CN106010764A - Method for recovering mortar during silicon wafer cutting - Google Patents
Method for recovering mortar during silicon wafer cutting Download PDFInfo
- Publication number
- CN106010764A CN106010764A CN201610333171.5A CN201610333171A CN106010764A CN 106010764 A CN106010764 A CN 106010764A CN 201610333171 A CN201610333171 A CN 201610333171A CN 106010764 A CN106010764 A CN 106010764A
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- Prior art keywords
- mortar
- tank
- liquid
- filter
- filter cake
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M175/00—Working-up used lubricants to recover useful products ; Cleaning
- C10M175/0083—Lubricating greases
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M175/00—Working-up used lubricants to recover useful products ; Cleaning
- C10M175/0058—Working-up used lubricants to recover useful products ; Cleaning by filtration and centrifugation processes; apparatus therefor
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Organic Chemistry (AREA)
- Treatment Of Sludge (AREA)
Abstract
The invention discloses a method for recovering mortar during silicon wafer cutting. The method comprises steps as follows: primary centrifugation is performed, a first filter cake after centrifugation is subjected to secondary centrifugation after being subjected to primary blending and primary configuration, a second filter cake after secondary centrifugation enters a crude product tank after being subjected to secondary blending and secondary configuration, a filter-pressing liquid obtained after heating and filter pressing of first filtrate and second filtrate is blended with the first filter cake, and a distilled recovery liquid is blended with the second filter cake. By means of the recovery method, the mortar produced in the silicon wafer cutting process can be recovered and is pollution-free, and the recutting requirement of a silicon wafer is completely met.
Description
Technical field
The present invention relates to a kind of recovery method, particularly relate to a kind of mortar generated in silicon chip cutting recovery method.
Background technology
Along with reshuffling and profit continuous decrease of solar silicon wafers cutting industry, silicon chip cuts
Enterprise is in order to control production cost further, and the most immediately possible way is in three big adjuvants
Silicon carbide micro-powder and Polyethylene Glycol cutting liquid carry out regeneration, are reused by the regeneration of mortar
Can make to be sliced into originally to significantly reduce.Existing recovery method is a kind of off-line way of recycling, is returning
Use alkali to carry out chemical method during receipts and silicon Impurity removal, alkali and chemistry of silicones reaction can be produced silicon
Acid sodium, need to clean with substantial amounts of water and remove sodium silicate, the carborundum higher to obtain purity；With
Substantial amounts of water cleans, and not only causes the serious waste of water resource, and PEG contained in water and silicic acid
Sodium is macromolecule organic, causes COD content in water high, and degraded difficulty, in addition in carborundum
Metal impurities could need to be removed after pickling, and after pickling, metal impurities are just changed into heavy metal, use water
After cleaning, heavy metal is soluble in water, causes the heavy metal pollution of water.
Summary of the invention
The technical problem to be solved is: provide a kind of mortar generated in silicon chip cutting recovery method,
This recovery method can be with the mortar in silicon chip cutting process, and the mortar of recovery is pollution-free, fully meets
Cutting again of silicon chip.
