CN102141601A - AC (Alternating Current) magnetic sensor - Google Patents
AC (Alternating Current) magnetic sensor Download PDFInfo
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- CN102141601A CN102141601A CN2010106130335A CN201010613033A CN102141601A CN 102141601 A CN102141601 A CN 102141601A CN 2010106130335 A CN2010106130335 A CN 2010106130335A CN 201010613033 A CN201010613033 A CN 201010613033A CN 102141601 A CN102141601 A CN 102141601A
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- 230000005291 magnetic effect Effects 0.000 title claims abstract description 78
- 230000005389 magnetism Effects 0.000 claims description 53
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- 150000001875 compounds Chemical class 0.000 claims description 3
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- 238000005289 physical deposition Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 230000008901 benefit Effects 0.000 abstract description 2
- 239000003302 ferromagnetic material Substances 0.000 abstract 2
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- 230000006872 improvement Effects 0.000 description 9
- 229910001172 neodymium magnet Inorganic materials 0.000 description 8
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- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
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- 241000238366 Cephalopoda Species 0.000 description 3
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000005520 electrodynamics Effects 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
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- RIVZIMVWRDTIOQ-UHFFFAOYSA-N cobalt iron Chemical compound [Fe].[Co].[Co].[Co] RIVZIMVWRDTIOQ-UHFFFAOYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
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- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
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- NSRBDSZKIKAZHT-UHFFFAOYSA-N tellurium zinc Chemical compound [Zn].[Te] NSRBDSZKIKAZHT-UHFFFAOYSA-N 0.000 description 1
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Abstract
本发明公开了一种交流磁传感器，包括传感器本体和施加在传感器本体上的直流磁场；所述的传感器本体包括铁磁性材料片以及通过界面的连接与铁磁性材料片复合的压电片；所述的压电片设有电压输出端。该交流磁传感器可用于探测交流磁信号，具有探测频率范围广、精度高、成本低、制作工艺简单、应用广泛的优点。
The invention discloses an AC magnetic sensor, which includes a sensor body and a DC magnetic field applied to the sensor body; the sensor body includes a ferromagnetic material sheet and a piezoelectric sheet compounded with the ferromagnetic material sheet through an interface connection; The piezoelectric sheet described above is provided with a voltage output terminal. The AC magnetic sensor can be used to detect AC magnetic signals, and has the advantages of wide detection frequency range, high precision, low cost, simple manufacturing process and wide application.
Description
Technical field
The present invention relates to field of electronic devices, be specifically related to a kind of AC magnetism sensor of cheapness of detectable AC magnetic signal.
Background technology
Sensor technology has become a progressive important technology of restriction modernization, and the development of sensor has been experienced from common to high-precision, expensive to a popular evolution, the sensor of development high precision, cheapness, low-power consumption has become a megatrend of moment sensor development.
A kind of as in the big class of sensor of Magnetic Sensor playing the part of more and more important effect in development of modern science and technology, its reliability and dirigibility also make its application become more and more widely.Divide from type, Magnetic Sensor can be divided into: inductive coil type (Search coil), Hall effect type (Hall effect), magnetoelectricity resistance type (AMR or GMR), magnetic channel type (MTJ or SDJ), magneto-optical (Magneto-optical), optical pumping type (Optically pumped), magnetic diode type (Magneto-diode), magnetic triode type (Magneto-transistor), atomic magnetic force type (Nuclear precession), fluxgate type (Fluxgate), magnetoelectricity type (magnetoelectric), superconductive quantum interference type (SQUID) etc.These sensors all have the relative merits of himself, and at low-frequency acquisition, the sensor of full accuracy is SQUID at present, however SQUID need work at low temperatures, and cost an arm and a leg, be difficult to be widely used; Other detection accuracies have atomic magnetic force type, fluxgate type, magnetoelectricity resistance type, optical pumping type, magnetoelectricity type Magnetic Sensor etc. than higher Magnetic Sensor, yet the Magnetic Sensor of these types costs an arm and a leg or makes complexity, has restricted widespread usage.Thereby, be necessary to develop the Magnetic Sensor technology of new inexpensive high-precision.
