Digest of Papers. 2004 Topical Meeting onSilicon Monolithic Integrated Circuits in RF Systems, 2004.
This paper reports on the reliability investigation on a suspended redundancy ring for millimeter... more This paper reports on the reliability investigation on a suspended redundancy ring for millimeter wave applications. Mechanical characterization has shown no major failure when an original method is presented to investigate the charging effect in a capacitive MEMS.
EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems, 2008
In recent years the MEMS market has grown rapidly. In parallel, design methodologies have develop... more In recent years the MEMS market has grown rapidly. In parallel, design methodologies have developed in order to fulfil increasing design requirements. A finite-element- method analysis plays a key role in today's designer work. Even though, in case of some multi-domain systems such as micro pressure sensors, a FEM analysis is used at the beginning of the project, such an
Abstract RF MEMS switches with piezoelectric actuation permits us to obtain a reliable switch rel... more Abstract RF MEMS switches with piezoelectric actuation permits us to obtain a reliable switch relative to electrostatic actuated switches since the dielectric charging is reduced and fast respond. The problem here is the deformation induced by the actuation is transmitted ...
EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems, 2008
... Hikmat ACHKAR1, Fabienne PENNEC1, David PEYROU1, Marc SARTOR2, Robert PLANA1,Patrick PONS1. .... more ... Hikmat ACHKAR1, Fabienne PENNEC1, David PEYROU1, Marc SARTOR2, Robert PLANA1,Patrick PONS1. ... 4. Oliver J. Myers, M. Anjanappa, Carl B. Freidhoff, Modeling a piezoelectrically Actuated Planar Capacitor Actuator Membrane Proceeding of the COMSOL users ...
ABSTRACT This paper presents an overview of the important issues in the field of TCAD MEMS. It wi... more ABSTRACT This paper presents an overview of the important issues in the field of TCAD MEMS. It will be shown different techniques to investigate the materials properties of MEMS and their impact on the RF MEMS characteristics. Multi-physic simulation are presented to predict the initial deformation of MEMS based membrane and to predict the capacitive and DC contact characteristics of RF MEMS.
This paper presents the advances done in the field of simulation and design applied to MEMS. It w... more This paper presents the advances done in the field of simulation and design applied to MEMS. It will be discussed some techniques to link different finite element softwares, especially COMSOL and ANSYS, in order to profit from all the advantages offered by each finite element code. Then, an explication is done on how we piloted ABAQUS using a Matlab routine. In a third and very important section, the use of reverse engineering method is described and applied to RF-MEMS (Radio Frequency-Micro Electro Mechanical System) switches. The applications for each of these methods will be explained.
2007 International Conference on Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems. EuroSime 2007, 2007
2007 International Conference on Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems. EuroSime 2007, 2007
... Contact model This model of a metal-to-metal contact simulated with COMSOL Multiphysics had a... more ... Contact model This model of a metal-to-metal contact simulated with COMSOL Multiphysics had a goal to validate the contact results by analytical values obtained from the formulation of Hertz. Figure:4. The contact model between a plate and a cylinder formulated by Hertz. ...
Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems EuroSimE, 2006
This paper presents a study on multiphysics software reliability provided by COMSOL and ANSYS. Th... more This paper presents a study on multiphysics software reliability provided by COMSOL and ANSYS. The goal is to give an overview about the fundamentals of how to set up RF simulations, mechanical contact and residual stress through three examples chosen as the main key points in order to make in the future a highly coupled model of the RF MEMS
7th. Int. Conf. on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006
This paper presents a study on multiphysics software reliability provided by COMSOL and ANSYS. Th... more This paper presents a study on multiphysics software reliability provided by COMSOL and ANSYS. The goal is to give an overview about the fundamentals of how to set up RF simulations, mechanical contact and residual stress through three examples chosen as the main key points in order to make in the future a highly coupled model of the RF MEMS
Contact analysis is of major concern in a lot of applications and addresses often multi-field eff... more Contact analysis is of major concern in a lot of applications and addresses often multi-field effects (thermal, electromagnetic effects…). Due to the nonlinearity and difficulty in predicting the behaviour of bodies coming into and go out of contact, the need of software able to simulate a structural contact problem and couple it with other physics is a major stake. The last version 3.3 of COMSOL Multiphysics allows the analysis of multiphysics contact problem and appears attractive. Being new and under development, COMSOL 3.3 needs therefore to be validated in terms of contact modelling. Only the cases of frictionless problem are taken into account. A static contact Hertz model and a model containing a rigid-flexible contact and a flexible-flexible contact are studied and describe the capabilities, advantages, originalities and drawbacks of COMSOL 3.3. A good user interface and the capabilities to couple all physics with facilities make attractive the software. However, contact alg...