For solving above-mentioned technical problem, the technical scheme is that a kind of mortar generated in silicon chip cutting returns
Receiving method, comprises the following steps:
A. the waste mortar reclaimed after cutting silicon chip is delivered in thinning tank, and add in thinning tank
Stir after the annex solution of 23-25% weight ratio formation pretreatment mortar；Pretreatment mortar is heated
Centrifugal formation the first filtrate and the first filter cake in the first sedimentation centrifuge is delivered to after 50-52 DEG C；Make
The liquid content of the first filter cake controls in 30-40% weight ratio；
B. the first filter cake step A obtained is delivered in a Mixer pot, adds 30-33% weight
After the annex solution of ratio, stirring is in harmonious proportion and forms a subharmonic mortar, then is delivered to once by a subharmonic mortar
Slurry commanding tank stirs with slurry, formed after adding the annex solution of 15-20% weight ratio in a slurry commanding tank
Once configure mortar, will once configure and after mortar is heated to 52-55 DEG C, deliver to the second sedimentation centrifuge
In centrifugal form the second filter cake and the second filtrate, the liquid content of the second filter cake controls in 30-35% weight
Ratio；
C. delivering in secondary Mixer pot by the second filter cake, after adding the cutting liquid of 30-40%, stirring is in harmonious proportion
Form secondary and coordinate mortar, then deliver to two subharmonic mortars secondary slurry commanding tank stirs with slurry, past
Secondary configuration mortar is formed after secondary slurry commanding tank adds the cutting liquid of 12-15% weight ratio；
D. the second filtrate formed in the first filtrate formed in step A and step B delivers to surge tank
Middle caching, delivers to after then the mixing filtrate in buffer tank being heated to 60-70 DEG C press in pressure filter
Filter, the Stress control in pressure filter is at 0.4-0.6MPa, and the pressing filtering liquid that filter pressing obtains delivers to pressing filtering liquid
Holding vessel stores, and the pressing filtering liquid part in this filter pressing holding vessel delivers to the dilution in step A
As annex solution in a Mixer pot in tank, step B and a slurry commanding tank；Another part filter pressing
Liquid delivers to distillation dehydration in distillating still, and vapo(u)rizing temperature controls at 100-120 DEG C, and takes out distillating still
Vacuum, relative vacuum degree is 0.090-0.093MPa, is recycled liquid after distillating still distills,
This recovered liquid is delivered in the secondary Mixer pot in step C, in secondary slurry commanding tank as cutting liquid；
E., secondary in step C configures mortar deliver to, in first finished pot, in ancient times finished pot add
After the new mortar of 40-50% weight ratio, stirring is configured to mortar product, by mortar product through fine filter
Deliver to after filtration product storage tank reuses.
Wherein preferred, the once configuration mortar of configuration in an above-mentioned slurry commanding tank in stepb
Sand content controls the secondary configuration sand of configuration in secondary slurry commanding tank in 1.53-1.54g/ml, step C
The sand content of slurry controls at 1.65-1.67g/ml.
After have employed technique scheme, the effect of the present invention is: 1. what this recovery method reclaimed cuts
Cut liquid and solid particle is purer, make mortar can meet again completely by two subharmonics and configuration
Split requirement；2. the pressing filtering liquid after utilizing pressure filter filter pressing in this recovery method delivers to a Mixer pot
With in a slurry commanding tank, so, pressing filtering liquid enters in second time sedimentation centrifuge centrifugal once more,
So pressing filtering liquid is processed once more, improve the treatment effect of impurity, and after distillating still distills
The recovered liquid water content composite demand obtained, adds in secondary Mixer pot and secondary slurry commanding tank complete
Composite demand.3. this recovery method, does not the most use water, and the secondary not resulting in environment is dirty
Dye, is the way of recycling of a kind of energy-conserving and environment-protective.
Accompanying drawing explanation
The present invention is further described with embodiment below in conjunction with the accompanying drawings.
Fig. 1 is the system diagram of the Upstream section of the recovery method step of the embodiment of the present invention；
Fig. 2 is the system diagram of the tract of the recovery method step in the embodiment of the present invention；
In accompanying drawing: 1. waste mortar holding vessel；2. thinning tank；3. a Mixer pot；4. a slurry commanding tank；
5. a slurry commanding tank；6. two Mixer pots；7. two slurry commanding tanks；8. two slurry commanding tanks；9. first finished product
Tank；10. first finished pot；11. product storage tank；12. product storage tank；13. first add hot charging
Put；14. first sedimentation centrifuges；15. secondary heating mechanisms；16. second sedimentation centrifuges；17. delay
Rush tank；18. surge tanks；19. surge tanks；20. the 3rd heaters；21. pressure filter；22. pressures
Filtrate holding vessel；23. distillating stills；24. recovered liquid holding vessels；25. fine filters.
Detailed description of the invention
Below by specific embodiment, the present invention is described in further detail.
