Introduction Motivation Most equipment used in VLSI fabrication has multiple inputs or equipment ... more Introduction Motivation Most equipment used in VLSI fabrication has multiple inputs or equipment settings that are used to optimize and control a number of output product attributes. When a new product is introduced, designed experiments [I ,2] can be used off-line to determine the ...
Introduction Motivation Most equipment used in VLSI fabrication has multiple inputs or equipment ... more Introduction Motivation Most equipment used in VLSI fabrication has multiple inputs or equipment settings that are used to optimize and control a number of output product attributes. When a new product is introduced, designed experiments [I ,2] can be used off-line to determine the ...
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Papers by Albert Hu