five degrees, the angle between the axis of the gas injection nozzle and the left side surface of the clamping portion 9 is thirty degrees, the angle between the injection direction of the gas injected by the gas injection nozzle on the right gas injection branch pipe 71 and the horizontal plane is sixty degrees, and the angle between the injection direction of the gas injected by the gas injection nozzle and the right side surface of the clamping portion 9 is thirty degrees. At this time, when the drying capacity is the same for both sides of the clamping portion 9, and the jet direction of the gas jetted by the jet nozzle forms an included angle of thirty degrees with the side surface of the clamping portion 9, the impact force of the jet can be decomposed into a component perpendicular to the surface of the clamping portion 9 and a component parallel to the surface of the clamping portion and inclined downward, and the liquid drops attached to the surface of the clamping portion 9 can be effectively blown off, thereby playing a role of drying.
The specific implementation mode of the scheme is as follows:
closing the drain valve 52, injecting cleaning liquid into the injection main pipe 4, spraying the cleaning liquid from the injection hole 42 after passing through the injection branch pipe 41 to form a first impact liquid column 81, impacting the bottom surface of the tank body 1 along the direction of inclining downwards by forty-five degrees and rebounding to form a second impact liquid column 82, impacting the side wall of the tank body 1 by the second impact liquid column 82 to form a third impact liquid column 83, wherein the third impact liquid columns 83 on the two sides of the injection branch pipe 41 comprise a vertical motion component and a horizontal opposite motion component, driving the cleaning liquid at the liquid level to fluctuate up and down and converge downwards from the middle position of the tank surface to form backflow, and continuously and circularly disturbing the cleaning liquid in the tank body 1. Clamping part 9 passes the clearance between two branch pipes 31 that spray, spray nozzle sprays the washing liquid to clamping part 9's lateral surface, take away the partial reagent on clamping part 9 surface, clamping part 9 continues the downstream, from clamping part 9 begin the in-process that contacts the washing liquid and get into the liquid level in the cell body 1 completely to clamping part 9, the flow direction of mid portion washing liquid is the same with clamping part 9's direction of motion, clamping part 9's removal promotes the circulation of washing liquid, clamping part 9 rebound's in-process, the flow direction of mid portion washing liquid is opposite with clamping part 9's direction of motion, increase this part washing liquid to the impact of clamping part 9, in order to strengthen clean effect. In the above process, when the liquid level in the tank body 1 is higher than the notch position of the overflow groove 11, the cleaning liquid in the tank body 1 overflows, and the cleaning liquid is injected into the injection main pipe 4 again to enhance the circulation flow of the liquid in the tank body 1. The spray nozzle continuously sprays the clamping part 9, the air injection nozzle above the spray nozzle sprays air to the clamping part 9 so as to remove liquid drops carried on the clamping part 9, the clamping part 9 repeatedly moves up and down, the effect of cleaning the clamping part 9 is realized, after the use is finished, the drain valve 52 is opened, and the used cleaning liquid is converged into the main drain pipe 5 through the branch drain pipe 51 and is discharged through the branch drain pipe 51.
The foregoing is merely an example of the present invention and common general knowledge of known specific structures and features of the embodiments is not described herein in any greater detail. It should be noted that, for those skilled in the art, without departing from the structure of the present invention, several changes and modifications can be made, which should also be regarded as the protection scope of the present invention, and these will not affect the effect of the implementation of the present invention and the practicability of the patent. The scope of the claims of the present application shall be determined by the contents of the claims, and the description of the embodiments and the like in the specification shall be used to explain the contents of the claims.
Claims (10)
1. The utility model provides an automatic change wafer tong sprays washing tank equipment of separation, includes the washing tank, the washing tank is used for holding the washing liquid, its characterized in that: be formed with overflow slot (11) that make the washing liquid spill over on the washing tank, be formed with the washing space that holds the robotic arm tong in the washing tank, be provided with spray set on the washing tank, annotate and flow subassembly and jet-propelled subassembly, spray set is used for spraying the washing liquid to the robotic arm tong, the notes flow the subassembly and include that the notes that communicate each other flow in charge (4) and annotate branch pipe (41), annotate and flow branch pipe (41) and set up in the bottom of cleaning bath, a plurality of injection holes (42) have been seted up on the lateral wall of notes branch pipe (41), when towards when annotating in the notes flow in charge (4) and pouring the washing liquid, the washing liquid is flowed by the injection hole (42) on notes branch pipe (41) entering washing tank and the washing liquid circulation in the drive washing tank, jet-propelled subassembly is used for dry robotic.
