CN103592712A - High-performance all-dielectric interference multilayer film-TCO series type light filter and manufacturing method thereof - Google Patents

Abstract

The invention discloses a high-performance all-dielectric interference multilayer film-TCO series optical filter and a preparation method thereof. The optical filter comprises: a base; a TCO film layer arranged on the first surface of the base; a TCO film layer arranged on the TCO film An all-dielectric multilayer film on the layer; and, an anti-reflection film layer arranged on the second surface of the base; the all-dielectric multilayer film is composed of several layers of high refractive index dielectric films and low refractive index dielectric films alternately stacked. In the preparation method of the optical filter of the present invention, the all-dielectric multilayer film is prepared by a thin film deposition system, and the TCO filter is prepared by a thin film deposition system, followed by annealing treatment, and then the two are organically combined to finally obtain the series optical filter of the present invention. The optical filter of the present invention organically combines an all-dielectric multi-layer film optical filter and a TCO optical filter, integrates the advantages of the two, and can modulate the energy of the entire spectrum, so that the energy of the available bands can be transmitted, and the energy of the unavailable bands can be transmitted. Energy reflection improves the spectral efficiency of the filter and can be used in combination with thermal photovoltaic systems to improve system efficiency.

Description

High-performance all-dielectric interference multilayer film-TCO series filter and its preparation method

technical field

The present invention relates to a tandem optical filter, in particular to a combination of an all-dielectric multilayer optical filter and a transparent conductive oxide thin film (TCO) optical filter, which overcomes the shortcomings of each other and combines the two It is a filter with high spectral efficiency that combines the advantages in one body. the

Background technique

The technology of the present invention is mainly aimed at thermal photovoltaic power generation systems. Thermal photovoltaic systems have great application potential in future military and civilian power supply because of their many advantages: extensive heat sources, high output power density, and no moving parts in the system. High reliability etc. The filter is a key component in a thermal photovoltaic system. It can selectively pass and reflect the energy radiated by the heat source, reduce the heat burden on the battery, improve the utilization rate of heat energy, and improve the overall efficiency of the system. Therefore, the performance of the filter directly affects the performance of the system. overall efficiency. the

Contents of the invention

The object of the present invention is to provide a kind of optical filter, it can organically combine the all-dielectric multi-layer optical filter and the TCO optical filter, combine the advantages of both, and modulate the full-spectrum energy, so that the available Band energy transmission and unusable band energy reflection to improve the spectral efficiency of the filter, which can be used in conjunction with thermal photovoltaic systems to improve system efficiency. the

In order to achieve the above object, the invention provides a kind of high-performance all-dielectric interference multilayer film-TCO tandem optical filter, and this optical filter comprises:

base,

a TCO film layer disposed on the first surface of the substrate;

an all-dielectric multilayer film disposed on the TCO film layer; and

An anti-reflection film layer is disposed on the second surface of the substrate;

The all-dielectric multilayer film is composed of several layers of high-refractive-index dielectric films and low-refractive-index dielectric films alternately stacked.

The above-mentioned high-performance all-dielectric interference multilayer film-TCO tandem optical filter, wherein the all-dielectric multilayer film is formed of 8-50 layers of high-refractive-index dielectric films and low-refractive-index dielectric films, wherein each layer The thickness of the high refractive index medium film and the low refractive index medium film is 10-400nm. the

The above-mentioned high-performance all-dielectric interference multilayer film-TCO tandem optical filter, wherein, the high-refractive-index dielectric film is Si film; the low-refractive-index dielectric film is _SiO2 film.

In the above-mentioned high-performance all-dielectric interference multilayer film-TCO tandem optical filter, the anti-reflection film layer is composed of several layers of high-refractive-index dielectric films and low-refractive-index dielectric films alternately stacked. the

The above-mentioned high-performance all-dielectric interference multilayer film-TCO tandem optical filter, wherein, the anti-reflection film layer is formed by 4-20 layers of high-refractive-index dielectric film and low-refractive-index dielectric film, wherein each layer is high The thickness of the refractive index medium film and the low refractive index medium film is 10-400nm, the high refractive index medium film is TiO ₂ film, and the low refractive index medium film is SiO ₂ film.

