Towards the end of 2014, ASML committed to provide a EUV pellicle solution to the industry. Last ... more Towards the end of 2014, ASML committed to provide a EUV pellicle solution to the industry. Last year, during SPIE Microlithography 2015, we introduced the NXE pellicle concept, a removable pellicle solution that is compatible with current and future patterned mask inspection methods. This paper shows results of how we took this concept to a complete EUV pellicle solution for the industry. We will highlight some technical design challenges we faced developing the NXE pellicle and how we solved them. We will also present imaging results of pellicle exposures on a 0.33 NA NXE scanner system. In conjunction with the NXE pellicle, we will also present the supporting tooling we have developed to enable pellicle use.
Particle image velocimetry (PIV) measurements of the flow around a wing section are employed as a... more Particle image velocimetry (PIV) measurements of the flow around a wing section are employed as a basis for non-intrusive aerodynamic mean loads characterisation, providing sectional lift, drag and pitching moment. The technique relies upon the application of control-volume approaches in combination with the deduction of the pressure from the PIV experimental data through application of the momentum equation. The treatment can also be applied when the flow is unsteady; in that case time-mean loads are obtained from velocity statistics, through the use of Reynolds-averaged formulation of the governing equations. The procedure was applied in the experimental investigation of a NACA 642A015 aerofoil, in which the PIV approach is validated against standard pressure-based methods (surface pressure distribution and wake rake). The chord Reynolds number considered in the investigation ranges between 1 – 7 × 105. In addition, the consistency and potential performance of the method was asses...
ASML introduced the NXE pellicle concept, a removable pellicle solution that is compatible with c... more ASML introduced the NXE pellicle concept, a removable pellicle solution that is compatible with current and future patterned mask inspection methods. We will present results of how we have taken the idea from concept to a demonstrated solution enabling the use of EUV pellicle by the industry for high volume manufacturing. We will update on the development of the next generation of pellicle films with higher power capability. Further, we will provide an update on top level requirements for pellicles and external interface requirements needed to support NXE pellicle adoption at a mask shop. Finally, we will present ASML’s pellicle handling equipment to enable pellicle use at mask shops and our NXE pellicle roadmap outlining future improvements.
ABSTRACT EUV defectivity has been an important topic of investigation in past years. Today, the a... more ABSTRACT EUV defectivity has been an important topic of investigation in past years. Today, the absence of a pellicle raises concerns for particle adders on reticle front side. A desire to improve defectivity on reticle front side via implementation of a pellicle could greatly assist in propelling EUV into high volume manufacturing. In this paper, we investigate a set of pellicle requirements and potential EUV pellicle materials. Further, we present experimental results of pellicle performance results and imaging results.
*† ‡ Particle Image Velocimetry (PIV) measurements of the flow around a wing section are employed... more *† ‡ Particle Image Velocimetry (PIV) measurements of the flow around a wing section are employed as a basis for non-intrusive aerodynamic loads characterization, providing sectional lift, drag and pitching moment. The technique relies upon the application of control-volume approaches in combination with the deduction of the pressure from the PIV experimental data through application of the momentum equation. The treatment can also be applied to unsteady flows, in which case time-mean loads are obtained from velocity statistics, through the use of Reynolds-averaged formulation of the governing equations. The procedure was applied in the experimental investigation of a NACA 642A015 airfoil, in which the PIV approach is validated against standard pressure-based methods (surface pressure distribution and wake rake). The chord Reynolds number considered in the investigation ranges between 1 - 7 × 10 5 . In addition, the consistency and potential performance of the method was assessed by means of synthetic data obtained from CFD.
A new implantation-free lift-off process is presented. We deposit a layer with mismatched thermal... more A new implantation-free lift-off process is presented. We deposit a layer with mismatched thermal expansion coefficient with respect to the substrate. Upon cooling, the differential contraction induces a large stress field which is released by the initiation and the propagation of a crack parallel to the surface. The principle is demonstrated on both single and multi-crystalline silicon. Films with an area of 25 cm2 and a thickness of 30 50 μm have been obtained. Some Si layers were further processed into solar cells. An energy conversion efficiency of 9.9% was reached on a 1 cm2 sample.
