CN109798886A - A kind of gyroscope arrangement - Google Patents
A kind of gyroscope arrangement Download PDFInfo
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- CN109798886A CN109798886A CN201711137644.5A CN201711137644A CN109798886A CN 109798886 A CN109798886 A CN 109798886A CN 201711137644 A CN201711137644 A CN 201711137644A CN 109798886 A CN109798886 A CN 109798886A
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Abstract
A kind of gyroscope arrangement, comprising: substrate；The anchor point being fixed on substrate；Around the multiple mass blocks of anchor point setting being suspended on substrate, comprising: the first mass block, the second mass block, third mass block and the 4th mass block, the multiple mass block pass through elastic connecting component respectively and be connected to anchor point；First mass block, the second mass block are oppositely arranged in a first direction, for making the first mass block and the second mass block make translation back and forth movement along first direction under power drive；Third mass block, the 4th mass block are oppositely arranged in a second direction, it is connected between first mass block, the second mass block and third mass block, the 4th mass block by coupling unit, for when the first mass block, the second mass block make translation back and forth movement in a first direction, third mass block and the 4th mass block is driven to make translation back and forth movement in second direction, second direction is perpendicular to first direction and is in the same plane.The accuracy of the gyroscope and sensitivity are improved.
Description
Technical field
The present invention relates to field of micro electromechanical technology more particularly to a kind of gyroscope arrangements.
Background technique
MEMS (Micro Electro Mechanical System, MEMS) gyroscope utilizes Coriolis force
(Coriolis force, also known as coriolis force) phenomenon.Coriolis force be to the particle to move along a straight line in rotating system due to
A kind of description of the offset for the linear motion that inertia phase generates rotating system.Coriolis force is had from object of which movement
Some inertia, the particle to move along a straight line in rotating system have and continue along original direction of motion due to the effect of inertia
The trend of movement, but since system itself is rotation, after it experienced the movement of a period of time, the position of particle in system
Setting can be varied, and the direction of its original movement tendency, if going to observe with the visual angle of rotating system, will occur certain
The deviation of degree.MEMS gyroscope is small in size, at low cost, integration is good, has been more and more widely used, such as mobile whole
In the products such as end, camera stabilization, game paddle, toy airplane, navigation.
MEMS gyroscope includes drive part and detection part, and the coupling by driving and detecting movement is realized to fortune
The measurement of dynamic angular speed.Mode of motion is driven when gyro is in, and is moving axially vertical second direction with driven-mode
When having turning rate input, since Coriolis effect gyroscope is moved in the axial sensed-mode that generates of detection, passes through and measure sensed-mode
The displacement of movement can measure the rotational angular velocity of object.The displacement of the measurement sensed-mode movement can pass through measurement electricity
The variation of appearance is realized, for example, the variation by determining as caused by the movement of traveling electrode capacitor at a resonant condition, comes
The displacement of sensed-mode movement is detected with capacitive method, the detection of capacitor can be by interdigital electrode or plate electrode come real
It is existing.With the development of microelectromechanicgyroscope gyroscope technology, high integration, two axis of low cost or three-axis measurement gyro meet the modern times and disappear
The demand for taking electronic product becomes the trend of micro-electro-mechanical gyroscope development.
The performance of the gyroscope of the prior art need further to improve.
Summary of the invention
The technical problem to be solved by the invention is to provide a kind of gyroscope arrangement, the performance of the gyroscope arrangement into
One step improves.
To solve the above-mentioned problems, the present invention provides a kind of gyroscope arrangements, comprising: substrate；It is fixed on the substrate
On anchor point；Around the multiple mass blocks of anchor point setting being suspended on the substrate, comprising: the first mass block, second
Mass block, third mass block and the 4th mass block, the multiple mass block pass through elastic connecting component respectively and are connected to the anchor
Point；First mass block, the second mass block are oppositely arranged in a first direction, for making first mass block and the second matter
Gauge block makees translation back and forth movement along first direction under power drive；The third mass block, the 4th mass block are in second direction
On be oppositely arranged, and first mass block, the second mass block pass through between third mass block, the 4th mass block couple respectively
Component connection, for driving the third matter when the first mass block, the second mass block make translation back and forth movement in a first direction
Gauge block and the 4th mass block make translation back and forth movement in second direction, the second direction perpendicular to the first direction and with institute
First direction is stated to be in the same plane.