Summary of the invention
The invention provides the AC magnetism sensor that a kind of cost is low and precision is high.
A kind of AC magnetism sensor comprises sensor body and the D.C. magnetic field that is applied on the sensor body;
Described sensor body comprises ferrimagnet sheet and the connection and the compound piezoelectric patches of ferrimagnet sheet that pass through the interface; Described piezoelectric patches is provided with voltage output end.
Described sensor body is preferably fixed an end of sensor body, preferably selects the end in the two ends of length direction of sensor body to fix, obtaining bigger magnetic moment of torsion, and can be in space arbitrarily towards putting; Can be fixing by effects such as clampings.
Described ferrimagnet sheet adopts the general ferrimagnet sheet in this area, preferred relative permeability is higher than the plates of 10 ferrimagnet, as selecting a kind of in siliconized plate, amorphous sheet, permalloy sheet, iron plate, nickel sheet, cobalt sheet, ferrocobalt sheet, iron-nickel alloy sheet, the iron gallium alloy sheet etc. for use.
Described piezoelectric patches adopts the general patch of piezoelectric material in this area, preferred piezoelectric coefficient d
33Perhaps d
31Piezoelectric patches more than 10pC/N is as selecting piezoelectric ceramic piece, piezoelectric monocrystal sheet or piezopolymer etc. for use.
The ways of connecting at described interface is gluing, a kind of in burning, physical deposition or the chemogenic deposit altogether.Described ferrimagnet sheet and piezoelectric patches can link together in any order, can select for use common as single lamination (Unimorph), bipack-film (Bimorph), vertical-horizontal (L-T) structure, vertical-vertical (L-L) structure, horizontal stroke-horizontal stroke (T-T) structure, horizontal stroke-indulge (T-L) structure, push away-La a kind of in (Push-pull) structure, multilayer (Multi-layer), cymbals (Cymbal) structure, rainbow (rainbow) structure, the Moonie structure etc.
Described D.C. magnetic field is provided by a magnet, two magnet, magnet coil, two magnet coils or the field generator for magnetic be made up of a magnet and magnet coil.
The set-up mode of described two magnet, two magnet coils or a magnet and a magnet coil is: heteropole is oppositely arranged.
Described magnet and/or magnet coil can bond on the sensor body, perhaps and have the space between the sensor body, and preferably and have the space between the sensor body.
Described ferrimagnet sheet can be multilayer; Described piezoelectric patches also can be multilayer.
The application of described AC magnetism sensor in the magnetic signal of surveying AC magnetic field.
Described AC magnetic field and D.C. magnetic field can be any uneven angle, the angle of promptly described AC magnetic field and D.C. magnetic field greater than 0 ° less than 180 °; Be preferably AC magnetic field and D.C. magnetic field is orthogonal, promptly the angle of AC magnetic field and D.C. magnetic field is 90 °, obtaining maximum magnetic moment of torsion, thereby obtains maximum sensor output voltage.
AC magnetism working sensor principle of the present invention is as follows:
1, the D.C. magnetic field that is applied on the sensor body can produce a kind of bigger direct current magnetic moment M in the ferrimagnet sheet of sensor body
Dc, this direct current magnetic moment M
DcWith the AC magnetic signal H that is surveyed
AcDo the time spent, will in the ferrimagnet sheet, produce a kind of AC magnetism moment of torsion τ according to the principle of classical electrodynamics
Ac
2, AC magnetism moment of torsion τ
AcInterface interaction by ferrimagnet sheet and piezoelectric patches passes to piezoelectric patches to power, thereby makes piezoelectric patches produce a kind of including and AC magnetic signal H
AcSame frequency and with AC magnetic signal H
AcThe voltage that size is relevant is exported, thereby reads the AC magnetic signal H that is surveyed by output voltage signal
AcSize and frequency.
Compared with prior art, the present invention has following advantage:
AC magnetism sensor construction of the present invention is simple, only need a D.C. magnetic field that adds and comprise the ferrimagnet sheet and by the interface be connected and the sensor body of the piezoelectric patches that the ferrimagnet sheet is compound can constitute Magnetic Sensor.