The present invention also provides a method for preparing the above-mentioned high-performance all-dielectric interference multilayer film-TCO tandem filter, the method comprising the following specific steps:

Step 1, under a vacuum of 10-3Pa, the TCO film is plated on the substrate by evaporation;

Step 2, annealing the substrate coated with the TCO film layer to obtain a TCO filter, the annealing temperature is 550°C, and the annealing time is 20 minutes;

Step 3: Put the high-refractive-index material and the low-refractive-index material respectively in the coating machine for pre-melting, heat the substrate at 200°C, and vacuum at 10-3Pa, evaporate the high-refractive-index material and the low-refractive-index material, alternately Plated on the surface of TCO filter;

In step 4, an anti-reflection film is coated on the back of the substrate of the optical filter prepared in step 3 to enhance the transmittance of the convertible wavelength band, and obtain an all-dielectric interference dielectric film-TCO series optical filter. The anti-reflection film of the present invention performs comprehensive interference modulation on the incident light through multi-layer films with different refractive indices, so as to achieve the effect of anti-reflection, wherein the transmittance of the available wave band is mainly increased, and the unavailable wave band is mainly through the TCO film The layer is highly reflective.

The above-mentioned high-performance all-dielectric interference multilayer film-TCO tandem optical filter preparation method, wherein, in the step 1, the plating is completed when the plating thickness of the TCO film reaches 300 nm. the

The above-mentioned high-performance all-dielectric interference multilayer film-TCO tandem optical filter preparation method, wherein, the high refractive index dielectric material is Si material; the low refractive index dielectric material is SiO ₂ material.

The above-mentioned high-performance all-dielectric interference multilayer film-TCO tandem optical filter preparation method, wherein, in step 3, the thickness of each layer of high refractive index material layer and low refractive index material layer alternately plated is 10 ~400nm, the number of layers is 8-50 layers. the

The preparation method of the above-mentioned high-performance all-dielectric interference multilayer film-TCO tandem filter, wherein, in step 4, the anti-reflection film layer is composed of 4 to 20 high-refractive-index medium layers and low-refractive-index medium layers Layers are alternately plated, wherein the high refractive index dielectric film is TiO ₂ film, and the low refractive index dielectric film is SiO ₂ film.

The all-dielectric thin-film filter of the present invention can be designed to have a short-wave spectral range (such as less than 4 μm) and can be prepared by a thin-film deposition system; the TCO filter can be designed to have a long-wave spectral range (greater than 4 μm) and can be prepared by a thin-film deposition system. Annealing treatment; then organically combine the two, and make appropriate adjustments, a wide range of spectral control can be performed. the

The present invention first prepares a TCO filter film layer on the substrate, which can perform high reflection on the long-wave part of ≥ 4 μm, and high transmission in the short-wave part, and then prepare a multi-layer dielectric film on the plated TCO film layer, which is high, The film system with alternately stacked low-refractive index film layers can perform high reflection in the 1.8~4μm band, high transmission in the short-wave part, and finally form a high transmission in the short-wave, high reflection in the long-wave, and has a wide reflection band, which improves the filter spectrum. Efficiency, and improve the overall thermal photovoltaic system efficiency. the

Aiming at the special requirements of thermal photovoltaic systems for optical filters, the present invention provides a high-performance all-dielectric interference multilayer by combining two filters with different spectral characteristics (TCO filter film layer and multilayer dielectric film filter) Membrane-TCO series filter, the combination of the two can make their respective advantages organically combined, improve the spectral efficiency of the filter, and also improve the conversion efficiency of the thermal photovoltaic system. the

The main disadvantage of the all-dielectric film is the low reflectivity in the long-wave band; the disadvantage of TCO is the wide cut-off band; there is no precedent for the combination of the two at home and abroad. the

The advantage of the present invention is that: organically combine the multilayer dielectric film filter film system with the TCO filter film layer and the anti-reflection film layer, and combine the high reflection characteristics of the multilayer dielectric film system in the 2-4 μm band with the TCO filter film layer The high reflection characteristics of the ≥4μm band are combined together, and the transmittance can be enhanced. It combines the advantages of the three, overcomes their respective shortcomings and deficiencies, and improves the spectral efficiency of the filter, thereby improving the efficiency of the thermal photovoltaic overall system. . the

Description of drawings

FIG. 1 is a schematic structural view of the high-performance all-dielectric interference multilayer film-TCO tandem optical filter of the present invention. the

Figure 2 is a graph of the spectrum of the TCO filter film layer. the

Fig. 3 is a spectrum graph of a multilayer dielectric film filter. the

Fig. 4 is a spectrum curve diagram of the high-performance all-dielectric interference multilayer film-TCO series filter of the present invention. the