Optionally, the coupling unit includes: L shape connector and is respectively connected to positioned at the L shape connector both ends
The flexible connector of adjacent mass.
Optionally, two parts of the L shape connector have along first direction and second direction setting or respectively respectively
There is the projection along first direction and second direction.
Optionally, the elastic connecting component includes: the rectangular frame around anchor point setting；In the rectangular frame
The flexible body of portion and the connection rectangular frame and anchor point；The connecting rod being fixedly connected with the rectangular frame edge, the company
Extension bar extends to inside mass block；Inside the mass block, and it is vertically connected at the crossbeam of the connecting rod, the crossbeam
End has the first spring beam for being connected to mass block.
Optionally, the crossbeam include with the sub- crossbeam of the connecting rod connected vertically first, and be separately connected described
The second sub- crossbeam at the first sub- crossbeam both ends is connected between the first sub- crossbeam and the second sub- crossbeam by the second spring beam.
Optionally, each connecting rod connects more than two crossbeams.
Optionally, the elastic parts has the freedom degree of three-dimensional rotation.
Optionally, the width of first mass block and second mass block in a second direction is between anchor point
Distance becomes larger and becomes larger.
Optionally, the width of the third mass block and the 4th mass block in a first direction is between anchor point
Distance becomes larger and becomes larger.
Optionally, further includes: the first motion detection electrode, it is remote that the first motion detection electrode is set to each mass block
The substrate surface below peripheral region from the anchor point.
Optionally, further includes: the second motion detection electrode assembly, including being located on third mass block and the 4th mass block
Second motion detection traveling electrode, and it is fixed on the fixed electrode of the second motion detection of substrate, second motion detection is moved
Moving electrode and the fixed electrode of the second motion detection constitute capacitance structure.
Optionally, the second motion detection electrode assembly be set to the first motion detection electrode assembly and anchor point it
Between.
Optionally, further includes: driving electrodes component, the driving electrodes group include: positioned at the first mass block and the second matter
Driving traveling electrode on gauge block, and the fixed electrode of the driving be fixed on the substrate, the driving fixation electrode and described
Traveling electrode is driven to form comb structure.
Optionally, further includes: driving detecting electrode component, including the driving being located on third mass block and the 4th mass block
Traveling electrode is detected, and is fixed on the fixed electrode of driving detection of substrate, the driving detection traveling electrode and driving detection
Fixed electrode constitutes interdigital capacitor structure.
Gyroscope arrangement of the invention include centrally located anchor point and around symmetrically arranged first mass block of anchor point,
Second mass block and third mass block and the 4th mass block.Due to only having an anchor point, the gyroscope is to encapsulation
Stress is insensitive, avoids gyroscope by external influence, can be improved the sensitivity and accuracy of gyroscope.
Further, the gyroscope arrangement is located at the outer of mass block for the detecting electrode of x-axis and y-axis directional angular velocity
It encloses, capacitance variations are larger, are conducive to the sensitivity and accuracy that improve detection.
Further, mutually indepedent between the driving electrodes component and sensing electrode component of the gyroscope arrangement, be conducive to
Design is convenient.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the gyroscope arrangement of the embodiment of the invention；
Fig. 2 is the structural schematic diagram of the driving electrodes component of the gyroscope arrangement of the embodiment of the invention；
Fig. 3 is the structural schematic diagram of the driving detecting electrode component of the gyroscope arrangement of the embodiment of the invention；
Fig. 4 is the structural representation of the second motion detection electrode assembly of the gyroscope arrangement of the embodiment of the invention
Figure；
Fig. 5 is the structural schematic diagram of the gyroscope arrangement of the embodiment of the invention.
Specific embodiment
It elaborates with reference to the accompanying drawing to the specific embodiment of gyroscope arrangement provided by the invention.
Referring to FIG. 1, the structural schematic diagram of the gyroscope arrangement for the embodiment of the invention.
