Papers by Eberhard Spiller
Applied Optics, 2003
An ion-beam deposition system has been used to fabricate Mo-Si multilayer coatings for masks and ... more An ion-beam deposition system has been used to fabricate Mo-Si multilayer coatings for masks and imaging optics to be used for extreme-ultraviolet lithography. In addition to high reflectivity and excellent profile control, ion-beam deposition has the capability to smooth rough substrates. For example, we achieved reflectivity of 66.8% on a substrate with 0.39-nm roughness. Smoothing can be further enhanced with a second ion source directed at the multilayer coating. The smoothing capabilities relax the requirement on the finish of the mirror and the mask substrates and could dramatically reduce the cost of these components. Thickness profile control is in the +/-0.01% range, and the figure error added to the mirror substrate by errors in the multilayer thickness is less than 0.1 nm. Peak reflectivities obtained on smooth substrates are 67.5-68.6%.
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Lawrence Berkeley National Laboratory, Jun 23, 2008
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X Ray Euv Optics For Astronomy Microscopy Polarimetry and Projection Lithography, Feb 1, 1991
Photos obtained during 5 min. of observation time from the flight of our 10 in. normal incidence ... more Photos obtained during 5 min. of observation time from the flight of our 10 in. normal incidence soft x-ray (λ = 63.5â«) telescope on September 11, 1989 are analyzed and the data are compared to the results expected from tests of the mirror surfaces. These tests cover a range of spatial periods from 25 cm to 1â«. The photos demonstrate a reduction in the scattering of the multilayer mirror compared to a single surface for scattering angles above 1 arcmin, corresponding to surface irregularities with spatial periods below 10 μm. Our results are used to predict the possible performance of future flights. Sounding rocket observations might be able to reach a resolution around 0.1 arcsec. Higher resolutions will require flights of longer durations and improvements in mirror testing for the largest spatial periods. 21 refs., 7 figs., 1 tab.
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Modifications to our multilayer coated normal incidence telescope for (lambda) equals 63.5 angstr... more Modifications to our multilayer coated normal incidence telescope for (lambda) equals 63.5 angstrom since its last flight in 1989 are described. The purpose of the changes was to increase the photon flux of the detector by increasing the mirror reflectivity, area, and uniformity and by the use of light blocking filters with higher x-ray transmission. First results from the 1991 launch of the telescope are described.
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ABSTRACT
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Photographs obtained during three flights of an 11 inch diameter normal incident soft X-ray (wave... more Photographs obtained during three flights of an 11 inch diameter normal incident soft X-ray (wavelength 63.5 A) telescope are analyzed and the data are compared to the results expected from tests of the mirror surfaces. Multilayer coated X ray telescopes have the potential for 0.01 arcsec resolution, and there is optimism that such high quality mirrors can be built. Some of the factors which enter into the performance actually achieved in practice are as follows: quality of the mirror substrate, quality of the multilayer coating, and number of photons collected. Measurements of multilayer mirrors show that the actual performance achieved in the solar X-ray images demonstrates a reduction in the scattering compared to that calculated from the topography of the top surface of the multilayer. In the brief duration of a rocket flight, the resolution is also limited by counting statistics from the number of photons collected. At X-ray Ultraviolet (XUV) wavelengths from 171 to 335 A the photon flux should be greater than 10(exp 10) ph/sec, so that a resolution better than 0.1 arcsec might be achieved, if mirror quality does not provide a limit first. In a satellite, a large collecting area will be needed for the highest resolution.
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Proceedings of SPIE - The International Society for Optical Engineering
Modifications to our multilayer coated normal incidence telescope for (lambda) equals 63.5 angstr... more Modifications to our multilayer coated normal incidence telescope for (lambda) equals 63.5 angstrom since its last flight in 1989 are described. The purpose of the changes was to increase the photon flux of the detector by increasing the mirror reflectivity, area, and uniformity and by the use of light blocking filters with higher x-ray transmission. First results from the 1991 launch of the telescope are described.