Embodiment 1
As depicted in figs. 1 and 2, a kind of mortar generated in silicon chip cutting recovery method, comprise the following steps:
A. the waste mortar reclaimed after cutting silicon chip is had previously been stored in waste mortar holding vessel 1 temporary
Deposit, be then passed in thinning tank 2, and toward thinning tank 2 adds the interpolation of 23% weight ratio
Stir after liquid formation pretreatment mortar；This annex solution is through pressure filter 21 in subsequent handling
Pressing filtering liquid after filter pressing, send after pretreatment mortar is heated to 50 DEG C by first heater 13
Centrifugal formation the first filtrate and the first filter cake to the first sedimentation centrifuge 14；Make the first filter cake
Liquid content controls in 30% weight ratio；
B. the first filter cake step A obtained is delivered to, in a Mixer pot 3, add 30% weight ratio
Annex solution after stirring be in harmonious proportion and form a subharmonic mortar, then deliver to once join by a subharmonic mortar
Stirring with slurry in slurry tank 4,5, the quantity of a slurry commanding tank 4,5 is two, is conveniently used alternatingly,
Formed after adding the annex solution of 15% weight ratio in a slurry commanding tank 4,5 and once configure mortar,
In slurry commanding tank 4,5, the sand content once configuring mortar of configuration controls at 1.53g/ml, by one
The second sedimentation centrifuge 16 delivered to after secondary heating mechanism 15 is heated to 52 DEG C by secondary configuration mortar
In centrifugal form the second filter cake and the second filtrate, the liquid content of the second filter cake controls in 35% weight
Ratio；
C. delivering in secondary Mixer pot 6 by the second filter cake, after adding the cutting liquid of 30%, stirring is in harmonious proportion
Form secondary and coordinate mortar, then deliver to two subharmonic mortars secondary slurry commanding tank 7,8 stirs join
Slurry, the quantity of same secondary slurry commanding tank 7,8 is two and is used alternatingly, toward secondary slurry commanding tank 7,8
Secondary configuration mortar is formed after the cutting liquid of middle addition 12% weight ratio；Secondary configuration mortar containing sand
Amount controls at 1.65g/ml.
D. the second filtrate formed in the first filtrate formed in step A and step B delivers to surge tank
17, caching in 18,19, according to on-the-spot space, surge tank 17,18,19 can be with quantity
One, it is possible to for multiple, the present embodiment is 3 buffer tanks, then the mixing in buffer tank is filtered
Liquid delivers to filter pressing in pressure filter 21, pressure filter after the 3rd heater 20 is heated to 60 DEG C
Stress control in 21 is at 0.6MPa, and the pressing filtering liquid that filter pressing obtains is delivered in pressing filtering liquid holding vessel 22
Store, and the pressing filtering liquid part in this filter pressing holding vessel delivers to the thinning tank 2 in step A, step
As annex solution in a Mixer pot 3 in rapid B and a slurry commanding tank 4,5；Another part pressure
Filtrate delivers to distillation dehydration in distillating still 23, and vapo(u)rizing temperature controls at 100 DEG C, and to distillating still
23 evacuation, relative vacuum degree is 0.090MPa, can be taken out by the moisture of distillation while evacuation
From, it is recycled liquid and is placed in recovered liquid holding vessel 24 storage after distillating still 23 distills,
This recovered liquid is delivered in the secondary Mixer pot 6 in step C, in secondary slurry commanding tank 7,8 as cutting
Cut liquid；
E. the secondary in step C is configured mortar and delivers in first finished pot 9,10, thick finished pot
Quantity is two, in ancient times adds stirring configuration after the new mortar of 50% weight ratio in finished pot 9,10
Become mortar product, mortar product is delivered to after fine filter 25 filters product storage tank 11,12
In reuse, product storage tank 11,12 quantity is also two, and the aperture of fine filter 25 is 1.4
Micron.
Embodiment 2
In this embodiment, structure is essentially identical with the method for embodiment 1, is simply made that tune in parameter
Whole.