The gyroscope includes: substrate (not shown), the anchor point being fixed on the substrate 10, surrounds the anchor point
The multiple mass blocks being suspended on the substrate being arranged, comprising: the first mass block 11, the second mass block 12, third mass block
13 and the 4th mass block 14, the multiple mass block pass through elastic connecting component respectively and be connected to the anchor point 10；Described first
Mass block 11, the second mass block 12 are oppositely arranged in a first direction, for making first mass block 11 and the second mass block
12 make translation back and forth movement along first direction under power drive；The third mass block 13, the 4th mass block 14 are in second party
Be oppositely arranged upwards, and first mass block 11, the second mass block 12 respectively with third mass block 14, the 4th mass block 14 it
Between connected by coupling unit 15, for making translation back and forth movement in a first direction in the first mass block 11, the second mass block 12
When, drive the third mass block 13 and the 4th mass block 14 to make translation back and forth movement in second direction, the second direction is hung down
Directly it is in the same plane in the first direction and with the first direction.
In the specific embodiment, the first direction corresponds to the y-axis direction of orthogonal coordinate system, and second direction corresponds to
The x-axis direction of orthogonal coordinate system.
It connects and is connected between the anchor point 10 and each mass block by elastic connecting component, to limit each mass block
Moving displacement range.The elastic connecting component includes: the rectangular frame 101 being arranged around anchor point 10；Positioned at the rectangle frame
The flexible body of 101 inside of frame and the connection rectangular frame 101 and anchor point 10；It is fixedly connected with 101 edge of rectangular frame
Connecting rod 103, the connecting rod 103 extends to inside each mass block；Inside the mass block and it is vertically connected at
The crossbeam 104 of the connecting rod 103,104 end of crossbeam have the first spring beam 1041 for being connected to mass block.The bullet
Property connection component have three-dimensional rotation freedom degree, can be rotated around x-axis, y-axis and z-axis.
In the specific embodiment, the rectangular frame 101 is square, and side length is arranged with the direction y in the x-direction respectively.
Connecting rod 103 is individually secured to the center position of 101 side length of rectangular frame, for rigid connection.Four 103 shapes of connecting rod
At cross frame structure orthogonal in the x-direction and in the y-direction.First mass block 11 and the second mass block 12 are connected to along y
The connecting rod that direction extends, so that the first mass block 11 and the second mass block 12 are oppositely arranged in the y-direction；The third mass block
13 and the 4th mass block 14 be connected to the connecting rod extended in the x-direction so that third mass block 13 and the 4th mass block 14 are along the side x
To being oppositely arranged.
The connecting rod 103 is buckstay, is used to support first mass block 11, the second mass block 12, third quality
Block 13 and the 4th mass block 14 make first mass block 11, the second mass block 12, third mass block 13 and the 4th mass block 14
Vacantly.The connecting rod 103 is connect by being vertically connected at the crossbeam of the connecting rod 103 with mass block.The specific embodiment party
In formula, each connecting rod 103 connects two crossbeams 104 arranged in parallel, and the crossbeam 104 is symmetrical arranged about connecting rod 103.
It is connect by two crossbeams 104 with mass block, is conducive to the athletic posture of stabilised quality block, it is ensured that mass block is at any driving condition
Planar it is translatable.In other specific embodiments of the invention, each connecting rod 103 also can connect one or three
A above crossbeam 104.
In the specific embodiment, the crossbeam 104 includes and the sub- crossbeam of the connecting rod 103 connected vertically first
104a, and it is separately connected two second sub- crossbeam 104b at the described first both ends sub- crossbeam 104a, the first sub- crossbeam
It is connected between the sub- crossbeam 104b of 104a and second by the second spring beam 1042, the other end of the second sub- crossbeam 104b passes through
First spring beam 1041 is connect with mass block.Second spring beam 1042 is apart from 103 certain distance of connecting rod, Ke Yiti
The rotational stiffness of high-quality gauge block improves speed, advantageously reduces the interference of the other high order modes of gyroscope arrangement.Described
One spring beam 1041 and the second spring beam 1042 can have the elastic beam structure of certain span for folded beam, spring beam etc.,
Allow first mass block 11, the second mass block 12, third mass block 13 and the 4th mass block 14 at x, y, z three
Make harmonic moving in a certain range on direction.