2. An automated wafer gripper efficient spray separation cleaning tank arrangement as recited in claim 1, further comprising: the washing tank includes two mutually independent cell bodies (1), two annotate respectively in cell body (1) and have the washing liquid that is used for wasing two clamping part (9) of robotic arm tong, the bottom of cell body (1) all is provided with annotates and flows branch pipe (41), two equal fixed connection in cell body (1) is on connecting plate (2).
3. An automated wafer gripper efficient spray separation cleaning tank arrangement as recited in claim 2, further comprising: the spray assembly is including spraying person in charge (3) and a plurality of branch pipe (31) that spray, and each branch pipe (31) that sprays is responsible for (3) respectively and is linked together, each cell body (1) top is provided with two branch pipe (31) that spray respectively, sets up and is formed with the clearance that clamping part (9) that make the robotic arm tong pass through between two branch pipe (31) that spray on same cell body (1), each spray branch pipe (31) go up equal straight line and have arranged a plurality of spray nozzle, spray nozzle is used for spraying clamping part (9).
4. An automated wafer gripper efficient spray separation cleaning tank arrangement as recited in claim 2, further comprising: the bottom of notes class branch pipe (41) is seted up in notes class hole (42), and sets up a plurality of notes class hole (42) on same notes class branch pipe (41) and be the straight line and distribute, when annotating into the washing liquid in notes class person in charge (4), the washing liquid through notes class hole (42) and impact the bottom of cell body (1), disperses into the stranded and upwards flows along the lateral wall of cell body (1) respectively and forms the circulation.
5. An automated wafer gripper efficient spray separation cleaning tank arrangement as recited in claim 2, further comprising: the cleaning tank is characterized in that a drainage assembly is arranged at the bottom of the tank body (1) and used for discharging cleaning liquid after cleaning, the drainage assembly comprises a drainage main pipe (5) and a plurality of drainage branch pipes (51), the drainage branch pipes (51) are used for communicating the tank body (1) with the drainage main pipe (5), and a drainage valve (52) used for opening or closing the drainage main pipe (5) is arranged on the drainage main pipe (5).
6. An automated wafer gripper efficient spray separation cleaning tank arrangement as recited in claim 2, further comprising: jet-propelled main pipe (7) of jet-propelled subassembly and a plurality of jet-propelled branch pipe (71), every the top of cell body (1) all with two jet-propelled branch pipe (71) fixed connection, set up in same two jet-propelled branch pipe (71) on cell body (1) are used for carrying out the drying to two sides of mechanical tong respectively, a plurality of jet-propelled nozzles of fixedly connected with on the jet-propelled pipe set up to be same spray nozzle on the jet-propelled pipe is straight line distribution, and jet-propelled nozzle orientation sets up another jet-propelled pipe place orientation and downward sloping setting on same cell body (1).
7. An automated wafer gripper efficient spray separation cleaning tank arrangement as recited in claim 2, further comprising: the tank body (1) is made of transparent PVC material.
8. An automated wafer gripper efficient spray separation cleaning tank arrangement as recited in claim 3, further comprising: two relative mounting panel (6) that set up are installed to the notch of cell body (1), all seted up two first mounting hole (61) on mounting panel (6), the both ends of spraying branch pipe (31) pass respectively just right two first mounting hole (61) and with first mounting hole (61) normal running fit, set up two first through-hole (63) on mounting panel (6), two first through-hole (63) are linked together with first mounting hole (61), run through the mounting that has the lateral surface counterbalance with spraying branch pipe (31) in first through-hole (63).
9. An automated wafer gripper efficient spray separation cleaning tank arrangement as recited in claim 2, further comprising: the overflow grooves (11) are uniformly distributed at the notches of the groove body (1), and the cross sections of the overflow grooves (11) are V-shaped.