The required material of AC magnetism sensor of the present invention: magnet and/or magnet coil, ferrimagnet sheet and piezoelectric patches total cost are no more than 5 yuans, and be with low cost.
AC magnetism sensor accuracy height of the present invention generally can obtain the following AC magnetic field detection accuracy of 1nT, and particularly near the resonance region, detection accuracy reaches the magnitude of pT easily, has wide range of applications.
AC magnetism Fundamentals of Sensors of the present invention are different from existing Magnetic Sensor, for the development of Magnetic Sensor provides a brand new concept, will play positive impetus to the development of China's Magnetic Sensor.In addition, because the manufacture craft of Magnetic Sensor of the present invention is simple, also than being easier to realize suitability for industrialized production.
Description of drawings
Fig. 1 is a kind of structural representation of AC magnetism sensor of the present invention;
Fig. 2 is a kind of structural representation of AC magnetism sensor of the present invention;
Fig. 3 is a kind of structural representation of AC magnetism sensor of the present invention;
Fig. 4 is a kind of structural representation of AC magnetism sensor of the present invention;
Fig. 5 is a kind of structural representation of AC magnetism sensor of the present invention;
Fig. 6 is a kind of structural representation of AC magnetism sensor of the present invention;
Fig. 7 is a kind of structural representation of AC magnetism sensor of the present invention;
Fig. 8 is a kind of structural representation of AC magnetism sensor of the present invention;
Fig. 9 is a kind of structural representation of AC magnetism sensor of the present invention;
Figure 10 is a kind of structural representation of AC magnetism sensor of the present invention.
Embodiment
Below the thickness face of the indication in the narration refers to the plane vertical with thickness direction.
As shown in Figure 1, AC magnetism sensor of the present invention comprises that an end is by existing the magnet 3 that is used to produce D.C. magnetic field in space between clamping action fixed sensing body and one and the sensor body; Sensor body comprises ferrimagnet sheet 2 and by the gluing piezoelectric patches 1 of 502 glue and ferrimagnet sheet 2, magnetic material sheets being 2 and piezoelectric patches 1 link together with single lamination; The polarised direction P of piezoelectric patches 1 is its thickness direction, and on the thickness face output electrode is arranged, as the voltage output end Vo of piezoelectric patches 1; The direction of magnetization M of extremely close ferrimagnet sheet 2 of the N of magnet 3 and magnet 3 is perpendicular to the thickness face at ferrimagnet sheet 2 places.
When AC magnetism sensor of the present invention is specifically worked:
The AC magnetic field magnetic signal Hac of required detection is applied on the length direction of sensor body, the D.C. magnetic field H that AC magnetic field magnetic signal Hac and magnet 3 are applied is orthogonal, the angle that is AC magnetic field magnetic signal Hac and D.C. magnetic field H is 90 °, obtaining maximum magnetic moment of torsion, thereby obtain maximum sensor output voltage.
The D.C. magnetic field of magnet 3 produces bigger direct current magnetic moment M in ferrimagnet sheet 2
Dc, this direct current magnetic moment M
DcWith the AC magnetic field magnetic signal H that is surveyed
AcDo the time spent, will in ferrimagnet sheet 2, produce a kind of AC magnetism moment of torsion τ according to the principle of classical electrodynamics
Ac, ferrimagnet sheet 2 is bent, AC magnetism moment of torsion τ
AcInterface interaction by ferrimagnet sheet 2 and piezoelectric patches 1 passes to 1 bending of piezoelectric patches 1 drive piezoelectric patches to power, thereby makes piezoelectric patches 1 produce a kind of including and AC magnetic field magnetic signal H
AcSame frequency and with AC magnetic field magnetic signal H
AcThe voltage that size is relevant, this voltage is by the voltage output end Vo output of piezoelectric patches 1.
At the AC magnetic field magnetic signal Hac of required detection is under 300Hz, the 0.1Oe input condition, obtains the voltage output of 80mV, is equal to the magnetoelectricity voltage coefficient of 27V/cm.Oe.