In the specific embodiment, first mass block 11, the second mass block 12, third mass block 13 and the 4th matter
Gauge block 14 is connect by same mode with connecting rod 103, so that symmetrical configuration；It is described in another specific embodiment
First mass block 11, the second mass block 13 use same connection type, and third mass block 13, the 4th mass block 14 are using same
The connection type of sample, keeps symmetrical configuration in the same direction.
In the specific embodiment, the flexible body include around anchor point 10 be arranged it is cricoid elasticity overarm 102a and
Elasticity overarm 102b positioned at the periphery elasticity overarm 102a, the elasticity overarm 102a is connect in the x direction with anchor point 10, described
Elasticity overarm 102b is connect in y-direction with elasticity overarm 102a, and the elasticity overarm 102b and rectangular frame 101 are in the direction x
Upper connection.The flexible body can absorb the stress of anchor point 10 Yu connecting rod 103, avoid stress transfer to mass block, influence top
The accuracy of spiral shell instrument detection.Compared with the overarm of individual pen elasticity, using two cyclic spring overarms in the lesser situation of area occupied
Under, not only the flexible body can be enabled to rotate around x, y, z, but also have preferable assimilation effect more preferable stress, made
It obtains each mass block motion frequency to stablize, does not receive extraneous influence.In other specific embodiments of the invention, the flexible body
It can also hang oneself from a beam including one or three or more annular resilient.
In a specific embodiment of the invention, the gyroscope arrangement only includes an anchor point 10, and is located at entire gyro
The center of instrument, therefore in encapsulation process, is influenced smaller by encapsulation stress, also, the stress of anchor point 10 can be passed through anchor
Flexible body between point 10 and rectangular frame 101 absorbs, and influences on mass block lower.
In the specific embodiment, first mass block 11, the second mass block 12 are connected to third mass block 13 and
The coupling unit 15 of four mass blocks 14 includes: L shape connector 151 and is respectively connected to positioned at 151 both ends of L shape connector
The flexible connector 152 of adjacent mass.By taking the first mass block 11 and third mass block 13 as an example, 15 part of coupling unit is located at
In first mass block 11, partially in third mass block 13, so that described 151 one end of L shape connector is located at the first mass block
In 11, the first mass block 11 is connected by flexible connector 152, the other end is located in third mass block 13, passes through elastic connection
Part 152 connects third mass block 13.Specifically, the L shape connector 151 includes two parts, it can be two overarm connections
It forms, the two parts are arranged in the y-direction with the direction x respectively or are respectively provided with the projection with the direction y in the x-direction.For example,
In one specific embodiment, it is right angle between two parts of the L shape connector 151, is set in the x-direction with the direction y respectively
It sets.When the first mass block is in the translational motion of the direction y, skew occurs for the L shape connector 151, is located in the second mass block 12
One end to third mass block 13 transmit kinetic energy so that the second mass block 13 moves in the x direction.For example, when the first mass block
11 when moving in the y-direction, and third mass block 13 is driven to move along the direction-x.In the specific embodiment, the flexible connector
152 hang oneself from a beam for T shape, in other specific embodiments of the invention, the flexible connector 152 can also for folded beam etc. its
His elastic beam structure.
First mass block 11 is connect with the 4th mass block 14 by identical coupling unit 15, the first mass block 11 of connection,
The coupling unit 15 of third mass block 13 and 15 company of being located at of coupling unit for connecting the first mass block 11, the 4th mass block 14
13 two sides of extension bar, it is symmetrical.Between second mass block 12 and third mass block 13, the 4th mass block 14 in the same way
Connection, repeats no more.
Therefore, when the first mass block 11 is moved to the direction y, and the second mass block 12 is moved to the direction-y, third matter is driven
Gauge block 13 is moved to the direction-x, and the 4th mass block 14 is moved to the direction x.It can be by adjusting the bullet of the flexible connector 152
The parameters such as property coefficient, the fortune between the first mass block 11 of adjustment, the second mass block 12 and third mass block 13, the 4th mass block 14
The ratio between dynamic frequency, such as can make between third mass block 13, the 4th mass block 14 and the first mass block 11, the second mass block 12
Motion frequency having the same.
