CN109836858A - A kind of release film, flexible device preparation method, release film and flexible device - Google Patents
A kind of release film, flexible device preparation method, release film and flexible device Download PDFInfo
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- CN109836858A CN109836858A CN201711230081.4A CN201711230081A CN109836858A CN 109836858 A CN109836858 A CN 109836858A CN 201711230081 A CN201711230081 A CN 201711230081A CN 109836858 A CN109836858 A CN 109836858A
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- mixed solution
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- 238000002360 preparation method Methods 0.000 title claims abstract description 32
- 239000011521 glass Substances 0.000 claims abstract description 71
- 239000000758 substrate Substances 0.000 claims abstract description 55
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 49
- 239000002082 metal nanoparticle Substances 0.000 claims abstract description 35
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 34
- 239000011259 mixed solution Substances 0.000 claims abstract description 30
- 239000002086 nanomaterial Substances 0.000 claims abstract description 28
- 238000004519 manufacturing process Methods 0.000 claims abstract description 10
- 238000010438 heat treatment Methods 0.000 claims abstract description 9
- 239000011248 coating agent Substances 0.000 claims abstract description 8
- 238000000576 coating method Methods 0.000 claims abstract description 8
- 238000001035 drying Methods 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 18
- 239000002105 nanoparticle Substances 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 12
- 229910021389 graphene Inorganic materials 0.000 claims description 11
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 9
- 239000012528 membrane Substances 0.000 claims description 9
- 239000002904 solvent Substances 0.000 claims description 8
- 239000002042 Silver nanowire Substances 0.000 claims description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- 239000002798 polar solvent Substances 0.000 claims description 6
- 239000002041 carbon nanotube Substances 0.000 claims description 4
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 4
- 239000002245 particle Substances 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 235000007164 Oryza sativa Nutrition 0.000 claims description 2
- 235000013339 cereals Nutrition 0.000 claims description 2
- 235000009566 rice Nutrition 0.000 claims description 2
- 240000007594 Oryza sativa Species 0.000 claims 1
- 230000003766 combability Effects 0.000 abstract description 6
- 239000005518 polymer electrolyte Substances 0.000 abstract description 5
- 239000000203 mixture Substances 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 53
- 238000010586 diagram Methods 0.000 description 13
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 12
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 239000000243 solution Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000010148 water-pollination Effects 0.000 description 3
- 238000002156 mixing Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 241000209094 Oryza Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
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- Carbon And Carbon Compounds (AREA)
- Laminated Bodies (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
The present embodiments relate to flexible device manufacturing technology field more particularly to a kind of release film, flexible device preparation method, release film and flexible devices, to realize that reducing release film and glass substrate removes difficulty, and improve the Electro-static Driven Comb ability of release film.Coating includes the mixed solution of metal nanoparticle and the carbon nanomaterial with hydrophilic radical on the glass substrate in the embodiment of the present invention；By the mixed solution heating, drying on glass substrate, the release film for being attached to glass substrate is obtained.So, the release layer and glass baseplate surface that the mixed solution of carbon nanomaterial and metal nanoparticle composition with hydrophilic radical is formed have certain binding force, but the binding force of polymer electrolyte release film and glass in compared to the prior art is weak, and then can reduce the removing difficulty of release film and glass substrate；And metal nanoparticle is conductive, and the Electro-static Driven Comb ability of release film can be improved.
Description
Technical field
The present embodiments relate to flexible device manufacturing technology field more particularly to a kind of release films, flexible device preparation
Method, release film and flexible device.
Background technique
In the manufacturing process of flexible device, often applies on the glass substrate, solidifies macromolecule presoma to form flexibility
Substrate, and electronics and optical device are made on flexible base board.In the completed after continuous electronics and optical device processing procedure, pass through
Laser irradiation (LLO, abbreviation Laser Lift-off) leaves away glass substrate, obtains flexible device.
Easy damaged flexible base board and electronic device when in the prior art, due to removing glass substrate using LLO, generally in glass
The release layer that high molecular material preparation is introduced between glass substrate and flexible base board passes through LLO for glass again after the completion of element manufacturing
Glass substrate is removed from flexible base board.The release layer of this high molecular material preparation has insulation characterisitic, is gathered in electronics or light
The electrostatic charge learned in device is not easy to discharge, and electrostatic charge is easy to cause electrostatic breakdown to damage thin film transistor (TFT).