As shown in Figure 2, AC magnetism sensor of the present invention is the improvement to AC magnetism sensor among the embodiment 1, makes that the conversion effect of magnetoelectricity is better.Different is the end that ferrimagnet sheet 2 is bonded at piezoelectric patches 1 with embodiment 1, and an other end of piezoelectric patches 1 is by being clamped; Piezoelectric patches 1 polarizes along thickness direction, and on the thickness face output electrode is arranged, as the voltage output end Vo of piezoelectric patches 1; Also be provided with and sensor body between have the magnet 4 that is used to produce D.C. magnetic field in space, magnet 4 is neodymium iron boron (NdFeB) magnet, model is N42, magnet 3 is relative with magnet 4 heteropoles, and direction of magnetization M is perpendicular to the thickness face at ferrimagnet sheet 2 places.
As shown in Figure 3, AC magnetism sensor of the present invention is the improvement to AC magnetism sensor among the embodiment 1, be length direction with the polarised direction P of embodiment 1 different is piezoelectric patches 1, and output electrode also in the longitudinal direction, as the output Vo of piezoelectric patches 1, the other end ground connection of piezoelectric patches 1.
As shown in Figure 4, AC magnetism sensor of the present invention is the improvement to AC magnetism sensor among the embodiment 1, parallel with the thickness face of ferrimagnet sheet 2 with the direction of magnetization M of embodiment 1 different is magnet 3, the AC magnetic field Hac direction that measure is then perpendicular to the thickness face of ferrimagnet sheet 2.
Embodiment 5
As shown in Figure 5, AC magnetism sensor of the present invention is the improvement to AC magnetism sensor among the embodiment 1, with embodiment 1 a slice piezoelectric patches 1 that different is replaces among the embodiment 1 with the relative piezoelectric bimorph 1 of two polarised direction P, and exports for series model.
Embodiment 6
As shown in Figure 6, AC magnetism sensor of the present invention is the improvement to AC magnetism sensor among the embodiment 2, with embodiment 2 a slice piezoelectric patches 1 that different is replaces among the embodiment 2 with the relative piezoelectric bimorph 1 of two polarised direction P, and exports for series model.
Embodiment 7
As shown in Figure 7, AC magnetism sensor of the present invention is the improvement to AC magnetism sensor among the embodiment 1, with embodiment 1 different is on the piezoelectric patches 1 of original embodiment 1 bonding again a slice ferrimagnet sheet 2, form the sandwich structure of ferrimagnet sheet/piezoelectric patches/ferrimagnet sheet, and increased the magnet 4 that is used to produce D.C. magnetic field that has the space between one and the sensor body, magnet 4 is neodymium iron boron (NdFeB) magnet, model is N42, magnet 4 is at an other end of sandwich structure, and is relative with original magnet 3 heteropoles.
Embodiment 8
As shown in Figure 8, AC magnetism sensor of the present invention is the improvement to AC magnetism sensor among the embodiment 7, with embodiment 7 a slice piezoelectric patches 1 that different is replaces among the embodiment 7 with the relative piezoelectric bimorph 1 of two polarised direction P, and exports for series model.
Embodiment 9
As shown in Figure 9, AC magnetism sensor of the present invention is the improvement to AC magnetism sensor among the embodiment 7, with embodiment 7 a slice piezoelectric patches 1 that different is replaces among the embodiment 7 with the identical piezoelectric bimorph 1 of two polarised direction P, and export the other end ground connection of piezoelectric patches 1 for paralleling model.
Embodiment 10
As shown in figure 10, AC magnetism sensor of the present invention is the improvement to AC magnetism sensor among the embodiment 1, with embodiment 1 different is be provided with and sensor body between have the magnet 4 that is used to produce D.C. magnetic field in space, magnet 4 is neodymium iron boron (NdFeB) magnet, model is N42, magnet 3 is relative with magnet 4 heteropoles, and direction of magnetization M is perpendicular to the thickness face at ferrimagnet sheet 2 places.
