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Error correction analysis of wavefront testing in quadriwave lateral shearing interferometry

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Abstract

Quadriwave lateral shearing interferometry (QWLSI) is based on double birefringent crystals of a beam displacer (DBCs-BD), which can generate the lateral shearing interference wavefront of four beams of overlapped replicas in the DBCs-BD orthogonal directions. When the replica waves are overlapped incident to the analyzer and the direction of the transmission axis is set as 45° or 135°, the QWLSI’s polarization interferogram can be obtained. This paper deduces the principle of QWLSI based on the DBCs-BD and presents the analysis of orthogonal error influence based on the DBCs-BD and the phase retrieval error of QWLSI when shear displacement by tilted incident on the DBCs-BD. In our investigation, we have established the correction range of the PBD’s orthogonal angle error is within ${-}{0.5}^\circ - {0.5}^\circ$, the maximum error in PV is ${0.0012}\lambda$, and the maximum error in RMS is ${1.3789} \times {{10}^{- 4}}\lambda$ in wavefront reconstruction. Moreover, when the testing light tilts to incident on the PBD in the range of ${-}{0.4}^\circ - {0.4}^\circ $, correction of the shear distance is used for wavefront reconstruction to achieve a high-precision wavefront testing result. Finally, the experiment shows that QWLSI based on the DBCs-BD exhibits feasibility and high precision.

© 2024 Optica Publishing Group

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Data availability

No data were generated or analyzed in the presented research.

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