Summary of the invention
The embodiment of the present invention provides a kind of release film, flexible device preparation method, release film and flexible device, and realizing reduces
Release film and glass substrate remove difficulty, and improve the Electro-static Driven Comb ability of release film.
The embodiment of the present invention provides a kind of release membrane preparation method, comprising: coating includes metal nano on the glass substrate
The mixed solution of particle and the carbon nanomaterial with hydrophilic radical；The mixed solution on the glass substrate is heated and is dried
It is dry, obtain the release film for being attached to the glass substrate.
Optionally, the carbon nanomaterial includes any one of the following contents or appoints a variety of: graphene oxide, graphene
And carbon nanotube.
Optionally, the metal nanoparticle includes any one of the following contents or appoints a variety of: gold nanoparticle, Yin Na
Rice corpuscles, Pd nano particle, nickel nano particle, copper nano-particle, nano platinum particle.
Optionally, the metal nanoparticle is silver nanowires.
Optionally, the carbon nanomaterial and the metal nanoparticle with hydrophilic radical in the mixed solution
Mass ratio be 0.2~5.
Optionally, the solvent in the mixed solution is polar solvent.
The embodiment of the present invention provides a kind of flexible device preparation method, comprising: forms any of the above-described reality on the glass substrate
The release film of the release membrane preparation method preparation of example offer is provided；Flexible base board is formed on the release film；In the flexible base
After completing the production of OLED electronic device on plate, the glass substrate is removed from the release layer, obtains flexible device.
Optionally, described to remove the glass substrate from the release layer, comprising: by mechanical force by the glass base
Plate is removed from the release layer.
The embodiment of the present invention provides a kind of release film, the release membrane preparation method preparation provided including any of the above-described embodiment
Release film.
The embodiment of the present invention provides a kind of flexible device, the flexible device preparation method provided including any of the above-described embodiment
The flexible device of preparation.
In the embodiment of the present invention, coating includes metal nanoparticle and the carbon nanometer with hydrophilic radical on the glass substrate
The mixed solution of material；By the mixed solution heating, drying on glass substrate, the release film for being attached to glass substrate is obtained.Such as
This, on the one hand, it, can be with the hydrophily of glass baseplate surface since the carbon nanomaterial with hydrophilic radical has slightly water-wet
Group forms chemical bond, forms intermolecular force with glass baseplate surface；On the other hand, hate since metal nanoparticle has
It is aqueous, intermolecular force is not formed with glass baseplate surface.In this way, having the carbon nanomaterial and metal nano of hydrophilic radical
The release layer and glass baseplate surface that the molecular mixed solution of grain is formed have certain binding force, but compared to the prior art
In polymer electrolyte release film and glass binding force it is weak, and then the removing difficulty of release film and glass substrate can be reduced；And
And metal nanoparticle is conductive, and the Electro-static Driven Comb ability of release film can be improved.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly introduced.
Fig. 1 is a kind of release membrane preparation method flow diagram provided in an embodiment of the present invention；
Fig. 2 is a kind of flexible device preparation method flow diagram provided in an embodiment of the present invention；
Fig. 3 is the structural schematic diagram provided in an embodiment of the present invention that release film is formed in glass substrate；
Fig. 4 is the structural schematic diagram provided in an embodiment of the present invention that flexible base board is formed on release film；
Fig. 5 is the structural schematic diagram provided in an embodiment of the present invention for forming OLED electronic device on flexible substrates；
Fig. 6 is a kind of structural schematic diagram of flexible device provided in an embodiment of the present invention.
Specific embodiment
In order to which the purpose of the present invention, technical solution and beneficial effect is more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only used to explain this hair
It is bright, it is not intended to limit the present invention.
Fig. 1 illustrates a kind of release membrane preparation method flow diagram provided in an embodiment of the present invention.Such as Fig. 1 institute
Show, the release membrane preparation method the following steps are included:
Step 101: coating includes metal nanoparticle and the carbon nanomaterial with hydrophilic radical on the glass substrate
Mixed solution；
Step 102: by the mixed solution heating, drying on glass substrate, obtaining the release film for being attached to glass substrate.