A kind of mortar generated in silicon chip cutting recovery method, comprises the following steps:
A. the waste mortar that reclaims will deliver in thinning tank 2 after cutting silicon chip, and toward in thinning tank 2
Stir after adding the annex solution of 25% weight ratio formation pretreatment mortar；Pretreatment mortar is added
Heat delivers to centrifugal formation the first filtrate and the first filter cake in the first sedimentation centrifuge 14 after 52 DEG C；
The liquid content making the first filter cake controls in 40% weight ratio；
B. the first filter cake step A obtained is delivered to, in a Mixer pot 3, add 33% weight ratio
Annex solution after stirring be in harmonious proportion and form a subharmonic mortar, then deliver to once join by a subharmonic mortar
Slurry tank 4,5 stirs with slurry, in a slurry commanding tank 4,5, add the annex solution of 20% weight ratio
Rear formation once configures mortar, in a slurry commanding tank 4,5 configuration once configuration mortar containing sand
Amount controls at 1.54g/ml, will once configure after mortar is heated to 55 DEG C and deliver to the second sedimentation centrifuge
Centrifugal formation the second filter cake and the second filtrate in 16, the liquid content of the second filter cake controls in 35% weight
Ratio；
C. delivering in secondary Mixer pot 6 by the second filter cake, after adding the cutting liquid of 40%, stirring is in harmonious proportion
Form secondary and coordinate mortar, then deliver to two subharmonic mortars secondary slurry commanding tank 7,8 stirs join
Slurry, forms secondary configuration sand in secondary slurry commanding tank 7,8 after adding the cutting liquid of 15% weight ratio
Slurry；The sand content of the secondary configuration mortar of configuration in secondary slurry commanding tank 7,8 controls at 1.67g/ml.
D. the second filtrate formed in the first filtrate formed in step A and step B delivers to surge tank
17, cache in 18,19, after then the mixing filtrate in buffer tank being heated to 70 DEG C, deliver to pressure
Filter pressing in filter 21, the Stress control in pressure filter 21 at 0.4MPa, the pressing filtering liquid that filter pressing obtains
Deliver to pressing filtering liquid holding vessel 22 stores, and the pressing filtering liquid part in this filter pressing holding vessel is delivered to
In thinning tank 2 in step A, the Mixer pot 3 in step B and a slurry commanding tank 4,5
As annex solution；Another part pressing filtering liquid delivers to distillation dehydration in distillating still 23, vapo(u)rizing temperature control
System is at 120 DEG C, and to distillating still 23 evacuation, relative vacuum degree is 0.093MPa, Jing Guozheng
It is recycled liquid after evaporating still 23 distillation, this recovered liquid delivers in the secondary Mixer pot 6 in step C,
As cutting liquid in secondary slurry commanding tank 7,8；
E. the secondary in step C is configured mortar and delivers in first finished pot 9,10, in ancient times finished pot
9, after adding the new mortar of 50% weight ratio in 10, stirring is configured to mortar product, by mortar product
Deliver to product storage tank 11,12 reuses after fine filter 25 filters.
Embodiment described above is only the description to the preferred embodiment of the present invention, not as to this
The restriction of invention scope, on the basis of designing spirit without departing from the present invention, to the technology of the present invention side
Various deformation that case is made and transformation, all should fall into the protection model that claims of the present invention determines
In enclosing.
Claims (2)
1. a mortar generated in silicon chip cutting recovery method, it is characterised in that: comprise the following steps:
A. the waste mortar reclaimed after cutting silicon chip is delivered in thinning tank, and add in thinning tank
Stir after the annex solution of 23-25% weight ratio formation pretreatment mortar；Pretreatment mortar is heated
Centrifugal formation the first filtrate and the first filter cake in the first sedimentation centrifuge is delivered to after 50-52 DEG C；Make
The liquid content of the first filter cake controls in 30-40% weight ratio；
B. the first filter cake step A obtained is delivered in a Mixer pot, adds 30-33% weight
After the annex solution of ratio, stirring is in harmonious proportion and forms a subharmonic mortar, then is delivered to once by a subharmonic mortar
Slurry commanding tank stirs with slurry, formed after adding the annex solution of 15-20% weight ratio in a slurry commanding tank
Once configure mortar, will once configure and after mortar is heated to 52-55 DEG C, deliver to the second sedimentation centrifuge
