"Focused ion beam contact to non-volatile memory cells."

Clemens Helfmeier, Rudolf Schlangen, Christian Boit (2014)

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DOI: 10.1016/J.MICROREL.2014.07.017

access: closed

type: Journal Article

metadata version: 2020-02-22

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Clemens Helfmeier, Rudolf Schlangen, Christian Boit:
Focused ion beam contact to non-volatile memory cells. Microelectron. Reliab. 54(9-10): 1798-1801 (2014)

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