"Analysis of squeeze-film air damping of thick perforated plate in MEMS device."

Zelong Zhou, Xiong Wang (2011)

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DOI: 10.1109/NEMS.2011.6017312

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Zelong Zhou, Xiong Wang:
Analysis of squeeze-film air damping of thick perforated plate in MEMS device. NEMS 2011: 131-133

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