Detailed ways

The technical solutions of the present invention will be further described below in conjunction with the embodiments and the accompanying drawings. the

As shown in Figure 1, it is the structure of the all-dielectric interference multilayer film-TCO tandem optical filter of the present invention, and this optical filter comprises:

base 10,

The TCO film layer 20 disposed on the first surface of the substrate 10 is highly reflective to the unusable wavelength band ≥ 4 μm, and highly transmissive to the usable wavelength band ≤ 4 μm;

The all-dielectric multilayer film 30 disposed on the TCO film layer 20 is highly reflective to the unusable band of 1.8-4 μm, and highly transmissive to the usable band of ≤1.8 μm;

and

An anti-reflection film layer 40 is provided on the second surface of the substrate 10, and the anti-reflection film mainly performs anti-reflection for the available wavelength band (≤1.8 μm);

The all-dielectric multilayer film 30 is composed of several layers of high-refractive-index dielectric films and low-refractive-index dielectric films stacked alternately.

The incident light is incident from one side of the multilayer film system of the high-performance all-dielectric interference multilayer film-TCO tandem optical filter of the present invention, and the reflection spectrum curve obtained by it is shown in Figure 4. ) High transmittance, ≥1.8μm part (unusable band) high reflection, so that the part of the radiation spectrum (≤1.8μm) that can be used with high efficiency reaches the photocell through the filter for efficient photoelectric conversion, and the part that cannot be used ( ≥1.8μm) is reflected back for reuse, which can improve the utilization rate of energy, and also reduce the thermal burden of long-wave radiation on the photovoltaic cell, improve the conversion efficiency of the battery, and improve the conversion efficiency of the system as a whole. the

The manufacturing method of the all-dielectric interference multilayer film-TCO series filter of the present invention is as follows: 

1) Place the film material to be plated in the crucible of the coating machine, fix the cleaned substrate on the fixture, then close the door of the coating machine, and vacuum it. When the vacuum reaches 10-3Pa, the fixture Turn on the revolution, turn on the electron gun power supply, select the appropriate electron gun parameters (such as beam current 50mA), evaporate the TCO material to be plated and attach it to the K9 glass on the top of the coating machine, monitor the film thickness in real time through the crystal oscillator film thickness meter, when the TCO When the coating thickness of the film reaches 300nm, the coating is completed;

2) Then place the substrate coated with the TCO film layer in an annealing furnace for annealing treatment, the general annealing temperature is 550°C, and the annealing time is 20 minutes, and finally a TCO filter is obtained;

3) Place the required high and low refractive index materials in the crucible of the coating machine, the high refractive index material is Si material, the low refractive index material is SiO ₂ material, and then fix the TCO filter prepared in the previous step on the coating machine On the jig at the top, the film-coated side faces down, then close the coating machine cabin door, vacuumize it, and heat the substrate to 200°C. The Si material and the SiO ₂ material in the pre-melting, and then Si and SiO ₂ are evaporated, alternately plated on the surface of the TCO filter (that is, a layer of Si is plated, a layer of SiO 2 is plated, and a layer of SiO ₂ is plated again. layer Si, and then plate a layer of SiO ₂ ... so that the two materials are alternately plated on the surface of the TCO filter), and the film thickness is monitored in real time by a film thickness meter. The film thickness of each layer is controlled at 10-400nm, and the number of layers is 8-50 layers, after the plating is completed, wait for ten minutes, break the vacuum, and take out the filter;

4) Finally, an anti-reflection film layer is coated on the back of the finished optical filter. The anti-reflection film is 4-20 layers, and the thickness range is 10-400nm. High and low refractive index multi-layer films are alternately plated and combined. The high refractive index dielectric film selects TiO ₂ film, and the low refractive index dielectric film is SiO ₂ film; such an anti-reflection film layer structure can enhance the transmittance of the convertible band, and finally obtain the all-dielectric interference dielectric film-TCO series filter.