In the embodiment of the present invention, coating includes metal nanoparticle and the carbon nanometer with hydrophilic radical on the glass substrate
The mixed solution of material；By the mixed solution heating, drying on glass substrate, the release film for being attached to glass substrate is obtained.Such as
This, on the one hand, it, can be with the hydrophily of glass baseplate surface since the carbon nanomaterial with hydrophilic radical has slightly water-wet
Group forms chemical bond, forms intermolecular stronger binding force with glass baseplate surface；On the other hand, due to metal nanoparticle
With hydrophobicity, chemical bond is not formed with glass baseplate surface, thus the binding force between metal nano material and glass substrate
It is weaker.In this way, with hydrophilic radical carbon nanomaterial and metal nanoparticle composition mixed solution formed release layer with
Glass baseplate surface have certain binding force, but compared to the prior art in polymer electrolyte release film and glass binding force
It is weak, and then the removing difficulty of release film and glass substrate can be reduced；And metal nanoparticle is conductive, can be improved
The Electro-static Driven Comb ability of release film.
In above-mentioned steps 101, the solute in mixed solution is metal nanoparticle and the carbon nanometer material with hydrophilic radical
Material, solvent is mainly polar solvent.Optionally, the solvent in mixed solution includes any one of the following contents or appoints multinomial:
Dimethylformamide and water.For example, solvent is dimethylformamide；For another example, solvent is the mixing of dimethylformamide and water
Solution etc..Those skilled in the art are it is found that polar solvent is not limited to dimethylformamide and water in above-described embodiment, suitable for dividing
The polar solvent for dissipating the metal nanoparticle in the embodiment of the present invention and the carbon nanomaterial with hydrophilic radical can be used.
In above-mentioned steps 102, when by mixed solution heating, drying, temperature is too low, and solvent is not easy to remove, and influences obtained
The binding force of release film and glass；Temperature is too high, causes to be lost to the performance of release film.Optionally, mixed solution is heated and is dried
Dry temperature is about 120 DEG C~450 DEG C.
Optionally, carbon nanomaterial includes any one of the following contents or appoints a variety of: graphene oxide, graphene and carbon
Nanotube.For example, for example, carbon nanomaterial is graphene oxide；For another example, carbon nanomaterial is graphene oxide and carbon
Nanotube composition.In the embodiment of the present invention, carbon nanomaterial includes but is not limited to above-mentioned several.On general carbon nanomaterial without
When having any hydrophilic radical, it is not easy to disperse in polar solvent.Carbon nanometer can be enhanced in carbon nanomaterial with hydrophilic radical
The dispersibility of material can make metal nanoparticle and the carbon nanomaterial with hydrophilic radical disperse in a solvent more
Uniformly, and then preferably performance of release membrane material, such as hydrophily, electric conductivity, mechanical property etc. are played.
In above-described embodiment, metal nanoparticle includes any one of the following contents or appoints a variety of: gold nanoparticle, silver
Nanoparticle, Pd nano particle, nickel nano particle, copper nano-particle, nano platinum particle.Since metal nanoparticle has conduction
Property, the release film prepared in the embodiment of the present invention includes metal nanoparticle, also just conductive, compared to the prior art in
Polymer electrolyte release film, the release film in the embodiment of the present invention has preferable Electro-static Driven Comb ability.In the embodiment of the present invention
In release film preparation after the completion of, continuation complete subsequent OLED electronic device on it, subsequent OLED electronic device can be discharged
In net charge, improve display device, especially TFT reliability.
The above-mentioned metallic nanoparticle period of the day from 11 p.m. to 1 a.m is being prepared, the shape for the nanoparticle that different preparation conditions is prepared is different, than
It is such as spherical, linear.In order to keep the electric conductivity of release film more preferable, in a kind of optional embodiment, metal nanoparticle is silver
Nano wire.In this way, the connectivity between silver nanowires is more preferable, metal nanoparticle can be improved and the carbon with hydrophilic radical is received
The electric conductivity for the release film that rice material is formed.