10. An automated wafer gripper efficient spray separation cleaning tank arrangement as recited in claim 2, further comprising: seted up a plurality of waist shape hole (21) on connecting plate (2), waist shape hole (21) are used for the mounted position of adjusting connecting plate (2), and are a plurality of waist shape hole (21) set up respectively in the both sides that deviate from each other in two cell bodies (1), the bottom of connecting plate (2) is formed with back timber (22) of two relative settings, back timber (22) are used for the erection site, two be formed with strengthening rib (23) between back timber (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011631844.8A CN112718690A (en) | 2020-12-31 | 2020-12-31 | Automatic change wafer tong and spray washing tank equipment of separation |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011631844.8A CN112718690A (en) | 2020-12-31 | 2020-12-31 | Automatic change wafer tong and spray washing tank equipment of separation |
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| CN112718690A true CN112718690A (en) | 2021-04-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202011631844.8A Pending CN112718690A (en) | 2020-12-31 | 2020-12-31 | Automatic change wafer tong and spray washing tank equipment of separation |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116759345A (en) * | 2023-08-14 | 2023-09-15 | 江苏晶工半导体设备有限公司 | Wafer single-chip cleaning device with independent spray cleaning function |
| WO2024103845A1 (en) * | 2022-11-16 | 2024-05-23 | Tcl Zhonghuan Renewable Energy Technology Co., Ltd. | Under-wire spray cleaning device for wire cutting machine |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040211449A1 (en) * | 2003-04-25 | 2004-10-28 | Dainippon Screen Mfg. Co., Ltd. | Cleaning apparatus and substrate processing apparatus |
| CN202877175U (en) * | 2012-09-20 | 2013-04-17 | 山西亿佳美食品有限公司 | Bubble type cleaning machine |
| TW201519348A (en) * | 2013-05-31 | 2015-05-16 | Tokyo Electron Ltd | Substrate processing device and nozzle cleaning method |
| CN207357682U (en) * | 2017-09-28 | 2018-05-15 | 冠礼控制科技（上海）有限公司 | A kind of organic solvent rinse bath |
| CN207806056U (en) * | 2017-11-30 | 2018-09-04 | 彩虹（合肥）液晶玻璃有限公司 | A kind of cleaning machine spray pipe fixing device |
| CN109701936A (en) * | 2019-01-14 | 2019-05-03 | 上海釜川自动化设备有限公司 | A kind of circulation trough body structure |
| CN111001606A (en) * | 2019-12-27 | 2020-04-14 | 上海至纯洁净系统科技股份有限公司 | A kind of semiconductor cleaning equipment |
| CN111940389A (en) * | 2020-09-17 | 2020-11-17 | 江苏丰东热技术有限公司 | Water curtain device for cleaning machine and cleaning machine |
| CN214555776U (en) * | 2020-12-31 | 2021-11-02 | 上海至纯洁净系统科技股份有限公司 | Automatic change wafer tong and spray washing tank equipment of separation |
-
2020
- 2020-12-31 CN CN202011631844.8A patent/CN112718690A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040211449A1 (en) * | 2003-04-25 | 2004-10-28 | Dainippon Screen Mfg. Co., Ltd. | Cleaning apparatus and substrate processing apparatus |
| CN202877175U (en) * | 2012-09-20 | 2013-04-17 | 山西亿佳美食品有限公司 | Bubble type cleaning machine |
| TW201519348A (en) * | 2013-05-31 | 2015-05-16 | Tokyo Electron Ltd | Substrate processing device and nozzle cleaning method |
| CN207357682U (en) * | 2017-09-28 | 2018-05-15 | 冠礼控制科技（上海）有限公司 | A kind of organic solvent rinse bath |
| CN207806056U (en) * | 2017-11-30 | 2018-09-04 | 彩虹（合肥）液晶玻璃有限公司 | A kind of cleaning machine spray pipe fixing device |
| CN109701936A (en) * | 2019-01-14 | 2019-05-03 | 上海釜川自动化设备有限公司 | A kind of circulation trough body structure |
| CN111001606A (en) * | 2019-12-27 | 2020-04-14 | 上海至纯洁净系统科技股份有限公司 | A kind of semiconductor cleaning equipment |
| CN111940389A (en) * | 2020-09-17 | 2020-11-17 | 江苏丰东热技术有限公司 | Water curtain device for cleaning machine and cleaning machine |
| CN214555776U (en) * | 2020-12-31 | 2021-11-02 | 上海至纯洁净系统科技股份有限公司 | Automatic change wafer tong and spray washing tank equipment of separation |
Non-Patent Citations (1)
| Title |
|---|
| 朱胜等: "《再制造技术与工艺》", vol. 1, 31 January 2011, 机械工业出版社, pages: 75 - 76 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024103845A1 (en) * | 2022-11-16 | 2024-05-23 | Tcl Zhonghuan Renewable Energy Technology Co., Ltd. | Under-wire spray cleaning device for wire cutting machine |
| CN116759345A (en) * | 2023-08-14 | 2023-09-15 | 江苏晶工半导体设备有限公司 | Wafer single-chip cleaning device with independent spray cleaning function |
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