Claims (9)
1. an AC magnetism sensor is characterized in that, described AC magnetism sensor comprises sensor body and the D.C. magnetic field that is applied on the sensor body;
Described sensor body comprises ferrimagnet sheet and the connection and the compound piezoelectric patches of ferrimagnet sheet that pass through the interface; Described piezoelectric patches is provided with voltage output end.
2. AC magnetism sensor according to claim 1 is characterized in that, described ferrimagnet sheet is the plates that relative permeability is higher than 10 ferrimagnet.
3. AC magnetism sensor according to claim 1 is characterized in that, the piezoelectric coefficient d of described piezoelectric patches
33Perhaps d
31More than 10pC/N.
4. AC magnetism sensor according to claim 1 is characterized in that, the ways of connecting at described interface is gluing, a kind of in burning, physical deposition or the chemogenic deposit altogether.
5. AC magnetism sensor according to claim 1, it is characterized in that described D.C. magnetic field is provided by a magnet, two magnet, magnet coil, two magnet coils or the field generator for magnetic be made up of a magnet and magnet coil.
6. AC magnetism sensor according to claim 5 is characterized in that, the set-up mode of described two magnet, two magnet coils or a magnet and a magnet coil is: heteropole is oppositely arranged.
7. AC magnetism sensor according to claim 1 is characterized in that, described ferrimagnet sheet is a multilayer; Described piezoelectric patches is a multilayer.
8. according to the application of each described AC magnetism sensor of claim 1-7 in the magnetic signal of surveying AC magnetic field.
9. application according to claim 8 is characterized in that, described AC magnetic field and D.C. magnetic field angle greater than 0 ° less than 180 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010106130335A CN102141601A (en) | 2010-12-29 | 2010-12-29 | AC (Alternating Current) magnetic sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010106130335A CN102141601A (en) | 2010-12-29 | 2010-12-29 | AC (Alternating Current) magnetic sensor |
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| Publication Number | Publication Date |
|---|---|
| CN102141601A true CN102141601A (en) | 2011-08-03 |
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|---|---|---|---|
| CN2010106130335A Pending CN102141601A (en) | 2010-12-29 | 2010-12-29 | AC (Alternating Current) magnetic sensor |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102520372A (en) * | 2011-12-19 | 2012-06-27 | 中国科学院宁波材料技术与工程研究所 | Multi-coupling magnetic sensor |
| CN103344754A (en) * | 2013-05-09 | 2013-10-09 | 中国科学院宁波材料技术与工程研究所 | Magnetically labeled biological detection system and detection method thereof |
| CN103353583A (en) * | 2012-11-02 | 2013-10-16 | 国家纳米科学中心 | Magnetic field sensor |
| CN104919328A (en) * | 2013-01-18 | 2015-09-16 | 株式会社村田制作所 | Magnetic sensor and production method therefor |
| CN104949694A (en) * | 2014-03-26 | 2015-09-30 | 中国科学院宁波材料技术与工程研究所 | Magnetic torsion type magnetoelectric sensor |
| CN111487567A (en) * | 2020-05-14 | 2020-08-04 | 上海科技大学 | Piezoelectric magnetic sensor based on Lorentz force and preparation method thereof |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102520372A (en) * | 2011-12-19 | 2012-06-27 | 中国科学院宁波材料技术与工程研究所 | Multi-coupling magnetic sensor |
| CN103353583A (en) * | 2012-11-02 | 2013-10-16 | 国家纳米科学中心 | Magnetic field sensor |
| CN104919328A (en) * | 2013-01-18 | 2015-09-16 | 株式会社村田制作所 | Magnetic sensor and production method therefor |
| CN103344754A (en) * | 2013-05-09 | 2013-10-09 | 中国科学院宁波材料技术与工程研究所 | Magnetically labeled biological detection system and detection method thereof |
| CN104949694A (en) * | 2014-03-26 | 2015-09-30 | 中国科学院宁波材料技术与工程研究所 | Magnetic torsion type magnetoelectric sensor |
| CN111487567A (en) * | 2020-05-14 | 2020-08-04 | 上海科技大学 | Piezoelectric magnetic sensor based on Lorentz force and preparation method thereof |
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Application publication date: 20110803 |