First mass block 11, the second mass block 12, third mass block 13 and the 4th mass block 14 can have a variety of
Shape, such as triangle, rectangle, trapezoidal, U-shaped etc..The mass block generally remained in same direction is of similar shape, each other
It is symmetrical arranged.
In this specific embodiment, each mass block overall profile is trapezoidal, is arranged around anchor point 10, and a profile is constituted
The gyroscope being square.The width of first mass block 11 and second mass block 12 in the x direction with anchor point
Distance becomes larger and becomes larger between 10；The width of the third mass block 13 and the 4th mass block 14 in y-direction with
Between anchor point 10 distance become larger and become larger.When the gyroscope is in detecting state, under corioliseffect, quality
Block moves, and mass block is greater than the displacement close to the region of anchor point 10 far from the region displacement of anchor point 10.
The gyroscope further includes driving electrodes component 20, is located at 12 location of the first mass block 11 and the second mass block
Domain, for driving first mass block 11 and the second mass block 12 to move in the y-direction.First mass block 11 and the second mass block
12 regions are respectively provided with two groups of driving electrodes components 20, are symmetrical arranged in 103 two sides of connecting rod.
Referring to FIG. 2, being the structural schematic diagram of the driving electrodes component 20.
The driving electrodes component 20 includes: the driving traveling electrode on the first mass block 11 and the second mass block 12
22, the fixed electrode 21 of the driving being fixed on the substrate.The driving traveling electrode 22 and the fixed electrode 21 of driving all have
Comb electrodes, the two form comb structure, apply on the fixed electrode 21 of the driving and driving traveling electrode 22 suitable quiet
Electricity can make the driving traveling electrode 22 fix electrode 21 far from or close to the driving, to drive first matter
Gauge block 11 and the second mass block 12 make concussion movement in the y-axis direction with certain frequency.
Meanwhile first mass block 11 and the second mass block 12 drive the third mass block 13 by coupling unit 15
Make concussion movement in y-direction with the 4th mass block 14.
In order to detect motion frequency and the displacement under gyroscope resonance, the gyroscope further includes driving detecting electrode component
30.The driving detecting electrode component 30 is located at 14 region of third mass block 13 and the 4th mass block, described for detecting
First mass block 11 and the second mass block 12 move in the y-direction and third mass block 13 and the 4th mass block 14 are transported in the x-direction
Dynamic frequency and displacement.Third mass block 13 and 14 region of the 4th mass block are respectively provided with two groups of driving detecting electrode components
30, it is symmetrical arranged in 103 two sides of connecting rod.The driving detecting electrode component 30 can also be placed on the first mass block 11 and
Two mass blocks, 12 region.
Referring to FIG. 3, for the structural schematic diagram of the driving detecting electrode component 30.
The driving detecting electrode group 30 includes: that the driving detection on third mass block 13 and the 4th mass block 14 moves
Moving electrode 32, and it is fixed on the fixed electrode 31 of driving detection of substrate, the driving detection traveling electrode 32 and driving detection
Fixed electrode 31 has the electrode plate of interdigital shape, and the two constitutes interdigital capacitor structure.When third mass block 13 and the 4th mass block
14 when moving in the x direction, and the interdigital capacitor that the driving detecting electrode group 30 is constituted changes, thus to first matter
Gauge block 11 and the second mass block along 12 the direction y and third mass block 13 and the 4th mass block 14 movement in the x direction
Frequency and displacement are detected.
The gyroscope further includes the second motion detection electrode 40, is set to the third mass block 13 and the 4th mass block
15 regions, for detecting the angular speed in z-axis direction.In the specific embodiment, the second motion detection electrode 40 is set to
It connects between third mass block 13, the 4th mass block 14 and two crossbeams 104 of connecting rod 103.It is specific in of the invention other
In embodiment, the second motion detection electrode 40 can also be set to 14 region of third mass block 13 and the 4th mass block
Other positions.
