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CN106247930B - The residual compensation method of phase carrier formula laser interferometer closed loop demodulating algorithm - Google Patents

The residual compensation method of phase carrier formula laser interferometer closed loop demodulating algorithm Download PDF

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CN106247930B
CN106247930B CN201610821010.0A CN201610821010A CN106247930B CN 106247930 B CN106247930 B CN 106247930B CN 201610821010 A CN201610821010 A CN 201610821010A CN 106247930 B CN106247930 B CN 106247930B
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温强
刘鹏飞
廖为桂
李立
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Harbin Engineering University
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Abstract

The present invention is to provide a kind of residual compensation methods of phase carrier formula laser interferometer closed loop demodulating algorithm.Interference light signal is multiplied with additional carrier signal, low-pass filtering, is removed, arc tangent obtains system residual error, the phase signal weighted sum that system residual error and closed loop are demodulated corrects measurement result with this.In phase carrier formula laser interferometer closed loop demodulating process, system can have different degrees of residual error because of the limitation of disturbance factor or tracking ability.The present invention has the advantages that phase-modulation high-ranking military officer's interference signal closed loop demodulation method, while also having higher demodulation accuracy.

Description

相位载波式激光干涉仪闭环解调算法的残差补偿方法Residual Compensation Method of Phase Carrier Laser Interferometer Closed-loop Demodulation Algorithm

技术领域technical field

本发明涉及的是一种光学干涉测量方法,具体地说是一种相位载波激光干涉信号的的残差补偿方法。The invention relates to an optical interferometry method, in particular to a method for residual error compensation of phase carrier laser interference signals.

背景技术Background technique

广泛应用于光学干涉型传感器的相位解调算法为PGC算法,其原理是利用输入信号与本地调相波进行差频处理,得到两路被测相位的正交值,再利用正交值与原始信号进行交叉微分相乘,通过三角函数关系与积分处理得到被测相位值。在80年代数字电路不是很发达的情况下该算法的提出很好的解决了工程实际化的问题。但是该算法存在几个问题,首先是其工作的动态范围受调相波信号影响很大,另外该系统工作在开环状态下,没有反馈回路保证系统的长期工作稳定性。PGC算法中还有一个比较严重的问题就是很容易受到伴生调幅的影响,由于PGC算法需要一个调相波信号对干涉仪进行调制,在直接调制激光器相位过程中容易引人伴随的幅度变化,该变化会使最终数据结果产生较大的谐波失真。另一方面,对于相位载波激光干涉信号的闭环解调算法也会因扰动因素或跟踪能力限制,而存有不同程度的残差。The phase demodulation algorithm widely used in optical interference sensors is the PGC algorithm. Its principle is to use the input signal and the local phase modulation wave to perform frequency difference processing to obtain the quadrature value of the two measured phases, and then use the quadrature value and the original The signal is multiplied by cross differential, and the measured phase value is obtained through trigonometric function relationship and integral processing. In the 1980s, when digital circuits were not very developed, the algorithm was proposed to solve the problem of engineering practice. However, there are several problems with this algorithm. First, the dynamic range of its work is greatly affected by the phase-modulated wave signal. In addition, the system works in an open-loop state, and there is no feedback loop to ensure the long-term stability of the system. Another serious problem in the PGC algorithm is that it is easily affected by the associated amplitude modulation. Since the PGC algorithm requires a phase-modulated wave signal to modulate the interferometer, it is easy to cause accompanying amplitude changes in the process of directly modulating the laser phase. Variations can produce large harmonic distortions in the final data result. On the other hand, the closed-loop demodulation algorithm for the phase-carrier laser interference signal also has different degrees of residual error due to disturbance factors or tracking capability limitations.

发明内容Contents of the invention

本发明的目的在于提供一种具有更高的解调精度的相位载波式激光干涉仪闭环解调算法的残差补偿方法。The purpose of the present invention is to provide a residual error compensation method of a phase carrier type laser interferometer closed-loop demodulation algorithm with higher demodulation accuracy.