Based on step 101, the quality of the carbon nanomaterial and metal nanoparticle with hydrophilic radical in mixed solution
Than being 0.2~5.Optionally, the mass ratio of the carbon nanomaterial with hydrophilic radical and metal nanoparticle can be 0.2~5
In arbitrary value, for example, by taking graphene oxide and silver nanowires mixed solution as an example, the quality of graphene oxide in mixed solution
Concentration is about 1~5%, and the mass concentration of silver nanowires is about 1~10%.Since graphene oxide is hydrophilic, silver nanowires
It is hydrophobic, the regulation that binding force may be implemented in the two mixing is easy to subsequent so that the binding force of this release film and glass is moderate
The separation of release film and glass substrate after the completion of processing procedure.
Based on the above embodiment and same idea, the embodiment of the present invention also provides a kind of release film, including above-mentioned Fig. 1 and on
State the release film of either method preparation.
Based on Fig. 1 and above-described embodiment, the embodiment of the present invention also provides a kind of flexible device preparation method, Fig. 2 example
Property has gone out to show a kind of flexible device preparation method provided in an embodiment of the present invention.As shown in Fig. 2, this method comprises:
Step 201: forming release film on the glass substrate；Release film is by metal nanoparticle and with the carbon of hydrophilic radical
The mixed solution of nano material is made；
Step 202: flexible base board is formed on release film；
Step 203: after completing the production of OLED electronic device on flexible substrates, glass substrate being removed from release layer, is obtained
To flexible device.
In the embodiment of the present invention, on the one hand, since the carbon nanomaterial with hydrophilic radical has slightly water-wet, Ke Yiyu
The hydrophilic radical of glass baseplate surface forms chemical bond, forms intermolecular force with glass baseplate surface；On the other hand, by
There is hydrophobicity in metal nanoparticle, do not form intermolecular force with glass baseplate surface.In this way, with hydrophilic radical
The release layer and glass baseplate surface that the mixed solution of carbon nanomaterial and metal nanoparticle composition is formed have certain knot
With joint efforts, but compared to the prior art the binding force of polymer electrolyte release film and glass in is weak, so can reduce release film with
The removing difficulty of glass substrate；And metal nanoparticle is conductive, and release film can be improved to the electrostatic of flexible device
Releasability.
Based on flexible device preparation method shown in Fig. 2, Fig. 3 is illustrated below to flexible base board shown in fig. 6
The corresponding structural schematic diagram of each preparation process.
Based on above-mentioned steps 201, Fig. 3 illustrates provided in an embodiment of the present invention in glass substrate formation release film
Structural schematic diagram.As shown in figure 3, applying metal nanoparticle and the carbon nanometer with hydrophilic radical on glass substrate 301
The mixed solution of material, heating, drying obtain release film 302.
The structure provided in an embodiment of the present invention that flexible base board is formed on release film is illustrated based on Fig. 3, Fig. 4
Schematic diagram.As shown in figure 4, foring flexible base board 401 on release film 302.
Formation OLED electronic device on flexible substrates provided in an embodiment of the present invention is illustrated based on Fig. 4, Fig. 5
Structural schematic diagram.As shown in figure 5, foring OLED electronic device 501 on flexible base board 401.
A kind of structural schematic diagram of flexible device provided in an embodiment of the present invention is illustrated based on Fig. 5, Fig. 6.Such as
Shown in Fig. 6, the glass substrate 301 in Fig. 5 is removed, flexible device is obtained.
In the embodiment of the present invention, due to carbon nanomaterial and metal nanoparticle mechanics mechanical property with higher, than
Such as tensile strength height, Young's modulus height, the attached machinery for being also conducive to improve flexible base board on flexible substrates of the release film of formation
Performance.
In the embodiment of the present invention, the release film in step 201 is prepared according to the method in above-mentioned Fig. 1, optionally, release film
Thickness be about 5~30 μm.
Optionally, flexible base board is polyimide substrate.Flexible base board is formed on release film, comprising: on release film
Coating polyimide precursor solution, and the obtained polyimide substrate that is heating and curing.Wherein, coating can use slit coating
Or the modes such as spin coated, solidification temperature are about 300 DEG C~500 DEG C, and heat cure can be carried out in heating furnace.