Referring to FIG. 4, being the structural schematic diagram of the second motion detection electrode 40.
The second motion detection electrode 40 includes: the second movement on third mass block 13 and the 4th mass block 14
Traveling electrode 42 is detected, and is fixed on the fixed electrode 41 of the second motion detection of substrate, the mobile electricity of second motion detection
There is interdigital electrode on pole 42 and the fixed electrode 41 of the second motion detection, the two constitutes capacity plate antenna structure.
When gyroscope is rotated around z-axis, since third mass block 13 and the 4th mass block 14 are moved along x-axis, because
This described third mass block 13 and the 4th mass block 14 will receive the coriolis force in y-axis direction.Lead to the second motion detection electricity
The capacity plate antenna size that pole 40 is formed changes, it is possible thereby to detect the angular speed that the gyroscope is rotated around z-axis.
The gyroscope further includes the first motion detection electrode, for detecting angle speed when gyroscope is rotated around x-axis and y-axis
Degree.
Referring to FIG. 5, the structural schematic diagram of the gyroscope for the embodiment of the invention.
The gyroscope further includes the first motion detection electrode, and the first motion detection electrode includes being located at the first mass
The first motion detection electrode 50b on block 11 and the substrate of the lower section of the second mass block 12, and it is located at third mass block 13 and the
The first motion detection electrode 50a on the substrate of four mass blocks, 14 lower section.First motion detection the electrode 50a and 50b are flat
It is constituted between plate electrode, with first mass block 11, the second mass block 12, third mass block 13 and the 4th mass block 14 flat
Plate capacitor.
When the gyroscope is rotated around x-axis, since the first mass block 11, the second mass block 12 move along the y-axis direction,
Therefore first mass block 11, the second mass block 12 will receive the coriolis force in a z-axis direction, so that the first mass block 11,
Second mass block 12 is subjected to displacement in the z-axis direction, so that first mass block 11, the second mass block 12 and the first of lower section
Capacity plate antenna between motion detection electrode 50b changes, so as to be obtained by the first motion detection electrode 50b
The angular velocity detection signal that gyroscope is rotated around x-axis.
Equally, when the gyroscope is rotated around y-axis, along the x-axis direction due to third mass block 13, the 4th mass block 14
Movement, therefore the third mass block 13, the 4th mass block 14 will receive the coriolis force in a z-axis direction, so that the third
Capacity plate antenna between mass block 13, the 4th mass block 14 and the first motion detection electrode 50a of lower section changes, so as to
To obtain the angular velocity detection signal that gyroscope is rotated around x-axis by the first motion detection electrode 50a.
Capacitance variations are bigger, and detection signal is more obvious, and the accuracy of detection is higher, in order to obtain biggish capacitance variations,
In the specific embodiment, the first motion detection electrode 50a and the first motion detection electrode 50b are all set in each quality
Substrate surface below peripheral region of the block far from the anchor point 10, specifically, the first motion detection electrode 50a and first
Motion detection electrode 50b is located at the second outside of the motion detection electrode 40 far from anchor point 10, when gyroscope occurs around x-axis or y-axis
When rotation, capacity plate antenna is changed greatly.
Gyroscope of the invention is including central anchor point 10 and surrounds symmetrically arranged first mass block 11, second of anchor point 10
Mass block 12 and third mass block 13 and the 4th mass block 15.Due to only having an anchor point, the gyroscope is to envelope
It is insensitive to fill stress, avoids gyroscope by external influence, can be improved the sensitivity and accuracy of gyroscope.Also, institute
The periphery that gyroscope is located at the detecting electrode of x-axis and y-axis directional angular velocity mass block is stated, capacitance variations are larger, are conducive to
Improve the sensitivity and accuracy of detection.Moreover, between the driving electrodes component and sensing electrode component of the gyroscope mutually
It is independent, it is convenient to be conducive to design.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
Member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications also should be regarded as
Protection scope of the present invention.