本发明的目的是这样实现的:The purpose of the present invention is achieved like this:

相位载波式激光干涉信号经过光电转换后分别与G cosω0t和H cos2ω0t作乘法运算,其中:ω0为相位调制频率,G、H分别为外加载波的幅值;The phase carrier laser interference signal is multiplied with G cosω 0 t and H cos2ω 0 t after photoelectric conversion, where: ω 0 is the phase modulation frequency, G and H are the amplitudes of the external loading wave;

利用低通滤波器滤除含有ω0的交流分量,得到其中:B为干涉后光强的交流分量,J1(C)、J2(C)分别为与光源调制深度有关的贝塞尔函数展开系数,二者的比值为 Use a low-pass filter to filter out the AC component containing ω 0 , and get and Among them: B is the AC component of the light intensity after interference, J 1 (C) and J 2 (C) are the Bessel function expansion coefficients related to the modulation depth of the light source, and the ratio of the two is

经反正切计算得到闭环解调算法的系统残差用于补偿闭环相位解调结果。The system residual error of the closed-loop demodulation algorithm is obtained by arctangent calculation It is used to compensate the closed-loop phase demodulation result.

本发明还可以包括:The present invention may also include:

当被测信号产生的相位变化范围小于等于正负45度时,所得到的残差项为被测信号产生的相位。When the phase variation range of the signal under test is less than or equal to plus or minus 45 degrees, the obtained residual term is the phase of the signal under test.

本发明在相位载波试激光干涉信号闭环解调算法的基础上引入了闭环残差补偿机制。The invention introduces a closed-loop residual error compensation mechanism on the basis of a closed-loop demodulation algorithm of a phase carrier test laser interference signal.

具体地,经光电探测器之后的干涉信号为:Specifically, the interference signal after the photodetector is:

其中:I1,I2分别为两束干涉光光强,A为干涉后光强的直流分量,B为干涉后光强的交流分量,为干涉相位变化值,表达式为:Among them: I 1 , I 2 are the light intensity of the two beams of interference light respectively, A is the DC component of the light intensity after interference, B is the AC component of the light intensity after interference, is the interferometric phase change value, the expression is:

其中上式中的分别为干涉初相位,光源调制引起的相位变化,。光源调制引起的相位变化与光源调制频率ν有关。where in the above formula are the initial phase of interference, the phase change caused by light source modulation, respectively. Phase change due to light source modulation It is related to the light source modulation frequency ν.

其中n为光纤折射率,l为两臂臂长差,c为光速,调制电流为i=i0cosω0t,则光源引起的频率变化为ν=Δνcosω0t,得到调制信号引起的相位变化量为:Where n is the refractive index of the fiber, l is the length difference between the two arms, c is the speed of light, and the modulation current is i=i 0 cosω 0 t, then the frequency change caused by the light source is ν=Δνcosω 0 t, and the phase change caused by the modulation signal is obtained The amount is:

其中C为调制深度,是与光纤干涉仪以及调制相关的固定常量,则干涉信号形式为:Where C is the modulation depth, which is a fixed constant related to the fiber interferometer and modulation, then the form of the interference signal is:

对其进行贝塞尔展开,得:Performing Bessel expansion on it, we get:

其中Jm(C)为某一调制深度C下的高阶系数。Where J m (C) is a high-order coefficient at a certain modulation depth C.

将贝塞尔展开后的式子与信号发生器产生的外加载波信号G cosω0t、H cos2ω0t相乘,并分别利用低通滤波去除掉包含ω0的交流项,可得:Multiply the Bessel expanded formula with the external loading wave signals G cosω 0 t and H cos2ω 0 t generated by the signal generator, and use low-pass filtering to remove the AC term including ω 0 respectively, and we can get:

作除法运算后,得到:After doing the division operation, we get:

去除常数项并利用反正切计算得到闭环相位解调算法的系统相位残差将该残差与闭环解调结果相加作为最终的解调结果。Remove the constant term and use the arctangent calculation to obtain the system phase residual of the closed-loop phase demodulation algorithm The residual is added to the closed-loop demodulation result as the final demodulation result.

本发明的优势在于:具有相位调制将官干涉信号闭环解调方法的优点,同时还具有更高的解调精度。The invention has the advantages of having the advantages of the closed-loop demodulation method of the phase modulation general interference signal, and at the same time having higher demodulation precision.