The high-performance all-dielectric interference multilayer film-TCO tandem optical filter provided by the present invention first prepares a TCO filter film layer on the substrate, which can perform high reflection on the long-wave part of ≥ 4 μm, and high transmittance on the short-wave part, such as As shown in Figure 2, a multi-layer dielectric film is then prepared on the plated TCO film layer, which is a film system in which Si and SiO2 high and low refractive index film layers are alternately superimposed, which can perform high reflection on the 1.8~4μm band, short-wave (≤ 1.8μm) part of the high transmission, as shown in Figure 3, finally forms a short-wave high transmission, long-wave high reflection, as shown in Figure 4, and has a very wide reflection band, which improves the spectral efficiency of the filter and improves the overall thermophotovoltaic system efficiency. the

Although the content of the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as limiting the present invention. Various modifications and alterations to the present invention will become apparent to those skilled in the art upon reading the above disclosure. Therefore, the protection scope of the present invention should be defined by the appended claims. the

Claims (10)

1. the full medium of high-performance is interfered multilayer film-TCO tandem type light filter, it is characterized in that, this light filter comprises:

Substrate (10),

Be arranged on the TCO rete (20) on substrate (10) first surface;

Be arranged on the all-dielectric multilayer-film (30) on TCO rete (20); And

Be arranged on (10) second upper antireflection film layers (40) of substrate;

Described all-dielectric multilayer-film (30) is alternately to be superposeed and form by some floor height index medium films and low refractive index dielectric film.

2. the full medium of high-performance as claimed in claim 1 is interfered multilayer film-TCO tandem type light filter, it is characterized in that, described all-dielectric multilayer-film (30) is formed by 8-50 floor height index medium film, low refractive index dielectric film, wherein, the thickness of every floor height index medium film, low refractive index dielectric film is 10-400nm.

3. the full medium of high-performance as claimed in claim 1 or 2 is interfered multilayer film-TCO tandem type light filter, it is characterized in that, described high refractive index medium film is Si film; Described low refractive index dielectric film is SiO ₂film.

4. the full medium of high-performance as claimed in claim 1 is interfered multilayer film-TCO tandem type light filter, it is characterized in that, described antireflection film layer (40) is alternately superposeed and forms by some floor height index medium films and low refractive index dielectric film.

5. the full medium of high-performance as claimed in claim 4 is interfered multilayer film-TCO tandem type light filter, it is characterized in that, described antireflection film layer (40) is formed by 4-20 floor height index medium film and low refractive index dielectric film, wherein, the thickness of every floor height index medium film, low refractive index dielectric film is 10-400nm, and described high refractive index medium film is selected TiO ₂film, described low refractive index dielectric film is SiO ₂film.

6. the full medium of high-performance according to claim 1 is interfered a preparation method for multilayer film-TCO tandem type light filter, it is characterized in that, the method comprises following concrete steps:

Step 1, under the vacuum tightness of 10-3Pa, is coated on TCO film in substrate with evaporation method;

Step 2, carries out annealing in process to the substrate of coated TCO rete and obtains TCO light filter, and annealing temperature is 550 ℃, and annealing time is 20 minutes;

Step 3, is positioned over high-index material, low-index material respectively in coating machine and carries out fritting, and substrate is heated 200 ℃, and vacuum tightness is 10-3Pa, and high-index material and low-index material are evaporated, and is alternately coated on TCO filter surface;

Step 4, is coated with antireflection film layer at the backside of substrate of the ready-made light filter of step 3, to strengthen the transmissivity that can transform wave band, obtains full medium and interferes deielectric-coating-TCO serial filter.

7. the full medium of high-performance as claimed in claim 1 is interfered the preparation method of multilayer film-TCO tandem type light filter, it is characterized in that, in described step 1, during being coated with thickness and reaching 300nm of TCO film, has been coated with.

8. the full medium of high-performance as claimed in claim 1 is interfered the preparation method of multilayer film-TCO tandem type light filter, it is characterized in that, described high refractive index medium material is Si material; Described low refractive index dielectric material is SiO ₂material.

9. the full medium of high-performance as claimed in claim 1 is interfered the preparation method of multilayer film-TCO tandem type light filter, it is characterized in that, in step 3, the thickness that is alternately coated with every floor height refraction materials layer and low refractive index material layer is 10 ~ 400nm, and the number of plies is 8-50 layer.

10. the full medium of high-performance as claimed in claim 1 is interfered the preparation method of multilayer film-TCO tandem type light filter, it is characterized in that, in step 4, described antireflection film layer is alternately coated with and forms by 4 ~ 20 floor height index medium layers and low refractive index dielectric layer, wherein, the thickness of every floor height index medium film, low refractive index dielectric film is 10-400nm.

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