Claims (14)
1. a kind of gyroscope arrangement characterized by comprising
Substrate；
The anchor point being fixed on the substrate；
Around the multiple mass blocks of anchor point setting being suspended on the substrate, comprising: the first mass block, the second mass
Block, third mass block and the 4th mass block, the multiple mass block pass through elastic connecting component respectively and are connected to the anchor point；
First mass block, the second mass block are oppositely arranged in a first direction, for making first mass block and second
Mass block makees translation back and forth movement along first direction under power drive；
The third mass block, the 4th mass block are oppositely arranged in a second direction, and first mass block, the second mass block
It is connect between third mass block, the 4th mass block by coupling unit respectively, for existing in the first mass block, the second mass block
When first direction makees translation back and forth movement, the third mass block and the 4th mass block is driven to make the round-trip fortune of translation in second direction
Dynamic, the second direction is in the same plane perpendicular to the first direction and with the first direction.
2. gyroscope arrangement according to claim 1, which is characterized in that the coupling unit include: L shape connector and
The flexible connector of adjacent mass is respectively connected to positioned at the L shape connector both ends.
3. gyroscope arrangement according to claim 2, which is characterized in that two parts of L shape connector edge respectively
First direction and second direction are arranged or are respectively provided with the projection along first direction and second direction.
4. gyroscope arrangement according to claim 1, which is characterized in that the elastic connecting component includes: around anchor point
The rectangular frame of setting；Positioned at the rectangular frame inside and the flexible body of the connection rectangular frame and anchor point；With the square
The connecting rod that shape frame edge is fixedly connected, the connecting rod extend to inside mass block；Inside the mass block, and hang down
The direct-connected crossbeam for being connected to the connecting rod, the beam-end have the first spring beam for being connected to mass block.
5. gyroscope arrangement according to claim 4, which is characterized in that the crossbeam includes connects vertical with the connecting rod
The sub- crossbeam of first connect, and it is separately connected the second sub- crossbeam at the described first sub- crossbeam both ends, the first sub- crossbeam and
It is connected between two sub- crossbeams by the second spring beam.
6. gyroscope arrangement according to claim 4 or 5, which is characterized in that each connecting rod connects more than two cross
Beam.
7. gyroscope arrangement according to claim 4, which is characterized in that the elastic parts has the freedom of three-dimensional rotation
Degree.
8. gyroscope arrangement according to claim 1, which is characterized in that first mass block and second mass block
Width in a second direction between anchor point distance become larger and become larger.
9. gyroscope arrangement according to claim 8, which is characterized in that the third mass block and the 4th mass block
Width in a first direction between anchor point distance become larger and become larger.
10. according to claim 1 or gyroscope arrangement described in 9, which is characterized in that further include: the first motion detection electrode, institute
State the substrate surface that the first motion detection electrode is set to below peripheral region of each mass block far from the anchor point.
11. gyroscope arrangement according to claim 10, which is characterized in that further include: the second motion detection electrode assembly,
Including the second motion detection traveling electrode being located on third mass block and the 4th mass block, and it is fixed on the second fortune of substrate
Dynamic to detect fixed electrode, the second motion detection traveling electrode and the fixed electrode of the second motion detection constitute capacitance structure.
12. gyroscope arrangement according to claim 11, which is characterized in that the second motion detection electrode assembly setting
Between the first motion detection electrode assembly and anchor point.
13. gyroscope arrangement according to claim 1, which is characterized in that further include: driving electrodes component, the driving
Electrode group includes: the driving traveling electrode on the first mass block and the second mass block, and the drive being fixed on the substrate
Dynamic fixed electrode, the fixed electrode of the driving and the driving traveling electrode form comb structure.
14. gyroscope arrangement according to claim 1, which is characterized in that further include: driving detecting electrode component, including
Driving on third mass block and the 4th mass block detects traveling electrode, and is fixed on the fixed electricity of driving detection of substrate
Pole, the driving detection traveling electrode and driving detect fixed electrode and constitute interdigital capacitor structure.
