Oct 30, 2015 · Based on the exponentially weighted moving average (EWMA) algorithm, we propose two kinds of controllers, EWMA-I and II controllers for single ...

Based on the exponentially weighted moving average (EWMA) algorithm, two kinds of controllers are proposed, EWMA-I and II controllers for single product ...

This paper investigates the stability of systems under exponentially weighted moving average (EWMA) run-to-run control with stochastic metrology delay.

Dec 4, 2015 · Based on the exponentially weighted moving average (EWMA) algorithm, we propose two kinds of controllers, EWMA-I and II controllers for single ...

This paper examines stability bounds for the tuning parameters of both single input-single output (SISO) and multiple input-multiple output (MIMO) d-EWMA ...

In this paper, we analyze the behavior of an EWMA controller with gain updating and compare it to that of an EWMA controller with intercept updating. Both ...

This paper investigates the stability of systems under exponentially weighted moving average (EWMA) run-to-run control with stochastic metrology delay.

Based on the exponentially weighted moving average (EWMA) algorithm, two kinds of controllers are proposed, EWMA-I and II controllers for single product ...

This paper investigates the stability of systems under exponentially weighted moving average (EWMA) run-to-run control with fixed and stochastic metrology delay ...

Exponentially weighted moving average (EWMA) controllers are the most commonly used run-to-run controllers in semiconductor manufacturing industry.