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"Silicon Nitride in Silicon Photonics."
Daniel J. Blumenthal et al. (2018)
- Daniel J. Blumenthal
, René G. Heideman, Douwe Geuzebroek
, Arne Leinse, Chris Roeloffzen
:
Silicon Nitride in Silicon Photonics. Proc. IEEE 106(12): 2209-2231 (2018)

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