Miniaturized Optical Resolution Photoacoustic Microscope Based on a Microelectromechanical Systems Scanning Mirror

Micromachines (Basel). 2018 Jun 7;9(6):288. doi: 10.3390/mi9060288.

Authors

Weizhi Qi^{1

2}, Qian Chen^{3

4}, Heng Guo^{5

6}, Huikai Xie⁷, Lei Xi^{8

9}

Affiliations

¹ Department of Biomedical Engineering, Southern University of Science and Technology, Shenzhen 518055, China. qiweizhi@std.uestc.edu.cn.
² School of Physics, University of Electronic Science and Technology of China, Chengdu 610054, China. qiweizhi@std.uestc.edu.cn.
³ Department of Biomedical Engineering, Southern University of Science and Technology, Shenzhen 518055, China. QianChen@std.uestc.edu.cn.
⁴ School of Physics, University of Electronic Science and Technology of China, Chengdu 610054, China. QianChen@std.uestc.edu.cn.
⁵ Department of Biomedical Engineering, Southern University of Science and Technology, Shenzhen 518055, China. guoheng95@std.uestc.edu.cn.
⁶ School of Physics, University of Electronic Science and Technology of China, Chengdu 610054, China. guoheng95@std.uestc.edu.cn.
⁷ Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USA. hkxie@ece.ufl.edu.
⁸ Department of Biomedical Engineering, Southern University of Science and Technology, Shenzhen 518055, China. xilei@sustc.edu.cn.
⁹ School of Physics, University of Electronic Science and Technology of China, Chengdu 610054, China. xilei@sustc.edu.cn.

Abstract

In this paper, we report a miniaturized optical resolution photoacoustic microscopy system based on a microelectromechanical system (MEMS) scanning mirror. A two-dimensional MEMS scanning mirror was used to achieve raster scanning of the excitation optical focus. The wideband photoacoustic signals were detected by a flat ultrasound transducer with a center frequency of 10 MHz and an active area of 2 mm in diameter. The size and weight of this device were 60 mm × 30 mm × 20 mm and 40 g, respectively. We evaluated this system using sharp blades, carbon fibers, and a silver strip target. In vivo experiments of imaging vasculatures in the mouse ear, brain, and human lip were completed to demonstrate its potential for biological and clinical applications.

Keywords: microelectromechanical systems (MEMS); miniaturized microscope; photoacoustic.

Abstract

Grants and funding