An assessment is made of the feasibility of using PIV velocity data for the non-intrusive aerodyn... more An assessment is made of the feasibility of using PIV velocity data for the non-intrusive aerodynamic force characterization (lift, drag and pitching moment) of an airfoil. The method relies upon the application of control-volume approaches in combination with the deduction of the pressure from the PIV experimental data, by making use of the momentum equation. First, the consistency of the
Towards the end of 2014, ASML committed to provide a EUV pellicle solution to the industry. Last ... more Towards the end of 2014, ASML committed to provide a EUV pellicle solution to the industry. Last year, during SPIE Microlithography 2015, we introduced the NXE pellicle concept, a removable pellicle solution that is compatible with current and future patterned mask inspection methods. This paper shows results of how we took this concept to a complete EUV pellicle solution for the industry. We will highlight some technical design challenges we faced developing the NXE pellicle and how we solved them. We will also present imaging results of pellicle exposures on a 0.33 NA NXE scanner system. In conjunction with the NXE pellicle, we will also present the supporting tooling we have developed to enable pellicle use.
Particle image velocimetry (PIV) measurements of the flow around a wing section are employed as a... more Particle image velocimetry (PIV) measurements of the flow around a wing section are employed as a basis for non-intrusive aerodynamic mean loads characterisation, providing sectional lift, drag and pitching moment. The technique relies upon the application of control-volume approaches in combination with the deduction of the pressure from the PIV experimental data through application of the momentum equation. The treatment can also be applied when the flow is unsteady; in that case time-mean loads are obtained from velocity statistics, through the use of Reynolds-averaged formulation of the governing equations. The procedure was applied in the experimental investigation of a NACA 642A015 aerofoil, in which the PIV approach is validated against standard pressure-based methods (surface pressure distribution and wake rake). The chord Reynolds number considered in the investigation ranges between 1 – 7 × 105. In addition, the consistency and potential performance of the method was asses...
ASML introduced the NXE pellicle concept, a removable pellicle solution that is compatible with c... more ASML introduced the NXE pellicle concept, a removable pellicle solution that is compatible with current and future patterned mask inspection methods. We will present results of how we have taken the idea from concept to a demonstrated solution enabling the use of EUV pellicle by the industry for high volume manufacturing. We will update on the development of the next generation of pellicle films with higher power capability. Further, we will provide an update on top level requirements for pellicles and external interface requirements needed to support NXE pellicle adoption at a mask shop. Finally, we will present ASML’s pellicle handling equipment to enable pellicle use at mask shops and our NXE pellicle roadmap outlining future improvements.
ABSTRACT EUV defectivity has been an important topic of investigation in past years. Today, the a... more ABSTRACT EUV defectivity has been an important topic of investigation in past years. Today, the absence of a pellicle raises concerns for particle adders on reticle front side. A desire to improve defectivity on reticle front side via implementation of a pellicle could greatly assist in propelling EUV into high volume manufacturing. In this paper, we investigate a set of pellicle requirements and potential EUV pellicle materials. Further, we present experimental results of pellicle performance results and imaging results.
*† ‡ Particle Image Velocimetry (PIV) measurements of the flow around a wing section are employed... more *† ‡ Particle Image Velocimetry (PIV) measurements of the flow around a wing section are employed as a basis for non-intrusive aerodynamic loads characterization, providing sectional lift, drag and pitching moment. The technique relies upon the application of control-volume approaches in combination with the deduction of the pressure from the PIV experimental data through application of the momentum equation. The treatment can also be applied to unsteady flows, in which case time-mean loads are obtained from velocity statistics, through the use of Reynolds-averaged formulation of the governing equations. The procedure was applied in the experimental investigation of a NACA 642A015 airfoil, in which the PIV approach is validated against standard pressure-based methods (surface pressure distribution and wake rake). The chord Reynolds number considered in the investigation ranges between 1 - 7 × 10 5 . In addition, the consistency and potential performance of the method was assessed by means of synthetic data obtained from CFD.
A new implantation-free lift-off process is presented. We deposit a layer with mismatched thermal... more A new implantation-free lift-off process is presented. We deposit a layer with mismatched thermal expansion coefficient with respect to the substrate. Upon cooling, the differential contraction induces a large stress field which is released by the initiation and the propagation of a crack parallel to the surface. The principle is demonstrated on both single and multi-crystalline silicon. Films with an area of 25 cm2 and a thickness of 30 50 μm have been obtained. Some Si layers were further processed into solar cells. An energy conversion efficiency of 9.9% was reached on a 1 cm2 sample.
An assessment is made of the feasibility of using PIV velocity data for the non-intrusive aerodyn... more An assessment is made of the feasibility of using PIV velocity data for the non-intrusive aerodynamic force characterization (lift, drag and pitching moment) of an airfoil. The method relies upon the application of control-volume approaches in combination with the deduction of the pressure from the PIV experimental data, by making use of the momentum equation. First, the consistency of the
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