In above-described embodiment, the production of OLED electronic device is completed, is specifically included: completing electronic component (thin film transistor (TFT) battle array
Column and light-emitting component) processing procedure and encapsulation procedure and module group procedure etc. production.
In the embodiment of the present invention, there are many implementations that glass substrate is removed from release layer, a kind of optional to implement
Mode is that glass substrate is left away by the way of laser irradiation.But the presence of the mode of laser irradiation is easy to damage flexible base
The disadvantages of plate and OLED electronic device, therefore, the present invention also provides a kind of optional embodiments to be, by mechanical force by glass
Substrate is removed from release layer.Since the binding force of release membrane material and glass substrate is weaker, it is easy to pass through mechanical force glass.
Based on the above embodiment and same idea, the embodiment of the present invention also provide a kind of including above-mentioned Fig. 2 and above-mentioned reality
Apply the flexible device of any one of example preparation.Fig. 3 illustrates a kind of flexible device provided in an embodiment of the present invention
Structural schematic diagram.As shown in figure 3, the flexible device includes: release film 302, flexible base board 401, production is arranged on release film
In the OLED electronic device 501 on flexible base board.Wherein, release film 302 is by metal nanoparticle and with the carbon of hydrophilic radical
The mixed solution of nano material is made.
Although preferred embodiments of the present invention have been described, it is created once a person skilled in the art knows basic
Property concept, then additional changes and modifications can be made to these embodiments.So it includes excellent that the following claims are intended to be interpreted as
It selects embodiment and falls into all change and modification of the scope of the invention.
Obviously, various changes and modifications can be made to the invention without departing from essence of the invention by those skilled in the art
Mind and range.In this way, if these modifications and changes of the present invention belongs to the range of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to include these modifications and variations.
Claims (10)
1. a kind of release membrane preparation method characterized by comprising
Coating includes the mixed solution of metal nanoparticle and the carbon nanomaterial with hydrophilic radical on the glass substrate；
By the mixed solution heating, drying on the glass substrate, the release film for being attached to the glass substrate is obtained.
2. the method as described in claim 1, which is characterized in that the carbon nanomaterial include any one of the following contents or
Appoint a variety of: graphene oxide, graphene and carbon nanotube.
3. the method as described in claim 1, which is characterized in that the metal nanoparticle includes any one of the following contents
Or appoint a variety of: gold nanoparticle, Nano silver grain, Pd nano particle, nickel nano particle, copper nano-particle, nano platinum particle.
4. the method as described in claim 1, which is characterized in that the metal nanoparticle is silver nanowires.
5. the method as described in claim 1, which is characterized in that the carbon with hydrophilic radical in the mixed solution is received
The mass ratio of rice material and the metal nanoparticle is 0.2~5.
6. the method as described in claim 1, which is characterized in that the solvent in the mixed solution is polar solvent.
7. a kind of flexible device preparation method characterized by comprising
The release film of the method preparation as described in any claim in claim 1-6 is formed on the glass substrate；
Flexible base board is formed on the release film；
After completing the production of OLED electronic device on the flexible base board, the glass substrate is removed from the release layer, is obtained
To flexible device.
8. the method for claim 7, which is characterized in that described to remove the glass substrate from the release layer, packet
It includes:
The glass substrate is removed from the release layer by mechanical force.
9. a kind of release film, which is characterized in that including the release of the method preparation as described in claim 1-6 any claim
Film.
10. a kind of flexible device, which is characterized in that including the method preparation as described in claim 7-8 any claim
Flexible device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711230081.4A CN109836858B (en) | 2017-11-29 | 2017-11-29 | Release film, flexible device manufacturing method, release film and flexible device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711230081.4A CN109836858B (en) | 2017-11-29 | 2017-11-29 | Release film, flexible device manufacturing method, release film and flexible device |
Publications (2)
| Publication Number | Publication Date |
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| CN109836858A true CN109836858A (en) | 2019-06-04 |
| CN109836858B CN109836858B (en) | 2021-10-01 |
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| Publication number | Publication date |
|---|---|
| CN109836858B (en) | 2021-10-01 |
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