In centrifugal form the second filter cake and the second filtrate, the liquid content of the second filter cake controls in 30-35% weight
Ratio；
C. delivering in secondary Mixer pot by the second filter cake, after adding the cutting liquid of 30-40%, stirring is in harmonious proportion
Form secondary and coordinate mortar, then deliver to two subharmonic mortars secondary slurry commanding tank stirs with slurry, past
Secondary configuration mortar is formed after secondary slurry commanding tank adds the cutting liquid of 12-15% weight ratio；
D. the second filtrate formed in the first filtrate formed in step A and step B delivers to surge tank
Middle caching, delivers to after then the mixing filtrate in buffer tank being heated to 60-70 DEG C press in pressure filter
Filter, the Stress control in pressure filter is at 0.4-0.6MPa, and the pressing filtering liquid that filter pressing obtains delivers to pressing filtering liquid
Holding vessel stores, and the pressing filtering liquid part in this filter pressing holding vessel delivers to the dilution in step A
As annex solution in a Mixer pot in tank, step B and a slurry commanding tank；Another part filter pressing
Liquid delivers to distillation dehydration in distillating still, and vapo(u)rizing temperature controls at 100-120 DEG C, and takes out distillating still
Vacuum, relative vacuum degree is 0.090-0.093MPa, is recycled liquid after distillating still distills,
This recovered liquid is delivered in the secondary Mixer pot in step C, in secondary slurry commanding tank as cutting liquid；
E., secondary in step C configures mortar deliver to, in first finished pot, in ancient times finished pot add
After the new mortar of 40-50% weight ratio, stirring is configured to mortar product, by mortar product through fine filter
Deliver to after filtration product storage tank reuses.
2. a kind of mortar generated in silicon chip cutting recovery method as claimed in claim 1, it is characterised in that:
In an above-mentioned slurry commanding tank in stepb, the sand content once configuring mortar of configuration controls
1.53-1.54g/ml, the sand content control of the secondary configuration mortar of configuration in secondary slurry commanding tank in step C
System is at 1.65-1.67g/ml.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610333171.5A CN106010764A (en) | 2016-05-19 | 2016-05-19 | Method for recovering mortar during silicon wafer cutting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610333171.5A CN106010764A (en) | 2016-05-19 | 2016-05-19 | Method for recovering mortar during silicon wafer cutting |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106010764A true CN106010764A (en) | 2016-10-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610333171.5A Pending CN106010764A (en) | 2016-05-19 | 2016-05-19 | Method for recovering mortar during silicon wafer cutting |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113183339A (en) * | 2021-04-07 | 2021-07-30 | 中环领先半导体材料有限公司 | Mortar circulation process capable of greatly reducing cost of large-size mortar line |
| CN115404120A (en) * | 2022-08-26 | 2022-11-29 | 江阴东为资源再生技术有限公司 | Mortar recovery method, system, electronic device and storage medium |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100163462A1 (en) * | 2008-12-31 | 2010-07-01 | Memc Electronic Materials, Inc. | Methods to recover and purify silicon particles from saw kerf |
| CN102757856A (en) * | 2012-07-30 | 2012-10-31 | 江苏阳帆机电设备制造有限公司 | Online recovery method for waste mortar produced in silicon wafer cutting |
| CN104046504A (en) * | 2014-06-10 | 2014-09-17 | 江阴华诺太阳能设备科技有限公司 | Online recycling process for solar silicon wafer cutting mortar |
-
2016
- 2016-05-19 CN CN201610333171.5A patent/CN106010764A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100163462A1 (en) * | 2008-12-31 | 2010-07-01 | Memc Electronic Materials, Inc. | Methods to recover and purify silicon particles from saw kerf |
| CN102757856A (en) * | 2012-07-30 | 2012-10-31 | 江苏阳帆机电设备制造有限公司 | Online recovery method for waste mortar produced in silicon wafer cutting |
| CN104046504A (en) * | 2014-06-10 | 2014-09-17 | 江阴华诺太阳能设备科技有限公司 | Online recycling process for solar silicon wafer cutting mortar |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113183339A (en) * | 2021-04-07 | 2021-07-30 | 中环领先半导体材料有限公司 | Mortar circulation process capable of greatly reducing cost of large-size mortar line |
| CN115404120A (en) * | 2022-08-26 | 2022-11-29 | 江阴东为资源再生技术有限公司 | Mortar recovery method, system, electronic device and storage medium |
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Application publication date: 20161012 |