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| CN201711137644.5A CN109798886B (en) | 2017-11-16 | 2017-11-16 | Gyroscope structure |
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| CN201711137644.5A CN109798886B (en) | 2017-11-16 | 2017-11-16 | Gyroscope structure |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110986908A (en) * | 2019-12-16 | 2020-04-10 | 武汉大学 | Elliptical resonant mode piezoelectric MEMS (micro-electromechanical systems) ring gyroscope |
| CN111024057A (en) * | 2019-12-30 | 2020-04-17 | 无锡莱斯能特科技有限公司 | Three-axis MEMS gyroscope |
| CN111693036A (en) * | 2020-07-13 | 2020-09-22 | 苏州感测通信息科技有限公司 | Three-axis MEMS gyroscope |
| CN112097751A (en) * | 2020-09-02 | 2020-12-18 | 美新半导体(天津)有限公司 | Decoupling type double-frame micro gyroscope |
| CN112902892A (en) * | 2021-01-21 | 2021-06-04 | 清华大学深圳国际研究生院 | Static comb drive type in-plane two-dimensional positioning platform with low crosstalk motion |
| CN112945219A (en) * | 2021-02-04 | 2021-06-11 | 浙江大学 | Variable area capacitor structure capable of adjusting elastic coefficient of micro mechanical device more |
| CN113218381A (en) * | 2021-05-24 | 2021-08-06 | 美新半导体(天津)有限公司 | Three-axis gyroscope |
| CN114719834A (en) * | 2022-03-09 | 2022-07-08 | 瑞声开泰科技(武汉)有限公司 | Triaxial MEMS gyroscope |
| WO2023029927A1 (en) * | 2021-08-31 | 2023-03-09 | 华为技术有限公司 | Inertial sensor and electronic device |
| WO2023155637A1 (en) * | 2022-02-18 | 2023-08-24 | 华为技术有限公司 | Angular velocity sensor, inertial sensor, and electronic device |
| WO2024169017A1 (en) * | 2023-02-14 | 2024-08-22 | 瑞声开泰科技(武汉)有限公司 | Micromechanical gyroscope and electronic product |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110986908A (en) * | 2019-12-16 | 2020-04-10 | 武汉大学 | Elliptical resonant mode piezoelectric MEMS (micro-electromechanical systems) ring gyroscope |
| CN111024057A (en) * | 2019-12-30 | 2020-04-17 | 无锡莱斯能特科技有限公司 | Three-axis MEMS gyroscope |
| CN111693036A (en) * | 2020-07-13 | 2020-09-22 | 苏州感测通信息科技有限公司 | Three-axis MEMS gyroscope |
| CN112097751A (en) * | 2020-09-02 | 2020-12-18 | 美新半导体(天津)有限公司 | Decoupling type double-frame micro gyroscope |
| CN112902892A (en) * | 2021-01-21 | 2021-06-04 | 清华大学深圳国际研究生院 | Static comb drive type in-plane two-dimensional positioning platform with low crosstalk motion |
| CN112945219A (en) * | 2021-02-04 | 2021-06-11 | 浙江大学 | Variable area capacitor structure capable of adjusting elastic coefficient of micro mechanical device more |
| CN112945219B (en) * | 2021-02-04 | 2022-09-20 | 浙江大学 | Variable-area capacitor structure with larger adjustable elastic coefficient of micromechanical devices |
| CN113218381A (en) * | 2021-05-24 | 2021-08-06 | 美新半导体(天津)有限公司 | Three-axis gyroscope |
| WO2023029927A1 (en) * | 2021-08-31 | 2023-03-09 | 华为技术有限公司 | Inertial sensor and electronic device |
| WO2023155637A1 (en) * | 2022-02-18 | 2023-08-24 | 华为技术有限公司 | Angular velocity sensor, inertial sensor, and electronic device |
| CN114719834A (en) * | 2022-03-09 | 2022-07-08 | 瑞声开泰科技(武汉)有限公司 | Triaxial MEMS gyroscope |
| WO2024169017A1 (en) * | 2023-02-14 | 2024-08-22 | 瑞声开泰科技(武汉)有限公司 | Micromechanical gyroscope and electronic product |
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Denomination of invention: A gyroscope structure Granted publication date: 20240507 Pledgee: China Construction Bank Corporation Shanghai Zhangjiang Branch Pledgor: Shanghai Sirui Technology Co.,Ltd. Registration number: Y2024980031811 |