"Quality factor measurement of micro gyroscope structure according to ..."

Jong-Seok Kim et al. (2008)

> Home

Details and statistics

DOI: 10.1016/J.MICROREL.2008.03.001

access: closed

type: Journal Article

metadata version: 2020-02-22

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/mr/KimLJKCJ08
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/mr/KimLJKCJ08
Jong-Seok Kim, Sang-Woo Lee, Kyu-Dong Jung, Woon-Bae Kim, Sung-Hoon Choa, Byeong-Kwon Ju:
Quality factor measurement of micro gyroscope structure according to vacuum level and desired Q-factor range package method. Microelectron. Reliab. 48(6): 948-952 (2008)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.