"Low-stress packaging for a MEMS atmosphere pressure sensor."

Mengying Zhang et al. (2013)

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DOI: 10.1109/NEMS.2013.6559817

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-05

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Mengying Zhang, Lidong Du, Zhan Zhao, Zhen Fang:
Low-stress packaging for a MEMS atmosphere pressure sensor. NEMS 2013: 665-668

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