附图说明Description of drawings

图1为相位载波式激光干涉信号闭环解调的残差补偿方法的流程图。FIG. 1 is a flowchart of a residual compensation method for closed-loop demodulation of a phase-carrier laser interference signal.

图2为相位载波式激光干涉信号闭环解调的残差补偿方法的装置结构图。Fig. 2 is a device structure diagram of a residual error compensation method for closed-loop demodulation of a phase-carrier laser interference signal.

具体实施方式Detailed ways

下面结合附图举例对本发明做更详细的描述。The present invention will be described in more detail below with examples in conjunction with the accompanying drawings.

结合图2,本发明的装置包括:1、激光器光源,2、光纤耦合器,3、光纤传感器臂,4、光纤参考臂,5、传感臂反射镜,6、参考臂反射镜,7、光电探测器,8、带通滤波器,9、用于与外载波信号相乘的乘法器,10、乘法器,11、低通滤波器,12、低通滤波器,13、除法器,14、反正切运算,15、开方运算,16、PID控制器,17、加法器,18、输出的最后解调出的相位信号,19、压电陶瓷驱动器,20、压电陶瓷。本发明的装置可分为两部分,第一部分为激光光纤干涉仪产生相位载波的干涉相位信号,包括激光光源、光纤耦合器、参考臂和传感臂;第二部分为本发明提供的相位载波式激光干涉仪闭环解调算法的残差补偿方法,其中的相位解调模块由中心频率ω0的带通滤波器、乘法器、低通滤波器、开方求和运算构成,系统残差补偿模块由乘法器、低通滤波器、除法器、反正切运算构成,闭环控制模块由PID控制器和压电陶瓷构成。2, the device of the present invention includes: 1. laser light source, 2. fiber coupler, 3. fiber sensor arm, 4. fiber reference arm, 5. sensing arm reflector, 6. reference arm reflector, 7. Photodetector, 8, band-pass filter, 9, multiplier for multiplying external carrier signal, 10, multiplier, 11, low-pass filter, 12, low-pass filter, 13, divider, 14 . Arctangent operation, 15. Square root operation, 16. PID controller, 17. Adder, 18. The final demodulated phase signal output, 19. Piezoelectric ceramic driver, 20. Piezoelectric ceramic. The device of the present invention can be divided into two parts, the first part is the interference phase signal of the phase carrier generated by the laser fiber interferometer, including laser light source, fiber coupler, reference arm and sensing arm; the second part is the phase carrier provided by the present invention The residual compensation method of the laser interferometer closed-loop demodulation algorithm, wherein the phase demodulation module is composed of a band-pass filter with a center frequency ω 0 , a multiplier, a low-pass filter, and a square root summation operation. The system residual compensation The module is composed of a multiplier, a low-pass filter, a divider, and an arctangent operation, and the closed-loop control module is composed of a PID controller and piezoelectric ceramics.

干涉信号经光电转换和AD采样送入可编程逻辑器件(FPGA),在FPGA中完成光干涉信号带通滤波、自乘、低通滤波、开方运算,及PID运算,产生闭环控制信号,即相位补偿信号,该信号放大后产生补偿相位馈入光路。The interference signal is sent to the programmable logic device (FPGA) through photoelectric conversion and AD sampling, and the band-pass filtering, self-multiplication, low-pass filtering, square root operation, and PID operation of the optical interference signal are completed in the FPGA to generate a closed-loop control signal, namely The phase compensation signal is amplified to generate a compensation phase and fed into the optical path.

同时光电转换的干涉信号经AD采样后还在FPGA中与单倍频、双倍频载波信号做相应的乘法、除法、低通滤波和反正切运算,得到系统残差。残差与相位补偿信号在FPGA中相加得到最终的相位解调结果,该信号由FPGA输出。At the same time, after the photoelectric conversion interference signal is sampled by AD, it is also multiplied, divided, low-pass filtered and arctangent calculated with the single-frequency and double-frequency carrier signals in the FPGA to obtain the system residual. The residual and the phase compensation signal are added in the FPGA to obtain the final phase demodulation result, which is output by the FPGA.

