A prototype system for handling, assembly and testing of microcomponents is described and demonst... more A prototype system for handling, assembly and testing of microcomponents is described and demonstrated. The system is specially designed to fit inside the SEM chamber and operate under vacuum conditions but operation under an optical microscope, in atmospheric conditions, is also possible. The combination of servomotors and piezo-elements allow for a fast and precise positioning of the microparts at the submicron level
A prototype system for handling, assembly and testing of microcomponents is described and demonst... more A prototype system for handling, assembly and testing of microcomponents is described and demonstrated. The system is specially designed to fit inside the SEM chamber and operate under vacuum conditions but operation under an optical microscope, in atmospheric conditions, is also possible. The combination of servomotors and piezo-elements allow for a fast and precise positioning of the microparts at the submicron level
A prototype system for handling, assembly and testing of microcomponents is described and demonst... more A prototype system for handling, assembly and testing of microcomponents is described and demonstrated. The system is specially designed to fit inside the SEM chamber and operate under vacuum conditions but operation under an optical microscope, in atmospheric conditions, is also possible. The combination of servomotors and piezo-elements allow for a fast and precise positioning of the microparts at the submicron level
A prototype system for handling, assembly and testing of microcomponents is described and demonst... more A prototype system for handling, assembly and testing of microcomponents is described and demonstrated. The system is specially designed to fit inside the SEM chamber and operate under vacuum conditions but operation under an optical microscope, in atmospheric conditions, is also possible. The combination of servomotors and piezo-elements allow for a fast and precise positioning of the microparts at the submicron level
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