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Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, 1985
ABSTRACT
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X-Ray and Extreme Ultraviolet Optics, 1995
ABSTRACT We have produced two new normal incidence soft x-ray telescope mirrors coated for lambda... more ABSTRACT We have produced two new normal incidence soft x-ray telescope mirrors coated for lambda equals 63.5 angstrom wavelength: the first with a focal length f equals 1.5 m and a diameter of 25 cm for the Space Weather and Terrestrial Hazards (SWATH) satellite and the second (f equals 2 m, diameter 27.5 cm) for launch by sounding rocket (NIXT). We describe figuring and polishing of the mirror surfaces and deposition and testing of the multilayer coatings. Optimization of the mirror fabrication included grazing incidence x-ray reflectivity for quality control during polishing. In addition, the substrate and each metal layer of the Co-C multilayer coating were polished by an ion beam with in-situ roughness estimation. We explored the possibilities and limitations of telescopes for shorter wavelengths by coating several small mirrors covering the lambda equals 45 to 60 angstrom region at normal incidence and report on their performance.
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Photonics for Processors, Neural Networks, and Memories, 1993
ABSTRACT
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X-Ray/EUV Optics for Astronomy and Microscopy, 1989
ABSTRACT A tunable double crystal x-ray monochromator using matched pairs of multilayer-coated mi... more ABSTRACT A tunable double crystal x-ray monochromator using matched pairs of multilayer-coated mirrors has been designed and constructed at the CfA. Each set of mirrors is usable over a factor of three range of wavelengths and by changing the mirrors the mechanism can be used at wavelengths of ~10 to >300 Å (40ev to 1.2kev). The mechanism maintains a fixed entrance and exit beam and is controlled by a single stepping motor; a simple mechanical linkage provides the additional motions which arc necessary to move the mirrors to the required positions. The novel features of this design are the simplicity of the mechanism and the use of narrow-band multilayer mirrors in place of crystal elements. Details of the design are presented as well as results of preliminary throughput and resolution tests using a pair of multilayer mirrors made to be particularly narrow band in order to be used in this type of instrument.
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Emerging Lithographic Technologies IX, 2005
We are developing polymer smoothing processes on diamond-turned (metal) and ground (metal or cera... more We are developing polymer smoothing processes on diamond-turned (metal) and ground (metal or ceramic) substrates to reduce high and mid-spatial frequency roughness, for implementation as EUVL condenser optics. Diamond-turning or grinding can be used as relatively inexpensive processes to obtain the specified optic figure, however, the resulting surface has high-spatial roughness in the order of tens or hundreds of Angstroms, which would prohibit normal incidence operation at EUV wavelengths due to extremely low reflectance. Our polymer smoothing process reduces roughness to a few Angstroms, thus enabling normal-incidence operation. The substrate material and smoothing film have to combine a unique set of properties such as chemical compatibility, high thermal stability and low stress to be able to operate inside alternative-fuel EUVL source environments. Experimental results are presented on the development, testing and performance of these novel substrates.
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X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, 1991
ABSTRACT
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The instruments on board our Normal Incidence X-ray Telescopes payload and the results obtained d... more The instruments on board our Normal Incidence X-ray Telescopes payload and the results obtained during the most recent flights will be described. The payload was launched three times during the 1991 - 1993 period, the last time on April 12, 1993. It contained a main telescope with an 11 inch diameter multilayer coated mirror for (lambda) equals 63.5 angstroms and
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Optics for EUV, X-Ray, and Gamma-Ray Astronomy II, 2005
Since 1993, research in the fabrication of extreme ultraviolet (EUV) optical imaging systems, con... more Since 1993, research in the fabrication of extreme ultraviolet (EUV) optical imaging systems, conducted at Lawrence Berkeley National Laboratory (LBNL) and Lawrence Livermore National Laboratory (LLNL), has produced the highest resolution optical systems ever made. We have pioneered the development of ultra-high-accuracy optical testing and alignment methods, working at extreme ultraviolet wavelengths, and pushing wavefront-measuring interferometry into the 2-20-nm wavelength
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2003
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2003
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Papers by Eberhard Spiller