相位载波式激光干涉仪闭环解调过程中,系统会因扰动因素或跟踪能力的限制,而存有不同程度的残差。本发明提供了一种相位载波式激光干涉信号闭环解调算法的残差补偿方法,主要包括:将干涉光信号与外加的载波信号相乘、低通滤波、作除、反正切得到系统残差,将系统残差与闭环解调出的相位信号加权求和,以此修正测量结果。During the closed-loop demodulation process of the phase-carrier laser interferometer, the system will have different degrees of residual error due to disturbance factors or limitations of tracking capabilities. The invention provides a residual error compensation method of a phase-carrier laser interference signal closed-loop demodulation algorithm, which mainly includes: multiplication of the interference optical signal and an external carrier signal, low-pass filtering, division, and arctangent to obtain the system residual , to correct the measurement result by weighting and summing the system residual and the phase signal obtained from the closed-loop demodulation.

相位载波式激光干涉信号经过光电转换后分别与G cosω0t和H cos2ω0t作乘法运算(ω0为相位调制频率,G、H分别为外加载波的幅值),并利用低通滤波器滤除含有ω0的交流分量,得到(B为干涉后光强的交流分量,J1(C)、J2(C)分别为与光源调制深度有关的贝塞尔函数展开系数),二者的比值为根据该式可经反正切计算得到闭环解调算法的系统残差并用于补偿闭环相位解调结果;The phase carrier laser interference signal is multiplied with G cosω 0 t and H cos2ω 0 t after photoelectric conversion (ω 0 is the phase modulation frequency, G and H are the amplitude of the external loading wave respectively), and the low-pass filter is used Filter out the AC component containing ω 0 , get and (B is the AC component of the light intensity after interference, J 1 (C) and J 2 (C) are the Bessel function expansion coefficients related to the modulation depth of the light source respectively), the ratio of the two is According to this formula, the system residual error of the closed-loop demodulation algorithm can be obtained by arctangent calculation And used to compensate the closed-loop phase demodulation results;

当被测信号产生的相位变化范围不大时(如正负45度),可在适当调整静态工作点后,将闭环系统转为开环状态,则所得到的残差项就是被测信号产生的相位。When the phase change range of the signal under test is not large (such as plus or minus 45 degrees), the closed-loop system can be converted to an open-loop state after properly adjusting the static operating point, and the obtained residual term is the signal generated by the signal under test. phase.

Claims (2)

1.一种相位载波式激光干涉仪闭环解调算法的残差补偿方法,其特征是:1. A kind of residual compensation method of phase carrier type laser interferometer closed-loop demodulation algorithm, it is characterized in that: 相位载波式激光干涉信号经过光电转换后分别与G cosω0t和H cos2ω0t作乘法运算,其中:ω0为相位调制频率,G、H分别为外加载波的幅值;The phase carrier laser interference signal is multiplied with G cosω 0 t and H cos2ω 0 t after photoelectric conversion, where: ω 0 is the phase modulation frequency, G and H are the amplitudes of the external loading wave; 利用低通滤波器滤除含有ω0的交流分量,得到其中:B为干涉后光强的交流分量,J1(C)、J2(C)分别为与光源调制深度有关的贝塞尔函数展开系数,二者的比值为C为调制深度;Use a low-pass filter to filter out the AC component containing ω 0 , and get and Among them: B is the AC component of the light intensity after interference, J 1 (C) and J 2 (C) are the Bessel function expansion coefficients related to the modulation depth of the light source, and the ratio of the two is C is the modulation depth; 经反正切计算得到闭环解调算法的系统残差用于补偿闭环相位解调结果。The system residual error of the closed-loop demodulation algorithm is obtained by arctangent calculation It is used to compensate the closed-loop phase demodulation result. 2.根据权利要求1所述的相位载波式激光干涉仪闭环解调算法的残差补偿方法,其特征是:当被测信号产生的相位变化范围在负45度至正45度之间时,所得到的残差项为被测信号产生的相位。2. The residual compensation method of the phase-carrier laser interferometer closed-loop demodulation algorithm according to claim 1, characterized in that: when the phase variation range produced by the measured signal is between minus 45 degrees and plus 45 degrees, The resulting residual term is the phase generated by the signal under test.
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