Digest of Papers. 2004 Topical Meeting onSilicon Monolithic Integrated Circuits in RF Systems, 2004.
This paper reports on the reliability investigation on a suspended redundancy ring for millimeter... more This paper reports on the reliability investigation on a suspended redundancy ring for millimeter wave applications. Mechanical characterization has shown no major failure when an original method is presented to investigate the charging effect in a capacitive MEMS.
EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems, 2008
In recent years the MEMS market has grown rapidly. In parallel, design methodologies have develop... more In recent years the MEMS market has grown rapidly. In parallel, design methodologies have developed in order to fulfil increasing design requirements. A finite-element- method analysis plays a key role in today's designer work. Even though, in case of some multi-domain systems such as micro pressure sensors, a FEM analysis is used at the beginning of the project, such an
Abstract RF MEMS switches with piezoelectric actuation permits us to obtain a reliable switch rel... more Abstract RF MEMS switches with piezoelectric actuation permits us to obtain a reliable switch relative to electrostatic actuated switches since the dielectric charging is reduced and fast respond. The problem here is the deformation induced by the actuation is transmitted ...
EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems, 2008
... Hikmat ACHKAR1, Fabienne PENNEC1, David PEYROU1, Marc SARTOR2, Robert PLANA1,Patrick PONS1. .... more ... Hikmat ACHKAR1, Fabienne PENNEC1, David PEYROU1, Marc SARTOR2, Robert PLANA1,Patrick PONS1. ... 4. Oliver J. Myers, M. Anjanappa, Carl B. Freidhoff, Modeling a piezoelectrically Actuated Planar Capacitor Actuator Membrane Proceeding of the COMSOL users ...
ABSTRACT This paper presents an overview of the important issues in the field of TCAD MEMS. It wi... more ABSTRACT This paper presents an overview of the important issues in the field of TCAD MEMS. It will be shown different techniques to investigate the materials properties of MEMS and their impact on the RF MEMS characteristics. Multi-physic simulation are presented to predict the initial deformation of MEMS based membrane and to predict the capacitive and DC contact characteristics of RF MEMS.
This paper presents the advances done in the field of simulation and design applied to MEMS. It w... more This paper presents the advances done in the field of simulation and design applied to MEMS. It will be discussed some techniques to link different finite element softwares, especially COMSOL and ANSYS, in order to profit from all the advantages offered by each finite element code. Then, an explication is done on how we piloted ABAQUS using a Matlab routine. In a third and very important section, the use of reverse engineering method is described and applied to RF-MEMS (Radio Frequency-Micro Electro Mechanical System) switches. The applications for each of these methods will be explained.
2007 International Conference on Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems. EuroSime 2007, 2007
2007 International Conference on Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems. EuroSime 2007, 2007
... Contact model This model of a metal-to-metal contact simulated with COMSOL Multiphysics had a... more ... Contact model This model of a metal-to-metal contact simulated with COMSOL Multiphysics had a goal to validate the contact results by analytical values obtained from the formulation of Hertz. Figure:4. The contact model between a plate and a cylinder formulated by Hertz. ...
Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems EuroSimE, 2006
This paper presents a study on multiphysics software reliability provided by COMSOL and ANSYS. Th... more This paper presents a study on multiphysics software reliability provided by COMSOL and ANSYS. The goal is to give an overview about the fundamentals of how to set up RF simulations, mechanical contact and residual stress through three examples chosen as the main key points in order to make in the future a highly coupled model of the RF MEMS
7th. Int. Conf. on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006
This paper presents a study on multiphysics software reliability provided by COMSOL and ANSYS. Th... more This paper presents a study on multiphysics software reliability provided by COMSOL and ANSYS. The goal is to give an overview about the fundamentals of how to set up RF simulations, mechanical contact and residual stress through three examples chosen as the main key points in order to make in the future a highly coupled model of the RF MEMS
Contact analysis is of major concern in a lot of applications and addresses often multi-field eff... more Contact analysis is of major concern in a lot of applications and addresses often multi-field effects (thermal, electromagnetic effects…). Due to the nonlinearity and difficulty in predicting the behaviour of bodies coming into and go out of contact, the need of software able to simulate a structural contact problem and couple it with other physics is a major stake. The last version 3.3 of COMSOL Multiphysics allows the analysis of multiphysics contact problem and appears attractive. Being new and under development, COMSOL 3.3 needs therefore to be validated in terms of contact modelling. Only the cases of frictionless problem are taken into account. A static contact Hertz model and a model containing a rigid-flexible contact and a flexible-flexible contact are studied and describe the capabilities, advantages, originalities and drawbacks of COMSOL 3.3. A good user interface and the capabilities to couple all physics with facilities make attractive the software. However, contact alg...
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